Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
04/2006
04/20/2006DE102005049233A1 Verfahren und Vorrichtung zum Zerstäuben Method and apparatus for atomizing
04/20/2006DE102004051290A1 Apparatus to coat plastics surfaces with a metal, by vapor deposition, has ceramic shuttles each with a magazine of rods for simultaneous transfer of rods into the shuttles for an automatic and continuous operation
04/20/2006DE102004050822A1 Apparatus for cooling plate-form substrates, e.g. wafers, under vacuum, comprising cooling body with cooling surface to which substrate is applied via intermediate space filled with fluid
04/20/2006DE102004050821A1 Vorrichtung und Verfahren zum Kühlen bandförmiger Substrate Apparatus and method for cooling substrates in strip form
04/20/2006DE102004050474A1 Verfahren zur Herstellung eines mit einer Verschleißschutzbeschichtung beschichteten Bauteils A process for producing a coated with a wear protective coating component
04/20/2006DE102004049996A1 Aufdampfmaterial zur Herstellung hochbrechender Schichten Coating material for the production of high refractive index layers
04/20/2006DE102004049389A1 High temperature-resistant, laminated light reflector systems, useful as coatings on glass substrates, e.g. light sources, comprising metallic reflective layer, metallic barrier layer and dielectric covering layer
04/20/2006DE102004014430A1 Vorrichtung und Verfahren zur nasschemischen Präparation von hochreinen Festkörperoberflächen Apparatus and method for wet chemical preparation of highly pure solid surfaces
04/19/2006EP1648034A1 Evaporation material comprising Ta2Ox with x = 4.81 bis 4.88, for the deposition of layers with high refraction
04/19/2006EP1647612A2 Coating system and method for vibrational damping of gas turbine engine airfoils
04/19/2006EP1647605A2 Low oxygen content alloy compositions
04/19/2006EP1392883A4 Assemblies comprising molybdenum and aluminum; and methods of utilizing interlayers in forming target/backing plate assemblies
04/19/2006EP0954948A4 Model based temperature controller for semiconductor thermal processors
04/19/2006EP0627016B1 Cemented carbide with binder phase enriched surface zone
04/19/2006CN2773098Y Vacuum cavity for magnetic-controlled sputtering film coating
04/19/2006CN1762039A Method and apparatus for cleaning of native oxide with hydrogen-containing radicals
04/19/2006CN1761890A Production method for chip-form film-forming component
04/19/2006CN1761832A Universal vacuum coupling for cylindrical target
04/19/2006CN1760407A Method for preparing thin film of transparent hydrophobic born nitride
04/19/2006CN1760406A Method for preparing multilaminar metal sheets in dispersion-strongthened metal/oxide
04/19/2006CN1760405A Physical vapor deposition device and method for Nano silicon-crystal thin film of solar battery
04/19/2006CN1760404A Method and structure for producing non conducting metallized plastic basis material
04/19/2006CN1252804C Bismuth titanium silicon oxide, bismuth titanium silicon oxide film and preparation method of said film
04/19/2006CN1252312C Method and device for producing organic EL elements
04/19/2006CN1252311C Process for preparing large-area zinc oxide film with nano lines by physical gas-phase deposition
04/18/2006US7031600 Method and apparatus for silicon oxide deposition on large area substrates
04/18/2006US7030450 Precursor for hafnium oxide layer and method for forming halnium oxide film using the precursor
04/18/2006US7030013 Method for fabricating semiconductor device using high dielectric material
04/18/2006US7030000 Method for fabricating a metallic oxide of high dielectric constant, metallic oxide of high dielectric constant, gate insulating film and semiconductor element
04/18/2006US7029803 Lithography; multilayer; substrate, thin films , layer having controlled optical transmission; defect-free
04/18/2006US7029560 Rod target for arc evaporation source, manufacturing method therefor, and arc deposition device
04/18/2006CA2245511C Ultrasonic sputtering target testing method
04/13/2006WO2006039211A2 Corrosion resistant apparatus for control of a multi-zone nozzle in a plasma processing system
04/13/2006WO2006038538A1 Method for manufacturing target material for sputtering target
04/13/2006WO2006038494A1 Transparent conductive film and touch panel
04/13/2006WO2006037700A1 Component comprising a coating and method for producing said coating
04/13/2006WO2006037699A1 Component comprising a coating and method for producing a coating
04/13/2006WO2006037516A1 Apparatus for coating a band-shaped substrate
04/13/2006WO2006037505A1 Orthodontic curved brace consisting of a sputtered shape-memory alloy
04/13/2006WO2005103322A3 Device for coating heavy strips in a vacuum
04/13/2006WO2005103319A3 Device for introducing an electric arc source into a coating chamber for large-size substrates or strips
04/13/2006WO2005095668A8 Method and apparatus for producing a metal wire coated with a layer of metal alloy
04/13/2006WO2005019125A3 Coated article with silicon nitride inclusive layer adjacent glass
04/13/2006US20060079388 applying antireflective coatings onto optical lenses
04/13/2006US20060079094 Method for microstructuring flat glass substrates
04/13/2006US20060078750 Low conductivity and sintering-resistant thermal barrier coatings
04/13/2006US20060077884 Phase-change information recording medium, manufacturing method for the same, sputtering target, method for using the phase-change information recording medium and optical recording apparatus
04/13/2006US20060076593 Method to sputter deposit metal on a ferroelectric polymer
