| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/28/1995 | US5401543 Diamond-like carbon |
| 03/28/1995 | US5401319 Cleaning |
| 03/28/1995 | US5401307 High temperature-resistant corrosion protection coating on a component, in particular a gas turbine component |
| 03/28/1995 | US5400892 Selector device for feeding an object such as a substrate to a processing station |
| 03/28/1995 | US5400505 Engines |
| 03/28/1995 | CA1334911C Process for the vapor deposition of polysilanes |
| 03/24/1995 | CA2130388A1 Process for barrier coating of plastic objects |
| 03/23/1995 | DE4339490C1 Method and device for coating the inner walls of hollow bodies (cavities), in particular of small dimensions |
| 03/23/1995 | DE4331890A1 Method of applying a coating of hard material to substrates and also cutting tools provided with a coating of hard material |
| 03/22/1995 | EP0644588A1 Wafer with epitaxial layer having a low defect density |
| 03/22/1995 | EP0644573A1 Scan control for ion beam apparatus |
| 03/22/1995 | EP0644273A1 Magnetron plasma sputter deposition apparatus and method of sputter coating onto a substrate |
| 03/22/1995 | EP0355165B1 Process of manufacturing target used for formation of superconductive film |
| 03/22/1995 | CN2192628Y Aim-at target type D.C. magnetic controlled ion splash stage |
| 03/22/1995 | CN1100475A Production method for vacuum film-coated gold & silver imitation decorative board |
| 03/21/1995 | US5400317 Polymethyl methacrylate for disks and coatings formed by sputtering, aluminum or alloys for reflecting layers |
| 03/21/1995 | US5399871 Plasma flood system for the reduction of charging of wafers during ion implantation |
| 03/21/1995 | US5399842 Composite wrapper with vapor deposited electroconductive layer |
| 03/21/1995 | US5399521 Method of semiconductor layer growth by MBE |
| 03/21/1995 | US5399438 Corrosion resistant layers with aluminum or chromium |
| 03/21/1995 | US5399435 Amorphous oxide film and article having such film thereon |
| 03/21/1995 | US5399253 Plasma generating device |
| 03/21/1995 | US5399252 Apparatus for coating a substrate by magnetron sputtering |
| 03/21/1995 | US5399211 Method of plating steel |
| 03/21/1995 | US5399207 Nitriding or oxidation of zirconium or titanium, heating in fluidized bed |
| 03/21/1995 | US5398455 Hard core with diamond layer or boron nitride and coatings of nitrides or carbides of hafnium and bonding |
| 03/16/1995 | WO1995007544A1 Soft plasma ignition in plasma processing chambers |
| 03/16/1995 | WO1995007369A1 Clamp assembly for a vaporization boat |
| 03/16/1995 | WO1995007368A1 Device with miniaturized photoionic head for the treatment of a material |
| 03/16/1995 | DE4430390A1 Process for the production of structured metallic coatings on surfaces |
| 03/16/1995 | CA2166549A1 Soft plasma ignition in plasma processing chambers |
| 03/15/1995 | EP0643400A1 Superconductor thin film and manufacturing method |
| 03/15/1995 | EP0643376A1 Surveillance marker and method of making same |
| 03/15/1995 | EP0643242A1 Element forming a part of a working chamber from a motor having a coating |
| 03/15/1995 | EP0643153A1 Process for the fabrication of structured metallizations on surfaces |
| 03/15/1995 | EP0643151A1 Apparatus and system for arc ion plating |
| 03/15/1995 | EP0642989A1 Microwave interactive barrier films |
| 03/15/1995 | EP0642858A2 Method and apparatus for production of composite ultrafine particles |
| 03/15/1995 | CN2191866Y Device for preparing thermal reflector in film system by laser method |
| 03/15/1995 | CN1100151A Sputtering pole |
| 03/14/1995 | US5397962 Source and method for generating high-density plasma with inductive power coupling |
| 03/14/1995 | US5397448 Device for generating a plasma by means of cathode sputtering and microwave-irradiation |
| 03/14/1995 | US5397446 Method of forming a ferroelectric film |
| 03/14/1995 | US5397373 Raw material for high oxygen chromium target |
| 03/14/1995 | US5397050 Method of bonding tungsten titanium sputter targets to titanium plates and target assemblies produced thereby |
| 03/11/1995 | CA2131127A1 Surveillance marker and method of making same |
| 03/09/1995 | DE4424544A1 Target for cathode-sputtering installations |
| 03/09/1995 | DE4343042C1 Method and device for plasma-activated vapour deposition |
| 03/08/1995 | EP0641224A1 Anti-microbial coating for medical devices |
| 03/08/1995 | EP0568524B1 Composite element comprising a titanium chalcogen or oxychalcogen layer, suitable in particular for use as a positive electrode in a thin-layer fuel cell |
