| Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810) |
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| 04/18/2006 | US7030991 Field condensing imaging system for remote sensing of atmospheric trace gases |
| 04/18/2006 | US7030990 Controlled interference spectrometer |
| 04/18/2006 | US7030971 Natural fiber span reflectometer providing a virtual signal sensing array capability |
| 04/13/2006 | WO2006038876A1 A method and a system for generating three- or two-dimensional images |
| 04/13/2006 | WO2005106593A3 Method and apparatus for measurement of exit pupil transmittance |
| 04/13/2006 | US20060077397 Semiconductor fabricating apparatus with function of determining etching processing state |
| 04/13/2006 | US20060077394 Temperature measuring apparatus, temperature measurement method, temperature measurement system, control system and control method |
| 04/13/2006 | US20060077393 System and method for implementation of interferometric modulator displays |
| 04/13/2006 | US20060077378 Optical system for automatic lens meter |
| 04/12/2006 | EP1645910A1 Lithographic apparatus and position measuring method |
| 04/12/2006 | EP1645837A1 Device for the measurement of a displacement of an object using a self-mixing technique |
| 04/12/2006 | EP1644697A2 System and method for low coherence broadband quadrature interferometry |
| 04/12/2006 | EP1588122A4 Single point laser measurement reference |
| 04/12/2006 | EP1285221B1 In-situ mirror characterization |
| 04/12/2006 | CN2771816Y Large-shearing electronic speckle interfering instrument |
| 04/12/2006 | CN1759296A Full-filled optical measurements of surface properties of panels, substrates and wafers |
| 04/12/2006 | CN1758140A Lithographic apparatus and position measuring method |
| 04/12/2006 | CN1758015A Reflection multilight bean confocal interference microscope having several tens nanometer lateral discriminability |
| 04/12/2006 | CN1758014A Interferometer systems for measuring displacement and exposure systems using the same |
| 04/11/2006 | US7027223 Optical element that is adjustable for optimizing extinction ratios |
| 04/11/2006 | US7027164 Speckle reduction method and system for EUV interferometry |
| 04/11/2006 | US7027163 sensor includes first and second periodic diffraction gratings superimposed and shifted laterally relative to each other by distance of less than one period, such that illumination from source is affected by both gratings before reaching detector; fast, accurate |
| 04/11/2006 | US7027162 System and method for three-dimensional measurement |
| 04/11/2006 | US7027161 Adaptive optical system with self-referencing contrast control |
| 04/11/2006 | US7027144 Fluid dispenser and lens inspection device |
| 04/11/2006 | US7025800 Determination diffusion rate of sample into polymer; measuring optical waveguide interference; calibration |
| 04/11/2006 | US7025498 System and method of measuring thermal expansion |
| 04/06/2006 | WO2006036716A1 Phase-resolved measurement for frequency-shifting interferometry |
| 04/06/2006 | WO2006017702A3 Virtual sensor array optical fiber system |
| 04/06/2006 | WO2006001712A3 Non-destructive testing of materials |
| 04/06/2006 | US20060072204 Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces |
| 04/06/2006 | US20060072118 Optical image measuring apparatus |
| 04/06/2006 | US20060072104 Method for determining the image quality of an optical imaging system |
| 04/06/2006 | DE102004045808A1 Optische Messvorrichtung zur Vermessung von mehreren Flächen eines Messobjektes Optical measuring apparatus for measuring a plurality of surfaces of a measurement object |
| 04/06/2006 | DE102004045807A1 Optische Messvorrichtung zur Vermessung von gekrümmten Flächen The optical measuring device for measuring curved surfaces |
| 04/06/2006 | DE102004045806A1 Interferometer mit einer Spiegelanordnung zur Vermessung eines Messobjektes Interferometer with a mirror arrangement for measuring a DUT |
| 04/05/2006 | EP1643236A2 Optical image measuring apparatus |
| 04/05/2006 | CN1249401C Method and apparatus for wall film monitoring |
| 04/04/2006 | US7023563 Interferometric optical imaging and storage devices |
| 04/04/2006 | US7023562 Characterization of period variations in diffraction gratings |
| 04/04/2006 | US7023561 Exposure apparatus with interferometer |
| 04/04/2006 | US7023560 Method and apparatus for dark field interferometric confocal microscopy |
| 04/04/2006 | US7023559 Method and system for measuring the relief of an object |
| 04/04/2006 | US7023558 Acousto-optic monitoring and imaging in a depth sensitive manner |
| 04/04/2006 | US7023557 Parallel interferometric measurements using an expanded local oscillator signal |
| 04/04/2006 | US7023556 Method and apparatus for measurement of group delay |
| 04/04/2006 | US7022978 Method and apparatus including in-resonator imaging lens for improving resolution of a resonator-enhanced optical system |
| 03/30/2006 | WO2005124275A3 Improved wavefront sensor using hybrid optical/electronic heterodyne techniques |
| 03/30/2006 | WO2005124274A3 Calibrating method, measuring method, optical measuring device and operating method for a transmitter arrangement |
