Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/1995
05/03/1995EP0650829A1 A packaging laminate possessing gas and light barrier properties, and a method of producing the same
05/03/1995EP0650772A1 Process for depositing a thin layer on a plastic substrate
05/03/1995EP0650535A1 Method of soldering a sputtering target to a backing member
05/03/1995EP0650465A1 Conversion of fullerenes to diamond
05/03/1995CN2196124Y Vacuum film-deposition machine
05/03/1995CN2196123Y Cylindrical magnetic control splash source
05/03/1995CN2196122Y Electric arc evaporation source with cylindrical magnetic control cathod
05/02/1995US5412637 Method for putting an optical head in a stationary state and optical disk drive apparatus
05/02/1995US5411797 Nanophase diamond films
05/02/1995US5411772 Method of laser ablation for uniform thin film deposition
05/02/1995US5411592 Apparatus for deposition of thin-film, solid state batteries
05/02/1995CA2130739A1 Composition and method for off-axis growth sites on nonpolar substrates
05/02/1995CA2029355C Compound oxide superconducting thin film with buffer layer
05/02/1995CA1335439C Alloy heat engine parts covered with a metal-ceramic protective coating
04/1995
04/27/1995WO1995011517A1 Metal vapour deposition unit
04/27/1995WO1995011322A1 A method and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrode
04/26/1995EP0650181A2 Clamp with wafer release for semiconductor wafer processing equipment
04/26/1995CN2195551Y Multi-function omnibearing reinforcing gravity pouring ion-filling machine
04/26/1995CN2195550Y Product with golden surface
04/26/1995CN1102006A Barium ferrite thin film for longitudinal recordin
04/26/1995CN1101991A Apparatus and process for glow discharge
04/25/1995US5410631 Clamp assembly for a vaporization boat
04/25/1995US5410411 Method of and apparatus for forming multi-layer film
04/25/1995US5410162 Apparatus for and method of rapid testing of semiconductor components at elevated temperature
04/25/1995US5409782 Multilayer; metal or alloy thereof, inorganic and organic substance
04/25/1995US5409762 Electric contact materials, production methods thereof and electric contacts used these
04/25/1995US5409590 Target cooling and support for magnetron sputter coating apparatus
04/25/1995US5409587 Sputtering with collinator cleaning within the sputtering chamber
04/25/1995US5409517 Sputtering target and method of manufacturing the same
04/20/1995DE4436176A1 Sputtering source with a target arrangement and holder
04/20/1995DE4408052C1 Use of an apparatus for cluster beam production and for surface coating of a substrate
04/20/1995DE4407774C1 Target for cathode sputtering to produce transparent, conductive layers, and method for the fabrication thereof
04/20/1995DE4335224A1 Process for the production of optical layers
04/19/1995EP0649031A2 Apparatus for and method of testing of semiconductor components
04/19/1995EP0648861A1 Semiconductor processing apparatus
04/19/1995EP0648857A1 Confinement of secondary electrons in plasma ion processing
04/19/1995EP0380682B1 Method of fabricating semiconductor devices
04/18/1995US5407992 Hardening the surface of kapton" by bombarding ions of boron and nitrogen which forms a compound and effects chemical crossliking; wear/corrosiion resistance
04/18/1995US5407867 Method of forming a thin film on surface of semiconductor substrate
04/18/1995US5407602 Transparent conductors comprising gallium-indium-oxide
04/18/1995US5407551 Planar magnetron sputtering apparatus
04/18/1995US5407548 Sputtering target of non-amorphous material with a nickel, iron, chromium, phosphorus, boron alloy, supplying reactive gases to coating chamber to produce amorphous layer
04/18/1995US5407314 Apparatus for synchronizing loading and unloading of substrates with turntable movement in a coating chamber
04/18/1995US5406850 Method of non-destructively testing a sputtering target
04/18/1995CA1335272C Coated article with metallic appearance and method of making same
04/13/1995DE4434302A1 Mechanical parts, and process for the production of a film thereon
04/13/1995DE4342574C1 Band-type vaporisation apparatus
04/12/1995EP0647962A1 Physical vapor deposition employing ion extraction from a plasma
04/12/1995EP0647961A1 Device for coating elongated bendable products
04/12/1995EP0647727A1 Production of carriers for surface plasmon resonance
04/12/1995CN2194365Y Multi-function ion plating machine
04/12/1995CN1101383A Mechanical parts and a method of forming a film on the same
04/11/1995US5406088 Scan and tilt apparatus for an ion implanter
04/11/1995US5406080 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same
04/11/1995US5405906 Vapor deposition, polymerization to form clusters dispersed in polymer
04/11/1995US5405659 Illumination of target material by elliptical ring-shaped laser beam to form pattern, a deposition plume is emitted from pattern formed on target, positioning substrate to receive target material emitted from plume
04/11/1995US5405652 Method of manufacturing a die for use in molding glass optical elements having a fine pattern of concavities and convexities
04/11/1995US5405517 Magnetron sputtering method and apparatus for compound thin films
04/11/1995US5405458 Nitriding titanium-silicon alloy with nitrogen or ammonia gas to forms nitride film having titanium nitride crystalline particles dispersed in a matrix phase of titanium-silicon amorphous phase; wear resistance, high strength
04/11/1995US5405337 Spatially distributed SMA actuator film providing unrestricted movement in three dimensional space
04/06/1995WO1995009136A1 Method of manufacturing a composite material with lamellar interphase between reinforcing fibres and matrix, and material obtained
04/06/1995WO1995002709A3 EXTENDED NITRIDE MATERIAL COMPRISING β-C3N¿4?
