Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/2006
05/11/2006WO2006048568A2 Use of a titanium-copper-nickel-based alloy
05/11/2006WO2006047998A1 Coating of displacer components (tooth components) for providing a displacer unit with chemical resistance and tribological protection against wear
05/11/2006WO2005095263A3 Methods of forming alpha and beta tantalum films with controlled and new microstructures
05/11/2006US20060100094 Method and apparatus for manufacturing a catalyst
05/11/2006US20060099831 Silicon source reagent compositions, and method of making and using same for microelectronic device structure
05/11/2006US20060099830 Plasma implantation using halogenated dopant species to limit deposition of surface layers
05/11/2006US20060099519 Method of depositing a material providing a specified attenuation and phase shift
05/11/2006US20060099433 Insert for metal cutting
05/11/2006US20060099140 Sputtering target; radiation transparent; electroconductivity; a bixbyite structure indium oxide crystal phase containing tungsten in a solid solution and/or an indium tungstate compound crystal phase, with no tungsten oxide crystal phase; low electrical resistance
05/11/2006US20060099126 existence of unreacted matter in the target can be eliminated, the production yield can be improved by suppressing the generation of cracks in the target, and the quality of deposition formed by sputtering this kind of target can also be improved
05/11/2006US20060096857 Physical vapor deposition chamber having a rotatable substrate pedestal
05/11/2006US20060096856 Shielded encapsulated vacuum interrupter
05/11/2006US20060096855 Cathode arrangement for atomizing a rotatable target pipe
05/11/2006US20060096852 Process and apparatus for applying optical coatings
05/11/2006US20060096851 Physical vapor deposition chamber having an adjustable target
05/11/2006US20060096748 Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof
05/11/2006US20060096674 Method for coating the surface of a metallic material, device for carrying out said method
05/11/2006US20060096532 Thin film forming apparatus
05/11/2006DE4446992B4 Vorrichtung zum Abscheiden von Schichten auf Substraten An apparatus for depositing layers on substrates
05/11/2006DE102005010930A1 Vorrichtung zum Aufdampfen eines Beschichtungsmaterials An apparatus for vapor deposition of a coating material
05/11/2006DE102005010929A1 Vorrichtung zum Aufdampfen eines Beschichtungsmaterials An apparatus for vapor deposition of a coating material
05/11/2006DE102004052482A1 Verfahren zum Herstellen eines korrosionsgeschützten Stahlblechs A method for producing a corrosion-protected steel sheet
05/11/2006CA2586258A1 Fluorocarbon film and process for its production
05/10/2006EP1655386A2 Optical recording medium and production method of the same
05/10/2006EP1655385A1 Method for making optical coatings
05/10/2006EP1654702A2 Thermography test method and apparatus for evaluating a bond interface of a sputtering target/backing plate assemby
05/10/2006EP1654396A1 Work piece processing by pulsed electric discharges in solid-gas plasma
05/10/2006EP1654395A2 Target/backing plate constructions, and methods of forming them
05/10/2006EP1654394A2 High peak power plasma pulsed supply with arc handling
05/10/2006EP1476587B1 Piston ring comprising a pvd coating
05/10/2006EP1362132B1 Rejuvenation of a tantalum sputtering target.
05/10/2006CN1771547A Silver alloy sputtering target for forming reflection layer of optical recording medium
05/10/2006CN1771350A Tantalum spattering target and method of manufacturing the same
05/10/2006CN1771349A Copper alloy sputtering target process for producing the same and semiconductor element wiring
05/10/2006CN1771346A Method of forming metal blanks for sputtering targets
05/10/2006CN1771343A Composition for making metal matrix composites
05/10/2006CN1770939A Organic electroluminescence element
05/10/2006CN1770398A Method for cleaning surface of wafer carrying mechanism of semiconductor machine
05/10/2006CN1769544A Method for developping monocrystalline iron nanometer thread on silicon substrate
05/10/2006CN1769515A Cathode arrangement for atomizing a rotatable target pipe
05/10/2006CN1769514A Heating crucible and deposition apparatus including the same
05/10/2006CN1769513A Deposition method and apparatus
05/10/2006CN1769512A Vaporization coating apparatus and method
05/10/2006CN1769326A Tin indium oxide transparent conductive glass and its production process
05/10/2006CN1255844C Shady cover used for manufacturing plane display device
05/10/2006CN1255572C Instantaneously switch controlled vacuum unit for gaseous beam source furnace
05/09/2006US7041588 Method for producing smooth indium-tin-oxide layers on substrates and a substrate coating of indium-tin-oxide
05/09/2006US7041430 Preventing dissolution and diffusion of atoms in a protective layer from lowering reflectivity and times of overwriting of an optical disk by a protective layer having a tin content of 23.3-32.3% in contact with the recording layer
05/09/2006US7041391 Method for forming thin films
05/09/2006US7041389 Color-converting/filter substrate, multi-color organic EL display panel using the color-converting/filter substrate, and manufacturing methods thereof
05/09/2006US7041383 metallic substrate with ceramic coating consisting of a formula of NdxZr1-xOy with yttria and hafnia added and dissolved in; protective coatings for turbine components, (e.g. blades and vanes) to prevent the components from overheating during high temperature operation.
