| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 04/01/2010 | US20100081259 Dislocation engineering using a scanned laser |
| 04/01/2010 | US20100081217 Defect inspection apparatus, defect inspection method, and semiconductor device manufacturing method |
| 04/01/2010 | US20100078579 Extreme ultraviolet light source apparatus |
| 04/01/2010 | US20100078578 Method and arrangement for the operation of plasma-based short-wavelength radiation sources |
| 04/01/2010 | US20100078577 Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method of adjusting laser light source device for extreme ultraviolet light source device |
| 04/01/2010 | US20100078557 Electron beam source and method of manufacturing the same |
| 04/01/2010 | CA2738308A1 Method for producing actinium-225 and isotopes of radium and target for implementing same |
| 03/30/2010 | US7690046 Drive stage for scanning probe apparatus, and scanning probe apparatus |
| 03/30/2010 | US7688950 X-ray diagnostic apparatus |
| 03/30/2010 | US7686511 Angular irradiation in an upright treatment system |
| 03/30/2010 | US7686509 Medical upright positioning device and system |
| 03/25/2010 | WO2010033469A2 Dielectric material treatment saystem and method of operating |
| 03/25/2010 | WO2010012403A3 X-ray target and a method for producing x-rays |
| 03/25/2010 | US20100074400 Radiation imaging and therapy apparatus for breast |
| 03/25/2010 | US20100072406 Glass composition for ultraviolet light and optical device using the same |
| 03/25/2010 | US20100072405 Compact, short-pulse X-ray and T-ray fused source |
| 03/25/2010 | US20100072403 Pattern forming apparatus and pattern forming method |
| 03/24/2010 | EP1316103B1 Large surface area x-ray tube shield structure |
| 03/24/2010 | CN101681689A Radioisotope production system and radioisotope production method |
| 03/24/2010 | CN101678909A Electron beam sterilizer |
| 03/23/2010 | US7683352 Electron beam writing data creating method and electron beam writing data creating apparatus |
| 03/23/2010 | US7683350 Ion implantation method |
| 03/23/2010 | US7683348 Sensor for ion implanter |
| 03/23/2010 | US7682664 Method of forming composite ceramic targets |
| 03/18/2010 | US20100068830 Marker structure and method for controlling alignment of layers of a multi-layered substrate |
| 03/18/2010 | US20100067659 Device and method for immobilizing patients for breast radiation therapy |
| 03/18/2010 | US20100067656 Orthovoltage radiotherapy |
| 03/18/2010 | US20100065758 Dielectric material treatment system and method of operating |
| 03/18/2010 | DE102005043932B4 Anordnung zur UV-Bestrahlung von Flüssigkeiten mit elektrodenloser Strahlungsquelle Arrangement for the UV irradiation of liquids with electrodeless radiation source |
| 03/17/2010 | EP2164307A1 Device and method for adjusting collision timing between electron beam and laser light |
| 03/17/2010 | EP2164306A1 High brightness x-ray generating device and method |
| 03/17/2010 | CN100594428C Radiation source, photoetching device and manufacturing method of device |
| 03/16/2010 | US7681173 Mask data generation method and mask |
| 03/16/2010 | US7679071 Electron beam drawing apparatus |
| 03/16/2010 | US7679068 Method of calculating deflection aberration correcting voltage and charged particle beam writing method |
| 03/16/2010 | US7678458 chuck for use in a lithography apparatus, comprising a low-thermal expansion glass ceramic substrate; a silicon silicon carbide layer; and a bonding layer of silicate having a strength of at least about 5 megapascals, the bonding layer attaching the silicon silicon carbide layer to the substrate |
| 03/11/2010 | WO2010027368A1 Variable-ratio double-deflection beam blanker |
| 03/11/2010 | US20100059694 Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases |
| 03/11/2010 | US20100059692 Electromagnetic systems with double-resonant spiral coil components |
| 03/11/2010 | US20100059686 Tandem accelerator method and apparatus used in conjunction with a charged particle cancer therapy system |
| 03/11/2010 | DE102008046548A1 Belichtungskammer für die Aushärtung strahlungshärtender Beschichtungen Exposure chamber for curing radiation-curable coatings |
| 03/10/2010 | EP2161724A1 Ion beam control apparatus and method |
| 03/09/2010 | US7675049 Sputtering coating of protective layer for charged particle beam processing |
| 03/09/2010 | US7675043 Mesh and method of observing rubber slice technical field |
| 03/09/2010 | US7675034 Charged particle instrument equipped with optical microscope |
| 03/04/2010 | US20100051832 Extreme ultraviolet light source apparatus |
| 03/04/2010 | US20100051828 Processing system |
| 03/04/2010 | US20100051827 Method of cleaning optical surfaces of an irradiation unit in a two-step process |