04/13/2006US20060076324 Melting and vaporizing apparatus and method
04/13/2006US20060076244 Barrier enhancement process for copper interconnects
04/13/2006US20060076235 System and apparatus for magnetron sputter deposition
04/13/2006US20060076234 Non-planar sputter targets having crystallographic orientations promoting uniform deposition
04/13/2006US20060076233 Magnetic recording medium and method for production thereof
04/13/2006US20060076232 Variable positioning of the magnetron creating a magnetic field to enhance sputtering; two-steps of depositing a barrier metal on a substrate while scanning the outer edge of a target with a small magnetron moving in an outer circular path; cleaning by moving the magnetron towards the center
04/13/2006US20060076231 Method for magnetron sputter deposition
04/13/2006US20060076230 Sputtering target fixture
04/13/2006US20060076091 Shape memory alloy with ductility and a making process of the same
04/13/2006DE102004049772A1 Vacuum chamber process to apply catalytic agent to automotive catalytic converter substrate
04/13/2006DE102004049111A1 Forming high-gloss coatings on substrates, especially car wheels, by plasma pretreatment, plasma polymerization and sputtering with metal (compound) under vacuum, then applying covering layer of lacquer
04/13/2006DE102004048378A1 Zinc oxide film substance for photographic film manufacture for scintillation detector for time-of-flight mass spectrometer
04/13/2006DE102004047659A1 Verfahren zur Herstellung eines Flansches für ein Halbleiterbauelement sowie nach diesem Verfahren hergestellter Flansch Process for the preparation of a flange for a semiconductor device prepared by this method as well as flange
04/13/2006DE102004046280A1 Drehbarer Substrathalter Rotating substrate holder
04/12/2006EP1645661A1 Thermal barrier coatings with low thermal conductivity comprising lanthanide sesquioxides
04/12/2006EP1645655A1 Coated substrate and coating method
04/12/2006EP1644186A2 Heat treatable coated article with dual layer overcoat
04/12/2006EP1644143A2 Sputtering target assembly having low conductivity backing plate and method of making same
04/12/2006EP1115899B1 Low temperature sputter target bonding method and target assemblies produced thereby
04/12/2006CN1759202A Hafnium alloy target and process for producing the same
04/12/2006CN1758076A Manufacturing method of absorption near infrared ray and orange coloured light substrate of PDP protective screen
04/12/2006CN1757793A Spray coating technology for preparing high melting point coramic coating layer
04/12/2006CN1757788A Method of preparing antifriction I1F-WS2/IF-MoS2 composite film by magnetic controlled sputtering
04/12/2006CN1757787A Preparation method of intermetallic compound/metal multilayer plate
04/12/2006CN1757786A Manufacturing method of heat product
04/12/2006CN1757785A Preparation method of calcium titanium ore structure lanthanum strontium manganese oxygen half metal film
04/12/2006CN1250984C Functional film improved optical property and electrical property
04/12/2006CN1250779C Pyrolyzing borium nitride crucible and method
04/12/2006CN1250766C Method for producing composite material and composite material produced thereby
04/12/2006CN1250765C Thermal barrier coating suitable for nickel-based high-temperature alloy with high Mo content and preparing method thereof
04/12/2006CN1250482C Prep.of strontium titanate barium ceramic target
04/12/2006CN1250475C Method and apparatus for producing silver based low emission coatings without use of metal primer layers and articles produced thereby
04/11/2006US7026696 Thin film-structure and a method for producing the same
04/11/2006US7026694 Lanthanide doped TiOx dielectric films by plasma oxidation
04/11/2006US7026187 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition
04/11/2006US7026077 Forming pattern on radiation transparent substrate; sputtering in helium environment; heating
04/11/2006US7026057 A thin transition layer made of metal or alloy that varies from a first composition to a second composition and in which first composition function as corrosion resistance and second composition determine visible color
04/11/2006US7026046 Component comprising submicron hollow spaces
04/11/2006US7026009 Evaluating textured coating on structure by: directing a beam of electrons onto surface grains of textured coating causing electrons to be backscattered, detecting backscattered electrons and generating a signal image, evaluating signal
04/11/2006US7025895 Plasma processing apparatus and method
04/11/2006US7025863 Vacuum system with separable work piece support
04/11/2006US7025859 Coated article with improved barrier layer structure and method of making the same
04/11/2006US7025836 Modification of surfaces in order to increase the surface tension
04/11/2006US7025833 Apparatus and method for web cooling in a vacuum coating chamber
04/11/2006US7025832 Source for thermal physical vapor deposition of organic electroluminescent layers
04/11/2006CA2403693C Liquid crystal device and manufacturing method
04/11/2006CA1341504C Substituted superconductive bi-sr-ca-cu oxide and bi-sr-ca-ln-cu oxide compositions
04/06/2006WO2006036547A2 Methods for forming superconducting conductors
04/06/2006WO2006036393A2 Protected polymeric film
04/06/2006WO2006036215A2 Superconductor fabrication processes
04/06/2006WO2006034676A1 Layer system that can be annealed and method for producing the same
04/06/2006WO2006034598A1 Method for the production of magnetron-coated substrates and magnetron sputter source