H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2009
12/03/2009	WO2009145623A1 Device and method for drying separated electronic components
12/03/2009	WO2009145531A2 Heat-treatment apparatus
12/03/2009	WO2009145526A2 Protective film composition for wafer dicing
12/03/2009	WO2009145461A2 Substrate for ceramic printed circuit board and method for manufacturing the substrate
12/03/2009	WO2009145416A1 Socket for testing semiconductor chip
12/03/2009	WO2009145370A1 Method for epitaxial growth
12/03/2009	WO2009145327A1 Nitride semiconductor layer-containing structure, nitride semiconductor layer-containing composite substrate and production methods of these
12/03/2009	WO2009145288A1 Tio2-containing silica glass and optics for lithography which comprise with the glass
12/03/2009	WO2009145272A1 Composition for ferroelectric thin film formation, method for ferroelectric thin film formation, and ferroelectric thin film formed by the method
12/03/2009	WO2009145253A1 External electrode discharge lamp and ultraviolet ray irradiating apparatus using the same
12/03/2009	WO2009145196A1 Semiconductor chip, intermediate substrate and semiconductor device
12/03/2009	WO2009145161A1 Magnetic memory cell and magnetic random access memory
12/03/2009	WO2009145158A1 Photosensitive resin composition, process for producing cured relief pattern, and semiconductor device
12/03/2009	WO2009145129A1 AlXGa1-XN SINGLE CRYSTAL AND ELECTROMAGNETIC WAVE TRANSMISSION BODY
12/03/2009	WO2009145124A1 Cleaning solution for substrate for semiconductor device
12/03/2009	WO2009145120A1 Photosensitive resin composition, photosensitive element, method of forming resist pattern and method of producing printed wiring board
12/03/2009	WO2009145111A1 Semiconductor device
12/03/2009	WO2009145093A1 Sputtering method
12/03/2009	WO2009145082A1 Carrier device, position-teaching method, and sensor jig
12/03/2009	WO2009145068A1 Thin film formation device and semiconductor film manufacturing method
12/03/2009	WO2009145061A1 Photocurable composition and manufacturing method for a molded body having a fine pattern on the surface
12/03/2009	WO2009145058A1 Scribe apparatus for thin film solar cell
12/03/2009	WO2009145055A1 Ultrasonic bonding apparatus
12/03/2009	WO2009145048A1 Inspection device and inspecting method for spatial light modulator, illuminating optical system, method for adjusting the illuminating optical system, exposure device, and device manufacturing method
12/03/2009	WO2009145030A1 Semiconductor processing device
12/03/2009	WO2009145008A1 Laser working apparatus, and laser working method
12/03/2009	WO2009145006A1 Imprinting method and device utilizing ultrasonic vibrations
12/03/2009	WO2009145005A1 Adhesive film
12/03/2009	WO2009144985A1 Dicing method
12/03/2009	WO2009144948A1 Unit for testing and test system
12/03/2009	WO2009144938A1 Plasma processing device and method
12/03/2009	WO2009144920A1 Method of producing silylated porous insulating film, method of producing semiconductor device, and silylated material
12/03/2009	WO2009144918A1 Thin film transistor, method for manufacturing the same, and electronic device using thin film transistor
12/03/2009	WO2009144915A1 Semiconductor device and manufacturing method thereof
12/03/2009	WO2009144910A1 Resin sealing device and resin sealing method
12/03/2009	WO2009144902A1 Field effect transistor and method for manufacturing the same
12/03/2009	WO2009144874A1 Finfet with impurity blocking portion on an upper surface of fin
12/03/2009	WO2009144870A1 Semiconductor device and manufacturing method thereof
12/03/2009	WO2009144828A1 Wafer unit for testing and testing system
12/03/2009	WO2009144810A1 Method for forming silicide and apparatus for forming the silicide
12/03/2009	WO2009144806A1 Manufacturing equipment for substrate for testing, and method and program of manufacturing substrate for testing
12/03/2009	WO2009144801A1 Dithiane derivative, polymer, resist composition, and process for producing semiconductor using the resist composition
12/03/2009	WO2009144791A1 Test system and write wafer
12/03/2009	WO2009144762A2 Micro emulsion of cadmium telluride and preparation method
12/03/2009	WO2009144662A1 Trench capacitor and method for producing the same
12/03/2009	WO2009144643A1 Thermo-mechanical stress in semiconductor wafers
12/03/2009	WO2009144641A1 Semiconductor device with dummy gate electrode and corresponding integrated circuit and manufacturing method
12/03/2009	WO2009144640A1 Trench gate semiconductor device and method of manufacturing thereof.
