| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/07/2006 | CN1783533A Method for forming display device |
| 06/07/2006 | CN1783431A Plasma processing apparatus |
| 06/07/2006 | CN1783430A Capacitive coupling plasma processing apparatus |
| 06/07/2006 | CN1783429A Plasma control method and plasma control apparatus |
| 06/07/2006 | CN1782122A Tube-shaped sputtering target |
| 06/07/2006 | CN1782121A Sputtering target, method for producing sputtering target, sputtering apparatus, and liquid-jet head |
| 06/07/2006 | CN1782120A Evaporation source and steam plating device with evaporation source |
| 06/07/2006 | CN1782119A Method of coating a component inside an apparatus |
| 06/07/2006 | CN1258616C Sputter device and sputter film forming method |
| 06/06/2006 | US7057244 Dielectric materials |
| 06/06/2006 | US7056827 Methods of filling trenches using high-density plasma deposition (HDP) |
| 06/06/2006 | US7056620 Thin film battery and method of manufacture |
| 06/06/2006 | US7056602 Precipitation hardened wear resistant coating |
| 06/06/2006 | US7056416 Atmospheric pressure plasma processing method and apparatus |
| 06/06/2006 | US7056197 Dry surface treating apparatus and dry surface treating method using the same apparatus |
| 06/06/2006 | CA2156301C Safety document and process for producing the same |
| 06/01/2006 | WO2006057959A1 High resolution substrate holder leveling device and method |
| 06/01/2006 | WO2006057829A2 Scratch resistant coated article and method of making |
| 06/01/2006 | WO2006057618A2 Product coated with a composite max-material and method of its production |
| 06/01/2006 | WO2006057353A1 Method for forming thin film, deposition source substrate and method for producing the same |
| 06/01/2006 | WO2006057312A1 Wiring/electrode and sputtering target |
| 06/01/2006 | WO2006057021A1 Dispensing system for alkali metals capable of releasing a high quantity of metals |
| 06/01/2006 | WO2006024808A3 Method for transferring a functional organic molecule onto a transparent substrate |
| 06/01/2006 | WO2006005217A3 Highly oxidation resistant hard coating for cutting tools |
| 06/01/2006 | WO2006003322A3 Ion implanter operating in pulsed plasma mode |
| 06/01/2006 | WO2005106072A3 Thermal vacuum deposition method and device |
| 06/01/2006 | US20060115686 Magnetic recording medium and manufacturing method thereof |
| 06/01/2006 | US20060115672 Method of manufacturing a laminated structure |
| 06/01/2006 | US20060115243 Resistance-heated boat and manufacturing method thereof |
| 06/01/2006 | US20060113916 Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode |
| 06/01/2006 | US20060113182 Driving frequency modulation system and method for plasma accelerator |
| 06/01/2006 | US20060112730 Core insert for a glass molding machine, and an apparatus for making the same |
| 06/01/2006 | DE202006004791U1 Stromversorgungseinrichtung A power supply device |
| 06/01/2006 | DE10316379B4 Verfahren zur Herstellung von Metall-Polymer-Nanokompositen A process for preparing metal-polymer nanocomposites |
| 06/01/2006 | DE102004057956A1 Increasing the wear resistance of hard material layers, comprises irradiating the precipitated material in situ with an additional laser |
| 06/01/2006 | DE102004054193A1 Hard coating on any, preferably flexible substrate, comprising at least two morphologically different layers useful in applications involving friction pairs has outer layer comprising hard layer of amorphous, diamond-like carbon (DLC) |
| 05/31/2006 | EP1662514A1 Process for producing oxide superconductive wire |
| 05/31/2006 | EP1662197A2 Metal reflector and method of producing the same |
| 05/31/2006 | EP1662019A1 Method of producing defect free deposited titanium alloys |
| 05/31/2006 | EP1662018A2 Carbon containing sputter target alloy compositions |
| 05/31/2006 | EP1662017A1 Apparatus for evaporation of materials |
| 05/31/2006 | EP1661867A1 Article with photocatalytic film |
| 05/31/2006 | EP1660848A1 Substrate comprising a fabry-perot filter and method for application of the filter to the substrate |
| 05/31/2006 | EP1660696A2 Titanium foil metallization product and process |
| 05/31/2006 | EP1660695A1 Method for depositing an amorphous layer primarily containing fluorine and carbon, and device suited for carrying out this method |
| 05/31/2006 | EP1660694A2 Coated bore cutting tools |
| 05/31/2006 | EP1660618A2 Lubricated part having partial hard coating allowing reduced amounts of antiwear additive |
| 05/31/2006 | EP1660316A2 Silver alloys for optical data storages and optical media containing same |
| 05/31/2006 | EP1322799A4 Surface treatment for improved hardness and corrosion resistance |
| 05/31/2006 | CN1781036A Component comprising submicron hollow spaces |
| 05/31/2006 | CN1780933A Method of manufacturing crystalline film, method of manufacturing crystalline-film-layered substrate, method of manufacturing thermoelectric conversion element, and thermoelectric conversion element |
| 05/31/2006 | CN1780932A Contacting of an electrode with a substance in vacuum |
