Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/2006
07/27/2006DE102005001353A1 Pumpkanal einer längserstreckten Vakuumbeschichtunganlage A longitudinally extending channel pump vacuum coating system
07/27/2006DE102004029595B4 Preparation of nano-column of arrays in polymer matrix on a substrate, comprises simultaneous separation of metal and polymer steam from the gaseous phase
07/27/2006DE102004028030B4 Katalytisches Beschichtungsverfahren für strukturierte Substratoberflächen und mit einer Siliziumdioxid-Dünnschicht beschichtetes Substrat mit einer strukturierten Oberfläche Catalytic coating method for structured substrate surface and coated with a silicon dioxide thin film substrate with a structured surface
07/26/2006EP1684371A1 Metal alloys for forming conductive oxide coatings for electrical contacts
07/26/2006EP1683888A2 Method and apparatus for cathodic arc deposition
07/26/2006EP1683887A1 Film deposition apparatus having hole-like rotary filter plate for capturing fine particles, and film deposition method
07/26/2006EP1683886A2 Vacuum vapor deposition apparatus
07/26/2006EP1683883A1 Molybdenum alloy
07/26/2006EP1683875A2 High-speed tool steel gear cutting tool and manufacturing method therefor
07/26/2006EP1682701A2 LARGE AREA, UNIFORMLY LOW DISLOCATION DENSITY GaN SUBSTRATE AND PROCESS FOR MAKING THE SAME
07/26/2006EP1682691A1 A stainless steel strip coated with a metallic layer
07/26/2006EP1682690A1 Apparatus and method for the vacuum metallization of textile materials and the like
07/26/2006EP1682689A2 Methods of treating components of a deposition apparatus to form particle traps, and such components having particle traps thereon
07/26/2006EP1296363B1 Method of manufacturing group-iii nitride compound semiconductor device
07/26/2006EP1016122B1 Continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages
07/26/2006EP0809719A4 Apparatus and method for a reliable return current path for sputtering processes
07/26/2006EP0789671B1 The combinatorial synthesis of novel materials
07/26/2006CN1809653A A method and apparatus for the production of metal coated steel products
07/26/2006CN1809652A Surface-coating method
07/26/2006CN1809436A Surface-coated high hardness material for tool
07/26/2006CN1808691A Vacuum processing apparatus
07/26/2006CN1807686A Surface anti-rust treatment method for powder moulded permanent magnet
07/26/2006CN1807680A Sputtering target, dielectric film formed from the sputtering target and method for producing the dielectric film
07/26/2006CN1807679A Carbon containing sputter target alloy compositions
07/26/2006CN1807678A Process for preparing multi-component film based on flow field theory
07/26/2006CN1807677A Vacuum vapor deposition apparatus
07/26/2006CN1807676A Process for preparing functional film on fused substrate surface
07/26/2006CN1807675A Single-target magnetic control sputtering process for Cu1-xCrx alloy film
07/26/2006CN1807674A Wafer heater and method for preventing heater pollution
07/26/2006CN1807089A High hardness ZrN/Al2(O1-xNx)3 nanometer multicoating
07/26/2006CN1266740C Micro-powder remover
07/26/2006CN1266306C Sputtering plating apparatus and metal layer/metal compound layer making process therewith
07/26/2006CN1266305C Ring-type sputtering target
07/26/2006CN1266304C Physical gas phase deposition target and method for producing metal material
07/25/2006US7081306 Compressive alpha-tantalum thin film stack
07/25/2006US7081303 Function device and method for manufacturing the same, perpendicular magnetic recording medium, magnetic recording/reproduction apparatus and information processing apparatus
07/25/2006US7081186 Combined coating process comprising magnetic field-assisted, high power, pulsed cathode sputtering and an unbalanced magnetron
07/25/2006US7081166 Planetary system workpiece support and method for surface treatment of workpieces
07/25/2006US7081148 Sheet resistance uniformity
07/20/2006WO2006076333A2 High integrity sputtering target material and method for producing bulk quantities of same
07/20/2006WO2006076287A1 Vaporization source with baffle
07/20/2006WO2006076176A1 Customized one time use vapor deposition source
07/20/2006WO2006075998A2 Means and method for a liquid metal evaporation source with integral level sensor and external reservoir
07/20/2006WO2006075997A2 Biaxially-textured film deposition for superconductor coated tapes
07/20/2006WO2006075755A1 Evaporation source and vapor deposition apparatus
07/20/2006WO2006075401A1 Evaporation source and vapor deposition apparatus
07/20/2006WO2006074625A1 Compartment system of a longitudinally extending vacuum coating assembly
07/20/2006WO2006074624A1 Pumping duct of a longitudinally extending vacuum coating assembly
07/20/2006WO2006074604A1 Surface treated shape memory materials and methods for making same
07/20/2006WO2005119804A3 Depositing organic layers for oled
07/20/2006US20060160369 Method of fabricating semiconductor electric heating film
