Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2012
04/18/2012CN102420116A 消除栅极凹形缺陷的方法 The method of eliminating gate concave defect
04/18/2012CN102420115A Method for reducing overlap capacitance in semiconductor device
04/18/2012CN102420114A Laminate body, method, and apparatus for manufacturing ultrathin substrate using the laminate body
04/18/2012CN102420113A 一种避免光刻机被硅片背面金属沾污的方法 A contamination of the wafer lithography method avoids the back metal
04/18/2012CN102420112A 基板处理方法及基板处理装置 Substrate processing method and substrate processing apparatus
04/18/2012CN102420111A 提高外延层电阻均匀性的方法、外延片及半导体器件 Improve the uniformity of the epitaxial layer resistivity method, epitaxial wafers and semiconductor devices
04/18/2012CN102420110A 一种提高半导体器件中mim电容密度的方法及其器件 A method for increasing the capacitance density of a semiconductor device mim method and device
04/18/2012CN102420109A Method for improving capacitance uniformity of MIM (Metal-Insulator-Metal) device
04/18/2012CN102420108A 铜大马士革工艺金属-绝缘层-金属电容制造工艺及结构 Copper damascene metal - insulator - metal capacitor manufacturing processes and structures
04/18/2012CN102420107A 铜大马士革工艺金属-绝缘层-金属电容制造工艺及结构 Copper damascene metal - insulator - metal capacitor manufacturing processes and structures
04/18/2012CN102420106A 铜大马士革工艺金属-绝缘层-金属电容结构及制造工艺 Copper damascene metal - insulator - metal capacitor structure and manufacturing process
04/18/2012CN102420105A Process for manufacturing metal-insulator-metal capacitor by using copper damascene process, and structure
04/18/2012CN102420104A 一种mim（金属-绝缘层-金属）电容制作方法 One kind of mim (metal - insulator - metal) capacitor production methods
04/18/2012CN102420103A 铜大马士革工艺金属-绝缘层-金属电容结构及制造工艺 Copper damascene metal - insulator - metal capacitor structure and manufacturing process
04/18/2012CN102420102A 一种形成mim电容器结构的方法及mim电容器 A method of forming a capacitor structure and mim mim capacitor
04/18/2012CN102420101A 一种利用铜大马士革工艺制造双层金属-绝缘层-金属电容的方法 A use of copper damascene manufacturing double metal - insulator - metal capacitor method
04/18/2012CN102420100A 一种刻蚀腔体清除记忆效应的方法 One kind of etching the cavity method to clear the memory effect
04/18/2012CN102420099A Test method used for monitoring active region damage caused by wet etching
04/18/2012CN102420089A Electrode plate for plasma etching and plasma etching apparatus
04/18/2012CN102419961A Driving circuit and display device using the same
04/18/2012CN102419822A Tool management method of die bonder and die bonder
04/18/2012CN102419603A 一种化学机械研磨过程中研磨垫的温度控制系统 A chemical mechanical polishing pad during polishing temperature control system
04/18/2012CN102419513A Resist composition and method for producing semiconductor device
04/18/2012CN102419512A Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon
04/18/2012CN102419336A Unpackaging method for tiny components
04/18/2012CN102418149A 低温快速热处理的温度监控方法 Temperature monitoring method of low-temperature rapid thermal processing
04/18/2012CN102418138A 一种用于全面积器件转移的制备多孔硅的装置 An apparatus for producing porous silicon for the whole area of ​​the device transfer
04/18/2012CN102418073A Sputtering chamber, pre-cleaning chamber and plasma processing equipment
04/18/2012CN102416596A 一种用于改善晶圆表面被固定磨料抛光垫刮伤的装置 A method of improving the wafer surface is a fixed abrasive polishing pad scratching means for
04/18/2012CN102087977B 垂直npn晶体管及其制造方法 The vertical npn transistor and its manufacturing method
04/18/2012CN102082088B Method for sharing SL mask plate in products of DCMP (direct chemically mechanical polishing) process
04/18/2012CN102074465B 一种双阱制造工艺方法 A dual-well process for manufacturing
