| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/08/2009 | US20090008241 Method for forming metallic nitride film |
| 01/08/2009 | US20090008240 Method and system for controlling a vapor deposition process |
| 01/08/2009 | DE10354090B4 Einrichtung zur Beschichtung von Flachbandkabel Equipment for coating ribbon cable |
| 01/08/2009 | DE10232179B4 PVD-Verfahren PVD-method |
| 01/08/2009 | DE102007031457A1 Verfahren und Vorrichtung zur Aufbringung einer Schicht eines Trennmittels auf ein Substrat Method and apparatus for applying a layer of a release agent to a substrate |
| 01/08/2009 | DE102007030735A1 Werkzeug mit mehrlagiger Metalloxidbeschichtung Tool with multi-layered metal oxide coating |
| 01/08/2009 | DE102007030734A1 Beschichtetes Werkzeug Coated tool |
| 01/08/2009 | DE102007030499A1 Vorrichtung und Verfahren zum Abscheiden von insbesondere dotierten Schichten mittels OVPD oder dergleichen An apparatus and method for depositing in particular doped layers or the like by means of OVPD |
| 01/08/2009 | DE102007029028A1 Cathode sputter surface coating source has two components of different heat conductivity positioned in enriched zones |
| 01/08/2009 | DE102004019060B4 Vorrichtung zum Einbringen einer Lichtbogenquelle in eine Beschichtungsanlage für große Substrate oder Bänder Device for inserting an arc source in a coating system for large substrates or tapes |
| 01/08/2009 | CA2688522A1 Treatment system for flat substrates |
| 01/07/2009 | EP2012372A1 Method for manufacturing gallium nitride compound semiconductor light emitting element, gallium nitride compound semiconductor light emitting element and lamp |
| 01/07/2009 | EP2011897A2 Methods and apparatus for cleaning deposition chamber parts using selective spray etch |
| 01/07/2009 | EP2011896A1 ZnO DEPOSITION MATERIAL AND ZnO FILM FORMED OF SAME |
| 01/07/2009 | EP2011895A1 A composite material comprising a substrate and a barrier layer applied to the substrate |
| 01/07/2009 | EP2011894A1 Cemented carbide inserts for parting, grooving and threading |
| 01/07/2009 | EP2010691A1 Coated body |
| 01/07/2009 | EP1856303B1 Single, right-angled end-block |
| 01/07/2009 | EP1493061A4 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition |
| 01/07/2009 | EP1233082B1 Sputtering target, transparent conductive oxide, and method for preparing sputtering target |
| 01/07/2009 | EP1147241B1 Diffusion bonded sputter target assembly and method of making same |
| 01/07/2009 | EP1060285A4 Apparatus and method for depositing a semiconductor material |
| 01/07/2009 | CN201176455Y Coating production line of solar energy heat collecting tube |
| 01/07/2009 | CN101341275A Apparatus and method for deposition organic compounds, and substrate treating facility with the apparatus |
| 01/07/2009 | CN101341274A Amorphous hard carbon coating |
| 01/07/2009 | CN101340774A Flexible glue-free copper coated plate and preparation thereof |
| 01/07/2009 | CN101340770A Antistatic film, electron generating device, spacer and picture display unit |
| 01/07/2009 | CN101339989A Aluminum-tin alloy film for lithium ionic cell negative electrode and method for preparing the same |
| 01/07/2009 | CN101338412A Method for preparing of low stress chromium nitride multilayer hard film |
| 01/07/2009 | CN101338411A Zr-Si-N hard composite coating and method for preparing same |
| 01/07/2009 | CN101338410A Cleaning plate for vaporization coating process and vaporization coating process using the cleaning plate |
| 01/07/2009 | CN101338409A Coating method of automobile hub cover |
| 01/07/2009 | CN101338408A Brittle metall alloy sputtering targets and method of fabricating same |
| 01/07/2009 | CN101338040A Method for preparing porous conductive coating on plastic surface |
| 01/07/2009 | CN100449771C Luminating device, method for manufacturing it and its operational method |
| 01/07/2009 | CN100449689C A method of forming a teos cap layer at low temperature and reduced deposition rate |
| 01/07/2009 | CN100449034C Nanolayered coated cutting tool and method for making the same |
| 01/07/2009 | CN100449033C Pretreatment of metal materials |
| 01/07/2009 | CN100448600C Pvd coated cutting tool |
| 01/06/2009 | US7474051 Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube |
| 01/06/2009 | US7473436 Dry functionalization process in which precursor gas (e.g., H2 or F2 or CnHm) is irradiated to provide a cold plasma; particles produced are directed toward an array of CNTs in another chamber at or below room temperature while suppressing transport of ultraviolet radiation; applied magnetic field |
| 01/06/2009 | US7473331 Method of applying an optical coating to an article surface |
| 01/02/2009 | DE10324972B4 Geschirmtes Kabel und Verfahren und Vorrichtung zur Herstellung desselben Of the same shielded cable and method and apparatus for producing |
| 01/02/2009 | DE102007029683A1 Mechanische Komponente mit einer Beschichtung und Verfahren zur Messung von Zustandsgrößen an mechanischen Komponenten Mechanical component with a coating and methods for measuring state quantities of mechanical components |
| 01/01/2009 | US20090004502 Multilayer getter structures and methods for making same |
| 01/01/2009 | US20090004498 Manufacturing Method of High Purity Nickel, High Purity Nickel, Sputtering Target formed from said High Purity Nickel, and Thin Film formed with said Sputtering Target |
| 01/01/2009 | US20090004399 Tile Coating and Process Therefor |
| 01/01/2009 | US20090004364 Method For Protecting New/Used Engine Parts |