07/20/2006US20060159940 Providing a protective coating for the aluminum alloy surfaces of an enclosure designed for chemical vapor deposition or etching of integrated circuits and displays; anodizing the aluminium followed by sputtering analumina target for deposition on the anodized layer; purity; anticrackingagents
07/20/2006US20060159933 Heat treatable coated article with zirconium silicon oxynitride layer(s) and methods of making same
07/20/2006US20060159932 reduce oxidation of silver IR reflecting layers, use ceramic cathode to sputter and deposit a zinc oxide protective layer above; increase the electrical conductivity using zinc oxide doped with fluorine or boron
07/20/2006US20060157742 Semiconductor device with epitaxial C49-titanium silicide (TiSi2) layer and method for fabricating the same
07/20/2006US20060157347 Reduced maintenance sputtering chambers
07/20/2006US20060157346 Rotating tubular sputter target assembly
07/20/2006US20060157345 In-line coating/sputtering system with internal static electricity/dust removal and recycle apparatuses
07/20/2006US20060157344 Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilization
07/20/2006US20060157341 Thin piece specimen preparing method and composite charged particle beam device
07/20/2006US20060157340 Transfer chamber for vacuum processing system
07/20/2006US20060156984 Plasma processing apparatus and plasma processing method
07/20/2006US20060156949 inorganic pigments comprising iron oxide coated with silica flakes, used in cosmetics, paints, coatings, plastics, films, documents, papers, seeds, foods or drugs; microcrystals
07/20/2006DE102005007825A1 Verfahren zur Herstellung einer reflexionsmindernden Beschichtung A process for preparing a reflection reducing coating
07/20/2006DE102005001334A1 Kompartmentsystem einer längserstreckten Vakuumbeschichtungsanlage Kompartmentsystem an elongated vacuum coating system
07/20/2006DE102005000911A1 Environmentally resistant mirror coating system has dielectric coupling and diffusion barrier layer on substrate, and dielectric diffusion barrier and protection layer on functional metallic layer
07/20/2006CA2569863A1 Systems and method for fabricating substrate surfaces for sers and apparatuses utilizing same
07/19/2006EP1681369A1 Metal thin film chip production method and metal thin film chip production device
07/19/2006EP1681368A1 Tantalum sputtering target
07/19/2006EP1681367A1 Film-forming apparatus and film-forming method
07/19/2006EP1681366A1 Method for coating an object and object
07/19/2006EP1680829A1 Solid electrolyte, in particular for a thin layer electrochemical cell and production method
07/19/2006EP1680527A1 Apparatus and process for high rate deposition of rutile titanium dioxide
07/19/2006CN2797387Y Continuous vacuum film coating machine with built-in electrostatic dusting mechanism
07/19/2006CN1806063A Deflection magnetic field type vacuum arc vapor deposition device
07/19/2006CN1805119A Chuck plate assembly with cooling means
07/19/2006CN1804138A Mask electro-forming method for vaporization coating of organic light-emitting display
07/19/2006CN1804122A Transplantable ultrathin nano-porous gold film and method for preparing the same
07/19/2006CN1804113A Method for preparing Ti-Si-N film by adjusting gas partial pressure of magnetic controlled sputtering reaction
07/19/2006CN1804112A Electronic ceramic continuous sputtering coating equipment
07/19/2006CN1804111A Barrel type filming apparatus for chip inductor framework
07/19/2006CN1804110A Sputtering target
07/19/2006CN1804109A Preparation method of ultrathin, large-size, high-silicon silicon steel sheet by electron beam physical vapor deposition
07/19/2006CN1804108A Preparation method of lanthanum calcium manganese oxygen film
07/19/2006CN1804107A Composite separator for nanometer particle beam source
07/19/2006CN1804106A Multi-source evaporating physical vapor deposition system
07/19/2006CN1804105A Equipment and method for low temperature depositing high-quality decorative film by electric arc ion plating
07/19/2006CN1803962A Nano grain iron germanium particle film magnetic sensitive material
07/19/2006CN1265680C Laminated material and lamination method by using mask with preset pattern on substrate
07/19/2006CN1265019C Method and means for drill production
07/19/2006CN1265018C Method for preparing high photoconductive gain carbon nitride film
07/19/2006CN1265017C Electron-beam physical vapor deposition process of preparing composite nano soft magnet and ceramic film
07/19/2006CN1265016C Film formation method and film forming device
07/19/2006CN1265015C Method of preparing high-temperature wear resistant coating
07/18/2006US7078852 Method and apparatus for simultaneously depositing and observing materials on a target
07/18/2006US7078070 To haze the heterojunction and increase the efficiency of the radioactive recombination of the electron and the hole
07/18/2006US7078006 For obtaining endohedral metallofullerenes
07/18/2006US7077974 Fine-dimension masks and related processes
07/18/2006US7077943 Barium titanate film synthesizing process
07/18/2006US7077936 Method of producing exchange coupling film and method of producing magnetoresistive sensor by using exchange coupling film