04/06/1995DE4431966A1 Atomisation target electrode
04/05/1995EP0647089A1 Process for the manufacture of three dimensional plastic parts having integrated conductive tracks
04/05/1995EP0646660A1 Production of carriers for surface plasmon resonance
04/05/1995EP0646659A1 Production of carriers for surface plasmon resonance
04/05/1995EP0646551A1 Heat-treatment convertible coated glass and method of converting same
04/05/1995EP0646277A1 Giant magnetoresistant single film alloys
04/05/1995EP0646221A1 Magnetostrictive transducer.
04/05/1995EP0556208B1 Device for coating hollow workpieces by gas diffusion
04/05/1995EP0502068B1 Method for coating substrates with silicon based compounds
04/05/1995CN1101082A Anode structure for magnetron sputtering systems
04/04/1995US5404017 Ion implantation apparatus
04/04/1995US5403663 Sputtering; corrosion resistance, improved adhesion
04/04/1995US5403657 Light reflector having surface of unanodized aluminum (or alloy) coated with a ceramic adhesive layer and reflective layer of aluminum, silver, gold, copper, and/or their alloy; lighting fixtures, radiant heaters
04/04/1995US5403629 Vapor deposition of protective metal interlayer on surface of metal component in inert gas mixture before applying aluminum coating
04/04/1995US5403628 Process for producing a coated hard-metal cutting body
04/04/1995US5403614 Placing mask close to insulating substrate to block part of each transparent electrode, depositing film layer on exposed portion in vacuum chamber
04/04/1995US5403459 In situ, two-step plasma process
04/04/1995US5403458 Doping to form elctroconductive layer
04/04/1995US5403401 Substrate carrier
04/04/1995CA1335086C Multilayer heat-reflecting composite films and glazing products containing the same
03/1995
03/30/1995WO1995008831A1 High performance capacitors using nano-structure multilayer materials fabrication
03/30/1995WO1995008438A1 Laminated metal structure
03/30/1995DE4425356A1 Magnetoresistive sensor using a sensor material with perovskite-like crystal structure
03/30/1995DE4407274C1 Process for the production of wear-resistant coatings of cubic boron nitride, and their use
03/30/1995DE4333022A1 Method for producing bitextured thin films on amorphous or arbitrarily structured substrates
03/30/1995DE4332674A1 Apparatus for retaining a flat, preferably circular disc-shaped substrate on the substrate plate of a vacuum coating system
03/29/1995EP0645831A1 Magnetoresistive sensor using sensor material with perowskite crystal structure
03/29/1995EP0645798A1 Magnetron sputtering apparatus
03/29/1995EP0645621A2 Sensor
03/29/1995EP0645470A1 Process for barrier coating of plastic objects
03/29/1995EP0645469A1 Method for controlling a collimated sputtering source
03/29/1995EP0645468A1 Crystal-oriented thin film manufacturing apparatus
03/29/1995EP0645463A2 TiAl-based intermetallic compound piston ring and process for treating the surfaces thereof
03/29/1995EP0645207A2 Ultrafine particles of amorphous metal and method for production thereof
03/28/1995US5401701 Indium tin oxide from indium hydroxide and tin oxide, high density, sputtering target
03/28/1995US5401677 Platinum
03/28/1995US5401675 Sputtering titanium nitride
03/28/1995US5401584 Surveillance marker and method of making same