| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 08/01/2013 | WO2013112383A1 Molybdenum allyl complexes and use thereof in thin film deposition |
| 08/01/2013 | WO2013112364A1 Aluminum coated or ceramic parts for substrate drive system |
| 08/01/2013 | WO2013112303A1 Isolation of microwave sources through bellows |
| 08/01/2013 | WO2013112302A1 Segmented antenna assembly |
| 08/01/2013 | WO2013112026A1 Oxide film containing indium and method for manufacturing same |
| 08/01/2013 | WO2013111592A1 Method for manufacturing semiconductor device |
| 08/01/2013 | WO2013111358A1 Substrate transfer system and substrate transfer method |
| 08/01/2013 | WO2013110963A1 Apparatus and method for coating a moving metal substrate |
| 08/01/2013 | WO2013087702A3 Large area optical quality synthetic polycrystalline diamond window |
| 08/01/2013 | WO2013064737A3 Apparatus and method for processing substrate |
| 08/01/2013 | WO2012055510A9 Gas lock, and coating apparatus comprising a gas lock |
| 08/01/2013 | US20130196122 Method of surface tension control to reduce trapped gas bubbles |
| 08/01/2013 | US20130196112 Oxide mesostructured film and method for manufacturing the same |
| 08/01/2013 | US20130196081 Crystalline film devices, apparatuses for and methods of fabrication |
| 08/01/2013 | US20130196080 Deposition apparatus and deposition method |
| 08/01/2013 | US20130196078 Multi-Chamber Substrate Processing System |
| 08/01/2013 | US20130196076 Deposition Source, Deposition Apparatus, and Method of Manufacturing Organic Light-Emitting Display Apparatus |
| 08/01/2013 | US20130196054 Apparatus for forming a film and an electroluminescence device |
| 08/01/2013 | US20130195671 Hollow airfoil construction utilizing functionally graded materials |
| 08/01/2013 | US20130193108 Methods of end point detection for substrate fabrication processes |
| 08/01/2013 | US20130192982 Surface implantation for corrosion protection of aluminum components |
| 08/01/2013 | US20130192761 Rotary Substrate Processing System |
| 08/01/2013 | US20130192461 Accelerating transport through graphene membranes |
| 08/01/2013 | DE112011102855T5 Düsenkopf und Anordnung Nozzle head and arrangement |
| 08/01/2013 | DE102012201271A1 Treating surface by gas flame generated from gas mixture comprising combustion gas and oxygen-containing gas e.g. air, by adding/removing combustion gas and oxygen-containing gas or gas mixture water to adjust defined ratio of added water |
| 07/31/2013 | EP2620975A1 Thin film production process and thin film production device |
| 07/31/2013 | EP2620520A2 Quality control of container coatings |
| 07/31/2013 | EP2620519A1 Vacuum deposition apparatus |
| 07/31/2013 | EP2619787A2 Adapter ring for silicon electrode |
| 07/31/2013 | EP2619346A1 Unit for the treatment of an object, in particular the surface of a polymer object |
| 07/31/2013 | CN203103339U Film-coated boat |
| 07/31/2013 | CN203096215U Multilayer composite fixture for film coating |
| 07/31/2013 | CN203096170U Graphene copper wire production device |
| 07/31/2013 | CN203096169U Roll-to-roll type atomic layer deposition equipment |
| 07/31/2013 | CN203096168U Metal organic chemical vapor deposition (MOCVD) equipment |
| 07/31/2013 | CN203096167U Gas distributor |
| 07/31/2013 | CN203096166U Chemical vapor deposition equipment for preparing nano-film |
| 07/31/2013 | CN203096165U Heating wire auxiliary chemical vapor deposition device for preparing solar battery |
| 07/31/2013 | CN203096164U Rotary coating clamp |
| 07/31/2013 | CN103228827A Method for producing epitaxial silicon carbide single crystal substrate |
| 07/31/2013 | CN103228814A Water-reactive al composite material, water-eactive thermally sprayed al film, process for production of thermally sprayed al film, and structural member for film-<wbr/>forming chamber |
| 07/31/2013 | CN103225076A Wear-resistant graphene surface modification method |
| 07/31/2013 | CN103225074A Processing apparatus and process status checking method |
| 07/31/2013 | CN103225073A Vacuum film forming apparatus |
| 07/31/2013 | CN103225072A Gas discharging unit and thin film deposition apparatus including same |
| 07/31/2013 | CN103225071A Method for depositing a chlorine-free conformal SiN film |
| 07/31/2013 | CN103225070A Process for producing silicon oxide films from organoaminosilane precursors |
| 07/31/2013 | CN103224510A Alkoxyaminosilane compounds and applications thereof |
| 07/31/2013 | CN102383111B Solar cell deposition fixture capable of reducing diffraction |
| 07/31/2013 | CN102168256B ZnO:B film grown by utilizing MOCVD (Metal Organic Chemical Vapor Deposition) gradient doping technology and application |
| 07/31/2013 | CN102127748B Thin film deposition apparatus |
