| Patents for G01B 9 - Instruments as specified in the subgroups and characterised by the use of optical measuring means (14,810) |
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| 03/16/2006 | US20060058682 Method and apparatus for improving both lateral and axial resolution in ophthalmoscopy |
| 03/16/2006 | US20060056784 Coherence microscope |
| 03/16/2006 | US20060056468 Control system and apparatus for use with ultra-fast laser |
| 03/16/2006 | US20060055940 Phase measuring method and apparatus for measuring characterization of optical thin films |
| 03/16/2006 | US20060055937 Multi-beam heterodyne laser Doppler vibrometer |
| 03/16/2006 | US20060055936 System and method for optical coherence imaging |
| 03/16/2006 | US20060055935 Wavelength dispersive fourier transform spectrometer |
| 03/16/2006 | US20060055915 Measuring apparatus, test reticle, exposure apparatus and device manufacturing method |
| 03/16/2006 | DE4204601B4 Vorrichtung zum Erfassen von Lageinformationen mit einer optischen Beobachtungseinheit und Verfahren zur Ermittlung von Lageinformationen An apparatus for detecting position information with an optical viewing unit and method for determining location information |
| 03/16/2006 | DE102004038239A1 Luftfeder mit integrierter optischer Höhenstandssensorik Air suspension with integrated optical ride height sensors |
| 03/16/2006 | DE102004038186A1 Verfahren zum Vermessen von Oberflächen mittels einer interferometrischen Anordnung Method for measuring surfaces using an interferometric arrangement |
| 03/15/2006 | EP1635137A1 Optical device for studying an object |
| 03/15/2006 | EP1634035A2 Interferometric measuring device |
| 03/15/2006 | CN1746616A Optical signall processor and process thereof |
| 03/15/2006 | CN1245605C Device for measuring 2D displacement |
| 03/14/2006 | US7012939 Wavelength stabilization module having light-receiving element array and method of manufacturing the same |
| 03/14/2006 | US7012700 Interferometric optical systems having simultaneously scanned optical path length and focus |
| 03/14/2006 | US7012698 Method and arrangement for contactless determination of geometric and optical characteristics |
| 03/14/2006 | US7012697 Heterodyne based optical spectrum analysis with controlled optical attenuation |
| 03/14/2006 | US7012696 Optical heterodyne detection in optical cavity ringdown spectroscopy |
| 03/14/2006 | US7012695 Method and apparatus for multiwavelength imaging spectrometer |
| 03/14/2006 | US7012245 Calculation of sensor array induced phase angle |
| 03/14/2006 | CA2316984C Spectral imaging apparatus and methodology |
| 03/09/2006 | WO2006025759A1 Interferometric device (variants) |
| 03/09/2006 | WO2005114150B1 Low coherence interferometric system for optical metrology |
| 03/09/2006 | WO2005114149B1 Low coherence interferometry utilizing phase |
| 03/09/2006 | WO2005031397A3 Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces |
| 03/09/2006 | WO2005008199A3 Method and apparatus for compact fabry-perot imaging spectrometer |
| 03/08/2006 | EP1631788A1 Digital holographic microscope for 3d imaging and process using it |
| 03/08/2006 | EP1502332B1 Optical arrangement for generating a broadband spectrum |
| 03/08/2006 | EP0963540B1 System and method for laser ultrasonic bond integrity evaluation |
| 03/08/2006 | CN1743793A Holographic phase difference amplifying restructuring device based on sagnac interferometer |
| 03/08/2006 | CN1743792A Interferometer for measuring virtual contact surfaces |
| 03/07/2006 | US7009716 System for monitoring optical output/wavelength |
| 03/07/2006 | US7009715 Method and apparatus for determining endpoint of semiconductor element fabricating process and method and apparatus for processing member to be processed |
| 03/07/2006 | US7009714 Method of dry etching a sample and dry etching system |
| 03/07/2006 | US7009713 Optical position measuring system using an interference pattern |
| 03/07/2006 | US7009712 Leaky guided wave modes used in interferometric confocal microscopy to measure properties of trenches |
| 03/07/2006 | US7009711 Retroreflector coating for an interferometer |
| 03/07/2006 | US7009710 Direct combination of fiber optic light beams |
| 03/07/2006 | US7009709 Active control of two orthogonal polarizations for heterodyne beam delivery |
| 03/07/2006 | US7009708 Symmetric periscope for concentric beam configuration in an ultra-high precision laser interferometric beam launcher |
| 03/07/2006 | US7009707 Apparatus and method of sensing fluid flow using sensing means coupled to an axial coil spring |
| 03/07/2006 | US7009691 System and method for removing the relative phase uncertainty in device characterizations performed with a polarimeter |
| 03/02/2006 | WO2006023634A2 Multiple reference non-invasive analysis system |
| 03/02/2006 | WO2006023614A2 Frequency resolved imaging system |
| 03/02/2006 | WO2006023523A2 System and method for optical measurement |
| 03/02/2006 | WO2006023489A2 Cyclic error compensation in interferometry systems |
| 03/02/2006 | WO2006023406A2 Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry |
| 03/02/2006 | WO2006023345A2 System for rotation measurement with laser interferometry |
| 03/02/2006 | WO2005106382A3 Optical transducer for detecting liquid level and electronic circuit therefor |
| 03/02/2006 | US20060044566 Interferometric Optical Apparatus And Method Using Wavefront Division |
| 03/02/2006 | US20060044549 Smart spacecraft structures based on laser metrology |
| 03/02/2006 | US20060044536 Exposure apparatus equipped with interferometer and exposure apparatus using the exposure apparatus |
| 03/01/2006 | EP1630520A2 Apparatus and method of heterodyne interferometry for imaging |
| 03/01/2006 | EP1546645B1 Interferometric measuring device |
| 03/01/2006 | CN1740738A Inner three-directional moire interferometer |
| 03/01/2006 | CN1243952C Position phase-difference enlarger of combined interferometer |
| 03/01/2006 | CN1243951C Interferometer equipment and measurement method in interferometer |
| 02/28/2006 | US7006562 Phase demodulator, phase difference detector, and interferometric system using the phase difference detector |
| 02/28/2006 | US7006234 Common-path point-diffraction phase-shifting interferometer incorporating a birefringent polymer membrane |
| 02/28/2006 | US7006233 Method of detecting a distortion on a surface |
| 02/28/2006 | US7006232 Phase-referenced doppler optical coherence tomography |
| 02/28/2006 | US7006231 Diffraction grating based interferometric systems and methods |
| 02/28/2006 | US7006230 Interferometric method and apparatus for the characterization of optical pulses |
| 02/23/2006 | WO2006020776A2 Method and apparatus for interferometric measurement of components with large aspect ratios |
| 02/23/2006 | WO2005070166A3 Method and system for optically tracking a target using an interferometric technique |
| 02/23/2006 | US20060039009 Chip-size wavelength detector |
| 02/23/2006 | US20060039007 Vibration-insensitive interferometer |
| 02/23/2006 | US20060039006 Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method |
| 02/23/2006 | US20060039005 Differential interferometers creating desired beam patterns |
| 02/23/2006 | US20060039004 Process, system and software arrangement for determining at least one location in a sample using an optical coherence tomography |
| 02/23/2006 | DE20221476U1 Automatic regulation of focus and lighting and optical sensing of edge position for precision optical measurement involves determining weighted sum of individual auxiliary parameters |
| 02/23/2006 | DE10258248B4 System zur interferometrischen Passeprüfung System for interferometric testing Passe |
| 02/23/2006 | DE102004039410A1 Verfahren und Vorrichtung zur Regelung eines automatischen Bearbeitungsprozesses Method and apparatus for controlling an automatic machining process |
| 02/22/2006 | CN1737494A Surface profile analytical method for object needing measure |
| 02/22/2006 | CN1737492A Multidimensional adjustable optical image moving device |
| 02/22/2006 | CN1243213C X ray interferometer with twin zone plates |
| 02/21/2006 | US7003186 Waveguide-based optical interferometer |
| 02/21/2006 | US7002697 Tunable optical instruments |
| 02/21/2006 | US7002696 Band pass interferometer with tuning capabilities |
| 02/21/2006 | US7002695 Dual-spot phase-sensitive detection |
| 02/21/2006 | US7002694 Interferometer system and method for recording an interferogram using weighted averaging over multiple frequencies, and method for providing and manufacturing an object having a target surface |
| 02/21/2006 | US7002693 Thickness measurement method and apparatus |
| 02/21/2006 | US7002692 Infrared circular dichroism measuring apparatus and infrared circular dichroism measuring method |
| 02/21/2006 | US7002691 Spatially-heterodyned holography |
| 02/21/2006 | US7000477 Optical pressure sensor |
| 02/16/2006 | WO2006017837A2 Process, system and software arrangement for determining at least one location in a sample using an optical coherence tomography |
| 02/16/2006 | US20060033934 Method and apparatus for interferometric measurement of components with large aspect ratios |
| 02/16/2006 | US20060033933 Method and device for wave-front sensing |
| 02/16/2006 | US20060033932 Scatterometry by phase sensitive reflectometer |
| 02/16/2006 | US20060033931 System and method for three-dimensional measurement |
| 02/16/2006 | US20060033930 Time-resolved nonlinear complex sensitivity measuring instrument |
| 02/16/2006 | US20060033929 Phase measuring method and apparatus for multi-frequency interferometry |
| 02/16/2006 | US20060033928 Method and apparatus for measuring the absorption coefficient and the reduced scattering coefficient of a multiple scattering medium |
| 02/16/2006 | US20060033927 Heterodyne optical spectrum analyzer |
| 02/16/2006 | US20060033926 Spatially distributed spectrally neutral optical attenuator |
| 02/16/2006 | US20060033925 Interferometric measuring device |
| 02/16/2006 | US20060033924 Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry |
| 02/16/2006 | US20060033923 Autonomous ultra-short optical pulse compression, phase compensating and waveform shaping device |