H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2011
11/15/2011	US8058103 Semiconductor substrate cutting method
11/15/2011	US8058102 Package structure and manufacturing method thereof
11/15/2011	US8058101 Microelectronic packages and methods therefor
11/15/2011	US8058100 Method for fabricating chip scale package structure with metal pads exposed from an encapsulant
11/15/2011	US8058099 Method of fabricating a two-sided die in a four-sided leadframe based package
11/15/2011	US8058098 Method and apparatus for fabricating a plurality of semiconductor devices
11/15/2011	US8058097 Methods of forming resistive memory devices
11/15/2011	US8058096 Microelectronic device
11/15/2011	US8058095 Encapsulated phase change cell structures and methods
11/15/2011	US8058094 Transistor, method of fabricating the same and organic light emitting display including the transistor
11/15/2011	US8058093 Method of forming an encapsulating electrode
11/15/2011	US8058092 Method and material for processing iron disilicide for photovoltaic application
11/15/2011	US8058090 Apparatus and method of manufacturing solar cells
11/15/2011	US8058089 Electromechanical memory array using nanotube ribbons and method for making same
11/15/2011	US8058088 Phosphor coating systems and methods for light emitting structures and packaged light emitting diodes including phosphor coating
11/15/2011	US8058087 Method for fabricating thin film transistor array substrate
11/15/2011	US8058086 Self-organized pin-type nanostructures, and production thereof on silicon
11/15/2011	US8058085 Method of forming a waveguide in diamond
11/15/2011	US8058084 Pixel structure of LCD and fabrication method thereof
11/15/2011	US8058083 Method for manufacturing flexible semiconductor device
11/15/2011	US8058082 Light-emitting diode with textured substrate
11/15/2011	US8058081 Method of testing an integrity of a material layer in a semiconductor structure
11/15/2011	US8058080 Method of manufacturing a magnetic random access memory, method of manufacturing an embedded memory, and template
11/15/2011	US8057986 Method for forming resist pattern and method for manufacturing a semiconductor device
11/15/2011	US8057966 Manufacturing method of photomask for multiple exposure and semiconductor device manufacturing method using above photomask
11/15/2011	US8057762 Penetrable cap
11/15/2011	US8057696 Compositions and methods for rapidly removing overfilled substrates
11/15/2011	US8057656 Crossover
11/15/2011	US8057634 Method and apparatus for plasma processing
11/15/2011	US8057633 Post-etch treatment system for removing residue on a substrate
11/15/2011	US8057600 Method and apparatus for an improved baffle plate in a plasma processing system
11/15/2011	US8057599 Substrate processing apparatus and method for manufacturing a semiconductor device
11/15/2011	US8057564 Exhaust trap device
11/15/2011	US8057153 Substrate transfer device, substrate processing apparatus and substrate transfer method
11/15/2011	US8057151 Foup door positioning device for foup opener
11/15/2011	US8056698 Tray handling apparatus and semiconductor device inspecting method using the same
11/15/2011	US8056504 Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates
11/15/2011	US8056503 Plasma procesor and plasma processing method
11/15/2011	US8056501 Film forming apparatus and method of manufacturing light emitting device
11/15/2011	DE202011051801U1 Waferstapel-Transportträger Wafer stack shipping carrier
11/15/2011	CA2516166C Method for regeneration of an electrolysis bath for the production of a compound i-iii-vi<sb>2</sb> in thin layers
11/10/2011	WO2011140541A2 Method of 1/f noise level reduction and manipulation in semiconductor based devices
11/10/2011	WO2011140528A1 Substrates and methods of forming film structures to facilitate silicon carbide epitaxy
11/10/2011	WO2011140115A1 Combinatorial methods for making cigs solar cells
11/10/2011	WO2011140015A1 Isolation by implantation in led array manufacturing
11/10/2011	WO2011139862A2 Hermetic wafer-to-wafer bonding with electrical interconnection
11/10/2011	WO2011139775A2 Process chamber lid design with built-in plasma source for short lifetime species
11/10/2011	WO2011139774A2 Method for forming an organic device
11/10/2011	WO2011139642A2 Nmos metal gate materials, manufacturing methods, and equipment using cvd and ald processes with metal based precursors
11/10/2011	WO2011139640A2 Improved radiation heating efficiency by increasing absorption of a silicon containing material
