| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/27/2006 | US7067197 Powder metallurgy sputtering targets and methods of producing same |
| 06/27/2006 | US7067191 Method to increase wear resistance of a tool or other machine component |
| 06/27/2006 | US7067170 Vaporization coating using nozzle; vapor deposition; supplying inert gases under pressure; forming pattern |
| 06/27/2006 | US7067006 OH and H resistant silicon material |
| 06/27/2006 | US7066703 Chuck transport method and system |
| 06/27/2006 | US7066107 Shielding system for plasma chamber |
| 06/22/2006 | WO2006065984A2 Dual anode ac supply for continuous deposition of a cathode material |
| 06/22/2006 | WO2006065062A1 A heating apparatus of wafer deposition substrate |
| 06/22/2006 | WO2006064724A1 Surface-covered cutting tool |
| 06/22/2006 | WO2006064414A1 Thin film acoustic reflector stack |
| 06/22/2006 | WO2006064161A1 Method and installation for treating a glass substrate incorporating a magnetron line and a device generating an atmospheric pressure plasma |
| 06/22/2006 | WO2006064060A1 Substrate with antimicrobial properties |
| 06/22/2006 | WO2006064059A1 Substrate with antimicrobial properties |
| 06/22/2006 | WO2006063956A2 Device for the tempered storage of a container |
| 06/22/2006 | WO2006063855A2 Fine-laminar barrier protection layer |
| 06/22/2006 | WO2006063721A1 Tubular target comprising a connecting layer that is situated between the tubular target and the tubular support |
| 06/22/2006 | WO2006038407A3 Vacuum film forming apparatus |
| 06/22/2006 | WO2006029615A3 Preparing and operating a vaporizer body for a pvd metallization installation |
| 06/22/2006 | WO2006009667A3 Highly ionized pvd with moving magnetic field envelope for uniform coverage of structure and wafer |
| 06/22/2006 | US20060134522 Deposition of LiCoO2 |
| 06/22/2006 | US20060134467 lower medium noise, insusceptible to thermal fluctuation and high recording resolution; forming a metal film and forming an super thin film oxide layer |
| 06/22/2006 | US20060134437 Protective layer, composite for forming the protective layer, method of forming the protective layer, and plasma display panel including the protective layer |
| 06/22/2006 | US20060134346 Method of manufacturing heating/cooling coil with nanometer silver coating layer |
| 06/22/2006 | US20060134317 Method for making multifunctional organic thin films |
| 06/22/2006 | US20060131170 Dual anode AC supply for continuous deposition of a cathode material |
| 06/22/2006 | US20060130760 Vacuum coating unit and a method for the differentiated coating of spectacle lenses |
| 06/22/2006 | US20060130750 Cluster tool architecture for processing a substrate |
| 06/22/2006 | DE102004061095A1 Vorrichtung zur temperierten Aufbewahrung eines Behälters Apparatus for storing a temperate container |
| 06/22/2006 | DE102004059876A1 Sputtertarget aus einer Silberlegierung, dessen Verwendung sowie Glassubstrat mit Wärmedämmschicht Sputtering from a silver alloy, its use as well as glass substrate with thermal barrier coating |
| 06/22/2006 | DE102004059200A1 Device for cooling a substrate used in a vacuum deposition process comprises a brush-like unit with metallic bristles arranged between the substrate and a cooling body |
| 06/22/2006 | CA2591119A1 Substrate with antimicrobial properties |
| 06/22/2006 | CA2591036A1 Substrate with antimicrobial properties |
| 06/21/2006 | EP1672715A1 Apparatus for coating a substrate |
| 06/21/2006 | EP1672667A2 Plasma display panel including protective layer and method of forming the protective layer |
| 06/21/2006 | EP1672092A1 Method of bonding a first aluminium comprising mass to a second aluminium comprising mass and target/backing plate structure. |
| 06/21/2006 | EP1672091A1 Wurtzrite thin film, laminate containing wurtzrite crystal layer, and method for production thereof |
| 06/21/2006 | EP1672090A1 Method for recycling coating maskant |
| 06/21/2006 | EP1672086A1 HIGH-PURITY Ni-V ALLOY, TARGET THEREFROM, HIGH-PURITY Ni-V ALLOY THIN FILM AND PROCESS FOR PRODUCING HIGH-PURITY Ni-V ALLOY |
| 06/21/2006 | EP1670968A1 Apparatus for low temperature semiconductor fabrication |
| 06/21/2006 | EP1670967A1 Extended life sputter target |
| 06/21/2006 | EP1670966A1 Vapour deposition method |
| 06/21/2006 | EP1319092B1 Substrate with photocatalytic coating |
| 06/21/2006 | EP1113992B1 Method for preparing suspensions and powders based on indium tin oxide and the use thereof |
| 06/21/2006 | EP0839217B1 A plasma enhanced chemical processing reactor and method |
| 06/21/2006 | CN2789273Y Indium-molybdenum metal mosaic target |
| 06/21/2006 | CN1791948A Amorphous transparent conductive film, sputtering target as its raw material, amorphous transparent electrode substrate, process for producing the same and color filter for liquid crystal display |
| 06/21/2006 | CN1791706A Method for producing single crystal of multi- element oxide single crystal containing bismuth as constituting element |
| 06/21/2006 | CN1791700A Process for the preparation of a composite material |
| 06/21/2006 | CN1791699A Method of forming film on molded body, method of producing molded body with film formed thereon, mold for producing molded body with film formed thereon |
