| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 09/11/2013 | CN203187750U Automatic film plating machine of heat collection tube continuous film plating machine |
| 09/11/2013 | CN1956145B Semiconductor process chamber |
| 09/11/2013 | CN103298974A Apparatus, method and reaction chamber |
| 09/11/2013 | CN103298973A Method for producing lithium-based layers by CVD |
| 09/11/2013 | CN103298972A Piston assembly for alternative compressor |
| 09/11/2013 | CN103298971A Diazadiene-based metal compound, method for preparing same and method for forming a thin film using same |
| 09/11/2013 | CN103296133A Crystalline silicon battery piece with graphite substrate |
| 09/11/2013 | CN103296127A Method for manufacturing rare-earth modification carbon nano tube silicon solar cell |
| 09/11/2013 | CN103295869A Treatment apparatus for flat substrates |
| 09/11/2013 | CN103290392A Electrode-shearing plasma enhanced chemical vapor deposition device and method |
| 09/11/2013 | CN103290391A Laser processing apparatus |
| 09/11/2013 | CN103290390A Pectinate gas mixing unit and pectinate gas mixer |
| 09/11/2013 | CN103290389A Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof |
| 09/11/2013 | CN103290388A Plasma coating equipment and air extraction process thereof |
| 09/11/2013 | CN103290387A Method for cleaning process chamber of chemical vapor deposition reactor |
| 09/11/2013 | CN103290386A C/SiC coating with pore structure and preparation method thereof |
| 09/11/2013 | CN103288072A Preparation method of iron filled carbon nano tube and reaction device |
| 09/11/2013 | CN103286919A Mold with the surface treated by graphene and manufacturing method of mold |
| 09/11/2013 | CN102418085B Micronano-scale powder protective layer wrapping device and method |
| 09/11/2013 | CN102318049B Epitaxial substrate for electronic devices and manufacturing method therefor |
| 09/11/2013 | CN102108503B Grounding/supporting device and plasma treatment equipment employing same |
| 09/11/2013 | CN102098863B Electrode board for plasma processing equipment and method for removing process sediments |
| 09/11/2013 | CN101924003B 电极结构及等离子体设备 Electrode structure and plasma equipment |
| 09/11/2013 | CN101886253B Flexible material vacuum coating machine utilizing Penning discharge source |
| 09/11/2013 | CN101506095B Apparatus and method for manufacturing carbon structure |
| 09/10/2013 | US8530006 Localized plasma processing |
| 09/10/2013 | US8529996 High-temperature attachment of organic molecules to substrates |
| 09/10/2013 | US8529995 Method for producing parts made of a thermostructural composite material |
| 09/10/2013 | US8529994 Growth and applications of ultralong carbon nanotubes |
| 09/10/2013 | US8529988 Method for fabrication of localized plasmon transducers |
| 09/10/2013 | US8529984 Method of producing an ombré´ finish for materials |
| 09/10/2013 | US8529730 Plasma processing apparatus |
| 09/10/2013 | US8529701 Substrate processing apparatus |
| 09/10/2013 | US8529700 Apparatus for gaseous vapor deposition |
| 09/10/2013 | US8528499 Substrate processing apparatus and method |
| 09/10/2013 | US8528498 Integrated steerability array arrangement for minimizing non-uniformity |
| 09/06/2013 | WO2013130380A1 Single-unit reactor design for combined oxidative, initiated, and plasma-enhanced chemical vapor deposition |
| 09/06/2013 | WO2013129939A1 Dlc-coated gate valve in petroleum production or water injection |
| 09/06/2013 | WO2013129856A1 Food container having improved oxygen barrier properties and manufacturing method thereof |
| 09/06/2013 | WO2012105832A8 Apparatus for atomic layer deposition |
| 09/05/2013 | US20130230986 Adhesion improvement for low k dielectrics to conductive materials |
| 09/05/2013 | US20130230736 Nanostructure device and method for manufacturing nanostructures |
| 09/05/2013 | US20130230660 Method for producing metal complex quantum crystals |
| 09/05/2013 | US20130230652 Ruthenium film formation method and computer readable storage medium |
| 09/05/2013 | US20130230651 Film formation apparatus and film formation method using the same |
| 09/05/2013 | US20130228476 Method and apparatus to help promote contact of gas with vaporized material |
| 09/05/2013 | US20130228124 Substrate support with ceramic insulation |
| 09/05/2013 | US20130228121 Adjustable mask for use in optical coating process |
| 09/05/2013 | DE102012203212A1 Coating system useful for producing layer on substrate using growth process, preferably for performing atomic layer deposition, comprises supply container, in which liquid starting material for layer is provided, and evaporator unit |