04/18/2012CN102054865B 用于静电保护结构的mos晶体管及其制造方法 Electrostatic protection structures mos transistor and manufacturing method for
04/18/2012CN102054724B 晶圆表面缺陷的检测方法及装置 Method and apparatus for detecting defects in the wafer surface
04/18/2012CN102044407B 芯片的清洗方法 The cleaning method of the chip
04/18/2012CN102024720B 半导体器件的制造方法 The method of manufacturing a semiconductor device
04/18/2012CN102013399B 场效应晶体管制造方法 Field effect transistor manufacturing method
04/18/2012CN101996907B 一种晶圆级弹性体压入微球植球装置 One kind of wafer-level elastomer pressure nuanced ball bumping apparatus
04/18/2012CN101976677B 基于ZnO肖特基二极管的相变随机存储器阵列及制作方法 ZnO-based Schottky diode, and a phase change random access memory array production method
04/18/2012CN101955152B 具有倒y形通孔的圆片级气密性封装方法 An inverted y-shaped through-hole tightness wafer level packaging method
04/18/2012CN101937876B 具有双层堆叠自对准栅结构的存储器的制造方法 Having a method of manufacturing a self-aligned double gate structure stack of the memory
04/18/2012CN101930933B Method for manufacturing semiconductor device
04/18/2012CN101901827B 核/壳型纤锌矿/闪锌矿ZnS异质纳米结构及其制备方法 The core / shell type wurtzite / sphalerite ZnS heterogeneous nanostructures and its preparation method
04/18/2012CN101901786B 包含dmos晶体管的集成电路的制备方法 The method for preparing an integrated circuit comprising a transistor dmos
04/18/2012CN101897002B 等离子体无损溅射枪、溅射装置、等离子体处理装置及薄膜形成方法 Lossless plasma sputtering gun, a sputtering apparatus, a film forming apparatus and method for plasma processing
04/18/2012CN101866884B 非易失性存储器控制栅极字线的加工方法 Non-volatile memory control gate word line processing method
04/18/2012CN101866871B 一种用于单面处理的夹持与保护装置 A gripping and protection for single-sided deal
04/18/2012CN101866852B 构造间隙壁的方法 Construction methods spacer
04/18/2012CN101866846B 刻蚀沟槽的方法 Trench etching method
04/18/2012CN101866841B 一种器件源漏区域的自对准金属硅化物形成方法 A device self-aligned source and drain regions of metal silicide forming method
04/18/2012CN101847654B 有机发光二极管显示器的像素结构及其制作方法 Pixel structure and method of making an organic light emitting diode display
04/18/2012CN101842888B Semiconductor mounting apparatus and semiconductor mounting method
04/18/2012CN101840892B 反射式液晶显示面板的薄膜晶体管基板及其制作方法 The thin film transistor substrate and method of making the panel reflective LCD
04/18/2012CN101819960B Base plate, semiconductor packaging piece applying same and manufacture method of base plate
04/18/2012CN101819917B 半导体装置的制造方法及系统 Method and system for manufacturing a semiconductor device
04/18/2012CN101814462B Semiconductor package element and a fabricating method thereof together with a sealing method
04/18/2012CN101807554B Electronic board and manufacturing method thereof, electro-optical device, and electronic apparatus
04/18/2012CN101783346B 带有屏蔽栅极沟道的电荷平衡器件 Shielded gate trench charge balancing devices with
04/18/2012CN101783319B Dual metal for a backside package of backside illuminated image sensor
04/18/2012CN101783313B 浅沟槽及其制造方法和浅沟槽隔离结构 The method of manufacturing shallow trenches and shallow trench isolation structure
04/18/2012CN101777503B Solder ball printer
04/18/2012CN101772833B 气体供给装置 Gas supply means
04/18/2012CN101770940B 叠层底部抗反射结构及刻蚀方法 Laminated bottom antireflective structure and etching method
04/18/2012CN101752340B 半导体装置 Semiconductor device
04/18/2012CN101752311B 功率mos晶体管与肖特基二极管的集成方法及结构 The method of power mos transistors and integrated Schottky diode and structure
04/18/2012CN101745993B 形成风车形划片槽结构的方法 Forming a windmill-shaped groove structure scribe method
04/18/2012CN101740475B 具有双镶嵌结构的半导体器件及其形成方法 A semiconductor device having a dual damascene structure and method of forming
04/18/2012CN101740464B 在sonos技术中提升自对准孔模块工艺窗口的方法 Enhance self-aligned holes module process window method sonos art
