Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2007
10/04/2007US20070227881 Rotary vacuum feedthrough for rotatable magnetrons
10/04/2007US20070227879 Ultra precise polishing method and ultra precise polishing apparatus
10/04/2007US20070227878 Forming ovonic threshold switches with reduced deposition chamber gas pressure
10/04/2007US20070227877 Magnetron-sputtering film-forming apparatus and manufacturing method for a semiconductor device
10/04/2007US20070227876 RF powered target for increasing deposition uniformity in sputtering systems
10/04/2007DE4308632B4 Verfahren und Vorrichtung zum Nachbehandeln von Aluminium-beschichteten Kunststoff-Folien Method and apparatus for after-treatment of aluminum-coated plastic films
10/04/2007DE112005002801T5 Verdampfungsquellenvorrichtung Evaporation source device
10/04/2007DE102006013215A1 Wärmedämmschicht-System Thermal barrier coating system
10/03/2007EP1840241A2 Atomic deposition layer methods
10/03/2007EP1840240A1 Sb-Te BASED ALLOY POWDER FOR SINTERING AND SINTERED SPUTTERING TARGET PREPARED BY SINTERING SAID POWDER, AND METHOD FOR PREPARING Sb-Te BASED ALLOY POWDER FOR SINTERING
10/03/2007EP1838640A2 Fine-laminar barrier protection layer
10/03/2007EP1449234B1 Magnetron sputtering device
10/03/2007EP1026283B1 Method for preparing high purity ruthenium sputtering target
10/03/2007CN101048531A Protective coating on a substrate and method of making thereof
10/03/2007CN101048530A Coated product and method of its production
10/03/2007CN101048529A Coated product and method of production thereof
10/03/2007CN101048528A High oxidation resistant hard coating for cutting tools
10/03/2007CN101045989A Low energy ion implanter based on great area DC pulse plasma
10/03/2007CN101045988A Production apparatus for surface modification of metal plate and band
10/03/2007CN101045987A Sputter chamber for coating a substrate
10/03/2007CN101045986A Process of making sputtered target material
10/03/2007CN101045985A Method for controlling crystal granularity of FeS2 film
10/03/2007CN101045984A Vacuum film coating apparatus
10/03/2007CN101045983A Process of generating high density metal plasma without liquid drop
10/03/2007CN101045981A Oxidation-resistant coating and formation method thereof, thermal barrier coating, heat-resistant member, and gas turbine
10/03/2007CN101045612A Tin antimony oxide film material of P-type transparent conduction and manufacturing method thereof
10/03/2007CN101045611A Method for preparing nano crystal TiO film by deposition from plasma chemical vapour phase at ordinary temp and ordinary pressure
10/03/2007CN101045610A Self-clean film material and preparation method
10/03/2007CN101045183A Gold club head with modified surface and its making method
10/03/2007CN100341172C Film lithium ion battery using stannous selenide film as anode material and its preparation method
10/03/2007CN100341123C Method for producing aluminium nitride chip
10/03/2007CN100340700C Hall ion source actuated magnetron sputtering enhancing type multi-arc ion plating film method
10/03/2007CN100340699C Opposite target reaction magnetocontrol sputtering method for preparing vanadium oxide film
10/03/2007CN100340698C 溅射靶及光信息记录介质及其制造方法 Sputtering target and the optical information recording medium and its manufacturing method
10/03/2007CN100340697C Method for preparing spin valve capable of improving giant magnetoresistance effect
10/03/2007CN100340696C Sputtering apparatus
10/03/2007CN100340695C Evaporation source for evaporating an organic electroluminescent layer
10/03/2007CN100340694C Linear or planar type evaporator for the controllable film thickness profile
10/03/2007CN100340693C Target for transparent electric conduction film, transparent electric conduction film and its making method, electrode material for display, organic electrolumiescence element and solar cell
10/02/2007US7276729 Electronic systems having doped aluminum oxide dielectrics
10/02/2007US7276456 Article comprising an oxide layer on a GaAs-based semiconductor structure and method of forming same
10/02/2007US7276187 Transparent conductive thin film, process for producing the same, sintered target for producing the same, and transparent, electroconductive substrate for display panel, and organic electroluminiscence device
10/02/2007US7276186 Comprising indium oxide as the major component, tungsten and germanium ; low in resistance and excellent in surface smoothness; high transmittance in the low-wavelength region of visible rays
10/02/2007US7276140 Plasma accelerating apparatus for semiconductor substrate processing and plasma processing system having the same
10/02/2007US7276125 Barrel type susceptor
09/2007
09/27/2007WO2007109784A2 Surface treatments for spiral bevel gear sets
09/27/2007WO2007108952A2 High throughput deposition apparatus with magnetic support
09/27/2007WO2007108757A1 Edge coating in continuous deposition line
09/27/2007WO2007108525A1 Film deposition apparatus and method of film deposition
09/27/2007WO2007108373A1 Biocompatible transparent sheet, method of producing the same and cell sheet
