Patents for G01B 11 - Measuring arrangements characterised by the use of optical means (73,862)
05/2004
05/12/2004EP1418399A2 Device for measuring machine tools
05/12/2004EP1418398A1 Shape measuring device
05/12/2004EP1417476A1 Multiple beam ellipsometer
05/12/2004EP1417453A1 Device and method for 3d imaging
05/12/2004EP1417452A2 Three dimensional mapping system for automotive vehicles
05/12/2004EP1417451A1 Three dimensional imaging by projecting interference fringes and evaluating absolute phase mapping
05/12/2004EP1417450A2 Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system
05/12/2004EP1417448A1 Scanning interferometry with reference signal
05/12/2004EP1200801B1 Methods for operating a laser scanner
05/12/2004CN2615829Y X-ray rotary cable offset test instrument
05/12/2004CN1496474A 位移传感器 Displacement sensors
05/12/2004CN1495540A Alignment system of photoetching system utilizing at least two wavelengths and its method
05/12/2004CN1495536A Method for aligning with base, computer program, production method of device and device made up by using said method
05/12/2004CN1495408A Three-dimensional coordinate detecting method
05/12/2004CN1495407A Detector
05/12/2004CN1494971A Optical alignment system for electric power tool
05/12/2004CN1149552C Radial tilt detector
05/12/2004CN1149388C Method for reconstrucing 3D contour of digital projection based on phase-shifting method
05/11/2004US6735333 Pattern inspection apparatus
05/11/2004US6734983 Sensor body for detecting monitor light; plurality of detachable collector barrels to guide
05/11/2004US6734982 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structure
05/11/2004US6734981 Multiple laser optical systems and methods
05/11/2004US6734980 Body scanning equipment
05/11/2004US6734979 Rapid in situ mastering of an aspheric Fizeau with residual error compensation
05/11/2004US6734978 Profile measuring method and measurement apparatus using interference of light
05/11/2004US6734977 Method and apparatus for measuring gap, and method and apparatus for measuring shape and method for manufacturing liquid crystal device
05/11/2004US6734970 Method and a device for determining the radiation-damage resistance of an optical material
05/11/2004US6734969 Vacuum measurement device
05/11/2004US6734968 System for analyzing surface characteristics with self-calibrating capability
05/11/2004US6734951 Range finder device and camera
05/11/2004US6734849 Integrated system for quickly and accurately imaging and modeling three-dimensional objects
05/11/2004US6733820 Method for determining direction-dependent properties of enamels
05/06/2004WO2004038327A1 Film-thickness inspection method for thin-film device and production method for thin-film device
05/06/2004WO2004038325A2 Systems and methods that detect changes in incident optical radiation
05/06/2004WO2004038321A2 Method and apparatus for thickness decomposition of complicated layer structures
05/06/2004WO2004037486A1 Method for fastening a tool within a tool chuck
05/06/2004WO2004037085A1 Apparatus for determining size and shape of a foot
05/06/2004WO2004019382A8 Tft sensor having improved imaging surface
05/06/2004WO2004015893A3 System and method for automatically calibrating an alignment reference source
05/06/2004WO2004013566A3 System and method for imaging of coated substrates
05/06/2004WO2003102495A3 Metrology system for precision 3d motion
05/06/2004WO2003001146A9 Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces
05/06/2004US20040087152 Interferometric endpoint determination in a substrate etching process
05/06/2004US20040087041 Method for controlling a recess etch process
05/06/2004US20040086198 System and method for bump height measurement
05/06/2004US20040086174 Method for error analysis of trifocal transfer
05/06/2004US20040086173 Test tube type discrimination apparatus
05/06/2004US20040086170 Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof
05/06/2004US20040086168 Pattern inspection method and inspection apparatus
05/06/2004US20040086166 Method and apparatus for flat patterned media inspection
05/06/2004US20040086011 Planar and wafer level packaging of semiconductor lasers and photo detectors for transmitter optical sub-assemblies
05/06/2004US20040085549 Method and an apparatus for measuring positions of contact elements of an electronic component
05/06/2004US20040085548 Interference system and semiconductor exposure apparatus having the same
05/06/2004US20040085546 Measurement and compensation of errors in interferometers