04/18/2012CN101740434B 氧化物半导体层的非破坏性测试方法和制造方法 Non-destructive testing method and a manufacturing method of an oxide semiconductor layer,
04/18/2012CN101738541B 一种基于纳米加工技术的集成微四点探针芯片制作方法 Based on the integration of micro-nanofabrication technology chip making four-point probe method
04/18/2012CN101728234B 真空缓冲装置 Vacuum buffer device
04/18/2012CN101714534B 树脂片以及使用了该树脂片的电路装置的制造方法 And a method of manufacturing a resin sheet of the resin sheet using a circuit arrangement
04/18/2012CN101697051B 液晶显示装置及其形成方法 Apparatus and method for forming LCD
04/18/2012CN101685823B Optoelectronic component, manufacturing method thereof and device with a plurality of optoelectronic components
04/18/2012CN101673800B Method of manufacturing light-emitting diode device
04/18/2012CN101661921B 一种微波单片集成电路中的金属布线层结构及其制备方法 Metal wiring layer structure of a microwave monolithic integrated circuit and its preparation method
04/18/2012CN101661887B 源漏注入结构的制备方法 Source-drain structure injection preparation
04/18/2012CN101661885B 已减薄或划片的氮化镓基场效应管的退火处理方法 The method of annealing the GaN-based FET thinned or dicing
04/18/2012CN101651170B 全自动化多晶槽式酸处理设备 Fully automated polycrystalline trough acid treatment equipment
04/18/2012CN101651151B 一种具有功能特性的异质结场效应管 A heterojunction field effect transistor having the features
04/18/2012CN101651150B 一种全氧化物异质结场效应管 An all-oxide heterostructure FET
04/18/2012CN101651119B GaN场效应晶体管和单片电路台形接地通孔的制作方法 GaN field effect transistor and a method of manufacturing a monolithic flat-shaped ground vias
04/18/2012CN101651092B 电路结构的制造方法 The method of manufacturing a circuit structure
04/18/2012CN101643148B 输送系统 Delivery system
04/18/2012CN101635295B 一种量子阱红外焦平面阵列及其制作方法 A quantum well infrared focal plane array and its production methods
04/18/2012CN101611470B 移动体装置、图案形成装置及图案形成方法、设备制造方法、移动体装置的制造方法以及移动体驱动方法 The movable body apparatus, a pattern forming apparatus and a pattern forming method, a method of manufacturing apparatus and manufacturing method for a device and a movable body drive method
04/18/2012CN101609787B Method for forming patterns of semiconductor device by using mixed assist feature system
04/18/2012CN101593724B 通孔形成方法 The method for forming the through-hole
04/18/2012CN101587823B Inflation equipment
04/18/2012CN101562151B 具有金属硅化物的半导体结构及形成金属硅化物的方法 The method of a semiconductor structure and a metal silicide forming metal silicide
04/18/2012CN101562131B 栅极结构的制造方法 The method of manufacturing the gate structure
04/18/2012CN101548372B IC chip-mounted package and image display device using the same
04/18/2012CN101542749B 太阳能电池的制造方法及太阳能电池的制造装置 The method of manufacturing apparatus for manufacturing a solar cell and solar cell
04/18/2012CN101542735B 有机电致发光器件及其制造方法和有机电致发光显示器 Organic electroluminescent device and manufacturing method and organic electroluminescent display
04/18/2012CN101527273B 一种半导体材料特性的测量装置 Measuring material characteristics of a semiconductor device
04/18/2012CN101521146B 衬底加热设备、半导体装置制造方法以及半导体装置 A substrate heating apparatus, a method of manufacturing a semiconductor device and a semiconductor device
04/18/2012CN101517492B 使用半曝光用正型感光性树脂层的透明性固化膜的制造方法 Using the method for producing a positive half-exposed photosensitive resin layer, a transparent cured film,
04/18/2012CN101506561B 组合式气体分配盘装置 Combined gas distribution plate means
04/18/2012CN101504933B 具有剪裁的电介质的p型场效应晶体管及方法和集成电路 A trimming of a dielectric and a method p-type field effect transistors and integrated circuits
04/18/2012CN101501856B Low voltage transient voltage suppressor with reduced breakdown voltage
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