H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2011
11/03/2011	WO2011135902A1 Semiconductor fault analysis device and fault analysis method
11/03/2011	WO2011135901A1 Method for producing electrode element, calculator, and device for producing electrode element
11/03/2011	WO2011135896A1 Semiconductor device, and manufacturing method for same
11/03/2011	WO2011135890A1 Semiconductor device, display device, and method for manufacturing semiconductor device
11/03/2011	WO2011135874A1 Semiconductor device, method for manufacturing same, and display device
11/03/2011	WO2011135873A1 Shift register and display device
11/03/2011	WO2011135867A1 Inspecting apparatus and inspecting method
11/03/2011	WO2011135809A1 Semiconductor substrate, method for manufacturing semiconductor substrate, electronic device, and method for manufacturing electronic device
11/03/2011	WO2011135775A1 Method for checking ion implantation state, and method for manufacturing semiconductor wafer
11/03/2011	WO2011135731A1 Substrate processing apparatus and method for manufacturing thin film
11/03/2011	WO2011135655A1 Jig for wet etching
11/03/2011	WO2011135643A1 Nitride semiconductor transistor
11/03/2011	WO2011135641A1 Semiconductor device and method for manufacturing same
11/03/2011	WO2011135640A1 Semiconductor integrated circuit device
11/03/2011	WO2011135639A1 Container and method for storing semiconductor wafer
11/03/2011	WO2011135439A1 Perovskite material with anion-controlled dielectric properties, thin film capacitor device, and method for manufacturing the same
11/03/2011	WO2011135432A1 Dislocation and stress management by mask-less processes using substrate patterning and methods for device fabrication
11/03/2011	WO2011135420A1 Process for the production of a compound semiconductor layer
11/03/2011	WO2011135249A1 Method for preparing an n+pp+ or p+nn+ structure on silicon wafers
11/03/2011	WO2011135065A1 Semiconductor wafer and method for manufacturing the same
11/03/2011	WO2011134999A1 Device and method for mechanically texturing a silicon wafer intended to comprise a photovoltaic cell, and resulting silicon wafer
11/03/2011	WO2011134896A2 Trimming thinning
11/03/2011	WO2011134857A1 Method of fabricating semiconductor quantum dots using nanoimprint lithography
11/03/2011	WO2011134653A1 Apparatus and method for determining the location of plate elements of a wafer boat
11/03/2011	WO2011134433A1 Optical waveguide fabrication method
11/03/2011	WO2011134390A1 Manufacturing method for array substrate with fringe field switching type thin film transistor liquid crystal display
11/03/2011	WO2011134389A1 Manufacturing method for array substrate with fringe field switching type thin film transistor liquid crystal display
11/03/2011	WO2011134301A1 Semiconductor device and fabrication method thereof
11/03/2011	WO2011134274A1 Manufacturing method of asymmetrical source and drain field effect transitor
11/03/2011	WO2011134127A1 Flash memory device and manufacturing method thereof
11/03/2011	WO2011134117A1 Bonding method of heterogeneous material
11/03/2011	WO2011090912A3 Integrated void fill for through silicon via
11/03/2011	WO2011084126A3 Uv lamp assembly of degas chamber having rotary shutters
11/03/2011	WO2011083919A3 Block and standard cell packing method for automated design area optimization
11/03/2011	WO2011082857A3 Production of a component
11/03/2011	WO2011081438A3 Memory having three-dimensional structure and manufacturing method thereof
11/03/2011	WO2011081322A3 Composition for the bottom layer of a resist, and method using same to manufacture a semiconductor integrated circuit device
11/03/2011	WO2011081321A3 Composition for the bottom layer of a resist, and method using same to manufacture a semiconductor integrated circuit device
11/03/2011	WO2011078477A3 Method for supplying and discharging flat product to be treated
11/03/2011	WO2011072278A3 Germanium ingots/wafers having low micro-pit density (mpd) as well as systems and methods for manufacturing same
11/03/2011	WO2011072260A3 Porous barrier for evenly distributed purge gas in a microenvironment
11/03/2011	WO2011065776A3 Tray and substrate processing apparatus using same and method for manufacturing tray
11/03/2011	WO2011058035A3 Punch-through semiconductor device and method for producing same
11/03/2011	WO2011057247A3 System and method for handling multiple workpieces for matrix configuration processing
11/03/2011	WO2011055960A3 Apparatus and method for polishing and washing a semiconductor wafer
11/03/2011	WO2011053004A3 Substrate having low reflection and high contact angle, and production method for same
11/03/2011	WO2011052998A3 Substrate holding receptacle
11/03/2011	WO2011049620A3 Heating plate with planar heater zones for semiconductor processing
11/03/2011	WO2011043566A3 Apparatus and method for processing substrate
11/03/2011	WO2011040745A3 Image processing-based lithography system and target object coating method