| 03/08/1995 | EP0463022B1 Pyrotechnic materials |
| 03/08/1995 | CN1099813A Low-active surface strong radiation source target making tech. |
| 03/08/1995 | CN1099812A Improvements in the treating of metal surfaces |
| 03/07/1995 | US5396184 Method for the in situ identification of the sheet resistivity or, respectively, of process parameters of thin, electrically conductive layers manufactured under the influence of a plasma |
| 03/07/1995 | US5395735 Optical information recording medium and method of manufacture |
| 03/07/1995 | US5395704 Solid-oxide fuel cells |
| 03/07/1995 | US5395680 Coated cutting tools |
| 03/07/1995 | US5395663 Process for producing a perovskite film by irradiating a target of the perovskite with a laser beam and simultaneously irradiating the substrate upon which the perovskite is deposited with a laser beam |
| 03/07/1995 | US5395662 Improvements in high reflective aluminum sheeting and methods for making same |
| 03/07/1995 | US5395647 Apparatus and method for cooling films coated in a vacuum |
| 03/07/1995 | US5395180 Boron nitride vaporization vessel |
| 03/03/1995 | CA2105423A1 Method and apparatus for carrying out surface processes |
| 03/02/1995 | WO1995006269A1 Multiple layer thin films with improved corrosion resistance |
| 03/02/1995 | DE4328999A1 Medical apparatus and method for silvering it |
| 03/01/1995 | EP0641150A1 Process apparatus |
| 03/01/1995 | EP0641013A2 High density plasma CVD and etching reactor |
| 03/01/1995 | EP0640994A2 Superconductor thin film and manufacturing method |
| 03/01/1995 | EP0640964A1 Target for magneto-optical recording medium and process for production therefof |
| 03/01/1995 | EP0640849A1 An optical film, an antireflection film, a reflection film, a method for forming the optical film, the antireflection film or the reflection film and an optical device |
| 03/01/1995 | EP0640696A1 Nondestructive determination of plasma processing treatment characteristics |
| 03/01/1995 | EP0640474A1 Laminated films |
| 03/01/1995 | EP0563113B1 Preventing of via poisoning by glow discharge induced desorption |
| 03/01/1995 | EP0559787A4 Defect-induced control of the structure of boron nitride |
| 03/01/1995 | EP0532543B1 Sog with moisture resistant protective capping layer |
| 02/28/1995 | US5393986 Ion implantation apparatus |
| 02/28/1995 | US5393984 Magnetic deflection system for ion beam implanters |
| 02/28/1995 | US5393699 Deposited film formation method utilizing selective deposition by use of alkyl aluminum hydride |
| 02/28/1995 | US5393675 Process for RF sputtering of cadmium telluride photovoltaic cell |
| 02/28/1995 | US5393575 Method for carrying out surface processes |
| 02/28/1995 | US5393574 Method for forming light absorbing aluminum nitride films by ion beam deposition |
| 02/28/1995 | US5393573 Method of inhibiting tin whisker growth |
| 02/28/1995 | US5393572 Ion beam assisted method of producing a diamond like carbon coating |
| 02/28/1995 | US5393398 Magnetron sputtering apparatus |
| 02/28/1995 | US5393352 Pb/Bi-containing high-dielectric constant oxides using a non-P/Bi-containing perovskite as a buffer layer |
| 02/28/1995 | US5392981 High density, compatible with magnetron sputtering; hot isostaic pressing |
| 02/28/1995 | CA2130309A1 Confinement of secondary electrons in plasma ion processing |
| 02/23/1995 | WO1995005499A1 Electrode and preparation thereof |
| 02/23/1995 | WO1995005494A1 Masking means and cleaning techniques for surfaces of substrates |
| 02/23/1995 | WO1995005493A1 Method of producing coated particles |
| 02/23/1995 | DE4429472A1 Production process for a magnetic recording medium |
| 02/23/1995 | DE4427215A1 Transparent and conductive ultrathin films and process for the production thereof |
| 02/23/1995 | DE4333825C1 Apparatus for coating elongated flexible products |
| 02/23/1995 | CA2166965A1 Electrode and preparation thereof |
| 02/22/1995 | EP0639655A1 Method and apparatus for sputtering |
| 02/22/1995 | CN1099076A Multi-component alloy plating process for imitating 24k gold |
| 02/21/1995 | US5391407 Condensation of a vaporized stream of carbon-containing precursor molecules; ion beam bombardment |
| 02/21/1995 | US5391275 Method for preparing a shield to reduce particles in a physical vapor deposition chamber |
| 02/21/1995 | US5391231 Holding arrangement for a planar workpiece and at least one such holding arrangement |
| 02/16/1995 | WO1995004840A1 An improved method of forming cubic boron nitride films |
| 02/15/1995 | EP0638660A2 Dry cleaning of semiconductor processing chambers |