| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/14/2013 | CN103249864A Method for coating micromechanical parts with dual diamond coating |
| 08/14/2013 | CN103249863A Bis-pyrroles-2-ldiminate manganese precursors for deposition of manganese containing films |
| 08/14/2013 | CN103249862A Pressure based liquid feed system for suspension plasma spray coatings |
| 08/14/2013 | CN103249672A System and method for hydrogen production |
| 08/14/2013 | CN103249242A Antenna unit for inductively coupled plasma, inductively coupled plasma processing apparatus and method therefor |
| 08/14/2013 | CN103245696A Method for preparing porous silicon-based one-dimensional nanowire gas sensitive element |
| 08/14/2013 | CN103243315A Power lance and plasma-enhanced coating with high frequency coupling |
| 08/14/2013 | CN103243314A Film deposition apparatus |
| 08/14/2013 | CN103243313A Substrate supporting structure and reaction chamber comprising substrate supporting structure |
| 08/14/2013 | CN103243312A Shower head and vapor deposition equipment |
| 08/14/2013 | CN103243311A Gas transport reaction chamber with orthogonal perpendicular inlet gas/horizontal inlet gas on substrate surface |
| 08/14/2013 | CN103243310A Precursors for plasma activated conformal film deposition |
| 08/14/2013 | CN103243309A Film formation apparatus and film formation method |
| 08/14/2013 | CN103243308A Air extractor, low-pressure chemical vapor deposition equipment and chemical vapor deposition method |
| 08/14/2013 | CN103241706A Manufacturing method for stress-matching bimaterial microcantilever |
| 08/14/2013 | CN103239761A Silicon-nitride-coated medical magnesium alloy material and preparation method thereof |
| 08/14/2013 | CN102487001B Method for improving uniformity of dielectric layer |
| 08/14/2013 | CN102433543B Multi-deposition-chamber CVI (chemical vapor infiltration) device for compacting carbon/carbon crucible and method using same |
| 08/14/2013 | CN102260862B Plasma processing apparatus and gas supply member support device |
| 08/14/2013 | CN101844874B On-line film coating method of conductive glass and on-line film coating device |
| 08/14/2013 | CN101569841B Reagent dispensing apparatus and delivery method |
| 08/14/2013 | CN101516818B Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex |
| 08/13/2013 | US8507051 Polycrystalline silicon producing method |
| 08/13/2013 | US8507040 Binary and ternary metal chalcogenide materials and method of making and using same |
| 08/13/2013 | US8507039 Method for growing thin films |
| 08/13/2013 | US8507038 Substrate having a coating comprising copper and method for the production thereof by means of atomic layer deposition |
| 08/13/2013 | US8506753 Capacitive coupling plasma processing apparatus and method for using the same |
| 08/13/2013 | US8506715 Coating deposition apparatus and method therefor |
| 08/13/2013 | US8506714 Substrate processing system |
| 08/13/2013 | US8506713 Film deposition apparatus and film deposition method |
| 08/13/2013 | US8506712 Wafer support jig, vertical heat treatment boat including wafer support jig, and method for manufacturing wafer support jig |
| 08/13/2013 | US8506711 Apparatus for manufacturing flat-panel display |
| 08/13/2013 | US8506710 Apparatus for fabricating semiconductor device |
| 08/13/2013 | US8505481 Apparatus for growth of dilute-nitride materials using an isotope for enhancing the sensitivity of resonant nuclear reaction analysis |
| 08/13/2013 | US8505480 Plasma system |
| 08/13/2013 | US8505478 Apparatus for high-efficiency synthesis of carbon nanostructure |
| 08/13/2013 | CA2581626C Method and apparatus for growing a group (iii) metal nitride film and a group (iii) metal nitride film |
| 08/10/2013 | CA2802474A1 Coating for a medical instrument, in particular a dental or surgical instrument |
| 08/08/2013 | WO2013116495A1 Method of depositing metals using high frequency plasma |
| 08/08/2013 | WO2013116478A1 Multi-chamber substrate processing systems |
| 08/08/2013 | WO2013045596A3 Inorganic materials, methods and apparatus for making same, and uses thereof |
| 08/08/2013 | US20130203267 Multiple vapor sources for vapor deposition |
| 08/08/2013 | US20130203264 Method and apparatus for vapor and gas filtration |
| 08/08/2013 | US20130202991 Process for cleaning shield surfaces in deposition systems |
| 08/08/2013 | US20130202866 Mechanically stable nanoparticle thin film coatings and methods of producing the same |
| 08/08/2013 | US20130202849 Polycrystalline diamond for drawing dies and method for fabricating the same |
| 08/08/2013 | US20130202815 Method for Applying Aluminum Alloy Coatings for Corrosion Protection of Steel |