| 09/05/2013 | DE102012101717A1 Verfahren und Vorrichtung zur Regelung der Oberflächentemperatur eines Suszeptors einer Substratbeschichtungseinrichtung Method and apparatus for controlling the surface temperature of a susceptor of a substrate coating device |
| 09/05/2013 | DE102012004119A1 Beschichtung von kraftübertragenden Bauteilen mit magnetostriktiven Werkstoffen Coating of force transmitting components with magnetostrictive materials |
| 09/05/2013 | DE102008064183B4 In-Line-Vakuumbeschichtungsanlage In-line vacuum coating system |
| 09/04/2013 | EP2634294A1 Method for manufacturing optical element |
| 09/04/2013 | EP2634158A1 Improved quality multi-spectral zinc sulfide |
| 09/04/2013 | EP2634157A1 Improved quality multi-spectral zinc sulfide |
| 09/04/2013 | EP2633098A1 Gas lock, and coating apparatus comprising a gas lock |
| 09/04/2013 | EP2633097A1 Gas lock, and coating apparatus comprising a gas lock |
| 09/04/2013 | EP2633096A1 Thermal shield for silicon production reactors |
| 09/04/2013 | EP2632619A2 Alumina layer with multitexture components |
| 09/04/2013 | CN203174200U 等离子体增强原子层沉积设备 Plasma enhanced atomic layer deposition apparatus |
| 09/04/2013 | CN203174199U Chemical vapor deposition lifting device |
| 09/04/2013 | CN203174198U Insulating device for maintenance of nozzle |
| 09/04/2013 | CN203174197U Reaction cavity assembly |
| 09/04/2013 | CN203174193U Surface treatment device for corrosion-resistant and wear-resistant oil pipe |
| 09/04/2013 | CN1798618B Ultraviolet (UV) and plasma assisted metalorganic chemical vapor deposition (MOCVD) system |
| 09/04/2013 | CN103283014A Thin film deposition apparatus and substrate treatment system including same |
| 09/04/2013 | CN103280400A Preparation method for high-compressive stress silicon nitride thin film |
| 09/04/2013 | CN103276373A Plasma enhanced chemical vapor deposition (PECVD) device |
| 09/04/2013 | CN103276372A Preparation method of graphene and preparation method thereof |
| 09/04/2013 | CN103276371A CVD (chemical vapor deposition) equipment air inlet apparatus, cooling apparatus and cooling method thereof |
| 09/04/2013 | CN103276370A Porous low dielectric constant composition, and methods for producing and using the same |
| 09/04/2013 | CN103276369A PECVD (plasma enhanced chemical vapour deposition) film-coating system |
| 09/04/2013 | CN103276368A Particle pollution monitoring system and chemical vapor deposition device |
| 09/04/2013 | CN102468437B Manufacture method of phase change memory |
| 09/04/2013 | CN102421938B Surface wave plasma cvd apparatus and film forming method |
| 09/04/2013 | CN102376535B Semiconductor device and fabricating method thereof |
| 09/04/2013 | CN102272352B Cvd装置 Cvd device |
| 09/04/2013 | CN102260858B Method for directly growing graphine on various substrates |
| 09/04/2013 | CN102244152B Method for depositing amorphous silicon thin film in production of solar cells |
| 09/04/2013 | CN102037156B Substrates for solar cells and methods of producing the same |
| 09/04/2013 | CN101798670B Mask assembly and deposition apparatus using the same for flat panel display |
| 09/03/2013 | US8524611 Method and apparatus for inline deposition of materials on a non-planar surface |
| 09/03/2013 | US8524580 Manufacturing method of semiconductor substrate and substrate processing apparatus |
| 09/03/2013 | US8524333 Method of manufacturing gas barrier film |
| 09/03/2013 | US8524322 Combination CVD/ALD method and source |
| 09/03/2013 | US8524321 Providing liquid and vapor phase materials during semiconductor manufacturing; removable top wall member allows easy cleaning; maintains purity of chemicals, reduces waste |
| 09/03/2013 | US8524313 Method for manufacturing a device |
| 09/03/2013 | US8524181 Sensor-integrated device |
| 09/03/2013 | US8524054 Loading device and sputtering device using same |
| 09/03/2013 | US8524052 Cooling shower plate for disk manufacture |
| 09/03/2013 | US8524005 Heat-transfer structure and substrate processing apparatus |
| 09/03/2013 | US8524004 Loadlock batch ozone cure |
| 09/03/2013 | US8524003 Loaded film cassette for gaseous vapor deposition |
| 09/03/2013 | US8522716 Protective coating for a plasma processing chamber part and a method of use |
| 09/03/2013 | US8522715 Methods and apparatus for a wide conductance kit |
| 09/03/2013 | CA2718899C Protective coatings for metals |
| 08/29/2013 | WO2013126505A1 Apparatus and method for multi-source deposition |
| 08/29/2013 | WO2013126323A1 Method and apparatus for precursor delivery |
| 08/29/2013 | WO2013124634A1 Chemical vapor deposition process for depositing a silica coating on a glass substrate |
| 08/29/2013 | WO2013124535A1 Apparatus for processing substrates |