| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/24/2013 | EP2618365A2 Method for depositing a chlorine-free conformal SiN film |
| 07/24/2013 | CN203080065U Lifting device of etching baking equipment |
| 07/24/2013 | CN203080063U MOCVD (Metal Organic Chemical Vapor Deposition) equipment and air inlet device thereof |
| 07/24/2013 | CN203080062U Graphite disc baking tool |
| 07/24/2013 | CN203080061U Etching and roasting equipment |
| 07/24/2013 | CN203080056U Fixing device for vacuum coating transmission mechanism |
| 07/24/2013 | CN103221576A System for and method of fast pulse gas delivery |
| 07/24/2013 | CN103221575A Method of and apparatus for multiple-channel pulse gas delivery system |
| 07/24/2013 | CN103221574A Method of forming conformal barrier layers for protection of thermoelectric materials |
| 07/24/2013 | CN103219270A 机械手定位装置 Manipulator positioning device |
| 07/24/2013 | CN103219152A Electrostatic condenser based on nano electrodes and preparation method of electrostatic condenser |
| 07/24/2013 | CN103215573A Vacuum deposition apparatus |
| 07/24/2013 | CN103215572A Semiconductor equipment technology control method and semiconductor equipment technology control device |
| 07/24/2013 | CN103215571A Apparatus and methods for deposition reactors |
| 07/24/2013 | CN103215570A Method and apparatus for photo-excitation of chemicals for atomic layer deposition of dielectric film |
| 07/24/2013 | CN103215569A Barrier films for plastic substrates fabricated by atomic layer deposition |
| 07/24/2013 | CN103215568A Gas supply head and substrate processing apparatus |
| 07/24/2013 | CN103215567A Film deposition apparatus |
| 07/24/2013 | CN103215566A Gas supply head and substrate processing apparatus |
| 07/24/2013 | CN103215565A Cvd conformal vacuum/pumping guiding design |
| 07/24/2013 | CN103215564A Air exhaust structure of LPCVD (low pressure chemical vapor deposition) system |
| 07/24/2013 | CN103215563A Deposition equipment and rotary device |
| 07/24/2013 | CN103215562A Reaction cavity |
| 07/24/2013 | CN103215561A Plasma depositing and etching system |
| 07/24/2013 | CN103215560A Protective coating of silver |
| 07/24/2013 | CN103215559A Apparatus and method for depositing thin film |
| 07/24/2013 | CN103215469A Porous graphene, graphene/porous metal composite material, and preparation methods of porous graphene and composite material |
| 07/24/2013 | CN102492945B Preparation method of ice coating prevention surface of bionic micro-nano composite structure |
| 07/24/2013 | CN102395706B Method for manufacturing gas barrier thin film-coated plastic container |
| 07/24/2013 | CN102105620B Susceptor with support bosses |
| 07/24/2013 | CN102084030B Process and installation for despositing films simultaneously onto both sides of a substrate |
| 07/24/2013 | CN102084029B Deposition method for passivation of silicon wafers |
| 07/24/2013 | CN102017168B Apparatus for manufacturing thin film solar cell |
| 07/24/2013 | CN102016118B Apparatus and methods for deposition reactors |
| 07/24/2013 | CN101990585B Film formation apparatus |
| 07/24/2013 | CN101980935B Method and device for fixing and transporting impact-sensitive sheets in sputter feed systems |
| 07/24/2013 | CN101681871B Device for coating a plurality of closest-packed substrates arranged on a susceptor |
| 07/24/2013 | CN101665924B Film deposition apparatus and substrate processing apparatus |
| 07/24/2013 | CN101578391B Deposition system and method |
| 07/24/2013 | CN101540276B Plasma processing apparatus and method for manufacturing semiconductor device |
| 07/24/2013 | CN101447406B Loadlock designs and methods for using same |
| 07/23/2013 | US8492686 Device and method for heating using RF energy |
| 07/23/2013 | US8492250 Method for fabricating semiconductor device |
| 07/23/2013 | US8491964 Diamond nucleation using polyethene |
| 07/23/2013 | US8491963 Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates |
| 07/23/2013 | US8491955 Method of manufacturing electronic apparatus including plastic substrate, electronic apparatus manufactured using the method, and apparatus for use in the method |
| 07/23/2013 | US8491752 Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism |
| 07/23/2013 | US8491751 Plasma processing apparatus |
| 07/23/2013 | US8491750 Adjustable confinement ring assembly |
| 07/23/2013 | US8491748 Gluing method for assembling optical transceiver module |
| 07/23/2013 | US8491720 HVPE precursor source hardware |
