Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/2010
03/11/2010WO2010026988A1 Positive-type photosensitive resin composition, method for producing resist pattern, and electronic component
03/11/2010WO2010026981A1 Liquid for protecting copper wiring surface and method for manufacturing semiconductor circuit element
03/11/2010WO2010026973A1 Photosensitive composition, pattern-forming method using the composition and resin used in the composition
03/11/2010WO2010026968A1 Resist processing method
03/11/2010WO2010026956A1 Semiconductor device and manufacturing method thereof
03/11/2010WO2010026955A1 Substrate holding member, substrate processing apparatus, and substrate processing method
03/11/2010WO2010026938A1 Semiconductor product manufacturing method
03/11/2010WO2010026909A1 Mounting apparatus and mounting method
03/11/2010WO2010026901A1 Semiconductor integrated circuit
03/11/2010WO2010026893A1 Electrostatic chuck device and method for determining adsorbed state of wafer
03/11/2010WO2010026879A1 Gas supply member and plasma processing device
03/11/2010WO2010026861A1 Magnetic memory and method for manufacturing same
03/11/2010WO2010026840A1 Heat exchanging device
03/11/2010WO2010026831A1 Magnetic memory element and storage device using same
03/11/2010WO2010026820A1 Levitation unit and contactless support device with the same
03/11/2010WO2010026815A1 Heat treatment apparatus
03/11/2010WO2010026802A1 FERROMAGNETIC PREFERRED GRAIN GROWTH PROMOTION SEED LAYER FOR AMORPHOUS OR MICROCRYSTALLINE MgO TUNNEL BARRIER
03/11/2010WO2010026798A1 Oxide thin film transistor and method for manufacturing the same
03/11/2010WO2010026772A1 Substrate cooling method and semiconductor manufacturing method
03/11/2010WO2010026733A1 Substrate transfer apparatus and vacuum film-forming apparatus
03/11/2010WO2010026725A1 Magnetoresistive element, method for manufacturing same, and storage medium used in the manufacturing method
03/11/2010WO2010026705A1 Magnetoresistive element, method for manufacturing same, and storage medium used in the manufacturing method
03/11/2010WO2010026704A1 Magnetoresistive element, method for manufacturing same, and storage medium used in the manufacturing method
03/11/2010WO2010026703A1 Magnetoresistive element, method for manufacturing same, and storage medium used in the manufacturing method
03/11/2010WO2010026667A1 Ferromagnetic preferred grain growth promotion seed layer for amorphous or microcrystalline mgo tunnel barrier
03/11/2010WO2010026620A1 Method for manufacturing semiconductor
03/11/2010WO2010026343A1 Method for preparing a self-supporting crystallized silicon thin film
03/11/2010WO2010026243A1 Method for repairing copper diffusion barrier layers on a semiconductor solid substrate and repair kit for implementing this method.
03/11/2010WO2010026102A1 Modified particles and dispersions comprising said particles
03/11/2010WO2010026007A1 A progressive trimming method
03/11/2010WO2010026006A1 A mixed trimming method
03/11/2010WO2010025706A1 Method and device for temporarily storing glass plates for photovoltaic modules
03/11/2010WO2010025624A1 Rinse solution for removal of plasm etching residues
03/11/2010WO2010025517A1 Medical implant with self assembled monolayer coating on electrically conductive regions inhibiting attachment of impedance inducing materials
03/11/2010WO2010014128A3 Normally-off semiconductor devices and methods of fabricating the same
03/11/2010WO2010009013A3 Test head docking system and method
03/11/2010WO2010008959A3 Dc test resource sharing for electronic device testing
03/11/2010WO2010008711A3 Cathode with inner and outer electrodes at different heights
03/11/2010WO2010008703A3 Liquid phase molecular self-assembly for barrier deposition and structures formed thereby
03/11/2010WO2010008700A3 Method for growing a thin film using a gas cluster ion beam
03/11/2010WO2010008673A3 Methods and systems for packaging integrated circuits with thin metal contacts
03/11/2010WO2010006589A3 Laser scribing system for structuring substrates for thin-layer solar modules
03/11/2010WO2010006156A3 Rapid thermal processing chamber with shower head
03/11/2010WO2010002742A3 Apparatus and method for measuring radiation energy during thermal processing
03/11/2010WO2009158192A3 Rf power delivery system in a semiconductor apparatus
03/11/2010WO2009158039A8 Patterning processes comprising amplified patterns
03/11/2010WO2009157870A8 METHOD FOR FABRICATING GaNAsSb SEMICONDUCTOR
03/11/2010WO2009155506A3 Melt purification and delivery system
