Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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05/03/1995 | EP0650829A1 A packaging laminate possessing gas and light barrier properties, and a method of producing the same |
05/03/1995 | EP0650772A1 Process for depositing a thin layer on a plastic substrate |
05/03/1995 | EP0650535A1 Method of soldering a sputtering target to a backing member |
05/03/1995 | EP0650465A1 Conversion of fullerenes to diamond |
05/03/1995 | CN2196124Y Vacuum film-deposition machine |
05/03/1995 | CN2196123Y Cylindrical magnetic control splash source |
05/03/1995 | CN2196122Y Electric arc evaporation source with cylindrical magnetic control cathod |
05/02/1995 | US5412637 Method for putting an optical head in a stationary state and optical disk drive apparatus |
05/02/1995 | US5411797 Nanophase diamond films |
05/02/1995 | US5411772 Method of laser ablation for uniform thin film deposition |
05/02/1995 | US5411592 Apparatus for deposition of thin-film, solid state batteries |
05/02/1995 | CA2130739A1 Composition and method for off-axis growth sites on nonpolar substrates |
05/02/1995 | CA2029355C Compound oxide superconducting thin film with buffer layer |
05/02/1995 | CA1335439C Alloy heat engine parts covered with a metal-ceramic protective coating |
04/27/1995 | WO1995011517A1 Metal vapour deposition unit |
04/27/1995 | WO1995011322A1 A method and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrode |
04/26/1995 | EP0650181A2 Clamp with wafer release for semiconductor wafer processing equipment |
04/26/1995 | CN2195551Y Multi-function omnibearing reinforcing gravity pouring ion-filling machine |
04/26/1995 | CN2195550Y Product with golden surface |
04/26/1995 | CN1102006A Barium ferrite thin film for longitudinal recordin |
04/26/1995 | CN1101991A Apparatus and process for glow discharge |
04/25/1995 | US5410631 Clamp assembly for a vaporization boat |
04/25/1995 | US5410411 Method of and apparatus for forming multi-layer film |
04/25/1995 | US5410162 Apparatus for and method of rapid testing of semiconductor components at elevated temperature |
04/25/1995 | US5409782 Multilayer; metal or alloy thereof, inorganic and organic substance |
04/25/1995 | US5409762 Electric contact materials, production methods thereof and electric contacts used these |
04/25/1995 | US5409590 Target cooling and support for magnetron sputter coating apparatus |
04/25/1995 | US5409587 Sputtering with collinator cleaning within the sputtering chamber |
04/25/1995 | US5409517 Sputtering target and method of manufacturing the same |
04/20/1995 | DE4436176A1 Sputtering source with a target arrangement and holder |
04/20/1995 | DE4408052C1 Use of an apparatus for cluster beam production and for surface coating of a substrate |
04/20/1995 | DE4407774C1 Target for cathode sputtering to produce transparent, conductive layers, and method for the fabrication thereof |
04/20/1995 | DE4335224A1 Process for the production of optical layers |
04/19/1995 | EP0649031A2 Apparatus for and method of testing of semiconductor components |
04/19/1995 | EP0648861A1 Semiconductor processing apparatus |
04/19/1995 | EP0648857A1 Confinement of secondary electrons in plasma ion processing |
04/19/1995 | EP0380682B1 Method of fabricating semiconductor devices |
04/18/1995 | US5407992 Hardening the surface of kapton" by bombarding ions of boron and nitrogen which forms a compound and effects chemical crossliking; wear/corrosiion resistance |
04/18/1995 | US5407867 Method of forming a thin film on surface of semiconductor substrate |
04/18/1995 | US5407602 Transparent conductors comprising gallium-indium-oxide |
04/18/1995 | US5407551 Planar magnetron sputtering apparatus |
04/18/1995 | US5407548 Sputtering target of non-amorphous material with a nickel, iron, chromium, phosphorus, boron alloy, supplying reactive gases to coating chamber to produce amorphous layer |
04/18/1995 | US5407314 Apparatus for synchronizing loading and unloading of substrates with turntable movement in a coating chamber |
04/18/1995 | US5406850 Method of non-destructively testing a sputtering target |
04/18/1995 | CA1335272C Coated article with metallic appearance and method of making same |
04/13/1995 | DE4434302A1 Mechanical parts, and process for the production of a film thereon |
04/13/1995 | DE4342574C1 Band-type vaporisation apparatus |
04/12/1995 | EP0647962A1 Physical vapor deposition employing ion extraction from a plasma |
04/12/1995 | EP0647961A1 Device for coating elongated bendable products |
04/12/1995 | EP0647727A1 Production of carriers for surface plasmon resonance |
04/12/1995 | CN2194365Y Multi-function ion plating machine |
04/12/1995 | CN1101383A Mechanical parts and a method of forming a film on the same |