| 07/18/2013 | WO2013106171A1 Method for seasoning uv chamber optical components to avoid degradation |
| 07/18/2013 | WO2013106006A1 Method for applying aluminum alloy coatings for corrosion protection of steel |
| 07/18/2013 | WO2013105766A1 Susceptor |
| 07/18/2013 | WO2013105416A1 Method for producing silicon-containing film and method for manufacturing photoelectric conversion device |
| 07/18/2013 | WO2013105389A1 METHOD FOR FORMING TiSiN FILM AND RECORDING MEDIUM |
| 07/18/2013 | WO2013105358A1 Surface wave plasma treatment device |
| 07/18/2013 | WO2013105310A1 Aluminum compound, starting material for forming thin film, and method for producing thin film |
| 07/18/2013 | WO2013104874A1 Enhancing the adhesion or attachment of carbon nanotubes to the surface of a material via a carbon layer |
| 07/18/2013 | WO2013104685A1 Method for the chemical vapor infiltration of refractive substances |
| 07/18/2013 | WO2013104200A1 Method for using ald device to grow gallium nitride film |
| 07/18/2013 | WO2013104141A1 Method for using carbon source having multiple benzene rings to grow graphene over large area by chemical vapor deposition at low temperature |
| 07/18/2013 | US20130183831 Reducing Substrate Warpage in Semiconductor Processing |
| 07/18/2013 | US20130183581 Substrate for electrode of electrochemical cell |
| 07/18/2013 | US20130183458 Method for depositing phosphosilicate glass |
| 07/18/2013 | US20130183446 METHOD FOR FORMING Ge-Sb-Te FILM AND STORAGE MEDIUM |
| 07/18/2013 | US20130183445 Enhanced thin film deposition |
| 07/18/2013 | US20130183444 Apparatus and Methods for Deposition Reactors |
| 07/18/2013 | US20130183443 Processing apparatus and valve operation checking method |
| 07/18/2013 | US20130180953 Plasma processing apparatus and plasma processing method |
| 07/18/2013 | US20130180454 Thin film deposition apparatus |
| 07/18/2013 | US20130180453 Substrate processing device equipped with semicircle shaped antenna |
| 07/18/2013 | US20130180452 Film deposition apparatus |
| 07/18/2013 | US20130180451 Substrate treatment system |
| 07/18/2013 | US20130180213 Scanner-Sensitive Metallized Films |
| 07/18/2013 | DE112011103337T5 Verfahren und Vorrichtung für ein mehrkanaliges Pulsgaszuführungssystem Method and apparatus for a multi-channel pulse gas delivery system |
| 07/18/2013 | DE102012107282A1 Vorrichtung und verfahren zur plasmabehandlung von oberflächen Apparatus and method for plasma treatment of surfaces |
| 07/17/2013 | EP2615889A1 Plasma processing apparatus |
| 07/17/2013 | EP2615888A1 Plasma processing apparatus |
| 07/17/2013 | EP2615629A1 Epitaxial substrate for semiconductor element, method for producing epitaxial substrate for semiconductor element, and semiconductor element |
| 07/17/2013 | EP2615193A1 Production of agglomerates from gas phase |
| 07/17/2013 | EP2614905A1 Surface-coated cutting tool |
| 07/17/2013 | CN203065573U Chip model for graphite boat baking technology |
| 07/17/2013 | CN1782124B Porous low dielectric constant compositions and methods for making and using same |
| 07/17/2013 | CN103210500A Method for manufacturing semiconductor device |
| 07/17/2013 | CN103210484A Rotating and holding device and transport device for semiconductor substrate |
| 07/17/2013 | CN103210475A Susceptor and method of manufacturing epitaxial wafer |
| 07/17/2013 | CN103210117A Plasma cvd apparatus |
| 07/17/2013 | CN103208685A Corrosion-resistant electrode and manufacturing method and application thereof |
| 07/17/2013 | CN103207222A Method for preparing graphene nano-material electrochemical sensor by atomic layer deposition process |
| 07/17/2013 | CN103205734A Processing Apparatus And Valve Operation Checking Method |
| 07/17/2013 | CN103205733A Vertical airflow type MOCVD (Metal-organic Chemical Vapor Deposition) spray head device with multiple gas mixing chambers |
| 07/17/2013 | CN103205732A Splashguard for high flow vacuum bubbler vessel |
| 07/17/2013 | CN103205731A MOCVD novel reaction system |
| 07/17/2013 | CN103205730A Nitrogen doped titanium dioxide film preparation method |
| 07/17/2013 | CN103205729A Method for growing gallium nitride film through using ALD apparatus |
| 07/17/2013 | CN103205728A Surface-modified coated cutting tool and preparation method thereof |
| 07/17/2013 | CN103205727A Method of regulating refractive index of optical film of amorphous silicon |
| 07/17/2013 | CN103205726A Production process of graphene conductive film |
| 07/17/2013 | CN103203250A Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process |