| Patents for C23C 16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (cvd) processes (71,892) |
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| 07/04/2013 | WO2013100616A1 Zn-mg alloy-coated steel sheet with excellent blackening resistance and excellent adhesion and method for manufacturing same |
| 07/04/2013 | WO2013098794A2 Nickel allyl amidinate precursors for deposition of nickel-containing films |
| 07/04/2013 | US20130171546 Coatings for Electrowetting and Electrofluidic Devices |
| 07/04/2013 | US20130171446 Coated article and method for making same |
| 07/04/2013 | US20130171442 Method for modifying porous substrate and modified porous substrate |
| 07/04/2013 | US20130171350 High Throughput Processing Using Metal Organic Chemical Vapor Deposition |
| 07/04/2013 | US20130171349 Sample preparation device for maldi and sample preparation method |
| 07/04/2013 | US20130171348 Thin film deposition apparatus and method for using the same |
| 07/04/2013 | US20130171336 Wafer processing method and system using multi-zone chuck |
| 07/04/2013 | US20130171335 Thin film depositing apparatus and the thin film depositing method using the same |
| 07/04/2013 | US20130168614 Nickel allyl amidinate precursors for deposition of nickel-containing films |
| 07/04/2013 | US20130168352 Methods and apparatuses for controlling plasma properties by controlling conductance between sub-chambers of a plasma processing chamber |
| 07/04/2013 | US20130168229 Method of preparing graphene layer |
| 07/04/2013 | US20130167772 Film forming apparatus |
| 07/04/2013 | US20130167461 Method for producing metalized fibrous composite sheet with olefin coating |
| 07/04/2013 | DE102012113145A1 Device, used for loading and unloading substrates to be treated in batch process, includes processing chamber, and a lock chamber, where processing and lock chambers are bounded via chamber walls and comprise substrate transporting device |
| 07/04/2013 | DE102011122658A1 Verfahren und System zur Herstellung elektrochemischer Zellen für elektrochemische Energiespeicher A method and system for the production of electrochemical cells for electrochemical energy storage |
| 07/04/2013 | DE102005024010B4 Beschichtungsanlage mit Einrichtungen für Prüf- und Serviceroutinen und Verfahren zum Durchführen von Prüf- und Serviceroutinen bei Beschichtungsanlagen Coating system with facilities for testing and service routines and procedures for performing the test and service routines in coating systems |
| 07/03/2013 | EP2610648A1 Microlens structure and fabrication method thereof |
| 07/03/2013 | EP2609614A1 Reactor box chamber cleaning using molecular fluorine |
| 07/03/2013 | EP2609102A1 Molybdenum (iv) amide precursors and use thereof in atomic layer deposition |
| 07/03/2013 | CN203034097U Safety intelligent control chemical vapour deposition (CVD) device |
| 07/03/2013 | CN203034096U Improved large-size sample selenylation processing device |
| 07/03/2013 | CN203034095U Direct type glow equivalent plasma vapor deposition device |
| 07/03/2013 | CN203034094U Graphite disc sucking device |
| 07/03/2013 | CN203034093U Sealing structure for electrode and base of CVD (Chemical Vapor Deposition) reactor |
| 07/03/2013 | CN203034092U Structure for connecting tank body and seal head of tank-like container |
| 07/03/2013 | CN203034091U PECVD (plasma enhanced chemical vapour deposition) microwave copper pipe |
| 07/03/2013 | CN203034090U Spare part baking jig of MOCVD (metal organic chemical vapor deposition) device |
| 07/03/2013 | CN203034089U Metal dust filtering device of MOCVD (metal organic chemical vapor deposition) device |
| 07/03/2013 | CN103189999A High efficiency solar cell device with gallium arsenide absorber layer |
| 07/03/2013 | CN103189543A Extended reactor assembly with multiple sections for performing atomic layer deposition on large substrate |
| 07/03/2013 | CN103189202A Gas-barrier laminate film |
| 07/03/2013 | CN103187455A Hybrid layers for use in coatings on electronic devices or other articles |
| 07/03/2013 | CN103187235A Discharging component, cavity device and plasma enhanced chemical vapor deposition (PECVD) device of substrate processing device |
| 07/03/2013 | CN103185906A Microlens structure and fabrication method thereof |
| 07/03/2013 | CN103185771A Liquid sample vaporizing system, diagnosis system and diagnosis program |
| 07/03/2013 | CN103184438A Film heat treatment method and heat treatment device, chemical vapor deposition apparatus |
| 07/03/2013 | CN103184437A 加热系统 Heating system |
| 07/03/2013 | CN103184436A Heating device with thermal expansion gap monitoring function |
| 07/03/2013 | CN103184435A Heating device, heating method and semiconductor processing equipment |
| 07/03/2013 | CN103184434A Tray apparatus, tray and semiconductor processing apparatus |
| 07/03/2013 | CN103184433A Gas diffusion homogenization device and plasma process equipment using same |
| 07/03/2013 | CN103184432A Injection device and processing apparatus |
| 07/03/2013 | CN103184431A Thin film depositing apparatus and the thin film depositing method using the same |
| 07/03/2013 | CN103184430A Film deposition method |
| 07/03/2013 | CN103184429A Film deposition method |