05/06/2004US20040085544 Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
05/06/2004US20040085543 Optical imaging system and optical imaging detection method
05/06/2004US20040085537 Device for ellipsometric two-dimensional display of a sample, display method and ellipsometric measurement method with spatial resolution
05/06/2004US20040083808 Apparatus and method for monitoring compaction
05/06/2004EP1416247A1 Interferometric endpoint determination in a substrate etching process
05/06/2004EP1415885A1 Method for the contactless measurement of a transverse profile or the distance between the rails of a track
05/06/2004EP1415126A2 Method and apparatus for integrating multiple process controllers
05/06/2004EP1192414B1 Method and system for measuring the relief of an object
05/06/2004EP1149269B1 Latex coat thickness measuring and control apparatus
05/06/2004EP1133674B1 Optoelectronic component
05/06/2004DE10295831T5 Verbesserter Laserjustiersensor zum Positionieren von Komponenten Improved Laserjustiersensor for positioning components
05/06/2004DE10250094A1 System for measuring displacement of first object relative to second has coupling rod, damping body that carries out frictionally affected shear movements relative to base body during bending
05/06/2004DE10158777B4 Anordnung zum Erfassen von Relativbewegungen oder Relativpositionen zweier Objekte Arrangement for detecting relative movements or relative positions of two objects
05/06/2004DE10158775B4 Anordnung zum Erfassen von Relativbewegungen oder Relativpositionen zweier Objekte Arrangement for detecting relative movements or relative positions of two objects
05/05/2004CN1493845A 光学位移传感器 Optical displacement sensor
05/05/2004CN1148563C Method and apparatus for in-situ monitoring of plasma etch and deposition processes using pulsed broadband light source
05/05/2004CN1148562C Device for continuously monitoring junction of conveyor belt
05/04/2004US6732045 Method and device for detecting the position of a vehicle in a given area
05/04/2004US6732030 Three-dimensional mapping systems for automotive vehicles and other articles
05/04/2004US6731991 System for projecting light on a work surface to produce an image for tracing
05/04/2004US6731777 Object recognition system
05/04/2004US6731720 Image pickup device
05/04/2004US6731392 Marker used for measuring displacement of moving object and method therefor
05/04/2004US6731391 Shadow moire surface measurement using Talbot effect
05/04/2004US6731390 Process and apparatus for determining surface information using a projected structure with a periodically changing brightness curve
05/04/2004US6731386 Measurement technique for ultra-thin oxides
05/04/2004US6731382 Self-calibrating 3D machine measuring system useful in motor vehicle wheel alignment
05/04/2004US6731380 Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
05/04/2004US6731329 Method and an arrangement for determining the spatial coordinates of at least one object point
05/04/2004US6731277 Process for generating a computer image of a coated three-dimensional object
05/04/2004US6730920 Abbe arm calibration system for use in lithographic apparatus
04/2004
04/29/2004WO2004036200A1 Method and apparatus for quality inspection
04/29/2004WO2004034894A1 Cornea characteristics measuring device
04/29/2004WO2004015727A3 Method for controlling a recess etch process
04/29/2004WO2004013723A3 Model and parameter selection for optical metrology
04/29/2004WO2004013565A3 Fringe pattern discriminator for grazing incidence interferometer
04/29/2004WO2004012999A3 Ultraviolet bottle coating thickness measurement
04/29/2004WO2003105289A3 Methods and systems for laser based real-time structured light depth extraction
04/29/2004WO2003104744A8 Method for obtaining the image of an object, device for carrying out said method and device for delivering low coherent optical radiation
04/29/2004WO2003093759A3 Phase gap analysis for scanning interferometry
04/29/2004WO2003081293B1 Improved semiconductor etching process control
04/29/2004WO2003016111A8 Transmission detector for a window body, especially a cleaning device for a visual area of a window body
04/29/2004WO2002061368A8 Method and apparatus for determining a three dimensional image of a moving object by means of light
04/29/2004US20040081445 Three-dimensional photographing apparatus and three-dimensional photographing method, and stereo adapter
04/29/2004US20040081352 Three-dimensional visual sensor
04/29/2004US20040080761 Method and apparatus for thickness decomposition of complicated layer structures