| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/03/2006 | CN1254844C Method and device for separating ion mass, and ion doping device |
| 05/02/2006 | US7037827 Semiconductor device with epitaxial C49-titanium silicide (TiSi2) layer and method for fabricating the same |
| 05/02/2006 | US7037589 Thin film coating having niobium-titanium layer |
| 05/02/2006 | US7037577 Glass substrates coated with a stack of thin layers having reflective properties in the infra-red and/or solar ranges |
| 05/02/2006 | US7037446 Radiation image storage panel |
| 05/02/2006 | US7037413 has barrier layer between protective layer and recording layer, barrier layer including germanium nitride or oxynitride and element belonging to Groups IIIa, IVa, Va, VIa, VIIa, VIII, Ib and IIb and carbon; excellent weather resistance and repeating characteristics |
| 05/02/2006 | US7037380 Method for cleaning chamber of deposition apparatus for organic EL device production |
| 04/27/2006 | WO2006044166A2 Method of making coated article having ir reflecting layer with predetermined target-substrate distance |
| 04/27/2006 | WO2006044002A2 System and apparatus for magnetron sputter deposition |
| 04/27/2006 | WO2006043723A1 Evaporation source |
| 04/27/2006 | WO2006043711A1 Method of manufacturing perpendicular magnetic recording medium and perpendicular magnetic recording medium |
| 04/27/2006 | WO2006043704A1 Printer, and printer control method |
| 04/27/2006 | WO2006043554A1 Plasma sputtering film deposition method and equipment |
| 04/27/2006 | WO2006043551A1 Plasma sputtering film deposition method and equipment |
| 04/27/2006 | WO2006043464A1 Method for producing film, and, film |
| 04/27/2006 | WO2006042575A1 Device and method for cooling strip substrates |
| 04/27/2006 | WO2005109472A3 Mobile pvd/cvd coating center |
| 04/27/2006 | WO2005107392A3 System for vaporizing materials onto substrate surface |
| 04/27/2006 | WO2005085151A3 Coated article with low-e coating including ir reflecting layer(s) and corresponding method |
| 04/27/2006 | US20060088737 Perpendicular magnetic recording medium with granular structured magnetic recording layer, method for producing the same, and magnetic recording apparatus |
| 04/27/2006 | US20060088736 Perpendicular magnetic recording medium and manufacturing of the same |
| 04/27/2006 | US20060088718 Electro-optical device, method of manufacturing the same, and electronic apparatus |
| 04/27/2006 | US20060088655 provides methods and apparatus for controlling ion dosage in real time during plasma processes. In one embodiment, ion dosages may be controlled using in-situ measurement of the plasma from a mass distribution sensor combined with in-situ measurement from an RF probe. |
| 04/27/2006 | US20060088436 Copper alloy sputtering target process for producing the same and semiconductor element wiring |
| 04/27/2006 | US20060087211 Plasma processing apparatus |
| 04/27/2006 | US20060086691 Porous material and production process thereof |
| 04/27/2006 | US20060086610 Ge-cr alloy sputtering target and process for producing the same |
| 04/27/2006 | US20060086606 Method for manufacturing perpendicular magnetic recording medium |
| 04/27/2006 | US20060086605 Method for magnetron sputtering |
| 04/27/2006 | US20060086438 Fine grain niobium sheet via ingot metallurgy |
| 04/27/2006 | US20060086320 Method and device for plasma treating workpieces |
| 04/27/2006 | DE4405747B4 Magnetfeldunterstützte Zerstäubungsanordnung und hiermit ausgerüstete Vakuumbehandlungsanlage Magnetic field-assisted atomization system and hereby equipped vacuum treatment plant |
| 04/27/2006 | DE102004051684A1 Bearbeitungsvorrichtung mit Hoch- oder Unterdruckkammer Processing apparatus having high or low pressure chamber |
| 04/27/2006 | DE102004051578A1 Method for coating a foil for coating gas turbine blades comprises preparing a foil to be coated, preparing a holder for the foil, arranging the foil on the holder, welding the foil with the holder under vacuum and coating the foil |
| 04/27/2006 | DE102004051496A1 Verfahren und eine Vorrichtung zur Herstellung einer Topcoatschicht A method and an apparatus for preparing a top coat layer |
| 04/27/2006 | CA2524430A1 Fine grain niobium sheet via ingot metallurgy |
| 04/26/2006 | EP1650792A1 Apparatus and method for cooling of platelike substrates |
| 04/26/2006 | EP1650324A2 Sputter coating system and method of sputter coating |
| 04/26/2006 | EP1650323A1 Assembly for sputtering aluminium-neodymium alloys |
| 04/26/2006 | EP1650322A1 Backing plates for sputtering targets |
| 04/26/2006 | EP1650321A2 A sputtering system |
| 04/26/2006 | EP1650051A2 Method for surface treatment of plates made of synthetic material |
| 04/26/2006 | EP1649937A1 Coating medical device using air suspension |
| 04/26/2006 | EP1649484A1 Sliding anode for a magnetron sputtering source |
| 04/26/2006 | EP1649074A1 Wear-resistant layer and component comprising a wear-resistant layer |
| 04/26/2006 | EP1493175B1 Gas driven planetary rotation apparatus and methods for forming silicon carbide layers |
| 04/26/2006 | EP1303449B1 Dual degas/cool loadlock cluster tool |
| 04/26/2006 | EP1012865A4 Method and apparatus for controlling a workpiece in a vacuum chamber |
| 04/26/2006 | CN2775070Y Material surface ion injection and deposit composite biasing device |
