Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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04/20/2006 | DE102005049233A1 Verfahren und Vorrichtung zum Zerstäuben Method and apparatus for atomizing |
04/20/2006 | DE102004051290A1 Apparatus to coat plastics surfaces with a metal, by vapor deposition, has ceramic shuttles each with a magazine of rods for simultaneous transfer of rods into the shuttles for an automatic and continuous operation |
04/20/2006 | DE102004050822A1 Apparatus for cooling plate-form substrates, e.g. wafers, under vacuum, comprising cooling body with cooling surface to which substrate is applied via intermediate space filled with fluid |
04/20/2006 | DE102004050821A1 Vorrichtung und Verfahren zum Kühlen bandförmiger Substrate Apparatus and method for cooling substrates in strip form |
04/20/2006 | DE102004050474A1 Verfahren zur Herstellung eines mit einer Verschleißschutzbeschichtung beschichteten Bauteils A process for producing a coated with a wear protective coating component |
04/20/2006 | DE102004049996A1 Aufdampfmaterial zur Herstellung hochbrechender Schichten Coating material for the production of high refractive index layers |
04/20/2006 | DE102004049389A1 High temperature-resistant, laminated light reflector systems, useful as coatings on glass substrates, e.g. light sources, comprising metallic reflective layer, metallic barrier layer and dielectric covering layer |
04/20/2006 | DE102004014430A1 Vorrichtung und Verfahren zur nasschemischen Präparation von hochreinen Festkörperoberflächen Apparatus and method for wet chemical preparation of highly pure solid surfaces |
04/19/2006 | EP1648034A1 Evaporation material comprising Ta2Ox with x = 4.81 bis 4.88, for the deposition of layers with high refraction |
04/19/2006 | EP1647612A2 Coating system and method for vibrational damping of gas turbine engine airfoils |
04/19/2006 | EP1647605A2 Low oxygen content alloy compositions |
04/19/2006 | EP1392883A4 Assemblies comprising molybdenum and aluminum; and methods of utilizing interlayers in forming target/backing plate assemblies |
04/19/2006 | EP0954948A4 Model based temperature controller for semiconductor thermal processors |
04/19/2006 | EP0627016B1 Cemented carbide with binder phase enriched surface zone |
04/19/2006 | CN2773098Y Vacuum cavity for magnetic-controlled sputtering film coating |
04/19/2006 | CN1762039A Method and apparatus for cleaning of native oxide with hydrogen-containing radicals |
04/19/2006 | CN1761890A Production method for chip-form film-forming component |
04/19/2006 | CN1761832A Universal vacuum coupling for cylindrical target |
04/19/2006 | CN1760407A Method for preparing thin film of transparent hydrophobic born nitride |
04/19/2006 | CN1760406A Method for preparing multilaminar metal sheets in dispersion-strongthened metal/oxide |
04/19/2006 | CN1760405A Physical vapor deposition device and method for Nano silicon-crystal thin film of solar battery |
04/19/2006 | CN1760404A Method and structure for producing non conducting metallized plastic basis material |
04/19/2006 | CN1252804C Bismuth titanium silicon oxide, bismuth titanium silicon oxide film and preparation method of said film |
04/19/2006 | CN1252312C Method and device for producing organic EL elements |
04/19/2006 | CN1252311C Process for preparing large-area zinc oxide film with nano lines by physical gas-phase deposition |
04/18/2006 | US7031600 Method and apparatus for silicon oxide deposition on large area substrates |
04/18/2006 | US7030450 Precursor for hafnium oxide layer and method for forming halnium oxide film using the precursor |
04/18/2006 | US7030013 Method for fabricating semiconductor device using high dielectric material |
04/18/2006 | US7030000 Method for fabricating a metallic oxide of high dielectric constant, metallic oxide of high dielectric constant, gate insulating film and semiconductor element |
04/18/2006 | US7029803 Lithography; multilayer; substrate, thin films , layer having controlled optical transmission; defect-free |
04/18/2006 | US7029560 Rod target for arc evaporation source, manufacturing method therefor, and arc deposition device |
04/18/2006 | CA2245511C Ultrasonic sputtering target testing method |
04/13/2006 | WO2006039211A2 Corrosion resistant apparatus for control of a multi-zone nozzle in a plasma processing system |
04/13/2006 | WO2006038538A1 Method for manufacturing target material for sputtering target |
04/13/2006 | WO2006038494A1 Transparent conductive film and touch panel |
04/13/2006 | WO2006037700A1 Component comprising a coating and method for producing said coating |
04/13/2006 | WO2006037699A1 Component comprising a coating and method for producing a coating |
04/13/2006 | WO2006037516A1 Apparatus for coating a band-shaped substrate |
04/13/2006 | WO2006037505A1 Orthodontic curved brace consisting of a sputtered shape-memory alloy |
04/13/2006 | WO2005103322A3 Device for coating heavy strips in a vacuum |
04/13/2006 | WO2005103319A3 Device for introducing an electric arc source into a coating chamber for large-size substrates or strips |
04/13/2006 | WO2005095668A8 Method and apparatus for producing a metal wire coated with a layer of metal alloy |
04/13/2006 | WO2005019125A3 Coated article with silicon nitride inclusive layer adjacent glass |
04/13/2006 | US20060079388 applying antireflective coatings onto optical lenses |
04/13/2006 | US20060079094 Method for microstructuring flat glass substrates |
04/13/2006 | US20060078750 Low conductivity and sintering-resistant thermal barrier coatings |
04/13/2006 | US20060077884 Phase-change information recording medium, manufacturing method for the same, sputtering target, method for using the phase-change information recording medium and optical recording apparatus |
04/13/2006 | US20060076593 Method to sputter deposit metal on a ferroelectric polymer |
