Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/2012
04/05/2012WO2012044733A2 Non-contact determination of joint integrity between a tsv die and a package substrate
04/05/2012WO2012044704A2 Integration of cluster mocvd and hvpe reactors with other process chambers
04/05/2012WO2012044702A2 Method and system for providing tool induced shift using a sub-sampling scheme
04/05/2012WO2012044623A2 Method for forming a pattern and a semiconductor device manufacturing method
04/05/2012WO2012044622A2 Low-temperature dielectric film formation by chemical vapor deposition
04/05/2012WO2012044582A1 Thin wafer support assembly
04/05/2012WO2012044580A1 Heater with liquid heating element
04/05/2012WO2012044536A1 Method and system for modifying photoresist using electromagnetic radiation and ion implantion
04/05/2012WO2012044533A1 Integrated shadow mask/carrier for pattern ion implantation
04/05/2012WO2012044398A1 Corner structure for ic die
04/05/2012WO2012044361A1 Method for minimizing defects in a semiconductor substrate due to ion implantation
04/05/2012WO2012044360A1 Method for reducing punch-through in a transistor device
04/05/2012WO2012044359A1 Method for minimizing defects in a semiconductor substrate due to ion implantation
04/05/2012WO2012044344A1 Method of making oxide thin film transistor array, and device incorporating the same
04/05/2012WO2012044284A1 Directionally recrystallized graphene growth substrates
04/05/2012WO2012044276A1 Device structure for long endurance memristors
04/05/2012WO2012044160A1 An active carrier for carrying a wafer and method for release
04/05/2012WO2012044060A2 Microwave generation device, driving method of device thereof, and waste gas removal system
04/05/2012WO2012043995A2 Wafer alignment-rear surface test device
04/05/2012WO2012043977A2 Fluid suction apparatus
04/05/2012WO2012043973A1 Substrate cleaning apparatus including non-contact rotation unit
04/05/2012WO2012043964A1 Preparation method of cmp pad conditioner using amorphous metal
04/05/2012WO2012043951A1 Sawing apparatus of single crystal ingot
04/05/2012WO2012043923A1 Adhesive composition and adhesive sheet for manufacturing semiconductor package
04/05/2012WO2012043890A1 Gap embedding composition, method of embedding gap and method of producing semiconductor device by using the composition
04/05/2012WO2012043866A1 Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film and method of forming pattern
04/05/2012WO2012043830A1 Etching agent and etching method
04/05/2012WO2012043828A1 Mold having fine irregular structure on surface, method of producing product having fine irregular structure on surface, use of product, stack expressing heterochromia and surface emitting member
04/05/2012WO2012043806A1 Wiring structure and display device
04/05/2012WO2012043775A1 Tape carrier package manufacturing method, and method of manufacturing flexible circuit board for tape carrier package
04/05/2012WO2012043767A1 Cleaning solution and cleaning method for semiconductor-device substrate
04/05/2012WO2012043764A1 Adhesive composition, method for manufacturing semiconductor device, and semiconductor device
04/05/2012WO2012043762A1 Composition for forming liquid immersion upper layer film, and polymer
04/05/2012WO2012043727A1 Structure for joining multilayer copper bonding wire
04/05/2012WO2012043695A1 Mask blank, method for producing same, and transfer mask
04/05/2012WO2012043658A1 Mullite sintered object and circuit board using the same, and probe card
04/05/2012WO2012043545A1 Adhesive composition and semiconductor device using the same
04/05/2012WO2012043502A1 Semiconductor device
04/05/2012WO2012043497A1 Method for driving spatial light modulator, method for forming pattern for exposure, exposure method, and exposure apparatus
04/05/2012WO2012043496A1 Refining method for alkaline treatment fluid for semiconductor substrate and refining device
04/05/2012WO2012043495A1 Transfer apparatus and processing system
04/05/2012WO2012043490A1 Al alloy film, wiring structure having al alloy film, and sputtering target used in producing al alloy film
04/05/2012WO2012043478A1 Film forming method and film forming device
04/05/2012WO2012043474A1 POLYCRYSTALLINE ALUMINUM NITRIDE SUBSTRATE FOR GROWING GaN-BASED SEMICONDUCTOR CRYSTAL, AND GaN-BASED-SEMICONDUCTOR MANUFACTURING METHOD USING SAME
04/05/2012WO2012043472A1 Conductive particles, anisotropic conductive material and connection structure