| 05/31/2006 | CN1780931A Pre-plating surface treatments for enhanced galvanic-corrosion resistance |
| 05/31/2006 | CN1780798A Method of making coated articles and coated articles made thereby. |
| 05/31/2006 | CN1779938A Method and apparatus for controlling temperature of a substrate |
| 05/31/2006 | CN1779925A Production of triple high K grid medium materials |
| 05/31/2006 | CN1779923A Production of thin-film ferroelectric materials with lead zirconate-titanate with reading circuit integration |
| 05/31/2006 | CN1779566A Mask for depositing thin film of flat panel display and method of fabricating the mask |
| 05/31/2006 | CN1778990A Surface treatment for improving metal welding performance and work pieces therefrom |
| 05/31/2006 | CN1778986A Methods and apparatus for sealing a chamber |
| 05/31/2006 | CN1778985A Production of hafnium nitride thin-membrane materials from ion beam epitaxial growth apparatus |
| 05/31/2006 | CN1778984A Production of zirconium nitride thin-membrane materials from ion beam epitaxial growth apparatus |
| 05/31/2006 | CN1778983A Multi-layer nanometer film coater for reinforcing mould surface |
| 05/31/2006 | CN1778731A Moulded glass mould core, its production and producer thereof |
| 05/31/2006 | CN1258211C Hafnium silicide target for forming gate oxide film and method for preparation thereof |
| 05/31/2006 | CN1258209C Conductive thin film for semiconductor device, semiconductor device and methods for producing them |
| 05/31/2006 | CN1257998C Tantalum and niobium billets and methods of producing the same |
| 05/31/2006 | CN1257997C Composite evaporation deposition coating production method, and composite evaporation deposition materials and method for producing same |
| 05/31/2006 | CN1257996C Decorative article having white film and production method therefor |
| 05/31/2006 | CN1257995C Method of depositing IO or ITO thin film on polymer substrate |
| 05/31/2006 | CN1257861C Method for preparing titanium dioxide photo catalytic film by wet hot oxidation |
| 05/30/2006 | US7053455 Semiconductor device and method of manufacturing semiconductor device |
| 05/30/2006 | US7053019 Composition with high dielectric constant and low dielectric loss, which includes a quaternary metallic oxide having a pervoskite structure and represented by a general formula, Ba1-xM1xTi1-yM2yOm. It is suitable for Gbit memory devices, |
| 05/30/2006 | US7053002 Plasma preclean with argon, helium, and hydrogen gases |
| 05/30/2006 | US7052801 Anode thin film for lithium secondary battery and preparation method thereof |
| 05/30/2006 | US7052736 Method for depositing coatings on the interior surfaces of tubular structures |
| 05/30/2006 | US7052731 Plasma processing apparatus, protecting layer therefor and installation of protecting layer |
| 05/30/2006 | US7052585 Overcoating glass substrate; sputtering titanium oxide; bombardment with carbon ion |
| 05/30/2006 | US7052584 Method of forming a capacitor |
| 05/30/2006 | US7052583 Magnetron cathode and magnetron sputtering apparatus comprising the same |
| 05/30/2006 | US7052019 Piston ring and method of manufacturing the same |
| 05/30/2006 | CA2227612C Electrically erasable, directly overwritable, multibit single cell memory elements and arrays fabricated therefrom |
| 05/26/2006 | WO2006055375A1 Organic materials for an evaporation source |
| 05/26/2006 | WO2006055323A2 Scratch resistant coated glass article including carbide layer(s) resistant to fluoride-based etchant(s) |
| 05/26/2006 | WO2006054663A1 Substrate holding apparatus, substrate processing apparatus and liquid crystal display device |
| 05/26/2006 | WO2006054409A1 Sputtering target, sputtering target backing plate assembly and film deposition system |
| 05/26/2006 | WO2006053889A1 Method for preparing flexible mechanically compensated transparent layered material |
| 05/26/2006 | WO2006053678A1 Device for machining workpieces in a vacuum |
| 05/26/2006 | WO2005106066A3 Vaporizing device and method for vaporizing coating material |
| 05/26/2006 | CA2585636A1 Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus |
| 05/25/2006 | US20060111805 Fabrication system and fabrication method |
| 05/25/2006 | US20060111802 Fabrication system and fabrication method |
| 05/25/2006 | US20060110663 Mask for depositing thin film of flat panel display and method of fabricating the mask |
| 05/25/2006 | US20060110629 Magnetic recording medium and manufacturing method thereof, magnetic storage apparatus, substrate and texture forming apparatus |
| 05/25/2006 | US20060110626 Carbon containing sputter target alloy compositions |
| 05/25/2006 | US20060110620 Process chamber component with layered coating and method |
| 05/25/2006 | US20060110578 Photocatalytic film formed article |
| 05/25/2006 | US20060108233 Method of manufacturing form factor disk |
| 05/25/2006 | US20060108217 Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates |
| 05/24/2006 | EP1659575A1 Magnetic recording medium and manufacturing method thereof, magnetic storage apparatus, substrate and texture forming apparatus |