Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
08/2006
08/23/2006CN1820885A Vacuum seal welding method for window and optic window of low temperature metal Dewar
08/23/2006CN1820880A Cutting tool made of surface-coated cemented carbide with hard coating layer exhibiting excellent wear resistance in high speed cutting operation of high hardnes steel
08/23/2006CN1271701C Coating method for internal part with holes and internal part with holes
08/23/2006CN1271665C Ion source operation method, and ion beam radiation device
08/23/2006CN1271241C Apparatus and method for forming protective film on plasma display
08/23/2006CN1271240C Method and apparatus for preparing thin film by noncontact heating covaporization process
08/23/2006CN1271239C Method and apparatus for preparing large-area thin membrane with thermal evaporation
08/23/2006CN1271238C Method for forming thin-film layer for device and organic electroluminescence device
08/23/2006CN1271237C Metal plasma procedure in multistage ionization
08/23/2006CN1270946C Semiconductor substrate processing system and throughput enhancement method of the same
08/22/2006US7095179 generator comprising enclosures for confining gases, anodes, cathodes and power sources, used for ionization
08/22/2006US7095070 Method for fabricating Bi thin film and device using the same
08/22/2006US7095021 Method, apparatus and system for specimen fabrication by using an ion beam
08/22/2006US7094479 a tungsten carbide based cemented carbide substrate, a titanium carbonitride based cermet substrate, or a cubic boron nitride based sintered substrate; and a hard coating layer of a nitride compound containing aluminum and titanium, formed on a surface of the substrate using a physical vapor deposition
08/22/2006US7094444 Method for repairing coated components using NiAl bond coats
08/22/2006US7094313 Universal mid-frequency matching network
08/22/2006US7093937 Optical component and coating system for coating substrates for optical components
08/22/2006US7093340 Stick resistant ceramic coating for cookware
08/17/2006WO2006086319A2 Sputtering target and method of fabrication
08/17/2006WO2006085994A2 Multi-component substances and apparatus for preparation thereof
08/17/2006WO2006085752A1 Process for preparing a metal film on a substrate
08/17/2006WO2006085354A1 Sputtering system
08/17/2006WO2006085063A1 Sealing of plastic containers
08/17/2006WO2006085020A1 Method for preparing by thermal spraying a silicon- and zirconium-based target
08/17/2006WO2006084756A1 Metallised plastics component with a display region, and method for producing same
08/17/2006WO2006084404A1 High wear resistant triplex coating for cutting tools
08/17/2006WO2006084315A1 Improvements relating to the colouring of hair
08/17/2006WO2006055513A3 Methods of forming three-dimensional pvd targets
08/17/2006US20060183320 Methods of filling trenches using high-density plasma deposition (HDP)
08/17/2006US20060183274 Transparent oxide semiconductor thin film transistors
08/17/2006US20060182999 aluminum (carbo)nitride hard films further combined with niobium and/or tantalum; deposited by cathode-discharge arc ion plating; oxidation resistance and/or wear resistance; use on cutting tools, and tools such as forging dies and stamping punches
08/17/2006US20060182991 Containing bismuth and rare earth metal elements for suppress the growth of crystal grains of Ag and the aggregation of Ag atoms; high thermal conductivity, reflectance and durability; optical recording media; liquid crystal display device; electromagnetic-shielding film
08/17/2006US20060180175 Method and system for determining flow conditions in a high pressure processing system
08/17/2006US20060180078 Gas reaction system and semiconductor processing apparatus
08/17/2006DE202006008808U1 Apparatus for changing tubular targets in coating plant comprises target supporting device, target transport device and magnet system changing device
08/17/2006DE102005050358A1 Vakuumbehandlungsanlage Vacuum treatment plant
08/17/2006DE102005006719A1 Pleuellagerschale oder -buchse oder Hauptlagerschale bei Verbrennungsmotoren Connecting rod bearing or bushing or main bearing shell in internal combustion engines
08/17/2006DE102005006459A1 Metallisiertes Kunststoffbauteil mit einem Anzeigebereich und Verfahren zur Herstellung Metallized plastic component having a display area and methods of making
08/17/2006DE102005004006A1 Holder for holding a lens on its edge by means of an adhesive joint useful in production of optical lenses, especially spectacle lenses with application of adhesive at one point only or at two spaced part points
08/17/2006DE102004061464A1 Feinlaminare Barriereschutzschicht Feinlaminare barrier protective layer
08/17/2006CA2597282A1 Sealing of plastic containers
08/17/2006CA2596622A1 Method for preparing by thermal spraying a silicon- and zirconium-based target
08/16/2006EP1691421A1 Process for preparing a metal film on a substrate