04/13/2006 | US20060076324 Melting and vaporizing apparatus and method |
04/13/2006 | US20060076244 Barrier enhancement process for copper interconnects |
04/13/2006 | US20060076235 System and apparatus for magnetron sputter deposition |
04/13/2006 | US20060076234 Non-planar sputter targets having crystallographic orientations promoting uniform deposition |
04/13/2006 | US20060076233 Magnetic recording medium and method for production thereof |
04/13/2006 | US20060076232 Variable positioning of the magnetron creating a magnetic field to enhance sputtering; two-steps of depositing a barrier metal on a substrate while scanning the outer edge of a target with a small magnetron moving in an outer circular path; cleaning by moving the magnetron towards the center |
04/13/2006 | US20060076231 Method for magnetron sputter deposition |
04/13/2006 | US20060076230 Sputtering target fixture |
04/13/2006 | US20060076091 Shape memory alloy with ductility and a making process of the same |
04/13/2006 | DE102004049772A1 Vacuum chamber process to apply catalytic agent to automotive catalytic converter substrate |
04/13/2006 | DE102004049111A1 Forming high-gloss coatings on substrates, especially car wheels, by plasma pretreatment, plasma polymerization and sputtering with metal (compound) under vacuum, then applying covering layer of lacquer |
04/13/2006 | DE102004048378A1 Zinc oxide film substance for photographic film manufacture for scintillation detector for time-of-flight mass spectrometer |
04/13/2006 | DE102004047659A1 Verfahren zur Herstellung eines Flansches für ein Halbleiterbauelement sowie nach diesem Verfahren hergestellter Flansch Process for the preparation of a flange for a semiconductor device prepared by this method as well as flange |
04/13/2006 | DE102004046280A1 Drehbarer Substrathalter Rotating substrate holder |
04/12/2006 | EP1645661A1 Thermal barrier coatings with low thermal conductivity comprising lanthanide sesquioxides |
04/12/2006 | EP1645655A1 Coated substrate and coating method |
04/12/2006 | EP1644186A2 Heat treatable coated article with dual layer overcoat |
04/12/2006 | EP1644143A2 Sputtering target assembly having low conductivity backing plate and method of making same |
04/12/2006 | EP1115899B1 Low temperature sputter target bonding method and target assemblies produced thereby |
04/12/2006 | CN1759202A Hafnium alloy target and process for producing the same |
04/12/2006 | CN1758076A Manufacturing method of absorption near infrared ray and orange coloured light substrate of PDP protective screen |
04/12/2006 | CN1757793A Spray coating technology for preparing high melting point coramic coating layer |
04/12/2006 | CN1757788A Method of preparing antifriction I1F-WS2/IF-MoS2 composite film by magnetic controlled sputtering |
04/12/2006 | CN1757787A Preparation method of intermetallic compound/metal multilayer plate |
04/12/2006 | CN1757786A Manufacturing method of heat product |
04/12/2006 | CN1757785A Preparation method of calcium titanium ore structure lanthanum strontium manganese oxygen half metal film |
04/12/2006 | CN1250984C Functional film improved optical property and electrical property |
04/12/2006 | CN1250779C Pyrolyzing borium nitride crucible and method |
04/12/2006 | CN1250766C Method for producing composite material and composite material produced thereby |
04/12/2006 | CN1250765C Thermal barrier coating suitable for nickel-based high-temperature alloy with high Mo content and preparing method thereof |
04/12/2006 | CN1250482C Prep.of strontium titanate barium ceramic target |
04/12/2006 | CN1250475C Method and apparatus for producing silver based low emission coatings without use of metal primer layers and articles produced thereby |
04/11/2006 | US7026696 Thin film-structure and a method for producing the same |
04/11/2006 | US7026694 Lanthanide doped TiOx dielectric films by plasma oxidation |
04/11/2006 | US7026187 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition |
04/11/2006 | US7026077 Forming pattern on radiation transparent substrate; sputtering in helium environment; heating |
04/11/2006 | US7026057 A thin transition layer made of metal or alloy that varies from a first composition to a second composition and in which first composition function as corrosion resistance and second composition determine visible color |
04/11/2006 | US7026046 Component comprising submicron hollow spaces |
04/11/2006 | US7026009 Evaluating textured coating on structure by: directing a beam of electrons onto surface grains of textured coating causing electrons to be backscattered, detecting backscattered electrons and generating a signal image, evaluating signal |
04/11/2006 | US7025895 Plasma processing apparatus and method |
04/11/2006 | US7025863 Vacuum system with separable work piece support |
04/11/2006 | US7025859 Coated article with improved barrier layer structure and method of making the same |
04/11/2006 | US7025836 Modification of surfaces in order to increase the surface tension |
04/11/2006 | US7025833 Apparatus and method for web cooling in a vacuum coating chamber |
04/11/2006 | US7025832 Source for thermal physical vapor deposition of organic electroluminescent layers |
04/11/2006 | CA2403693C Liquid crystal device and manufacturing method |
04/11/2006 | CA1341504C Substituted superconductive bi-sr-ca-cu oxide and bi-sr-ca-ln-cu oxide compositions |
04/06/2006 | WO2006036547A2 Methods for forming superconducting conductors |
04/06/2006 | WO2006036393A2 Protected polymeric film |
04/06/2006 | WO2006036215A2 Superconductor fabrication processes |
04/06/2006 | WO2006034676A1 Layer system that can be annealed and method for producing the same |
04/06/2006 | WO2006034598A1 Method for the production of magnetron-coated substrates and magnetron sputter source |