| 07/03/2013 | CN103184428A Integrated vacuum cavity structure applicable to plasma enhanced chemical vapor deposition processing equipment |
| 07/03/2013 | CN103184427A Thin film deposition apparatus and application method thereof |
| 07/03/2013 | CN103184426A Film deposition method |
| 07/03/2013 | CN103184425A Method for growing graphene film by using low-temperature chemical vapor deposition |
| 07/03/2013 | CN103184424A Low temperature material optimization method and processing apparatus |
| 07/03/2013 | CN103182538A Surface-coated cutting tool with a hard coating layer exhibiting excellent cutter breakage resistance |
| 07/03/2013 | CN103182537A Surface-coated cutting tool with a hard coating layer exhibiting excellent cutter breakage resistance |
| 07/03/2013 | CN103182536A Surface-coated cutting tool with excellent chipping resistance, peeling resistance, and wear resistance |
| 07/03/2013 | CN102586777B Preparation method for CBN (Cubic Boron Nitride) coated cutter based on micrometer/nanometer diamond transition layer |
| 07/03/2013 | CN102534565B Load boat for production of coating knife and application thereof |
| 07/03/2013 | CN102337515B Preparation method for high-temperature high-differential pressure valve of diamond coating |
| 07/03/2013 | CN102304696B Method for preparing diamond |
| 07/03/2013 | CN101423935B Substrate processing apparatus and method of controlling substrate processing apparatus |
| 07/02/2013 | US8476587 Ion source with surface coating |
| 07/02/2013 | US8476561 Substrate heating device and substrate heating method |
| 07/02/2013 | US8476161 Method for forming Cu electrical interconnection film |
| 07/02/2013 | US8475672 Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processed |
| 07/02/2013 | US8475598 Strip process for superalloys |
| 07/02/2013 | US8475596 Apparatus to process coating material using flame nozzle and evaporation deposition device having same |
| 07/02/2013 | US8474403 Apparatus for forming thin film and method of manufacturing semiconductor film |
| 06/27/2013 | WO2013096156A1 Catalysts systems |
| 06/27/2013 | WO2013095733A2 Selenophene-based low band gap active layers by chemical vapor deposition |
| 06/27/2013 | WO2013094716A1 Plasma creation device and plasma processing device |
| 06/27/2013 | WO2013094680A1 Substrate processing device, method for manufacturing semiconductor device, and vaporizer |
| 06/27/2013 | WO2013094491A1 Wafer holder |
| 06/27/2013 | WO2013094421A1 Method for producing cyclic siloxane compound, insulating film using cyclic siloxane compound, and disiloxane compound |
| 06/27/2013 | WO2013094232A1 Thin-film formation device, thin-film formation method, and method for manufacturing thin-film solar cell |
| 06/27/2013 | WO2013093580A1 Processes and systems for reducing undesired deposits within a reaction chamber associated with a semiconductor deposition system |
| 06/27/2013 | WO2013093350A1 Graphene production method and graphene obtained by said method |
| 06/27/2013 | WO2013093165A1 Device and method for hot-wire chemical vapour deposition |
| 06/27/2013 | WO2013092770A1 Method for removing deposits performed with varying parameters |
| 06/27/2013 | WO2013091694A1 System and methods for processing a substrate |
| 06/27/2013 | WO2013091280A1 Neutron sensitive coating and method for forming same |
| 06/27/2013 | WO2013091031A1 Antimicrobial communication board |
| 06/27/2013 | WO2013039866A4 Activated silicon precursors for low temperature deposition |
| 06/27/2013 | US20130164537 Method for modifying surface of hydrophobic polymer film and surface-modified hydrophobic polymer film |
| 06/27/2013 | US20130164527 Surface-coated cutting tool and manufacturing method thereof |
| 06/27/2013 | US20130164472 Housing and method for making the same |
| 06/27/2013 | US20130164458 Apparatus and method |
| 06/27/2013 | US20130164445 Self-Contained Heating Element |
| 06/27/2013 | US20130161416 Source Material Supplying Unit For Thin Film Depositing Apparatus |
| 06/27/2013 | US20130161184 Apparatus for forming gas blocking layer and method thereof |
| 06/27/2013 | US20130160948 Plasma Processing Devices With Corrosion Resistant Components |
| 06/27/2013 | US20130160712 Evaporation cell and vacuum deposition system the same |
| 06/27/2013 | US20130160710 Plasma film deposition device |
| 06/27/2013 | US20130160709 Vapor flow control apparatus for atomic layer deposition |
| 06/27/2013 | DE102012111728A1 Hartmetallkörper und Anwendungen davon Cemented carbide body and uses thereof |
| 06/27/2013 | DE102011111629B4 Verfahren zur Herstellung periodischer kristalliner Silizium-Nanostrukturen A process for preparing crystalline silicon-periodic nanostructures |
| 06/27/2013 | DE102007055936B4 Aerosolerzeugerdüse, Aerosolerzeugersystem, Beschichtungssystem und Verfahren Aerosolerzeugerdüse, aerosol generator system, coating system and method |
| 06/26/2013 | EP2607519A2 Scratch resistant coated glass article including layer(s) resistant to fluoride-based etchant(s), and method of making article using combustion CVD |
| 06/26/2013 | EP2607518A1 Nanostructured antennas |
| 06/26/2013 | EP2607516A2 Apparatus for forming gas blocking layer and method thereof |
| 06/26/2013 | EP2607515A2 Diffusion coating method and chromium layer produced according to the method |