| 07/31/2013 | CN102054910B LED chip process integration system and treating method thereof |
| 07/31/2013 | CN102031500B Load chamber for chemical vapor deposition |
| 07/31/2013 | CN101999174B Apparatus for manufacturing thin film solar cell |
| 07/31/2013 | CN101974736B Chemical vapor deposition device and spray head assembly thereof |
| 07/31/2013 | CN101713067B Film formation method and film formation apparatus |
| 07/31/2013 | CN101651100B Film forming method and film forming apparatus |
| 07/31/2013 | CN101432460B Increased polysilicon deposition in a cvd reactor |
| 07/30/2013 | US8497391 Insulating film material, method of film formation using insulating film material, and insulating film |
| 07/30/2013 | US8497190 Process for treating a semiconductor-on-insulator structure |
| 07/30/2013 | US8496999 Field-aided preferential deposition of precursors |
| 07/30/2013 | US8496993 Nanocomposite coatings on cemented carbide |
| 07/30/2013 | US8496992 Methods of forming nanocomposites containing nanodiamond particles by vapor deposition |
| 07/30/2013 | US8496781 Plasma processing apparatus |
| 07/30/2013 | US8496780 Apparatus for the deposition of high dielectric constant films |
| 07/30/2013 | US8496753 Arrangement in connection with ALD reactor |
| 07/25/2013 | WO2013109545A1 Deposition of graphene or conjugated carbons using radical reactor |
| 07/25/2013 | WO2013109401A1 Silicon containing compounds for ald deposition of metal silicate films |
| 07/25/2013 | WO2013109381A1 Molecular layer deposition of silicon carbide |
| 07/25/2013 | WO2013109369A1 Low temperature plasma enhanced chemical vapor deposition of conformal silicon carbon nitride and silicon nitride films |
| 07/25/2013 | WO2013108751A1 Film-forming apparatus |
| 07/25/2013 | WO2013107712A1 Method for producing a ceramic layer on a surface formed from an ni base alloy |
| 07/25/2013 | WO2013107343A1 Showerhead for chemical vapour deposition process |
| 07/25/2013 | WO2013107132A1 Cutting tool with modified surface coating and method for manufacturing same |
| 07/25/2013 | WO2013055141A9 Apparatus and method for surface modification of biological material |
| 07/25/2013 | WO2011116009A3 Vapor deposition reactor system |
| 07/25/2013 | US20130190699 Anti-biofilm intravascular catheter |
| 07/25/2013 | US20130189851 CVD Conformal Vacuum/Pumping Guiding Design |
| 07/25/2013 | US20130189579 Material Engineering for High Performance Li-ion Battery Electrodes |
| 07/25/2013 | US20130189448 Dlc film coated plastic container, and device and method for manufacturing the plastic container |
| 07/25/2013 | US20130189446 Low pressure high frequency pulsed plasma reactor for producing nanoparticles |
| 07/25/2013 | US20130189433 Vapor Deposition Apparatus and Vapor Deposition Method |
| 07/25/2013 | US20130189423 Film-forming material and method for predicting film-forming material |
| 07/25/2013 | US20130187546 Novel Coherent Multiple Side Electromagnets |
| 07/25/2013 | US20130187097 Method for producing graphene at a low temperature, method for direct transfer of graphene using same, and graphene sheet |
| 07/25/2013 | US20130186859 Asymmetrical RF Drive for Electrode of Plasma Chamber |
| 07/25/2013 | US20130186857 Positive displacement pumping chamber |
| 07/25/2013 | US20130186340 Vacuum Film Forming Apparatus |
| 07/25/2013 | US20130186339 Dry Coating Apparatus |
| 07/25/2013 | US20130186338 Shielding Design for Metal Gap Fill |
| 07/25/2013 | US20130186336 Device for plasma treatment of workpieces |
| 07/25/2013 | US20130186334 Vacuum coating apparatus |
| 07/25/2013 | US20130186332 Processing apparatus and process status checking method |
| 07/25/2013 | US20130186325 Process for determining surface contamination of polycrystalline silicon |
| 07/25/2013 | DE102012221945A1 Abscheidungsmaske und Abscheidungsvorrichtung, die diese aufweist Deposition mask and deposition apparatus having this |
| 07/25/2013 | DE102012200976A1 Qualitätskontrolle von Behälterbeschichtungen Quality control of container coatings |
| 07/25/2013 | DE102012001267A1 Partikelstrahlsystem mit Zuführung von Prozessgas zu einem Bearbeitungsort A particle beam system with delivery of process gas to a processing site |
| 07/25/2013 | DE102011108634B4 Substrat-Bearbeitungs-Vorrichtung Substrate processing apparatus |
| 07/25/2013 | DE102011087715A1 Hartstoffbeschichtete körper aus metall, hartmetall, cermet oder keramik sowie verfahren zur herstellung derartiger körper Hard-coated body of metal carbide, cermet or ceramic and process for manufacture of such body |
| 07/25/2013 | DE102008017492B4 Verfahren zum Transport eines bandförmigen Substrats und Vakuumbeschichtungsanlage A method of transporting a strip-shaped substrate and vacuum coating system |