| 03/30/2006 | US20060066876 Method and system for sensing light using interferometric elements |
| 03/30/2006 | US20060066875 Vibration sensor utilizing a feedback stabilized fabry-perot filter |
| 03/30/2006 | US20060066868 Detector configurations for optical metrology |
| 03/30/2006 | US20060066867 Photonic crystal interferometer |
| 03/30/2006 | US20060066866 Mach Zehnder photonic crystal sensors and methods |
| 03/30/2006 | US20060066865 Optical tomographic image obtaining apparatus |
| 03/30/2006 | US20060066864 Process control monitors for interferometric modulators |
| 03/30/2006 | US20060066863 Electro-optical measurement of hysteresis in interferometric modulators |
| 03/30/2006 | US20060066841 Method and system for reconstructing aberrated image profiles through simulation |
| 03/30/2006 | DE102004045802A1 Interferometrisches System mit Referenzfläche mit einer verspiegelten Zone Interferometric system with reference surface with a mirrored zone |
| 03/29/2006 | EP1639331A2 Measurements of optical inhomogeneity and other properties in substances using propagation modes of light |
| 03/29/2006 | CN1752712A Light intensity ratio adjustment filter for an interferometer, interferometer, and light interference measurement method |
| 03/29/2006 | CN1248377C 气体激光器和光学系统 Gas laser and the optical system |
| 03/29/2006 | CN1247954C Tilt adjustment equipment, loop clamping equipment, interferometer for the above equipment |
| 03/28/2006 | US7019847 Ring-interferometric sol-gel bio-sensor |
| 03/28/2006 | US7019846 Method for determining wavefront aberrations |
| 03/28/2006 | US7019845 Measuring elastic moduli of dielectric thin films using an optical metrology system |
| 03/28/2006 | US7019844 Method for in-situ monitoring of patterned substrate processing using reflectometry. |
| 03/28/2006 | US7019843 Method and apparatus for stage mirror mapping |
| 03/28/2006 | US7019842 Position measuring device |
| 03/28/2006 | US7019841 System and method for inspecting a component using interferometry |
| 03/28/2006 | US7019840 Dual-beam interferometer for ultra-smooth surface topographical measurements |
| 03/28/2006 | US7019839 Optical analyzer and method for measuring spectral amplitude and phase of input optical signals using heterodyne architecture |
| 03/28/2006 | US7019838 System and method for low coherence broadband quadrature interferometry |
| 03/28/2006 | US7019837 Method and apparatus for reducing crosstalk interference in an inline Fabry-Perot sensor array |
| 03/28/2006 | US7019836 Position detection method and apparatus, and exposure method and apparatus |
| 03/28/2006 | US7019824 Moire method and measuring system for measuring the distortion of an optical imaging system |
| 03/28/2006 | US7019815 Off-axis leveling in lithographic projection apparatus |
| 03/28/2006 | CA2368272C Apparatus for measuring physical properties of a sample |
| 03/23/2006 | US20060063986 Concurrent scanning non-invasive analysis system |
| 03/23/2006 | US20060063985 Multiple reference non-invasive analysis system |
| 03/23/2006 | US20060061771 Compensation for effects of beam misalignments in interferometer metrology systems |
| 03/23/2006 | US20060061770 Heterodyning time resolution boosting method and system |
| 03/23/2006 | US20060061769 Homodyne based optical coherence microscope |
| 03/23/2006 | US20060061768 Optical sensor using low-coherence interferometry |
| 03/23/2006 | US20060061757 Method of calculating two-dimensional wavefront aberration |
| 03/23/2006 | US20060061756 Exposure method for correcting a focal point, and a method for manufacturing a semiconductor device |
| 03/23/2006 | DE102005017306A1 Gewünschte Strahlmuster erzeugende Differenzinterferometer Desired beam pattern generating differential interferometer |
| 03/22/2006 | EP1637834A2 Apparatus and method of heterodyne interferometry for imaging |
| 03/22/2006 | EP1540271B1 Method for measuring contour variations |
| 03/22/2006 | EP1332331A4 Interferometric sensor and method to detect optical fields |
| 03/22/2006 | CN1246666C Sampler inclination measuring method |
| 03/21/2006 | US7016051 Reticle focus measurement system using multiple interferometric beams |
| 03/21/2006 | US7016050 Microscope with fixed-element autocollimator for tilt adjustment |
| 03/21/2006 | US7016049 Alignment apparatus, control method therefor, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method |
| 03/21/2006 | US7016048 Phase-resolved functional optical coherence tomography: simultaneous imaging of the stokes vectors, structure, blood flow velocity, standard deviation and birefringence in biological samples |
| 03/21/2006 | US7016047 Active Q-point stabilization for linear interferometric sensors |
| 03/21/2006 | US7016046 Interferometer arrangement and interferometric measuring method |
| 03/21/2006 | US7016025 Method and apparatus for characterization of optical systems |
| 03/21/2006 | US7015906 Method and arrangement for imaging and measuring microscopic three-dimensional structures |
| 03/16/2006 | WO2005033619A3 Robust heterodyne interferometer optical gauge |