Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
03/1993
03/11/1993DE4229816A1 Radiation sensitive compsn. for photoresist in accurate UV and X=ray process - contg. modified maleic anhydride] polymer and acid forming agent with high resolution and sensitivity for highly integrated circuit prodn.
03/11/1993DE4129439A1 Heat-resistant structurised epoxide] resin or polymer film prodn. - by exposing substrate with resin adduct of olefinically unsatd. mono:isocyanate through negative original and baking
03/11/1993CA2094593A1 Printing plate and methods of making and using same
03/10/1993EP0531259A1 Photoimageable polyimide
03/10/1993EP0531102A1 Aligner and exposure method for manufacturing semiconductor device
03/10/1993EP0531066A1 Sor exposure system and method of manufacturing semiconductor device using same
03/10/1993EP0531019A1 Photosensitive polyimide precursor compositions and process for preparing same
03/10/1993EP0530962A1 Anti-blocking, water soluble top coat for color proofing films
03/10/1993EP0530957A1 A lithographic printing plate precursor of direct image type
03/10/1993EP0530849A2 Fine pattern forming material and pattern forming method
03/10/1993EP0530815A1 Presensitized plate for use in making lithographic printing plate
03/10/1993EP0530798A1 Mixture of dyes for black dye donor for thermal color proofing
03/10/1993EP0530674A1 Plate blank, process for producing printing plate from plate blank, and printing method and apparatus using plate
03/10/1993EP0530613A1 Image forming element with a photopolymerizable monomer
03/10/1993EP0530469A1 Process for the preparation of organic compounds carrying tert.-butoxycarbonyl groups
03/09/1993US5192869 Device for controlling beams of particles, X-ray and gamma quanta
03/09/1993US5192643 Pattern-forming method and radiation resist for use when working this pattern-forming method
03/09/1993US5192642 Oxygen-containing titanocenes, and the use thereof
03/09/1993US5192640 Nitrosation, sulfonation, reduction, oxidation, diazotization, and salt formation
03/09/1993US5192639 Light-sensitive material containing silver halide, reducing agent, polymerizable compound and chromium molybdenum or tungsten compound
03/06/1993CA2077525A1 Photoimageable polyimide
03/04/1993WO1993004521A1 Linear actuator control system for platform stabilization
03/04/1993WO1993004406A1 Double-layer resist and method of and device for making said resist
03/04/1993WO1993004401A1 Silver image bleaching solution and process
03/04/1993WO1993003927A1 A hard copy imaging system
03/04/1993DE4226691A1 Imaging with light-sensitive resin and pigment using specified developer - contg. glycol or polyether glycol mono: or di:sulphate to minimise fogging
03/04/1993DE4128964A1 Defined adhesive area prodn. esp. for micro-mechanics or integrated sensor - using photoresist adhesive soln. of lacquer, photosensitive cpd. and hardener, etc.
03/04/1993DE4128796A1 Electron beam negative resist developed by aq. alkali - contg. 4-halophenol novolak and poly:cyclic partly hydrogenated triazine deriv. as crosslinker
03/03/1993EP0530148A1 Positive photo resist with increased dissolving power and reduced crystallisation tendency as well as new tetra(hydroxyphenyl)alkane
03/03/1993EP0530095A1 Improved sensitization of photopolymerizable compositions
03/03/1993EP0529971A1 High resolution printing technique by using a mask pattern adapted to the technique
03/03/1993EP0529970A1 Novolak resin compositions with high Tg and high sensitivity for photoresist applications
03/03/1993EP0529969A1 Novolak resin compositions with high Tg and high sensitivity for photoresist applications
03/03/1993EP0529944A1 Method and apparatus for aligning phototools for photoprocessing of printed circuit board panels
03/03/1993EP0529896A1 Light-sensitive article containing migration-resistant halomethyl-1,3,5-triazine photoinitiator
03/03/1993EP0529827A1 Process and apparatus for controllably separating framed working area from remainder of the membrane
03/03/1993EP0529826A1 Optical pellicle holder
03/03/1993EP0529789A1 Negative single sheet color proofing system based on aqueous developable photo-oligomers
03/03/1993EP0529697A1 Stripping film material
03/03/1993EP0529643A1 Aqueous-developable dry film photoresist
03/03/1993EP0529537A1 Intermediate receiver cushion layer
03/03/1993EP0529459A1 Dry film process for altering the wavelength of response of holograms
03/03/1993EP0529438A1 Apparatus for separating and peeling a foil from a laminated carrier material
03/03/1993EP0529362A1 Method of making thermally transferred color filter arrays with incorporated black matrix using electronic light flash
03/03/1993EP0529361A1 Radiation-curing resin composition
03/03/1993EP0528969A1 Unit magnification optical system with improved reflective reticle
03/03/1993EP0528791A1 Step and repeat camera/projector machine
03/02/1993US5191535 Mask control system
03/02/1993US5191374 Exposure control apparatus
03/02/1993US5191218 Vacuum-attraction holding device