08/16/2006EP1690958A1 Sputtering target material
08/16/2006EP1690279A2 Plasma source with segmented magnetron cathode
08/16/2006EP1689906A1 Method of preparing a metal-silicone rubber composite
08/16/2006EP1689905A1 A steel strip coated with zirconia
08/16/2006EP1387897B1 Electrode arrangement for the plasma-supported magnetically-guided deposition of thin layers in vacuo
08/16/2006EP1299324A4 Freestanding reactive multilayer foils
08/16/2006CN1819305A Green diode with optical microcavity structure and production thereof
08/16/2006CN1819274A Thin-film solar battery barrier with flexible substrate and production thereof
08/16/2006CN1819113A Vacuum processing apparatus and method of using the same
08/16/2006CN1819041A Recording film for use in optical information recording medium, optical information recording medium, and sputtering target
08/16/2006CN1818351A Valve lifter
08/16/2006CN1818136A Ag-based reflection film and method for preparing the same
08/16/2006CN1818135A Pretreatment of metal materials
08/16/2006CN1818130A Production of dual electromagnetic shielding screen by sputtering method
08/16/2006CN1818129A Production of tin-doped indium oxide ITO thin film by electronic beam evaporation
08/16/2006CN1818128A Supporting device for heating crucible and deposition apparatus having the same
08/16/2006CN1818127A Deposition source and deposition apparatus including deposition source
08/16/2006CN1818126A Complex alloy thin film with hydrogen-inducing off-coloring function and production thereof
08/16/2006CN1818125A Hard coating, target for forming hard coating, and method for forming hard coating
08/16/2006CN1818114A Molybdenum alloy
08/16/2006CN1817639A Composite reactive multilayer foil
08/16/2006CN1817638A Composite reactive multilayer foil
08/16/2006CN1817539A Composite reactive multilayer foil
08/16/2006CN1270359C Method for low temperature oxidation of silicon and used apparatus
08/16/2006CN1270195C Liquid crystal dustproof substrate and method for producing same
08/16/2006CN1269990C Method and system for icosaborane implatation
08/16/2006CN1269989C Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof
08/16/2006CN1269866C Production method for copolymer film, copolymer film for med therefrom, and semiconductor device using said copolymer film
08/15/2006US7090947 Phase shifter film and process for the same
08/15/2006US7090889 Boride thin films on silicon
08/15/2006US7090754 Sputtering device
08/15/2006US7090741 Semiconductor processing system
08/15/2006US7089680 Vacuum processing apparatus and operating method therefor
08/15/2006CA2188022C Amorphous diamond coating of blades
08/10/2006WO2006084001A1 Sputter targets with expansion grooves for reduced separation
08/10/2006WO2006083735A1 Feeding particulate material to a heated surface
08/10/2006WO2006083734A2 Controllably feeding organic material in making oleds
08/10/2006WO2006083332A1 Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece
08/10/2006WO2006082879A1 Oxide transparent electroconductive film and method for forming oxide transparent electroconductive film containing alkali metal, and organic optical device utilizing the oxide transparent electroconductive film
08/10/2006WO2006082863A1 Magnetic circuit device for magnetron sputtering and its manufacturing method
08/10/2006WO2006082760A1 Sinter, sputtering target and molding die, and production process of sinter using the same
08/10/2006WO2006082734A1 Separator for fuel cell and method for manufacturing same
08/10/2006WO2006082118A1 Process and device for depositing sequences of layers comprising a plurality of semiconductor components
08/10/2006WO2006010720A3 Reactive silicon suboxide flakes
08/10/2006US20060178009 Wafer stage with wafer positioning and alignment
08/10/2006US20060177963 Process for producing copy protection for an electronic circuit
08/10/2006US20060177769 Information recording medium and its manufacturing method
08/10/2006US20060177596 Method and apparatus for the production of metal coated steel products
08/10/2006US20060177594 Method of fabricating a polarizing layer on an interface
08/10/2006US20060177581 Electron beam physical vapor deposition
08/10/2006US20060177580 Removing vapor deposition material adhering to equipment walls without atmospheric exposure; irradiation sublimation and vacuum pump exhaustion
08/10/2006US20060175198 Method of manufacturing a sputter target
08/10/2006US20060175197 Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
08/10/2006US20060175190 Vacuum arc source comprising a device for generating a magnetic field
08/10/2006US20060174978 Modification of surfaces to increase the surface tension
08/10/2006DE102004047767B3 Method of siliconizing silicon boundary surface e.g. for semiconductor wafer manufacture, involves positioning semiconductor wafer on wafer chuck with wafer thermally decoupled from heated chuck
08/10/2006CA2596409A1 Separator for fuel cell and method for manufacturing same