H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2011
11/08/2011	US8053289 Manufacturing method for thin film transistor on insulator
11/08/2011	US8053288 Method of making device of a display
11/08/2011	US8053287 Method for making multi-step photodiode junction structure for backside illuminated sensor
11/08/2011	US8053286 Method of forming semiconductor device including trench gate structure
11/08/2011	US8053285 Thermally enhanced single inline package (SIP)
11/08/2011	US8053284 Method and package for circuit chip packaging
11/08/2011	US8053283 Die level integrated interconnect decal manufacturing method and apparatus
11/08/2011	US8053282 Mounting structure of component of lighting device and method thereof
11/08/2011	US8053281 Method of forming a wafer level package
11/08/2011	US8053280 Method of producing multiple semiconductor devices
11/08/2011	US8053279 Methods and systems for imaging and cutting semiconductor wafers and other semiconductor workpieces
11/08/2011	US8053278 Multi-chip package type semiconductor device
11/08/2011	US8053277 Three-dimensional integrated circuits with protection layers
11/08/2011	US8053276 Method of stacking and interconnecting semiconductor packages via electrical connectors extending between adjoining semiconductor packages
11/08/2011	US8053275 Semiconductor device having double side electrode structure and method of producing the same
11/08/2011	US8053274 Self cleaning large scale method and furnace system for selenization of thin film photovoltaic materials
11/08/2011	US8053273 Shallow PN junction formed by in situ doping during selective growth of an embedded semiconductor alloy by a cyclic growth/etch deposition process
11/08/2011	US8053272 Semiconductor device fabrication method
11/08/2011	US8053268 Semiconductor device and method of manufacturing the same
11/08/2011	US8053267 Three-dimensional force input control device and fabrication
11/08/2011	US8053266 Piezo-diode cantilever MEMS fabrication method
11/08/2011	US8053265 Mitigation of high stress areas in vertically offset structures
11/08/2011	US8053264 Photoelectrochemical etching of P-type semiconductor heterostructures
11/08/2011	US8053263 Method of manufacturing semiconductor light emitting device
11/08/2011	US8053262 Method for manufacturing nitride semiconductor laser element
11/08/2011	US8053261 Method of fabricating light emitting device
11/08/2011	US8053260 Large-area lighting systems and methods of making the same
11/08/2011	US8053259 Manufacturing method of light emitting diode
11/08/2011	US8053258 Thick film sealing glass compositions for low temperature firing
11/08/2011	US8053257 Method for prediction of premature dielectric breakdown in a semiconductor
11/08/2011	US8053256 Variable thickness single mask etch process
11/08/2011	US8053255 STRAM with compensation element and method of making the same
11/08/2011	US8053254 Apparatus for forming thin film and method of manufacturing semiconductor film
11/08/2011	US8053253 Method for manufacturing semiconductor device
11/08/2011	US8053251 Temperature-compensated ferroelectric capacitor device, and its fabrication
11/08/2011	US8053174 Manufacturing method for wiring
11/08/2011	US8053173 Multi-functional linear siloxane compound, a siloxane polymer prepared from the compound, and a process for forming a dielectric film by using the polymer
11/08/2011	US8053171 Substrate having film pattern and manufacturing method of the same, manufacturing method of semiconductor device, liquid crystal television, and EL television
11/08/2011	US8053036 Method for designing shower plate for plasma CVD apparatus
11/08/2011	US8052944 Penetrable cap
11/08/2011	US8052887 Substrate processing apparatus
11/08/2011	US8052885 Structural modification using electron beam activated chemical etch
11/08/2011	US8052861 Electrolytic etching method and method of producing a solar battery
11/08/2011	US8052834 Substrate treating system, substrate treating device, program, and recording medium
11/08/2011	US8052833 Chemical treatment apparatus
11/08/2011	US8052799 Anode, cathode, wafer, and ionizing cleaning gas
11/08/2011	US8052798 Particle removal apparatus and method and plasma processing apparatus
11/08/2011	US8052791 Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
11/08/2011	US8051870 Pressure reduction process device, pressure reduction process method, and pressure regulation valve
11/08/2011	US8051556 Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate
11/08/2011	US8051554 IC socket with attached electronic component
