Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2009
11/24/2009US7622365 Wafer processing including dicing
11/24/2009US7622364 Bond pad for wafer and package for CMOS imager
11/24/2009US7622363 Semiconductor substrate, semiconductor device, light emitting diode and producing method therefor
11/24/2009US7622362 Method for manufacturing semiconductor device
11/24/2009US7622361 Method for manufacturing semiconductor device
11/24/2009US7622360 Shallow trench isolation region in semiconductor device and method of manufacture
11/24/2009US7622359 Method for manufacturing semiconductor device
11/24/2009US7622358 Semiconductor device with semi-insulating substrate portions and method for forming the same
11/24/2009US7622357 Semiconductor device structures with backside contacts for improved heat dissipation and reduced parasitic resistance
11/24/2009US7622356 Method of fabricating metal oxide semiconductor field effect transistor
11/24/2009US7622355 Write once read only memory employing charge trapping in insulators
11/24/2009US7622354 Integrated circuit and method of manufacturing an integrated circuit
11/24/2009US7622353 Method for forming recessed gate structure with stepped profile
11/24/2009US7622352 Multi-step gate structure and method for preparing the same
11/24/2009US7622351 Method of manufacturing semiconductor device and semiconductor device
11/24/2009US7622350 Method of manufacturing semiconductor device having cell transistor with recess channel structure
11/24/2009US7622349 Floating gate non-volatile memory and method thereof
11/24/2009US7622348 Methods for fabricating an integrated circuit
11/24/2009US7622347 Self-aligned metal electrode to eliminate native oxide effect for metal insulator semiconductor (MIS) capacitor
11/24/2009US7622346 Method for forming ferroelectric capacitor and method for fabricating semiconductor device
11/24/2009US7622345 Method for forming fully silicided gate electrodes and unsilicided poly resistors
11/24/2009US7622344 Method of manufacturing complementary metal oxide semiconductor transistors
11/24/2009US7622343 Laser processing method, method for forming a flash memory, insulated gate semiconductor device and method for forming the same
11/24/2009US7622342 Method of fabricating back-illuminated imaging sensors
11/24/2009US7622341 Sige channel epitaxial development for high-k PFET manufacturability
11/24/2009US7622339 EPI T-gate structure for CoSi2 extendibility
11/24/2009US7622338 Method for manufacturing semiconductor device
11/24/2009US7622337 Method for fabricating a transistor using a SOI wafer
11/24/2009US7622336 Manufacturing method of semiconductor device
11/24/2009US7622335 Method for manufacturing a thin film transistor device
11/24/2009US7622334 Wafer-level packaging cutting method capable of protecting contact pads
11/24/2009US7622333 Integrated circuit package system for package stacking and manufacturing method thereof
11/24/2009US7622332 Partially patterned lead frames and methods of making and using the same in semiconductor packaging
11/24/2009US7622331 Method for forming contacts of semiconductor device
11/24/2009US7622330 Semiconductor substrates having useful and transfer layers
11/24/2009US7622329 Method for fabricating core substrate using paste bumps
11/24/2009US7622328 Processing method of wafer
11/24/2009US7622327 Covered devices in a semiconductor package
11/24/2009US7622326 Manufacturing process of a chip package structure
11/24/2009US7622325 Integrated circuit package system including high-density small footprint system-in-package
11/24/2009US7622324 Wafer bonding hermetic encapsulation
11/24/2009US7622322 Method of forming an AlN coated heterojunction field effect transistor
11/24/2009US7622321 High dielectric constant spacer for imagers
11/24/2009US7622320 CMOS image sensor and fabricating method thereof
11/24/2009US7622319 CMOS image sensor and manufacturing method thereof
11/24/2009US7622318 Method for producing structured substrate, structured substrate, method for producing semiconductor light emitting device, semiconductor light emitting device, method for producing semiconductor device, semiconductor device, method for producing device, and device
11/24/2009US7622317 Light emitting diode and method for manufacturing the same
11/24/2009US7622316 Active matrix organic luminescence display device and manufacturing method for the same
11/24/2009US7622315 Tunable laser source with integrated optical modulator
11/24/2009US7622314 Carbon nanotube structures and methods of manufacture and use
11/24/2009US7622313 Fabrication of three dimensional integrated circuit employing multiple die panels
