H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2011
11/22/2011	US8062461 Method of manufacturing an electro-optical device
11/22/2011	US8062440 Hafnium alloy target and process for producing the same
11/22/2011	US8062427 Particulate material metering and vaporization
11/22/2011	US8062422 Method and apparatus for generating a precursor for a semiconductor processing system
11/22/2011	US8062414 Coating liquid for forming amorphous silica-based coating film with low dielectric constant
11/22/2011	US8062384 Systems, methods and apparatuses for magnetic processing of solar modules
11/22/2011	US8062102 Plurality of spaced apart members projecting protruding from substrate comprising abrasive and chemical additive layers
11/22/2011	US8061299 Formation of photoconductive and photovoltaic films
11/17/2011	WO2011143062A2 Confined process volume pecvd chamber
11/17/2011	WO2011143012A2 Heater with independent center zone control
11/17/2011	WO2011142975A2 Pad window insert
11/17/2011	WO2011142957A2 Inductive plasma source with metallic shower head using b-field concentrator
11/17/2011	WO2011142892A2 Test pattern for contour calibration in opc model build
11/17/2011	WO2011142850A2 Etchant-free methods of producing a gap between two layers, and devices produced thereby
11/17/2011	WO2011142765A1 Apparatus and method for cleaning cmp polishing pads
11/17/2011	WO2011142764A1 Method for cmp using pad in a bottle
11/17/2011	WO2011142499A1 Cylindrical high-pressure treatment apparatus
11/17/2011	WO2011142470A1 Epitaxial silicon carbide single-crystal substrate and method for producing the same
11/17/2011	WO2011142467A1 Method for manufacturing semiconductor device
11/17/2011	WO2011142458A1 Semiconductor integrated circuit and method of producing same
11/17/2011	WO2011142443A1 Microcrystalline silicon film, manufacturing method thereof, semiconductor device, and manufacturing method thereof
11/17/2011	WO2011142403A1 Radiation-sensitive resin composition for immersion exposure, curing pattern forming method and curing pattern
11/17/2011	WO2011142402A1 Method for producing gallium trichloride gas and method for producing nitride semiconductor crystal
11/17/2011	WO2011142401A1 Adhesive tape for processing rigid wafers and grinding method using same
11/17/2011	WO2011142386A1 Semiconductor device, and method for producing same
11/17/2011	WO2011142371A1 Semiconductor device
11/17/2011	WO2011142362A1 Silicon-wafer polishing composition and silicon-wafer polishing method
11/17/2011	WO2011142351A1 Substrate-mounting carriage
11/17/2011	WO2011142318A1 Electronic component and method for producing same
11/17/2011	WO2011142288A1 Semiconductor device, bonded substrate, and manufacturing methods therefor
11/17/2011	WO2011142274A1 Dry etching device
11/17/2011	WO2011142267A1 Organic semiconductor film and method for manufacturing the same, and stamp for contact printing
11/17/2011	WO2011142265A1 Semiconductor device, active matrix substrate, and display device
11/17/2011	WO2011142261A1 Dry etching apparatus
11/17/2011	WO2011142194A1 Metal film forming system
11/17/2011	WO2011142193A1 Metal film forming system, method for forming metal film and computer recording medium
11/17/2011	WO2011142192A1 Metal film forming system, metal film forming method, and computer storage medium
11/17/2011	WO2011142159A1 Wafer chamfering device
11/17/2011	WO2011142158A1 Process for production of silicon carbide substrate, process for production of semiconductor device, silicon carbide substrate, and semiconductor device
11/17/2011	WO2011142154A1 Laser annealing device, method for manufacturing laser-annealed object, and laser annealing program
11/17/2011	WO2011142147A1 Circuit board and display device
11/17/2011	WO2011142125A1 Plasma processing device and method
11/17/2011	WO2011142089A1 Flexible semiconductor device, manufacturing method for same, and image display device
11/17/2011	WO2011142088A1 Flexible semiconductor device, manufacturing method for same, and image display device
11/17/2011	WO2011142087A1 Router and chip circuit
11/17/2011	WO2011142081A1 Flexible semiconductor device and manufacturing method therefor
11/17/2011	WO2011142074A1 Silicon carbide epitaxial wafer and process for production thereof, silicon carbide bulk substrate for epitaxial growth purposes and process for production thereof, and heat treatment apparatus
11/17/2011	WO2011142068A1 Method for driving non-volatile logic circuit