09/27/2007WO2007108313A1 Method of arc ion plating and target for use therein
09/27/2007WO2007108266A1 Zinc oxide-based transparent conductor and sputtering target for forming the transparent conductor
09/27/2007WO2007053317A3 Protective offset sputtering
09/27/2007US20070224730 Hillock-free aluminum layer and method of forming the same
09/27/2007US20070224443 Oxidation-resistant coating and formation method thereof, thermal barrier coating, heat-resistant member, and gas turbine
09/27/2007US20070224439 Stainless Steel Strip Coated with a Metallic Layer
09/27/2007US20070224410 Electrodes, printing plate precursors and other articles including multi-strata porous coatings, and method for their manufacture
09/27/2007US20070224357 Coating stack comprising a layer of barrier coating
09/27/2007US20070224351 Droplet jetting applicator and method for manufacturing coated body
09/27/2007US20070224349 Wear-Resistant Coating and Method for Producing Same
09/27/2007US20070224346 Increased adhesion of aromatic polyimide substrate to the subsequently plated metal layers by using the palladium activator in the conditioning and etching solution and the inclusion of ammonium chloride in the electroless nickel plating bath; durability; cost efficiency; microelectronic packaging
09/27/2007US20070221494 Piezoelectric resonator, piezoelectric filter, duplexer, communication apparatus, and method for manufacturing piezoelectric resonator
09/27/2007US20070221493 Plasma processing apparatus, plasma processing method, and storage medium
09/27/2007US20070220739 Method for fabricating a magnetic head using a ferrofluid mask
09/27/2007DE20321522U1 Werkstoff oder Bauteil mit einer Metallbeschichtung Material or component having a metal coating
09/27/2007DE102004034417B4 Verfahren zur Herstellung eines beschichteten Substrats mit gewölbter Oberfläche A process for preparing a coated substrate with a vaulted surface
09/27/2007CA2645924A1 Edge coating in continuous deposition line
09/27/2007CA2576004A1 Oxidation-resistant coating and formation method thereof, thermal barrier coating, heat-resistant member, and gas turbine
09/26/2007EP1837418A1 High-hardness carbon coating
09/26/2007EP1835946A1 Surface treated shape memory materials and methods for making same
09/26/2007EP1678351B1 Method and system for selectively coating metal surfaces
09/26/2007EP1373594A4 Cylindrical magnetron target and apparatus for affixing the target to a rotatable spindle assembly
09/26/2007CN200953342Y Improved semiconductor machine
09/26/2007CN101044652A Method of enhancing fuel cell water management
09/26/2007CN101044601A Method and system for substrate temperature profile control
09/26/2007CN101044598A Hdp-cvd multistep gapfill process
09/26/2007CN101044555A Method of manufacturing perpendicular magnetic recording medium and perpendicular magnetic recording medium
09/26/2007CN101044329A Fastener
09/26/2007CN101044283A Improved breathable low-emissivity metallized sheets
09/26/2007CN101044260A Thin film forming apparatus and method thereof
09/26/2007CN101044259A Plasma sputtering film deposition method and equipment
09/26/2007CN101044258A Plasma sputtering film deposition method and equipment
09/26/2007CN101044257A An end-block for a rotatable target sputtering apparatus
09/26/2007CN101044256A Preparing and operating a vaporizer body for a PVD metallization installation
09/26/2007CN101044255A Method for producing film, and, film
09/26/2007CN101043013A Substrates carrier for bearing substrates and manufacturing method thereof
09/26/2007CN101042903A Method for producing sputtering target for phase-change memory
09/26/2007CN101042443A A method for manufacturing vehicle mirrors
09/26/2007CN101042180A Solid lubrication precision wave filtering driving device
09/26/2007CN101041891A Vapor deposition source and vapor deposition apparatus
09/26/2007CN101041890A Mask film cradle and deposition system
09/26/2007CN101041889A Base plate support for film plating, plating equipment and method
09/26/2007CN100340140C Flexible printed circuit board and process for producing the same
09/26/2007CN100339942C Gas driven planetary rotation apparatus and methods for forming silicon carbide layers
09/26/2007CN100339914C Silver alloy material, circuit substrate, electronic device, and method for manufacturing circuit substrate
09/26/2007CN100339900C Aluminum-alloy reflective film for optical information recording and target material and recording medium for its formation
09/26/2007CN100339502C High wear resistant hard film
09/25/2007US7273803 Ball limiting metallurgy, interconnection structure including the same, and method of forming an interconnection structure
09/25/2007US7273639 Protective film for protecting a dielectric layer of a plasma display panel from discharge, method of forming the same, plasma display panel and method of manufacturing the same
09/25/2007US7273534 Optical device substrate film-formation apparatus, optical disk substrate film-formation method, substrate holder manufacture method, substrate holder, optical disk and a phase-change recording type of optical disk