11/24/2009US7622312 Method for evaluating dopant contamination of semiconductor wafer
11/24/2009US7622311 Inspection of underfill in integrated circuit package
11/24/2009US7622310 Contamination monitoring and control techniques for use with an optical metrology instrument
11/24/2009US7622309 Mechanical integrity evaluation of low-k devices with bump shear
11/24/2009US7622308 Process control using process data and yield data
11/24/2009US7622307 Semiconductor devices having a planarized insulating layer and methods of forming the same
11/24/2009US7622244 Method for contaminant removal
11/24/2009US7622227 Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof
11/24/2009US7622067 Apparatus and method for manufacturing a semiconductor device
11/24/2009US7622052 Methods for chemical mechanical planarization and for detecting endpoint of a CMP operation
11/24/2009US7622051 Methods for critical dimension control during plasma etching
11/24/2009US7622050 Polished glass substrate is applied with surface treatment by first-step gas-cluster ion beam etching to improve flatness, substrate is applied with surface treatment by second-step gas-cluster ion beam etching under different irradiation conditions to improve surface roughness, finish-polished; flatness
11/24/2009US7622049 Passivation for cleaning a material
11/24/2009US7622037 Ozonated water flow and concentration control apparatus and method
11/24/2009US7622017 Processing apparatus and gas discharge suppressing member
11/24/2009US7622016 Retainer ring of chemical mechanical polishing device
11/24/2009US7622008 Gate valve and vacuum container for semiconductor processing system
11/24/2009US7622007 Substrate processing apparatus and semiconductor device producing method
11/24/2009US7622006 Processed body carrying device, and processing system with carrying device
11/24/2009US7622005 Uniformity control for low flow process and chamber to chamber matching
11/24/2009US7621998 Single crystalline gallium nitride thick film having reduced bending deformation
11/24/2009US7621976 forming a photovoltaic conductive feature; in a flowing aerosol stream, preparing silver-containing particles, then coating with a material other than silver by vapor deposition; disperse silver particles confined in metal or ceramic coatings; uses in electronics and electrochemical cells
11/24/2009US7621970 Manufacturing method of electrolytic capacitor
11/24/2009US7621969 Mounting system
11/24/2009US7621799 Polishing method and polishing device
11/24/2009US7621732 Molding apparatus for manufacturing semiconductor device
11/24/2009US7621714 Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
11/24/2009US7621307 Tape adhering apparatus and tape adhering method
11/24/2009US7621045 Method of producing a probe with a trapezoidal contactor
11/24/2009CA2198745C Thermosetting resin compositions containing maleimide and/or vinyl compounds
11/19/2009WO2009140622A2 Polishing pad with endpoint window and systems and method using the same
11/19/2009WO2009140570A2 Process for forming an electroactive layer
11/19/2009WO2009140431A2 Laminated wall for uniform fluid flow
11/19/2009WO2009140406A2 Crystal growth apparatus for solar cell manufacturing
11/19/2009WO2009140403A2 Systems and methods for detecting defects on a wafer and generating inspection results for the wafer
11/19/2009WO2009140371A2 Method and apparatus for pulsed plasma processing using a time resolved tuning scheme for rf power delivery
11/19/2009WO2009140340A1 Process of fabricating microfluidic device chips and chips formed thereby
11/19/2009WO2009140286A1 Photoelectrochemical etching of p-type semiconductor heterostructures
11/19/2009WO2009140270A2 System and method for light source employing laser-produced plasma
11/19/2009WO2009140238A2 Structure and method for reliable solder joints
11/19/2009WO2009140172A2 Selective inductive double patterning
11/19/2009WO2009140153A2 Apparatus for etching semiconductor wafers
11/19/2009WO2009140139A2 Plasma process with photoresist mask pretreatment
11/19/2009WO2009140116A2 Solar cell spin-on based process for simultaneous diffusion and passivation
11/19/2009WO2009140094A2 Method for critical dimension shrink using conformal pecvd films
11/19/2009WO2009140052A2 Metal gate integration structure and method including metal fuse, anti-fuse and/or resistor
11/19/2009WO2009139962A2 Efficient interconnect structure for electrical fuse applications
11/19/2009WO2009139958A2 Backside controlled mems capacitive sensor and interface and method
11/19/2009WO2009139912A2 In-line effluent analysis method and apparatus for cmp process control