04/05/2012WO2012043450A1 Liquid resin composition and semiconductor device
04/05/2012WO2012043441A1 Ceramic member
04/05/2012WO2012043418A1 Surface treatment composition and surface treatment method using same
04/05/2012WO2012043403A1 Pattern forming method, resist underlayer film, and composition for forming resist underlayer film
04/05/2012WO2012043384A1 Apparatus for etching silicon-containing material
04/05/2012WO2012043383A1 Etching method, and device
04/05/2012WO2012043365A1 Etching fluid composition and etching method
04/05/2012WO2012043349A1 Suction plate
04/05/2012WO2012043340A1 Dicing/die-bonding film and semiconductor device manufacturing method
04/05/2012WO2012043338A1 Thin film transistor, method for manufacturing same, and image display device provided with thin film transistor
04/05/2012WO2012043334A1 Nitride semiconductor device
04/05/2012WO2012043272A1 Conveyance device used for surface treatment
04/05/2012WO2012043250A1 Method and device for forming insulation film
04/05/2012WO2012043220A1 Polishing agent
04/05/2012WO2012043110A1 Transfer system
04/05/2012WO2012043102A1 Acrylamide derivative, polymer compound and photoresist composition
04/05/2012WO2012043058A1 Inspection device, inspection method, and program
04/05/2012WO2012043057A1 Semiconductor die pickup device and semiconductor die pickup method using same
04/05/2012WO2012043054A1 Normal-temperature bonding device and normal-temperature bonding method
04/05/2012WO2012043053A1 Substrate treatment system
04/05/2012WO2012043039A1 Defect inspecting apparatus and defect inspecting method
04/05/2012WO2012042961A1 Growth method for gan crystal and gan crystal substrate
04/05/2012WO2012042960A1 Cerium-based abrasive
04/05/2012WO2012042909A1 Iii nitride semiconductor light-emitting element, and process for manufacturing same
04/05/2012WO2012042907A1 Method of joining metals
04/05/2012WO2012042869A1 Expandable film, dicing film, and method for producing semiconductor device
04/05/2012WO2012042862A1 Resist pattern forming method, and method for processing base plate using same
04/05/2012WO2012042856A1 Method for producing semiconductor device
04/05/2012WO2012042820A1 Nanoimprinting mold, method of manufacturing thereof, and nanoimprinting method
04/05/2012WO2012042819A1 Pattern forming method, and method for forming metal structure
04/05/2012WO2012042818A1 Pattern forming method
04/05/2012WO2012042817A1 Pattern forming method, substrate manufacturing method, and mold manufacturing method
04/05/2012WO2012042809A1 Electronic component mounting method
04/05/2012WO2012042800A1 Load lock apparatus, exhaust control apparatus, and method of operating load lock apparatus
04/05/2012WO2012042772A1 Thin film manufacturing method and thin film manufacturing apparatus
04/05/2012WO2012042699A1 Semiconductor device and manufacturing method therefor
04/05/2012WO2012042664A1 Soaking apparatus
04/05/2012WO2012042653A1 Method of manufacturing semiconductor device
04/05/2012WO2012042586A1 Integrated circuit
04/05/2012WO2012042500A1 Load stabilization method and apparatus
04/05/2012WO2012042442A1 Semiconductor device with a gate stack
04/05/2012WO2012042370A1 Semiconductor device
04/05/2012WO2012042292A1 Methods for processing a semiconductor wafer, a semiconductor wafer and a semiconductor device
04/05/2012WO2012041836A1 Bipolar non-punch-through power semiconductor device
04/05/2012WO2012041232A1 Fabrication method of metal gates for gate-last process
04/05/2012WO2012041179A1 Igbt structure integrating anti-parallel diode and manufacturing method thereof
04/05/2012WO2012041114A1 Linewidth measuring method
04/05/2012WO2012041087A1 Semiconductor device and method for forming the same
04/05/2012WO2012041071A1 Semiconductor device and manufacturing method thereof
04/05/2012WO2012041064A1 Semiconductor structure and manufacturing method thereof
04/05/2012WO2012041056A1 Semiconductor structure and manufacturing method thereof
04/05/2012WO2012041038A1 Semiconductor device and method for forming strained semiconductor channel
04/05/2012WO2012041037A1 Method for manufacturing semiconductor struture
04/05/2012WO2012041035A1 Flash memory device and forming method thereof
04/05/2012WO2012041034A1 Three dimensional (3d) integrated circuit structure and manufacturing method thereof
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