11/17/2011	WO2011142067A1 Method for driving non-volatile logic circuit
11/17/2011	WO2011142066A1 Circuit simulation method and semiconductor integrated circuit
11/17/2011	WO2011142064A1 Active matrix substrate and display panel
11/17/2011	WO2011142061A1 Thin-film transistor substrate and liquid-crystal display device provided with the same
11/17/2011	WO2011142060A1 Cleaning method and cleaning device
11/17/2011	WO2011142055A1 Method for vapor-phase epitaxial growth of semiconductor film
11/17/2011	WO2011142052A1 Polishing agent, method for producing compound semiconductor, and method for manufacturing semiconductor device
11/17/2011	WO2011141996A1 Transfer device and method, and computer program
11/17/2011	WO2011141995A1 Transfer device and method, and computer program
11/17/2011	WO2011141986A1 Plasma film formation device and film formation method
11/17/2011	WO2011141981A1 Semiconductor device
11/17/2011	WO2011141973A1 Semiconductor device and method for manufacturing same
11/17/2011	WO2011141966A1 Transfer device
11/17/2011	WO2011141949A1 Method for manufacturing crystalline semiconductor film, substrate provided with crystalline semiconductor film, and thin film transistor
11/17/2011	WO2011141948A1 Thin film transistor device and method for manufacturing thin film transistor device
11/17/2011	WO2011141885A1 Manufacture of graphene-based apparatus
11/17/2011	WO2011141516A2 Method and apparatus to control surface texture modification of silicon wafers for photovoltaic cell devices
11/17/2011	WO2011141513A1 Chamber for physical vapor deposition
11/17/2011	WO2011141229A1 Generation of multiple diameter nanowire field effect transistors
11/17/2011	WO2011141228A1 Generation of multiple diameter nanowire field effect transistors
11/17/2011	WO2011141193A1 Directionally etched nanowire field effect transistors
11/17/2011	WO2011140850A1 Contact hole, semiconductor device and manufacturing method thereof
11/17/2011	WO2011117849A8 Thienocoronene-imide semiconducting compounds and polymers
11/17/2011	WO2011109149A3 Floating body cell structures, devices including same, and methods for forming same
11/17/2011	WO2011106203A3 Spalling for a semiconductor substrate
11/17/2011	WO2011103538A3 Post-cmp cleaning brush
11/17/2011	WO2011100207A3 Interconnect pattern for transceiver package
11/17/2011	WO2011100021A3 Bond pad with multiple layer over pad metallization and method of formation
11/17/2011	WO2011097089A3 Recessed semiconductor substrates
11/17/2011	WO2011097008A3 Resistive memory and methods of processing resistive memory
11/17/2011	WO2011094706A3 Feedback control of polishing using optical detection of clearance
11/17/2011	WO2011094302A3 Process for reconditioning semiconductor surface to facilitate bonding
11/17/2011	WO2011094300A3 Process and structure for high temperature selective fusion bonding
11/17/2011	WO2011094230A3 Life enhancement of ring assembly in semiconductor manufacturing chambers
11/17/2011	WO2011094135A3 High sensitivity real time profile control eddy current monitoring system
11/17/2011	WO2011092401A3 Method for producing a photovoltaic cell including the preparation of the surface of a crystalline silicon substrate
11/17/2011	WO2011091400A3 Method for protecting optical devices during manufacture
11/17/2011	WO2011090905A3 Transfer robot with substrate cooling
11/17/2011	WO2011090878A3 Charge storage nodes with conductive nanodots
11/17/2011	WO2011090850A3 Process condition sensing device for plasma chamber
11/17/2011	WO2011090571A3 Self-aligned contacts
11/17/2011	WO2011087698A3 Pecvd multi-step processing with continuous plasma
11/17/2011	WO2011087605A3 Wrap-around contacts for finfet and tri-gate devices
11/17/2011	WO2011085064A3 N-channel flow ratio controller calibration
11/17/2011	WO2011084812A3 Flowable dielectric using oxide liner
11/17/2011	WO2011084415A3 Electroless nickel and gold plating in semiconductor device
11/17/2011	WO2011082371A3 Mobile electrostatic carriers for thin wafer processing
11/17/2011	WO2011082183A3 Wafer test cassette system
11/17/2011	WO2011082020A3 Shadow ring for modifying wafer edge and bevel deposition
11/17/2011	WO2011081811A3 Tamper resistant fuse design
11/17/2011	WO2011080023A3 Spin-on formulation and method for stripping an ion implanted photoresist
11/17/2011	WO2011075437A3 Multifunctional heater/chiller pedestal for wide range wafer temperature control

1 ... 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 ... 6590