| 01/01/2009 | US20090002878 Method of Producing a Magnetic Recording Medium |
| 01/01/2009 | US20090000946 Plasma processing with enhanced charge neutralization and process control |
| 01/01/2009 | US20090000943 Magnetron sputtering apparatus and manufacturing method for structure of thin film |
| 01/01/2009 | US20090000942 Pulse plasma matching systems and methods including impedance matching compensation |
| 01/01/2009 | US20090000704 Hafnium Alloy Target and Process for Producing the Same |
| 01/01/2009 | US20090000517 Powder mixture to be made into evaporation source material for use in Ion plating, evaporation source material for use in Ion plating and method of producing the same, and gas barrier sheet and method of producing the same |
| 12/31/2008 | WO2009002762A1 Plasma ion implantation process control using reflectometry |
| 12/31/2008 | WO2009002266A1 Coated cemented carbide inserts for milling of especially hard cast steel |
| 12/31/2008 | WO2009002022A1 Mask exchange apparatus for deposition chamber |
| 12/31/2008 | WO2009001832A1 Display device and sputtering target |
| 12/31/2008 | WO2009001693A1 Amorphous composite oxide film, crystalline composite oxide film, process for producing amorphous composite oxide film, process for producing crystalline composite oxide film, and composite oxide sinter |
| 12/31/2008 | WO2009001634A1 Low-refractive index film, method for forming the low-refractive index film, and antireflection film |
| 12/31/2008 | WO2009001614A1 Filming device |
| 12/31/2008 | WO2009001547A1 Method for purifying silicon metal and method for producing silicon ingot |
| 12/31/2008 | WO2009000813A1 Process and apparatus for the introduction and removal of a substrate into and from a vacuum coating unit |
| 12/31/2008 | WO2009000391A1 Coated mechanical component and method for measuring state variables on mechanical components |
| 12/31/2008 | EP2009714A2 Method and device for separating in particular metered layers by means of OVPD or similar |
| 12/31/2008 | EP2009685A1 Vertical substrate conveyance device and film deposition equipment |
| 12/31/2008 | EP2009647A1 Method for fabricating thin film sensor, thin film sensor and thin film sensor module |
| 12/31/2008 | EP2009134A2 Layer system for creating a surface layer on a surface of a substrate, vaporisation source for manufacturing a layer system |
| 12/31/2008 | EP2009131A1 Heat shield coating member, process for producing the same, heat shield coat material, gas turbine and sintered body |
| 12/31/2008 | EP2008812A1 Biaxially oriented polyester film for forming members |
| 12/31/2008 | EP2008743A1 Fine grained cemented carbide for turning in heat resistant super alloys (HRSA) and stainless steels |
| 12/31/2008 | EP2007932A1 Articles with two crystalline materials and method of making same |
| 12/31/2008 | EP2007923A1 Etching process |
| 12/31/2008 | EP2007922A2 Wear-resistant layer for parts, method for coating a part with a wear-resistant layer, and device for carrying out said method |
| 12/31/2008 | EP2007916A2 Mirror magnetron plasma source |
| 12/31/2008 | EP2007915A2 Thermal evaporation apparatus, use and method of depositing a material |
| 12/31/2008 | EP1474710B1 Optical component comprising submicron hollow spaces |
| 12/31/2008 | CN201174029Y Photolithography thin film evoked by probe |
| 12/31/2008 | CN201173304Y Titanium nitride ceramic-metal composite wear-resistant ball valve |
| 12/31/2008 | CN201172688Y Gas intake for vacuum sputtering equipment |
| 12/31/2008 | CN201172687Y Oblique substrate conveying device for vacuum sputtering equipment |
| 12/31/2008 | CN201172686Y Splitting multifunction combined high vacuum vaporization coating equipment |
| 12/31/2008 | CN101333647A Age hardening processing method of Ti-Al-N coatings |
| 12/31/2008 | CN101333646A Method for preparing ZnO nano-rod array under non-catalyst and non-carbon condition |
| 12/31/2008 | CN101333645A Process for preparing copper-indium-selenium sputtering target |
| 12/31/2008 | CN101333644A Zinc oxide analog amorphous film sputtering target and its manufacture method |
| 12/31/2008 | CN101333643A Reactive sputtering knee voltage control process for energy-conserving high-efficiency solar thermal-collecting tube coating machine |
| 12/31/2008 | CN101333642A Band steel filming method and system thereof |
| 12/31/2008 | CN101333641A Method of preparing titanium nitride layer and device thereof |
| 12/31/2008 | CN101332706A Fluid jetting device and production method thereof |
| 12/31/2008 | CN100448327C System and method for lamp split zone control |
| 12/31/2008 | CN100447946C Mask, mask chip, manufacturing method of mask, manufacturing method of mask chip, and electronic device |
| 12/31/2008 | CN100447293C Rotary plating assistant device |
| 12/31/2008 | CN100447292C Anti-pollution superhigh vacuum magnetron sputtering film-plating device |
| 12/31/2008 | CN100447291C Physical vapor deposition method and device therefor |
| 12/31/2008 | CN100447290C Sputter target material and method of producing the same |
| 12/31/2008 | CN100446957C Injection molding device and member used thereof and surface treatment method |
| 12/31/2008 | CN100446918C Method for brazing aluminium parts on the carbon steel part surface and aluminizing anti-rust on the non brazing surface |
| 12/31/2008 | CN100446901C Surface-coated cutting tool having film with compressive stress intensity distribution |
| 12/30/2008 | US7471884 Resistance-heated vaporizer boat |