| 04/26/2006 | CN2775069Y Novel plane sputtering cathode |
| 04/26/2006 | CN1764990A Minute high-performance rare earth magnet for micromini product and process for producing the same |
| 04/26/2006 | CN1764736A Apparatus and methods for ionized deposition of a film or thin layer |
| 04/26/2006 | CN1764735A Al composite material being crumbled with water, al film and al powder comprising the material and methods for preparation thereof, constitutional member for film-forming chamber method for recovering |
| 04/26/2006 | CN1763915A Method of cleaning thin film deposition system, thin film deposition system and program |
| 04/26/2006 | CN1763246A Dispersion strengthened rare earth stabilized zirconia |
| 04/26/2006 | CN1763243A Method for controlling growth of carbon nanotube by ion Injection surface modification |
| 04/26/2006 | CN1763241A Backing plates for sputtering targets |
| 04/26/2006 | CN1763240A Assembly for sputtering aluminum-neodymium alloys |
| 04/26/2006 | CN1763239A Vapor deposition mask |
| 04/26/2006 | CN1763238A Method for manufacturing front substrate of plasma display, vapor deposition process and apparatus therefor |
| 04/26/2006 | CN1253728C Process and equipment for forming film |
| 04/26/2006 | CN1253598C Preparation of carbon supported film |
| 04/25/2006 | US7034091 Parallel deposition, synthesis and screening of an array of diverse materials at known locations on a single substrate surface |
| 04/25/2006 | US7033931 Temperature optimization of a physical vapor deposition process to prevent extrusion into openings |
| 04/25/2006 | US7033679 Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film |
| 04/25/2006 | US7033665 Precision mask for deposition and a method for manufacturing the same, an electroluminescence display and a method for manufacturing the same, and electronic equipment |
| 04/25/2006 | US7033643 Process of manufacturing a coated body |
| 04/25/2006 | US7033514 Method and apparatus for micromachining using a magnetic field and plasma etching |
| 04/25/2006 | US7033471 Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers |
| 04/25/2006 | US7033462 Generation and control of a magnetic field by a magnetic filter. |
| 04/25/2006 | US7033461 Thin film forming apparatus and method |
| 04/25/2006 | US7033435 Process for preparing p-n junctions having a p-type ZnO film |
| 04/20/2006 | WO2006041367A1 Pvd-coated cutting tool insert |
| 04/20/2006 | WO2006041366A1 Cutting tool with wear resistant coating and method of making the same |
| 04/20/2006 | WO2006041160A1 Physical deposition system |
| 04/20/2006 | WO2006010451A3 Vacuum-coating installation and method |
| 04/20/2006 | WO2005066384A8 Wear-resistant layer and component comprising a wear-resistant layer |
| 04/20/2006 | WO2005048284A3 Rotating sputtering magnetron |
| 04/20/2006 | WO2005000759A3 Dielectric-layer-coated substrate and installation for production thereof |
| 04/20/2006 | US20060084335 Contamination resistant fiber sheet |
| 04/20/2006 | US20060083952 Magnetic recording medium with diamond-like carbon protective film, and manufacturing method thereof |
| 04/20/2006 | US20060083949 Vaporizing material for producing highly refractive optical layers |
| 04/20/2006 | US20060083948 Electromagnetic noise suppressor, article with electromagnetic noise suppressing function, and their manufacturing methods |
| 04/20/2006 | US20060083934 Method of making coated article with IR reflecting layer(s) using krypton gas |
| 04/20/2006 | US20060083932 Glass coating |
| 04/20/2006 | US20060083856 Evaporating a material attached to a 2nd electrode by causing an arc discharge between the material and the 1st electrode having sub-electrodes, generating ultrafine particles, and colliding the particles against a substrate; sub-electrodes are in radial alignment to the same portion of the material. |
| 04/20/2006 | US20060081468 Magnetic latch for a vapour deposition system |
| 04/20/2006 | US20060081467 Systems and methods for magnetron deposition |
| 04/20/2006 | US20060081466 High uniformity 1-D multiple magnet magnetron source |
| 04/20/2006 | US20060081465 Assembly for sputtering aluminum-neodymium alloys |
| 04/20/2006 | US20060081464 Backing plates for sputtering targets |
| 04/20/2006 | US20060081463 Sputtering device |
| 04/20/2006 | US20060081459 In-situ monitoring of target erosion |
| 04/20/2006 | US20060081458 Methods and apparatus for sputtering |
| 04/20/2006 | US20060081457 Method of making coated article having IR reflecting layer with predetermined target-substrate distance |
| 04/20/2006 | US20060081337 Capacitive coupling plasma processing apparatus |
| 04/20/2006 | US20060081334 Substrate processing method |
| 04/20/2006 | DE202005020544U1 Vaporiser unit comprises a crucible with a melt zone, a vaporiser zone, a connection between the two zones, and a heating unit |
| 04/20/2006 | DE19853943B4 Katode zur Zerstäubung oder Bogenaufdampfung sowie Vorrichtung zur Beschichtung oder Ionenimplantation mit einer solchen Katode Cathode atomization or Bogenaufdampfung and apparatus for coating or ion implantation with such a cathode |
| 04/20/2006 | DE10348734B4 Verfahren zum selektiven Galvanisieren von Metalloberflächen und Selektiv-Galvanisierungssystem für Metalloberflächen A method for selective electroplating of metal surfaces and selective electroplating system for metal surfaces |