| Patents for G21K 5 - Irradiation devices (9,144) |
|---|
| 06/02/2010 | CN1739066B Electron beam processing technology for mask repair |
| 06/01/2010 | USRE41362 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 06/01/2010 | US7728313 Maskless lithography system and method using optical signals |
| 06/01/2010 | US7728312 Apparatus and method for partial ion implantation |
| 06/01/2010 | US7728284 Method of manipulating nanosize objects and utilization thereof |
| 06/01/2010 | US7727853 Processing method, manufacturing method of semiconductor device, and processing apparatus |
| 06/01/2010 | US7727681 regeneration transmission to quartz substrate doped with gallium; using etching gas; radiation transparent; controlling thickness; photolithography |
| 05/27/2010 | WO2010059210A2 Systems and methods for drive laser beam delivery in an euv light source |
| 05/27/2010 | WO2010058863A1 Signal processing device, signal processing method, signal processing program, computer-readable recording medium on which is recorded a signal processing program, and radiation therapy device |
| 05/27/2010 | US20100128847 X-ray induced wettability modification |
| 05/27/2010 | US20100127191 Systems and methods for drive laser beam delivery in an euv light source |
| 05/27/2010 | US20100127189 Computer peripherals sterilization system |
| 05/27/2010 | US20100127188 Biomarker Generator |
| 05/27/2010 | US20100127186 Laser produced plasma EUV light source |
| 05/27/2010 | US20100127169 Compact, interleaved radiation sources |
| 05/27/2010 | CA2744005A1 Signal processing apparatus, signal processing method, signal processing program, computer-readable recording medium storing signal processing program, and radiotherapy apparatus |
| 05/26/2010 | CN201489845U Combined operation platform of underwater inversed source |
| 05/26/2010 | CN201489844U Operating platform for conducting upside-down mounting operation on source storage well of gamma irradiation device |
| 05/26/2010 | CN1922696B Electron beam irradiation device |
| 05/26/2010 | CN1638015B Improvements relating to ion implantation |
| 05/26/2010 | CN1637620B Exposure processing system, exposure processing method and method for manufacturing a semiconductor device |
| 05/26/2010 | CN1618402B Systems and methods for reducing radiation dosage |
| 05/26/2010 | CN1577722B Image correcting method ,system and mask, semiconductor producing method and semiconductor device |
| 05/26/2010 | CN101713920A 半导体器件 Semiconductor devices |
| 05/25/2010 | US7723701 Specimen preservation systems and methods |
| 05/25/2010 | US7723697 Techniques for optical ion beam metrology |
| 05/20/2010 | US20100123090 Electron beam sterilizer |
| 05/20/2010 | US20100123086 Extreme ultraviolet light source device |
| 05/20/2010 | DE102009014079B3 Verfahren zur Herstellung eines Carbonbandes für einen Carbonstrahler, Verfahren zur Herstellung eines Carbonstrahlers sowie Carbonstrahler A method for producing a carbon strip for a carbon emitters, process for producing a carboxylic radiator and carbon emitters |
| 05/19/2010 | CN201477908U Double-rail speed changing device of irradiation trolley |
| 05/13/2010 | US20100117009 Extreme ultraviolet light source device and control method for extreme ultraviolet light source device |
| 05/13/2010 | US20100117008 Particle attachment preventing method and substrate processing apparatus |
| 05/13/2010 | US20100117007 System and method for separating micro-particles |
| 05/13/2010 | US20100117001 Simultaneous measurement of beams in lithography system |
| 05/13/2010 | US20100116983 Mass analysis magnet for a ribbon beam |
| 05/12/2010 | DE112008001701T5 Photoneutronenumwandlungstarget und Photoneutronen-Röntgenquelle Photo neutron transmutation target and photoneutron X-ray source |
| 05/12/2010 | CN201465583U Safe leading-out device of electron beam |
| 05/11/2010 | US7714308 Variable shaped electron beam lithography system and method for manufacturing substrate |
| 05/11/2010 | US7714306 Lithographic apparatus and device manufacturing method |
| 05/06/2010 | WO2010049071A1 Irradiation of at least two target volumes |
| 05/06/2010 | US20100108918 Extreme ultraviolet light source apparatus |
| 05/05/2010 | EP2181450A1 Quick regulation of the range of high-energy ion beams for precision irradiation of moving target volumes |
| 05/05/2010 | CN1829945B Modulator circuit |
| 05/05/2010 | CN1649643B Method for performing in vivo dosimetry |
| 05/04/2010 | US7712056 Characterization and verification for integrated circuit designs |
| 05/04/2010 | US7710634 Pattern generator |
| 05/04/2010 | US7709817 Ion beams in an ion implanter |
| 05/04/2010 | US7709816 Systems and methods for monitoring and controlling the operation of extreme ultraviolet (EUV) light sources used in semiconductor fabrication |
| 05/04/2010 | US7709815 Lithography system and projection method |