| 08/08/2013 | US20130202814 Method and device for plasma-treating workpieces |
| 08/08/2013 | US20130202794 Metal film deposition |
| 08/08/2013 | US20130202518 Single crystal diamond prepared by cvd |
| 08/08/2013 | US20130200572 Vehicle piston ring having a nano multi-layer coating |
| 08/08/2013 | US20130199982 Thin layer chromatography plates and related methods of manufacture including priming prior to infiltration with stationary phase and/or precursor thereof |
| 08/08/2013 | US20130199448 Method and apparatus for contactlessly advancing substrates |
| 08/08/2013 | US20130199447 Continuous Coating Apparatus |
| 08/08/2013 | US20130199446 Apparatus |
| 08/08/2013 | US20130199445 Vapor deposition device, vapor deposition method, and method for producing organic electroluminescence display device |
| 08/08/2013 | US20130199331 Machine element |
| 08/08/2013 | DE112011102860T5 Anordnung und Verfahren System and method |
| 08/08/2013 | DE112011102859T5 Düsenkopf Nozzle head |
| 08/08/2013 | DE112011102856T5 Anordnung Arrangement |
| 08/08/2013 | DE112011102853T5 Anordnung Arrangement |
| 08/08/2013 | DE102012202715A1 Vacuum processing system for treatment of substrates, has pressure separation device with separation element, which is extended in direction transverse to transport direction of substrates, by extending formation of gap on substrate |
| 08/08/2013 | DE102012100929A1 Substratbearbeitungsanlage Substrate processing system |
| 08/08/2013 | DE102012100927A1 Prozessmodul Process module |
| 08/07/2013 | EP2624285A1 Thin film manufacturing method and thin film manufacturing apparatus |
| 08/07/2013 | EP2623730A1 Flow engine component with joint and steam turbine with the flow engine component |
| 08/07/2013 | EP2622642A2 Microelectronic structures including cuprous oxide semiconductors and having improved p-n heterojunctions |
| 08/07/2013 | EP2622115A1 Method for growing white color diamonds by using diborane and nitrogen in combination in a microwave plasma chemical vapor deposition system |
| 08/07/2013 | CN203112924U Novel structure capable of preventing microwave leakage |
| 08/07/2013 | CN203112919U Gas phase processing device |
| 08/07/2013 | CN203109252U Center with super-hard coating |
| 08/07/2013 | CN103237921A Apparatus |
| 08/07/2013 | CN103237920A Wear resistant coating, article with wear resistant coating, and method for coating wear resistant coating |
| 08/07/2013 | CN103237919A Modular coater separation |
| 08/07/2013 | CN103233211A MOCVD (Metal-organic Chemical Vapor DePosition) heating device |
| 08/07/2013 | CN103233210A Organic metal chemical vapor deposition device for high-temperature growth of oxide film |
| 08/07/2013 | CN102321877B Electrode introduction device |
| 08/07/2013 | CN102076885B Component for rotary machine |
| 08/07/2013 | CN102011097B Method for eliminating sediment residues of compounds of elements in groups III and V |
| 08/06/2013 | US8501976 Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material |
| 08/06/2013 | US8501599 Substrate processing apparatus and substrate processing method |
| 08/06/2013 | US8501595 Thin film containing nanocrystal particles and method for preparing the same |
| 08/06/2013 | US8501277 Durable, heat-resistant multi-layer coatings and coated articles |
| 08/06/2013 | US8501276 Carbon film |
| 08/06/2013 | US8501275 Enhanced deposition of noble metals |
| 08/06/2013 | US8501268 Methods of forming material over a substrate and methods of forming capacitors |
| 08/06/2013 | US8501266 Method and apparatus |
| 08/06/2013 | US8501144 Polycrystalline diamond apparatuses and methods of manufacture |
| 08/06/2013 | US8501143 Single crystal diamond prepared by CVD |
| 08/06/2013 | US8500978 Composite coating apparatus |
| 08/06/2013 | US8500977 Coating apparatus |
| 08/06/2013 | US8500974 Carrier and sputtering device using the same |
| 08/06/2013 | US8500952 Plasma confinement rings having reduced polymer deposition characteristics |
| 08/06/2013 | US8500909 Apparatus for flattening coating material and evaporation deposition device having same |
| 08/06/2013 | US8500908 Method and system for mask handling in high productivity chamber |
| 08/06/2013 | US8500907 Masking system for the masking of a cylinder bore |
| 08/06/2013 | US8500906 Device for jetting gas and solar cell manufacturing method using the same |
| 08/06/2013 | US8499715 Coating appratus having two coating devices for successively coating same surface of substrate |
| 08/06/2013 | DE202013102608U1 Heizeinrichtung für eine Durchlauf-Substratbehandlungsanlage Heater for a continuous substrate treatment plant |
| 08/01/2013 | WO2013112941A1 Method of forming conformal metal silicide films |