11/10/2011	WO2011139575A2 Endpoint method using peak location of modified spectra
11/10/2011	WO2011139571A2 Dynamically or adaptively tracking spectrum features for endpoint detection
11/10/2011	WO2011139524A2 Automatic generation of reference spectra for optical monitoring
11/10/2011	WO2011139501A2 Pad conditioning sweep torque modeling to achieve constant removal rate
11/10/2011	WO2011139472A2 Inline chemical vapor deposition system
11/10/2011	WO2011139435A2 High-temperature selective dry etch having reduced post-etch solid residue
11/10/2011	WO2011139388A1 Disk-brush cleaner module with fluid jet
11/10/2011	WO2011139231A1 Bonding stress testing arrangement and method of determining stress
11/10/2011	WO2011139128A2 Multi-plasma generation device for wafer treatment
11/10/2011	WO2011139127A2 Double boat structure of wafer processing apparatus
11/10/2011	WO2011139126A2 Apparatus and method for processing wafers
11/10/2011	WO2011139124A2 Integrated semiconductor-processing apparatus
11/10/2011	WO2011139073A2 Negative photoresist composition, and method for patterning device
11/10/2011	WO2011139061A2 Method for aligning semiconductor materials
11/10/2011	WO2011139039A2 Gas discharge unit, manufacturing method for the same, and substrate processing apparatus having the same
11/10/2011	WO2011139036A2 Atmospheric pressure plasma apparatus
11/10/2011	WO2011138958A1 Process for production of functional device, process for production of ferroelectric material layer, process for production of field effect transistor, thin film transistor, field effect transistor, and piezoelectric inkjet head
11/10/2011	WO2011138941A1 Field effect transistor and memory device
11/10/2011	WO2011138938A1 Supporting device and light exposure device
11/10/2011	WO2011138921A1 Structure for mounting electronic circuit configuration component
11/10/2011	WO2011138906A1 Method for manufacturing semiconductor device
11/10/2011	WO2011138898A1 Stage heater and method for producing shaft
11/10/2011	WO2011138882A1 Template matching processing device and template matching processing program
11/10/2011	WO2011138881A1 Chemical supply system, substrate processing apparatus provided with same, and application/development system provided with the substrate processing apparatus
11/10/2011	WO2011138871A1 Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor device
11/10/2011	WO2011138851A1 Light emitting diode
11/10/2011	WO2011138818A1 Thin film transistor device, thin film transistor array device, organic el display device, and method for manufacturing thin film transistor device
11/10/2011	WO2011138706A2 Device for holding wafer shaped articles
11/10/2011	WO2011138703A2 Wafer support ring
11/10/2011	WO2011138695A2 Method for treatment of substrates and treatment composition for said method
11/10/2011	WO2011138524A1 Device and method for inspecting moving semiconductor wafers
11/10/2011	WO2011138451A1 Device analysis
11/10/2011	WO2011138315A1 Storage magazine of a cvd plant
11/10/2011	WO2011138304A1 Method for simultaneous double-side material-removing processing of a semiconductor wafer
11/10/2011	WO2011138232A1 Method for producing a flexible circuit configuration
11/10/2011	WO2011137701A1 Electrostatic protector and manufacturing method thereof
11/10/2011	WO2011137693A1 Dustless vacuum power transmission device
11/10/2011	WO2011137692A1 Gas environment buffer device
11/10/2011	WO2011137624A1 Flash memory device and manufacturing method thereof
11/10/2011	WO2011137512A1 Non-contact measurement of the dopant content of semiconductor layers
11/10/2011	WO2011115859A3 Biaxial strained field effect transistor devices
11/10/2011	WO2011103994A8 Wafer equivalent, method for producing it and use
11/10/2011	WO2011094590A3 High sensitivity real time profile control eddy current monitoring system
11/10/2011	WO2011094142A3 Apparatus for controlling temperature uniformity of a substrate
11/10/2011	WO2011092601A3 Bio-inspired nanostructures for implementing vertical pn-junctions
11/10/2011	WO2011090650A3 Electrostatic chucks and methods for refurbishing same
11/10/2011	WO2011090572A3 A method to form lateral pad on edge of wafer
11/10/2011	WO2011087874A3 Method of controlling trench microloading using plasma pulsing
11/10/2011	WO2011087215A3 Probe card
11/10/2011	WO2011085255A3 Inspection guided overlay metrology

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