Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2009
12/09/2009CN101599424A Micro air bubbles generating device, method for generating micro air bubbles and baseplate processing device
12/09/2009CN101599423A Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
12/09/2009CN101599422A Method and system for reducing energy consumption of device for processing substrate
12/09/2009CN101599421A Silicon chip stacking machine
12/09/2009CN101599420A Wafer cleaning device
12/09/2009CN101599419A Forming method of groove
12/09/2009CN101599418A Laser-stripping method
12/09/2009CN101599417A Method for cleaning etching residues of semiconductor wafer
12/09/2009CN101599408A Microwave plasma processing apparatus
12/09/2009CN101599304A Fuse device
12/09/2009CN101598989A Processing technique for lead of touch screen
12/09/2009CN101598908A Decompression drying devic
12/09/2009CN101598907A Substrate table, lithographic apparatus and device manufacturing method
12/09/2009CN101598906A Substrate table, lithographic apparatus and device manufacturing method
12/09/2009CN101598905A Lithographic apparatus and a method of operating the apparatus
12/09/2009CN101598902A Lithographic apparatus and device manufacturing method
12/09/2009CN101598894A Photomask, thin film transistor element and manufacturing method of thin film transistor element
12/09/2009CN101598876A Array substrate for liquid crystal display device and method of fabricating the same
12/09/2009CN101598874A Liquid crystal display device and method of driving the same
12/09/2009CN101597754A A method and apparatus for forming a high quality low temperature silicon nitride layer
12/09/2009CN101597548A Cleaning solution of plasma etching residues
12/09/2009CN101597477A Aquo dispersoid, circuit board and manufacture method thereof for chemical mechanical polishing
12/09/2009CN101596988A Adhesive film tape feeding mechanism
12/09/2009CN101596508A Normal pressure aerosol spray apparatus and method of forming a film using the same
12/09/2009CN100569043C Radiofrequency system control method and its radiofrequency matching box
12/09/2009CN100568573C Vertical semiconductor device structure and forming method thereof
12/09/2009CN100568569C Semiconductor structure and its manufacture method
12/09/2009CN100568565C Semiconductor light-emitting device and method for separating semiconductor light-emitting devices
12/09/2009CN100568564C Light emitting device and method for producing light emitting device
12/09/2009CN100568556C Method for forming reflection cover and its structure and bearing device using the same
12/09/2009CN100568548C Semiconductor light-emitting device and method for fabricating the same
12/09/2009CN100568546C Method for measuring silicon solar cell junction depth
12/09/2009CN100568535C Device threshold for controlling front-gate silicon-on-insulator MOSFET using a self-aligned back-gate
12/09/2009CN100568533C Double-grid field effect transistor and its forming method
12/09/2009CN100568532C Memory cell and manufacturing method thereof
12/09/2009CN100568531C 半导体结构及其制造方法 The semiconductor structure and a method of manufacturing
12/09/2009CN100568528C Electronic device and process for forming same
12/09/2009CN100568525C Organic light emitting display and method of fabricating the same
12/09/2009CN100568524C Display device and method of manufacturing the same
12/09/2009CN100568521C Solid-state imaging device and imaging apparatus
12/09/2009CN100568520C Fabricating of CMOS image sensor
12/09/2009CN100568518C Semiconductor integrated circuit device and method of fabricating the same
12/09/2009CN100568516C P-I-N semiconductor diodes and methods of forming the same
12/09/2009CN100568514C Trench memory on hybrid orientation substrate used for embedding and manufacturing method thereof
12/09/2009CN100568512C Static random access memory formed by buried local interconnect and forming method thereof
12/09/2009CN100568511C A multi-bit programmable non-volatile memory unit, array and manufacturing method thereof
12/09/2009CN100568509C Method of manufacturing non-volatile memory device
12/09/2009CN100568507C Metal-insulator-metal capacitor and fabrication method thereof
12/09/2009CN100568506C Memory device and semiconductor integrate circuit
12/09/2009CN100568505C Bipolar transistor with self-aligned silicide and extrinsic base
12/09/2009CN100568504C 半导体集成电路 The semiconductor integrated circuit
12/09/2009CN100568503C High-brightness LED with protective function of electrostatic discharge damage