03/11/2010WO2009155502A3 Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer
03/11/2010WO2009155247A3 Semiconductor die separation method
03/11/2010WO2009155090A3 Fast substrate support temperature control
03/11/2010WO2009154761A9 Stacking of wafer-level chip scale packages having edge contacts
03/11/2010WO2009154388A3 Photomask baking apparatus
03/11/2010WO2009154386A3 Worm memory using nanoparticles contained in a polymer thin film
03/11/2010WO2009154381A3 Sputtering apparatus and multi-chamber comprising the same
03/11/2010WO2009152329A3 Method for surface treatment of semiconductor substrates
03/11/2010WO2009152103A3 Method and apparatus for dampening pressure fluctuations in a fluid delivery system
03/11/2010WO2009152066A3 Gas delivery system for reducing oxidation in wire bonding operations
03/11/2010WO2009152063A3 Bandgap-shifted semiconductor surface and apparatus
03/11/2010WO2009151303A3 Cleaning device
03/11/2010WO2009149167A3 Low temperature deposition of silicon-containing films
03/11/2010WO2009142446A3 Vacuum processing system, buffer module used therein and tray transferring method of the vacuum processing system
03/11/2010WO2009140431A3 Laminated wall for uniform fluid flow
03/11/2010WO2009134678A9 Surface treatment to improved resistive-switching characteristics
03/11/2010WO2009132003A3 Methods and apparatus for low cost and high performance polishing tape for substrate bevel and edge polishing in semiconductor manufacturing
03/11/2010WO2009131902A3 Yttrium and titanium high-k dielectric films
03/11/2010WO2009030299A3 Method for producing a solar cell comprising a double-layered dielectric layer
03/11/2010WO2007016685A3 Contact fuse which does not touch a metal layer
03/11/2010US20100063623 Substrate processing system and substrate processing method
03/11/2010US20100062691 Substrate holding mechanism, substrate polishing apparatus and substrate polishing method
03/11/2010US20100062614 In-situ chamber treatment and deposition process
03/11/2010US20100062613 Method of processing a substrate
03/11/2010US20100062612 Aftertreatment Method for Amorphous Carbon Film
03/11/2010US20100062611 Method and Apparatus for Thinning a Substrate
03/11/2010US20100062610 Method of regulating the titration of a solution, device for controlling said regulation and system comprising such a device
03/11/2010US20100062609 Methods for retaining metal-comprising materials using liquid chemistry dispense systems from which oxygen has been removed
03/11/2010US20100062608 Method for selective palsmochemical dry-etching of phosphosilicate glass deposited on surfaces of silicon wafers
03/11/2010US20100062607 Dry etching method
03/11/2010US20100062606 Dry etching method
03/11/2010US20100062605 Method of forming a contact hole for a semiconductor device
03/11/2010US20100062604 Method for fabricating device pattern
03/11/2010US20100062603 Semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof
03/11/2010US20100062602 Etching method, method for producing dielectric film of low dielectric constant, method for producing porous member, etching system and thin film forming equipment
03/11/2010US20100062601 Methods for polishing aluminum nitride
03/11/2010US20100062600 Method of manufacturing a semiconductor device
03/11/2010US20100062599 Method for manufacturing semiconductor device
03/11/2010US20100062598 Method for fabricating semiconductor device with metal line
03/11/2010US20100062597 Interconnection for flip-chip using lead-free solders and having improved reaction barrier layers
03/11/2010US20100062596 Semiconductor device and manufacturing method for the same
03/11/2010US20100062595 Nonvolatile memory device and method of forming the same
03/11/2010US20100062594 Method for manufacturing a semiconductor device
03/11/2010US20100062593 Method for preparing multi-level flash memory devices
03/11/2010US20100062592 Method for forming gate spacers for semiconductor devices
03/11/2010US20100062591 N2 based plasma treatment and ash for hk metal gate protection
03/11/2010US20100062590 Novel solution for polymer and capping layer removing with wet dipping in hk metal gate etching process
03/11/2010US20100062589 Implanting a solar cell substrate using a mask
03/11/2010US20100062588 Method of manufacturing semiconductor substrate
03/11/2010US20100062587 Method to manufacture silicon quantum islands and single-electron devices
03/11/2010US20100062586 Method for manufacturing semiconductor device
03/11/2010US20100062585 Method for forming silicon thin film
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