11/03/2011	WO2011013091A3 Semiconductor device including a stress buffer material formed above a low-k metallization system
11/03/2011	US20110270099 Hermetic wafer-to-wafer bonding with electrical interconnection
11/03/2011	US20110269861 Solvent compositions containing chlorofluoroolefins or fluoroolefins
11/03/2011	US20110269316 Wafer Support Ring
11/03/2011	US20110269315 Thin film formation method and film formation apparatus
11/03/2011	US20110269314 Process chambers having shared resources and methods of use thereof
11/03/2011	US20110269313 Semiconductor substrate surface treatment method
11/03/2011	US20110269312 Chemical mechanical polishing (cmp) polishing solution with enhanced performance
11/03/2011	US20110269311 Gold-tin etch using combination of halogen plasma and wet etch
11/03/2011	US20110269310 Selective silicide process
11/03/2011	US20110269309 Photoresist composition, method of forming pattern by using the photoresist composition, and method of manufacturing thin-film transistor substrate
11/03/2011	US20110269308 Method for manufacturing semiconductor device
11/03/2011	US20110269307 Method for Making Integrated Circuit Device Using Copper Metallization on 1-3 PZT Composite
11/03/2011	US20110269306 Solder bump, electronic component and method for manufacturing the electronic component
11/03/2011	US20110269305 Method for forming a floating gate using chemical mechanical planarization
11/03/2011	US20110269304 Method for fabricating semiconductor device
11/03/2011	US20110269303 Reduced Defectivity in Contacts of a Semiconductor Device Comprising Replacement Gate Electrode Structures by Using an Intermediate Cap Layer
11/03/2011	US20110269302 Method of fabricating a semiconductor device
11/03/2011	US20110269301 Manufacturing method of single crystal semiconductor film and manufacturing method of electrode
11/03/2011	US20110269300 Integrated Assist Features for Epitaxial Growth
11/03/2011	US20110269299 Direct chemical vapor deposition of graphene on dielectric surfaces
11/03/2011	US20110269298 Irradiation assisted nucleation of quantum confinements by atomic layer deposition
11/03/2011	US20110269297 Method for synthesising semiconductor quantum dots
11/03/2011	US20110269296 Method for separating semiconductor wafer into chips
11/03/2011	US20110269295 Method of Forming a Semiconductor Wafer that Provides Galvanic Isolation
11/03/2011	US20110269294 Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same
11/03/2011	US20110269293 Reduced STI Loss for Superior Surface Planarity of Embedded Stressors in Densely Packed Semiconductor Devices
11/03/2011	US20110269292 Isolating wire bonding in integrated electrical components
11/03/2011	US20110269291 Method of manufacturing a semiconductor device comprising capacitive elements
11/03/2011	US20110269290 Method of manufacturing semiconductor device
11/03/2011	US20110269289 Transistor device and a method of manufacturing the same
11/03/2011	US20110269288 Methods of Forming CoSi2, Methods of Forming Field Effect Transistors, and Methods of Forming Conductive Contacts
11/03/2011	US20110269287 Methods for doping fin field-effect transistors
11/03/2011	US20110269286 Heavily doped region in double-diffused source mosfet (ldmos) transistor and a method of fabricating the same
11/03/2011	US20110269285 Field transistors for electrostatic discharge protection and methods for fabricating the same
11/03/2011	US20110269284 Semiconductor substrate, semiconductor device, and manufacturing methods for them
11/03/2011	US20110269283 High Voltage Transistor with Improved Driving Current
11/03/2011	US20110269282 Method of manufacturing semiconductor device
11/03/2011	US20110269281 Transistor with Longitudinal Strain in Channel Induced by Buried Stressor Relaxed by Implantation
11/03/2011	US20110269280 Semiconductor device and a method of manufacturing the same
11/03/2011	US20110269279 Method for forming junctions of vertical cells in semiconductor device
11/03/2011	US20110269278 Stress Memorization with Reduced Fringing Capacitance Based on Silicon Nitride in MOS Semiconductor Devices
11/03/2011	US20110269277 Reduced STI Topography in High-K Metal Gate Transistors by Using a Mask After Channel Semiconductor Alloy Deposition
11/03/2011	US20110269276 Method to optimize work function in complementary metal oxide semiconductor (cmos) structures
11/03/2011	US20110269275 Static Random Access Memory (SRAM) Cell and Method for Forming Same
11/03/2011	US20110269274 Thin film transistors having multiple doped silicon layers
11/03/2011	US20110269273 Semiconductor device and method of manufacturing the same
11/03/2011	US20110269272 Microelectronic packages and methods therefor
11/03/2011	US20110269271 Nanotube based vapor chamber for die level cooling
11/03/2011	US20110269270 Stackable layer containing ball grid array package

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