05/09/2006US7041341 Process for the fabrication of oxide films
05/09/2006US7041205 Sputtering target and method for making composite soft magnetic films with a sintered target
05/09/2006US7041204 Physical vapor deposition components and methods of formation
05/09/2006US7041202 Timing circuit for synchronizing changes in the target-cathode voltages with changes in the pallet bias voltage; magnetic recording media
05/09/2006US7041201 Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith
05/09/2006US7041200 Reducing particle generation during sputter deposition
05/09/2006CA2190856C Apparatus for deposition of thin-film, solid state batteries
05/09/2006CA2156431C A spatially distributed sma actuator film
05/05/2006CA2525061A1 Process for applying in particular optical coatings
05/04/2006WO2006046998A1 Vapor deposition source with plual apertures
05/04/2006WO2006046153A1 Palladium-containing nanoscale catalysts
05/04/2006WO2006045570A1 Method for producing a steel sheet protected against corrosion
05/04/2006WO2006045527A1 Method and device for producing a top coat layer
05/04/2006WO2006020469A3 Mask for vapor deposition
05/04/2006WO2005120824A3 Durable thermal barrier coating having low thermal conductivity
05/04/2006US20060093868 Vertical magnetic recording medium and manufacturing method thereof
05/04/2006US20060093860 Coated product and method of production thereof
05/04/2006US20060093840 Sputtering process for coating a substrate with at least one functional layer, the sputtering process being interrupted at least once by the application of a metal oxide intermediate layer with a thickness of less than 20 nm; high optical quality and/or a high surface smoothness
05/04/2006US20060093833 Components having crystalline coatings of the aluminum oxide/silicon oxide system and method for the production thereof
05/04/2006US20060093754 System and method for supplying precursor gases to an implantation tool
05/04/2006US20060093753 Method of engineering a property of an interface
05/04/2006US20060091000 Novel thiosilicate phosphor compositions and deposition methods using barium-silicon vacuum deposition sources for deposition of thiosilicate phosphor films
05/04/2006US20060090999 Allows larger coating area; vacuum chamber, prism-shaped sputter target assembly, material to be sputtered forming the outer surface of the target assembly and positioned such that the outer surface is surrounded by the plasma within the vacuum chamber
05/04/2006US20060090998 Manufacturing process for perpendicular magnetic recording medium
05/04/2006DE102004052169A1 Oberflächenveredeltes Objekt, Verfahren zu dessen Herstellung sowie Verwendung des Objektes Highly finished object, process for its preparation and use of the object
05/04/2006DE10018143B4 DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems DLC layer system and method and apparatus for producing such a layer system
05/03/2006EP1653484A1 Superconducting wire and its production method
05/03/2006EP1652968A1 Coating systems containing beta phase and gamma-prime phase nickel aluminide
05/03/2006EP1652966A2 Hard-carbon coated sliding member
05/03/2006EP1652963A1 Surface-improved object, method of its manufacture and use of the object
05/03/2006EP1652960A1 Sputtering target and method for production thereof
05/03/2006EP1652959A1 Method for depositing gamma-prime nickel aluminide coatings
05/03/2006EP1652945A1 Fine grain recrystallised niobium or tantalum sheet containing silicon produced by melting followed by thermo-mechanical processing
05/03/2006EP1651798A1 Fabricated titanium article having improved corrosion resistance
05/03/2006CN1768157A Sputtering target and method for preparation thereof
05/03/2006CN1767954A Phase-change information recording medium, manufacturing method for the same, sputtering target, method for using the phase-change information recording medium and optical recording apparatus
05/03/2006CN1767735A Portable electronic device casing and manufacturing method thereof
05/03/2006CN1767226A Thin film forming device, method of forming a thin film, and self-light-emitting device
05/03/2006CN1767146A Substrate processing apparatus, pressure control method for substrate processing apparatus
05/03/2006CN1767145A Vacuum treatment device
05/03/2006CN1766320A Symmetrically arranged vacuum obtaining system
05/03/2006CN1766170A AlSb thin film preparation using coevaporation, bind and annealing process
05/03/2006CN1766158A Preparation method of low resistivity metal oxide lanthanum nickelate
05/03/2006CN1766157A Apparatus for fabricating display device
05/03/2006CN1766156A Filming apparatus
05/03/2006CN1766155A Fliming clamp mask and its filming apparatus
05/03/2006CN1766154A Minute metal protruding point forming method
05/03/2006CN1766143A Fine grain niobium sheet via ingot metallurgy
05/03/2006CN1765626A Metal material for refrigeration and air-conditioning by use of nano plasma and its production method