11/08/2011	US8051522 Substrate treatment apparatus
11/08/2011	CA2495309C Semiconductor nanocrystal heterostructures
11/03/2011	WO2011137373A2 Vertical inline cvd system
11/03/2011	WO2011137371A2 Vertical inline cvd system
11/03/2011	WO2011137298A2 Improved biocompatible bonding method
11/03/2011	WO2011137179A1 Isolated wire bond in integrated electrical components
11/03/2011	WO2011137176A1 Method for making an isolated wire bond in electrical components
11/03/2011	WO2011137071A2 Methods and apparatus for calibrating flow controllers in substrate processing systems
11/03/2011	WO2011137070A2 Methods and apparatus for reducing flow splitting errors using orifice ratio conductance control
11/03/2011	WO2011137069A2 Twin chamber processing system
11/03/2011	WO2011137068A2 Twin chamber processing system with shared vacuum pump
11/03/2011	WO2011137059A2 Amorphous carbon deposition method for improved stack defectivity
11/03/2011	WO2011137010A2 Apparatus for radial delivery of gas to a chamber and methods of use thereof
11/03/2011	WO2011137009A2 Methods for extending the lifetime of pressure gauges coupled to substrate process chambers
11/03/2011	WO2011136982A2 Methods for processing substrates in process systems having shared resources
11/03/2011	WO2011136974A2 Process chambers having shared resources and methods of use thereof
11/03/2011	WO2011136966A1 Native devices having improved device characteristics and methods for fabrication
11/03/2011	WO2011136959A2 Methods for monitoring processing equipment
11/03/2011	WO2011136819A1 Circuit module
11/03/2011	WO2011136795A1 Connection and addressing of multi-plane crosspoint devices
11/03/2011	WO2011136659A1 Method and apparatus for removing a defect from a solar cell
11/03/2011	WO2011136604A2 Substrate treating apparatus
11/03/2011	WO2011136603A2 Plasma processing apparatus
11/03/2011	WO2011136594A2 Copper and titanium composition for metal layer etching solution
11/03/2011	WO2011136548A2 Spr gas sensing device manufacturing method using molecularly imprinted polymer
11/03/2011	WO2011136512A2 High density plasma generating apparatus
11/03/2011	WO2011136430A1 Method for detecting event error of semiconductor equipment and semiconductor equipment control system using same
11/03/2011	WO2011136387A1 Sapphire polishing slurry and sapphire polishing method
11/03/2011	WO2011136363A1 Method for manufacturing circuit device
11/03/2011	WO2011136338A1 Method for forming carbon nanotubes, and carbon nanotube film-forming apparatus
11/03/2011	WO2011136272A1 Semiconductor device
11/03/2011	WO2011136077A1 Vapor deposition device, vapor deposition method, and semiconductor element manufacturing method
11/03/2011	WO2011136074A1 Positive radiation-sensitive composition, interlayer insulating film for display element, and formation method for same
11/03/2011	WO2011136071A1 Semiconductor device, and manufacturing method for same
11/03/2011	WO2011136052A1 Epitaxial substrate and method for producing epitaxial substrate
11/03/2011	WO2011136051A1 Epitaxial substrate and method for producing epitaxial substrate
11/03/2011	WO2011136039A1 Titanium oxide particle, method for producing same, magnetic memory, optical information recording medium, and charge storage memory
11/03/2011	WO2011136016A1 Epitaxial film formation method, vacuum treatment device, method for producing semiconductor light-emitting element, semiconductor light-emitting element, lighting device
11/03/2011	WO2011135999A1 Semiconductor memory device
11/03/2011	WO2011135987A1 Method for manufacturing semiconductor device
11/03/2011	WO2011135986A1 Industrial robot
11/03/2011	WO2011135984A1 Semiconductor recording device
11/03/2011	WO2011135963A1 Epitaxial substrate and process for producing epitaxial substrate
11/03/2011	WO2011135949A1 Method for polishing silicon wafer and polishing liquid therefor
11/03/2011	WO2011135947A1 Positive radiation-sensitive composition for discharge nozzle coating method, interlayer insulating film for display element, and formation method for same
11/03/2011	WO2011135945A1 Semiconductor device, display device, and production method for semiconductor device and display device
11/03/2011	WO2011135939A1 Method of manufacturing crystalline semiconductor and laser anneal apparatus
11/03/2011	WO2011135920A1 Circuit board, display device, and method for producing circuit board
11/03/2011	WO2011135913A1 Silicon carbide crystal and method for producing silicon carbide crystal

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