| 03/04/2010 | US20100051805 Ion beam stabilization |
| 03/03/2010 | CN201417628Y Double-track trolley irradiation device |
| 03/03/2010 | CN201417627Y Source-passing synchronization migration machine for irradiation device |
| 03/02/2010 | US7671347 Cleaning method, apparatus and cleaning system |
| 03/02/2010 | US7670893 Membrane IC fabrication |
| 02/25/2010 | US20100044890 Semiconductor substrate manufacture apparatus, semiconductor substrate manufacture method, and semiconductor substrate |
| 02/25/2010 | US20100044598 Terahertz Laser Components And Associated Methods |
| 02/25/2010 | US20100044597 Terahertz wave generating device and apparatus using the same |
| 02/25/2010 | US20100044596 Image exposing method and apparatus |
| 02/25/2010 | US20100044592 Serial irradiation of a substrate by multiple radiation sources |
| 02/25/2010 | US20100044591 Radiation source, lithographic apparatus and device manufacturing method |
| 02/25/2010 | US20100044590 Laser processing method |
| 02/25/2010 | US20100044578 Charged Particle Beam Lithography System and Target Positioning Device |
| 02/25/2010 | US20100043729 Atmospheric electron particle beam generator |
| 02/24/2010 | EP2155932A2 Method for the production of an optical element by means of a molding process, optical element produced according to said method, collector, and lighting system |
| 02/23/2010 | US7669174 Pattern generation method and charged particle beam writing apparatus |
| 02/23/2010 | US7668292 Patient setup error evaluation and error minimizing setup correction in association with radiotherapy treatment |
| 02/23/2010 | US7665249 Shielded structure for radiation treatment equipment and method of assembly |
| 02/18/2010 | WO2010018621A1 Bonding device and maintenance method of bonding device |
| 02/18/2010 | US20100039632 Radiation source, lithographic apparatus and device manufacturing method |
| 02/18/2010 | US20100039631 Radiation sources and methods of generating radiation |
| 02/18/2010 | US20100038562 Radiation source, lithographic apparatus and device manufacturing method |
| 02/18/2010 | US20100038557 Addressable transmission electron microscope grid |
| 02/17/2010 | CN201408560Y Gamma irradiation device |
| 02/17/2010 | CN201408468Y Smoke alarm installation structure and irradiation system |
| 02/16/2010 | US7663125 Ion beam current uniformity monitor, ion implanter and related method |
| 02/16/2010 | US7662705 Partial implantation method for semiconductor manufacturing |
| 02/16/2010 | US7661881 Systems and methods for imaging large field-of-view objects |
| 02/11/2010 | US20100032588 Writing apparatus and writing method |
| 02/04/2010 | WO2010014096A1 Fluid transfer for radiation treatment apparatus |
| 02/04/2010 | WO2010012403A2 X-ray target and a method for producing x-rays |
| 02/04/2010 | US20100025597 Ion implanting device and method |
| 02/04/2010 | US20100025594 Neutron Moderator, Neutron Irradiation Method, and Hazardous Substance Detection Apparatus |
| 02/04/2010 | DE102008013607B3 Quecksilberfreie Metallhalogenid-Hochdruckentladungslampe Mercury-free metal halide high-pressure discharge lamp |
| 02/03/2010 | EP2149500A1 Electron beam sterilizer |
| 02/03/2010 | CN201397691Y High temperature irradiation box for irradiation of electron accelerator |
| 02/03/2010 | CN101641748A Device and method for immobilizing patients for breast radiation therapy |
| 02/03/2010 | CN101640077A Dual-rail variable speed device of irradiating trolley |
| 02/03/2010 | CN101640076A Irradiating device of dual-rail trolley |
| 02/03/2010 | CN100588305C Method for forming plasma |
| 02/02/2010 | US7657863 Pattern area value calculating method, proximity effect correcting method, and charged particle beam writing method and apparatus |
| 02/02/2010 | US7655931 Techniques for improving the performance and extending the lifetime of an ion source with gas mixing |
| 02/02/2010 | US7655929 Ion beam measuring method and ion implanting apparatus |
| 02/02/2010 | US7655905 Charged particle beam equipment |
| 01/27/2010 | EP1483565B1 Apparatus and method for making and inspecting pre-fastened articles |
| 01/27/2010 | CN201392672Y Retainer |
| 01/27/2010 | CN201392572Y Alarm device for container |
| 01/27/2010 | CN101635176A Novel radiation trolley |
| 01/27/2010 | CN101635175A Single-roll two-way traction piece material and thin film radiating device |
| 01/26/2010 | US7653176 Inspection system with material identification |
| 01/26/2010 | CA2490748C Apparatus and method for radiation therapy where the collimatorhelmet comprises slidable plates for controlling the collimator openings |
| 01/21/2010 | WO2010006736A1 Irradiation system for ion beam scanning of moving targets |