12/03/2009	WO2009144618A1 Integrated circuit manufacturing method and integrated circuit
12/03/2009	WO2009144617A1 Ldmos transistor
12/03/2009	WO2009144616A1 Ldmos transistor
12/03/2009	WO2009144218A1 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
12/03/2009	WO2009144163A1 Method to control deposition of organic molecules and organic electronic device
12/03/2009	WO2009143805A1 Method and device for cohesively joining metallic connection structures
12/03/2009	WO2009114177A3 Phase change memory cell with constriction structure
12/03/2009	WO2009111305A3 Silicon-germanium-carbon semiconductor structure
12/03/2009	WO2009110980A3 Method for inspecting electrostatic chucks with kelvin probe analysis
12/03/2009	WO2009103277A3 Method and device for conveying and rotating impact-sensitive panels in ultra clean rooms
12/03/2009	WO2009102949A3 Method and apparatus of z-scan photoreflectance characterization
12/03/2009	WO2009102133A3 Batch-type atomic layer vapour-deposition device
12/03/2009	WO2009100409A3 Apparatus for substantially uniform fluid flow rates relative to a proximity head in processing of a wafer surface by a meniscus
12/03/2009	WO2009097181A3 Etching chamber having flow equalizer and lower liner
12/03/2009	WO2009089499A4 Multibeam system
12/03/2009	WO2009072341A9 Probe apparatus
12/03/2009	US20090299670 Process control device and process control method
12/03/2009	US20090299652 Method of presuming interior situation of process chamber and storage medium
12/03/2009	US20090298671 Compositions for Preparing Low Dielectric Materials Containing Solvents
12/03/2009	US20090298397 Method of grinding semiconductor wafers and device for grinding both surfaces of semiconductor wafers
12/03/2009	US20090298396 Method of grinding semiconductor wafers, grinding surface plate, and grinding device
12/03/2009	US20090298394 Method of polishing silicon wafer
12/03/2009	US20090298393 Slurry supplying apparatus and method of polishing semiconductor wafer utilizing same
12/03/2009	US20090298387 Polishing end point detection method
12/03/2009	US20090298301 Method of producing a tensioned layer on a substrate
12/03/2009	US20090298300 Apparatus and Methods for Hyperbaric Rapid Thermal Processing
12/03/2009	US20090298299 Laser ablation of electronic devices
12/03/2009	US20090298298 Method of forming interlayer insulating film, precursor solution for forming of interlayer insulating film, cvd material for forming of interlayer insulating film and raw material for production of siloxane oligomer
12/03/2009	US20090298297 Dual stress memorization technique for cmos application
12/03/2009	US20090298296 Surface patterning and via manufacturing employing controlled precipitative growth
12/03/2009	US20090298295 Method for treating surface of a glass substrate
12/03/2009	US20090298294 Method for clearing native oxide
12/03/2009	US20090298293 Etching with Improved Control of Critical Feature Dimensions at the Bottom of Thick Layers
12/03/2009	US20090298292 Processing for overcoming extreme topography
12/03/2009	US20090298291 Method for forming a pattern of a semiconductor device
12/03/2009	US20090298290 Polishing liquid and polishing method
12/03/2009	US20090298289 Chemical Mechanical Polishing Composition for Copper Comprising Zeolite
12/03/2009	US20090298288 Silicide forming method and system thereof
12/03/2009	US20090298287 Method of plasma load impedance tuning for engineered transients by synchronized modulation of an unmatched low power rf generator
12/03/2009	US20090298286 Method of making electronic entities
12/03/2009	US20090298285 Fabricating a Top Conductive Layer in a Semiconductor Die
12/03/2009	US20090298284 Method for preparing integrated circuit structure with polymorphous material
12/03/2009	US20090298283 Conductive compositions and processes for use in the manufacture of semiconductor devices - organic medium components
12/03/2009	US20090298282 Methods of Forming Interlayer Dielectrics Having Air Gaps
12/03/2009	US20090298281 Interconnect structure with high leakage resistance
12/03/2009	US20090298280 Structure and method for creating reliable via contacts for interconnect applications
12/03/2009	US20090298279 Method for reducing metal irregularities in advanced metallization systems of semiconductor devices
12/03/2009	US20090298278 Method of bonding semiconductor devices utilizing solder balls
12/03/2009	US20090298277 Maskless Process for Solder Bumps Production
12/03/2009	US20090298276 Methods of forming semiconductor device patterns
12/03/2009	US20090298275 Metal High-K Transistor Having Silicon Sidewall For Reduced Parasitic Capacitance, And Process To Fabricate Same
12/03/2009	US20090298274 Method of fabricating semiconductor device

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