| 06/21/2006 | CN1791629A Process for preparing a composite material |
| 06/21/2006 | CN1791510A Transparent gas barrier laminated film, and electroluminescent light-emitting element, electroluminescent display device, and electrophoretic display panel using the same |
| 06/21/2006 | CN1791499A Film forming mold, film forming method using mold, and film forming control system |
| 06/21/2006 | CN1790773A Method for forming a display device |
| 06/21/2006 | CN1790659A Support ring assembly |
| 06/21/2006 | CN1790617A Replacing method of valv device, processing system and sealing components |
| 06/21/2006 | CN1790614A Method of resetting substrate processing apparatus, storing program and substrate processing apparatus |
| 06/21/2006 | CN1790612A Vacuum-generating apparatus and thin film processing apparatus having the same |
| 06/21/2006 | CN1790611A Apparatus for manufacturing flat-panel display |
| 06/21/2006 | CN1789508A Opening device for spinning machines |
| 06/21/2006 | CN1789495A In-situ treatment method of sapphire substrate for preparation of high-quality zinc oxide film |
| 06/21/2006 | CN1789486A Anti-oxidation treatment method for titanium aluminum alloy |
| 06/21/2006 | CN1789485A Methods and apparatus for providing a floating seal for chamber doors |
| 06/21/2006 | CN1789484A Alignment system, vertical tray transporting assembly, and deposition apparatus with the same |
| 06/21/2006 | CN1789483A Method for preparing LLTO(lithium lanthanum titanate) film by electron beam heat evaporation |
| 06/21/2006 | CN1789482A Evaporation apparatus and method for content gradually variational film |
| 06/21/2006 | CN1789481A Arrangement for coating a substrate |
| 06/21/2006 | CN1789480A Method for preparing aluminium-copper-ferrum quasi-crystal coating by vacuum evaporation |
| 06/21/2006 | CN1789479A Molecule supply source for use in thin-film forming |
| 06/21/2006 | CN1789478A Production process of vacuum aluminium-plated paper |
| 06/21/2006 | CN1789476A Refractory metal plates with uniform texture and methods of making the same |
| 06/21/2006 | CN1788915A Sputtering target and its manufacturing method |
| 06/21/2006 | CN1260770C Zirconia toughtened ceramic components and coatings in semiconductor processing equipment and method of manufacturing thereof |
| 06/21/2006 | CN1260389C Hafnium silicide target for gate oxide film formation and its production method |
| 06/21/2006 | CN1260388C Coating template calibrating device and method for sputtering nano multi-layer film |
| 06/20/2006 | US7064058 Low-temperature growth high-quality ultra-thin praseodymium gate dieletrics |
| 06/20/2006 | US7064049 Ion implantation method, SOI wafer manufacturing method and ion implantation system |
| 06/20/2006 | US7063891 Surface hardened carbon material and process of manufacturing |
| 06/20/2006 | US7063773 High purity sputter targets with target end-of-life indication and method of manufacture |
| 06/20/2006 | US7063748 Methods for coating particles and particles produced thereby |
| 06/20/2006 | US7063658 System having a carrier substrate and a Ti/P or A1/P coating |
| 06/15/2006 | WO2006063308A2 DEPOSITION OF LICoO2 |
| 06/15/2006 | WO2006062035A1 Metal mask unit, method of producing the same, method of installing metal tape, and tension application device |
| 06/15/2006 | WO2006061964A1 Substratum with conductive film and process for producing the same |
| 06/15/2006 | WO2006061517A1 Device for vacuum deposition with recharging reservoir and corresponding vacuum deposition method |
| 06/15/2006 | WO2006061195A2 Sputter target made of a silver alloy, use thereof, and glass substrate comprising a heat insulating layer |
| 06/15/2006 | WO2006017070A3 Protective cotaing on a substrate and method of making thereof |
| 06/15/2006 | WO2005041253A3 Methods for forming superconductor articles and xrd methods for characterizing same |
| 06/15/2006 | US20060127703 Perpendicular magnetic recording medium for high density recording and manufacturing of the same |
| 06/15/2006 | US20060127699 Protective layer and process and arrangement for producing protective layers |
| 06/15/2006 | US20060127602 Nanostructure and process of production thereof |
| 06/15/2006 | US20060124634 Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions |
| 06/15/2006 | US20060124585 Method for manufacturing magnetic recording medium |
| 06/15/2006 | US20060124456 Sputtering target, method for producing sputtering target, sputtering apparatus, and liquid-jet head |
| 06/15/2006 | US20060124455 Thin film forming device and thin film forming method |
| 06/15/2006 | US20060124450 Method and apparatus for cathodic arc deposition of materials on a substrate |
| 06/15/2006 | US20060124449 Thin film coating having niobium-titanium layer |
| 06/15/2006 | US20060124448 Thin film semi-permeable membranes for gas sensor and catalytic applications |
| 06/15/2006 | US20060124447 Multilayer composites and manufacture of same |
| 06/15/2006 | US20060124446 Method for the production of a substrate with a magnetron sputter coating and unit for the same |
| 06/15/2006 | US20060124055 Mask-retaining device |