04/11/1995 | US5406088 Scan and tilt apparatus for an ion implanter |
04/11/1995 | US5406080 Process for monitoring ion-assisted processing procedures on wafers and an apparatus for carrying out the same |
04/11/1995 | US5405906 Vapor deposition, polymerization to form clusters dispersed in polymer |
04/11/1995 | US5405659 Illumination of target material by elliptical ring-shaped laser beam to form pattern, a deposition plume is emitted from pattern formed on target, positioning substrate to receive target material emitted from plume |
04/11/1995 | US5405652 Method of manufacturing a die for use in molding glass optical elements having a fine pattern of concavities and convexities |
04/11/1995 | US5405517 Magnetron sputtering method and apparatus for compound thin films |
04/11/1995 | US5405458 Nitriding titanium-silicon alloy with nitrogen or ammonia gas to forms nitride film having titanium nitride crystalline particles dispersed in a matrix phase of titanium-silicon amorphous phase; wear resistance, high strength |
04/11/1995 | US5405337 Spatially distributed SMA actuator film providing unrestricted movement in three dimensional space |
04/06/1995 | WO1995009136A1 Method of manufacturing a composite material with lamellar interphase between reinforcing fibres and matrix, and material obtained |
04/06/1995 | WO1995002709A3 EXTENDED NITRIDE MATERIAL COMPRISING β-C3N¿4? |
04/06/1995 | DE4431966A1 Atomisation target electrode |
04/05/1995 | EP0647089A1 Process for the manufacture of three dimensional plastic parts having integrated conductive tracks |
04/05/1995 | EP0646660A1 Production of carriers for surface plasmon resonance |
04/05/1995 | EP0646659A1 Production of carriers for surface plasmon resonance |
04/05/1995 | EP0646551A1 Heat-treatment convertible coated glass and method of converting same |
04/05/1995 | EP0646277A1 Giant magnetoresistant single film alloys |
04/05/1995 | EP0646221A1 Magnetostrictive transducer. |
04/05/1995 | EP0556208B1 Device for coating hollow workpieces by gas diffusion |
04/05/1995 | EP0502068B1 Method for coating substrates with silicon based compounds |
04/05/1995 | CN1101082A Anode structure for magnetron sputtering systems |
04/04/1995 | US5404017 Ion implantation apparatus |
04/04/1995 | US5403663 Sputtering; corrosion resistance, improved adhesion |
04/04/1995 | US5403657 Light reflector having surface of unanodized aluminum (or alloy) coated with a ceramic adhesive layer and reflective layer of aluminum, silver, gold, copper, and/or their alloy; lighting fixtures, radiant heaters |
04/04/1995 | US5403629 Vapor deposition of protective metal interlayer on surface of metal component in inert gas mixture before applying aluminum coating |
04/04/1995 | US5403628 Process for producing a coated hard-metal cutting body |
04/04/1995 | US5403614 Placing mask close to insulating substrate to block part of each transparent electrode, depositing film layer on exposed portion in vacuum chamber |
04/04/1995 | US5403459 In situ, two-step plasma process |
04/04/1995 | US5403458 Doping to form elctroconductive layer |
04/04/1995 | US5403401 Substrate carrier |
04/04/1995 | CA1335086C Multilayer heat-reflecting composite films and glazing products containing the same |
03/30/1995 | WO1995008831A1 High performance capacitors using nano-structure multilayer materials fabrication |
03/30/1995 | WO1995008438A1 Laminated metal structure |
03/30/1995 | DE4425356A1 Magnetoresistive sensor using a sensor material with perovskite-like crystal structure |
03/30/1995 | DE4407274C1 Process for the production of wear-resistant coatings of cubic boron nitride, and their use |
03/30/1995 | DE4333022A1 Method for producing bitextured thin films on amorphous or arbitrarily structured substrates |
03/30/1995 | DE4332674A1 Apparatus for retaining a flat, preferably circular disc-shaped substrate on the substrate plate of a vacuum coating system |
03/29/1995 | EP0645831A1 Magnetoresistive sensor using sensor material with perowskite crystal structure |
03/29/1995 | EP0645798A1 Magnetron sputtering apparatus |
03/29/1995 | EP0645621A2 Sensor |
03/29/1995 | EP0645470A1 Process for barrier coating of plastic objects |
03/29/1995 | EP0645469A1 Method for controlling a collimated sputtering source |
03/29/1995 | EP0645468A1 Crystal-oriented thin film manufacturing apparatus |
03/29/1995 | EP0645463A2 TiAl-based intermetallic compound piston ring and process for treating the surfaces thereof |
03/29/1995 | EP0645207A2 Ultrafine particles of amorphous metal and method for production thereof |
03/28/1995 | US5401701 Indium tin oxide from indium hydroxide and tin oxide, high density, sputtering target |
03/28/1995 | US5401677 Platinum |
03/28/1995 | US5401675 Sputtering titanium nitride |
03/28/1995 | US5401584 Surveillance marker and method of making same |