03/02/1993US5191200 Imaging apparatus having a focus-error and/or tilt detection device
03/02/1993US5191124 Photoinitiators for Cationic Polymerization
03/02/1993US5191069 Polyfunctional compounds containing α-diazo-β-keto ester units and sulfonate units
03/02/1993US5190845 Coloring transparent substrates
03/02/1993US5190836 Reflection type photomask with phase shifter
03/02/1993US5190637 Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
03/02/1993US5190614 Electromagnetic radiation to measure processing, detection windows
03/01/1993CA2076727A1 Alkaline-etch resistant dry film photoresist
02/1993
02/28/1993CA2076601A1 Dry film process for altering the wavelength of response of holograms
02/27/1993CA2070354A1 Sensitization of photopolymerizable compositions
02/24/1993EP0528785A1 Ion optical imaging system
02/24/1993EP0528655A2 Dry-etching method and apparatus
02/24/1993EP0528401A1 Positive resist composition
02/24/1993EP0528395A1 Presensitized plate for use in making lithographic printing plate
02/24/1993EP0528373A1 Apparatus for peeling off a film, laminated to a carrier-material
02/24/1993EP0528285A1 Method and apparatus for patterning an imaging member
02/24/1993EP0528203A1 Radiation-sensitive composition containing a polymeric binder having units of alpha,beta-unsaturated carboxamides
02/23/1993US5189306 Grey-splice algorithm for electron beam lithography post-processor
02/23/1993US5188924 Pattern forming method utilizing material with photoresist film underlayer and contrast enhancement overlayer containing photosensitive diazonium salt
02/23/1993US5188921 Selected block copolymer novolak binder resins in radiation-sensitive resist compositions
02/23/1993US5188920 Positive resist composition containing 1,2-quinone diazide compound, alkali-soluble resin and polyhydroxy phenol additive compound
02/22/1993CA2076357A1 Positive resist composition
02/18/1993WO1993003423A1 Photosensitive resin composition, production thereof, and flexographic plate material
02/18/1993DE4125534A1 Three=dimensional layering - in which transparent sealed cover is used over bath to allow radiation through but exclude ambient atmos.
02/17/1993EP0527607A1 Electron beam exposure process for writing a pattern on an object by an electron beam with a compensation of the proximity effect
02/17/1993EP0527572A1 Formation of benzocyclobutene resin films
02/17/1993EP0527521A1 A silver halide photographic material
02/17/1993EP0527369A1 Radiation-sensitive recording material comprising a layer support and a positive-working radiation-sensitive layer having a grained surface
02/17/1993EP0527166A1 Illumination device.
02/16/1993US5187726 High resolution X-ray lithography using phase shift masks
02/16/1993US5187519 Exposure apparatus having mount means to suppress vibrations
02/16/1993US5187413 Low pressure discharge lamp apparatus
02/16/1993US5187241 Reaction of hydrolyzed polyimide surface (polyamic acids) with an acyl chloride to produce polyisoimides
02/16/1993US5187048 Photoresists formed by polymerization of di-unsaturated monomers
02/16/1993US5187045 Halomethyl-1,3,5-triazines containing a sensitizer moiety
02/16/1993US5187044 Aziridine compound containing primer layer, radiation curable polyurethane elastomer
02/16/1993US5187041 Using a photosensitive silver halide, organic silver salt, reducing agent and photopolymerizable monomer
02/16/1993US5187040 Photocurable mixture and material containing diazonium salt polycondensation product or organic azido compound photosensitizer and polyurethane binder grafted with vinyl alcohol and vinyl acetal units
02/16/1993US5186801 Forming a transparent, electroconductive layer on a substrate, electrodepositing a negative photosensitive resin layer, exposing to light through a mask developing and repeating for each color
02/16/1993US5186788 Coating a semiconductor substrate with a high molecular weight organic resist then a developer insoluble positive resist, irradiation such that positive resist becomes soluble, exposing positive resist to electron or focused ion beam
02/16/1993US5186787 Depositing releasable hard coating on carrier, depositing vacuum coating on the hardcoat, etching image, removing vacuum deposited coating
02/11/1993DE4203557A1 Resist pattern coating on substrate by deep UV lithography - comprises coating substrate with anti-reflection coating contg. new organo:silane cpd., applying resist, and selectively exposing
02/11/1993DE4126514A1 Cleaning appts. for printed circuit board - feeds board by roller pairs through spray generated by nozzles, with fluid collected in container
02/10/1993EP0527058A1 Apparatus for controlling a developing solution
02/10/1993EP0527043A1 Catadioptric reduction projection optical system
02/10/1993EP0527018A1 Method and apparatus for measuring positional deviation
02/10/1993EP0527008A1 Curable silicone composition
02/10/1993EP0526902A1 Process for producing multicolor display
02/10/1993EP0526867A1 Process for making a cylindrical embossing tool
02/10/1993EP0526650A1 Photosensitive polymer composition and pattern formation