| 05/04/2010 | US7709814 Apparatus and process for treating dielectric materials |
| 04/29/2010 | US20100102255 Method of transferring pattern of reticle, computer readable storage medium, and method of manufacturing device |
| 04/29/2010 | US20100102254 Electron beam apparatus |
| 04/29/2010 | US20100102248 Transmission Electron Microscope Sample Holder with Optical Features |
| 04/28/2010 | CN201444407U Industrial X-ray and high-energy electronic accelerator composite lighting supporting system |
| 04/28/2010 | CN201441756U Translation target KV/MV coaxial double-beam ray source device |
| 04/27/2010 | US7707541 Systems, masks, and methods for photolithography |
| 04/27/2010 | US7705330 Electron beam irradiation device |
| 04/27/2010 | US7705328 Broad ribbon beam ion implanter architecture with high mass-energy capability |
| 04/27/2010 | US7705323 Microscope stage with flexural axis |
| 04/27/2010 | US7705321 Charged particle beam writing apparatus and method |
| 04/27/2010 | US7705300 Charged particle beam adjusting method and charged particle beam apparatus |
| 04/22/2010 | US20100097593 EUV light source, EUV exposure apparatus, and electronic device manufacturing method |
| 04/22/2010 | US20100097013 Countertop decontaminating device |
| 04/22/2010 | US20100096565 Glass composition for ultraviolet light and optical device using the same |
| 04/22/2010 | US20100096564 Ultraviolet reflector with coolant gas holes and method |
| 04/22/2010 | US20100096557 Collector optical system |
| 04/22/2010 | DE112007003536T5 Ladungsteilchenstrahl-Untersuchungsgerät und einen Ladungsteilchenstrahl verwendendes Untersuchungsverfahren A charged particle inspection apparatus and a charged-use test methods |
| 04/21/2010 | CN201440340U Electron beam irradiation window |
| 04/20/2010 | US7700931 Ion beam processing apparatus |
| 04/20/2010 | US7700930 Lithographic apparatus with rotation filter device |
| 04/15/2010 | WO2010040454A1 Control method for electron beam sterilizing device and device performing said method |
| 04/15/2010 | WO2010040453A1 Switchable electron beam sterilizing device |
| 04/15/2010 | US20100094383 Irradiation device by modulated photonic energy radiation |
| 04/15/2010 | US20100092889 Mandrel |
| 04/15/2010 | US20100092113 Static pressure slider and transferring device and processing device provided with the same |
| 04/15/2010 | US20100091948 Patient immobilization and repositioning method and apparatus used in conjunction with charged particle cancer therapy |
| 04/15/2010 | US20100091941 Multi-reflection optical systems and their fabrication |
| 04/15/2010 | US20100090133 Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light |
| 04/15/2010 | US20100090132 Extreme ultraviolet light source apparatus |
| 04/15/2010 | US20100090131 Method of determining angle misalignment in beam line ion implanters |
| 04/15/2010 | US20100090129 Apparatus and method for the prevention of infestation inside a volume of interest |
| 04/15/2010 | US20100090124 Method and Apparatus for Irradiating Fluids |
| 04/15/2010 | US20100090108 Method and Apparatus for Producing Samples for Transmission Electron Microscopy |
| 04/15/2010 | US20100090107 Method and handling apparatus for placing patterning device on support member for charged particle beam imaging |
| 04/14/2010 | EP1354325B1 Collector with an unused area for lighting systems having a wavelength inferior or equal of 193 nm |
| 04/14/2010 | CN201438382U 电子束照射装置 Electron beam irradiation apparatus |
| 04/13/2010 | USRE41220 Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements |
| 04/13/2010 | US7696499 Modular patient support system |
| 04/08/2010 | WO2010039945A2 Ultraviolet curing apparatus for continuous material |
| 04/08/2010 | US20100087687 Processing biomass |
| 04/08/2010 | US20100086441 Beam radiating device, bio-chemical analyzer including the beam radiating device, and bio-chemical analyzing system including the bio-chemical analyzer |
| 04/08/2010 | US20100086095 Radioisotope manufacturing apparatus and radioisotope manufacturing method |
| 04/08/2010 | US20100084980 Plasma uniformity control using biased array |
| 04/08/2010 | US20100084579 Fluid delivery mechanism for vacuum wafer processing system |
| 04/08/2010 | US20100084574 Ultraviolet curing apparatus for continuous material |
| 04/07/2010 | EP2171724A1 Higher pressure, modular target system for radioisotope production |
| 04/07/2010 | CN201436259U 自动装卸系统 Automatic loading and unloading systems |
| 04/07/2010 | CN101692354A Source transshipment operating method and operating platform on reservoir well of gamma irradiation device |
| 04/06/2010 | US7692165 Charged particle beam device with a gas field ion source and a gas supply system |
| 04/06/2010 | US7691541 Additive and subtractive correction using direct write nanolithography; fine control over lateral dimensions and height |