12/09/2009CN100568502C 半导体器件 Semiconductor devices
12/09/2009CN100568500C Semiconductor structure manufacturing method and semiconductor structure manufactured thereby
12/09/2009CN100568499C Interconnection having dual-level or multi-level capping layer and method of forming the same
12/09/2009CN100568498C Semiconductor device and a manufacturing method of the same
12/09/2009CN100568489C 电路模块及其制造方法 Circuit module and manufacturing method thereof
12/09/2009CN100568488C High voltage CMOS device and method of fabricating the same
12/09/2009CN100568487C Electronic tag chip
12/09/2009CN100568486C Method of fabricating CMOS image sensor
12/09/2009CN100568485C Polishing apparatus and two-step method of polishing a metal layer of an integrated circuit
12/09/2009CN100568484C Method for treating the surface of a wafer
12/09/2009CN100568483C Method for fabricating shallow trenches
12/09/2009CN100568482C Electrostatic chuck with heater and manufacturing method thereof
12/09/2009CN100568481C Apparatus and method for positioning back-up pins for supporting substrate
12/09/2009CN100568480C Substrate carrying in/out apparatus, substrate carrying method and device thereof
12/09/2009CN100568479C Methods and apparatus for repositioning support for a substrate carrier
12/09/2009CN100568478C Semiconductor probe with resistive tip and method of fabricating the same, and information recording apparatus, information reproducing apparatus, and information measuring apparatus having the semico
12/09/2009CN100568477C 金属平板式半导体封装方法 Metal plate type semiconductor packaging method
12/09/2009CN100568476C Slotted metal plate type semi-conductor package method
12/09/2009CN100568475C Chip welder, hot-crimping band chip and bonding method and system thereof
12/09/2009CN100568474C Method of chip manufacturing
12/09/2009CN100568473C Semiconductor device and a manufacturing method of the same
12/09/2009CN100568472C Method for photoresist strip in presence of regular low k and/or porous low k dielectric materials
12/09/2009CN100568471C Method for organic semiconductor material thin film formation and process for producing organic thin film transistor
12/09/2009CN100568470C A super-self-aligned trench-gate DMOS
12/09/2009CN100568469C Production method for low-conducting impedance power field effect pipe VDMOS
12/09/2009CN100568468C Semiconductor component and its making method
12/09/2009CN100568467C MOSFET device and forming method thereof
12/09/2009CN100568466C Method for fabricating a power semiconductor device having a voltage sustaining layer with a terraced trench facilitating formation of floating islands
12/09/2009CN100568465C Wrap-around gate field effect transistor
12/09/2009CN100568464C Process for producing high-power quick soft-restoring diode
12/09/2009CN100568463C Method for thin film formation
12/09/2009CN100568462C Method and system for modifying a gate dielectric stack containing a high-K layer using plasma processing
12/09/2009CN100568461C Magnetic field generator for generating magnetron plasma
12/09/2009CN100568460C Method for manufacturing semiconductor device with groove grids
12/09/2009CN100568459C Semiconductor device and fabricating method thereof
12/09/2009CN100568458C Reduction of feature critical dimensions using multiple masks
12/09/2009CN100568457C Fabrication method of a semiconductor device
12/09/2009CN100568456C Using of second exposure to assit a PSM exposure in printing tight space adjacent to large feature
12/09/2009CN100568455C Reticle and optical characteristic measuring method
12/09/2009CN100568454C Method for preparing semiconductor conductive film by doping hydrogen on the surface of diamond
12/09/2009CN100568453C Plasma processing apparatus, gas dispensing device and gas delivery method
12/09/2009CN100568452C Coating and developing device, and method thereof
12/09/2009CN100568451C Island-projection-decorated component, its manufacturing method, and apparatus using it
12/09/2009CN100568450C Method and structure of lamellar microdomains for aligning block copolymer on substrate
12/09/2009CN100568449C Vertical heat treating apparatus and control method for transfer mechanism of vertical heat treating apparatus
12/09/2009CN100568448C Etching terminal checking device and method for plasma etching equipment
12/09/2009CN100568447C Mask for crystallization, crystallization process and method for fabricating thin film transistor array panel including said process
12/09/2009CN100568103C Lithographic apparatus and device manufacturing method