| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
|---|
| 03/05/2009 | DE102007041327A1 Method for the evaporation of metal alloy for the production of nanopowder and coating, comprises shifting an externally heated arc between an interior anode and an exterior anode in back and forth manner |
| 03/04/2009 | EP2031659A1 Method for creating a metal backing pin for a semiconductor element, in particular a solar cell |
| 03/04/2009 | EP2031606A1 Superconducting thin film material and method for producing the same |
| 03/04/2009 | EP2031425A1 Optical component comprising submicron hollow spaces |
| 03/04/2009 | EP2031087A1 Ag-based alloy sputtering target |
| 03/04/2009 | EP2031086A1 Ag base alloy sputtering target and method for manufacturing the same |
| 03/04/2009 | EP2031085A1 Arc evaporation source and vacuum evaporation system |
| 03/04/2009 | EP2031084A2 Sputtering method and apparatus |
| 03/04/2009 | EP2029789A1 Vacuum coating apparatus |
| 03/04/2009 | EP1359351B1 Piston ring and method of producing the same |
| 03/04/2009 | EP1357583B1 Sheet-fed treating device |
| 03/04/2009 | CN201201967Y Revolving rack apparatus for vertical type aluminum plating machine |
| 03/04/2009 | CN101379218A Highly reflective layer system, method for producing the layer system and device for carrying out the method |
| 03/04/2009 | CN101379213A Water vapor passivation of a wall facing a plasma |
| 03/04/2009 | CN101378115A Method for preparing lithium ion secondary battery cathode |
| 03/04/2009 | CN101378107A Method for forming organic luminous layer of OLED display device |
| 03/04/2009 | CN101378031A Substrate carrier plateform and substrate processing device |
| 03/04/2009 | CN101378029A Dual-electrode electrostatic chuck |
| 03/04/2009 | CN101378028A Device for clamping wafer |
| 03/04/2009 | CN101378027A Electrostatic chuck |
| 03/04/2009 | CN101378003A Alternate gas delivery and evacuation system for plasma processing apparatuses |
| 03/04/2009 | CN101376976A Vacuum sputtering and electrophoresis combined coating technology for plastic workpiece surface |
| 03/04/2009 | CN101376975A Preparation of plastic workpiece surface having EMI suppression and antibacterial effects |
| 03/04/2009 | CN101376974A Vacuum sputtering EMI film and electrophoresis combined coating technology for processing micro-arc oxidation workpiece |
| 03/04/2009 | CN101376973A Vacuum sputtering and electrophoresis combined coating technology for processing micro-arc oxidation workpiece |
| 03/04/2009 | CN101376972A Vacuum sputtering EMI film and electrophoresis combined coating technology for plastic workpiece surface |
| 03/04/2009 | CN101376965A Sputtering method and apparatus |
| 03/04/2009 | CN101376964A Sputtering type film coating apparatus and film coating method |
| 03/04/2009 | CN101376963A Ag-based alloy sputtering target |
| 03/04/2009 | CN101376962A Ag base alloy sputtering target and method for manufacturing the same |
| 03/04/2009 | CN101376178A Hard film for cutting tool |
| 03/04/2009 | CN100466201C Heat treatment device, heat treatment system and temperature control method for heat treatment apparatus |
| 03/04/2009 | CN100466154C Device for the treatment of a web-type material in a plasma-assisted process |
| 03/04/2009 | CN100465345C A surface plasmon crystal and a preparation method thereof |
| 03/04/2009 | CN100465344C A method for preparing cobalt-doping zinc oxide nanometer arrays |
| 03/04/2009 | CN100465341C A forming method of copper for chrome-plating of printed circuit boards |
| 03/04/2009 | CN100465332C A method of preparing anatase crystal phase titanium dioxide films at a low temperature |
| 03/04/2009 | CN100465331C A sputtering device with a gas injection assembly |
| 03/04/2009 | CN100465330C A production device and a method of multiple-system films and a coating tool for coating the multiple-system films |
| 03/04/2009 | CN100465329C A functional fiber sheet |
| 03/04/2009 | CN100465244C A paste composition with self orienting thermally-conductive characteristics and a forming method thereof |
| 03/04/2009 | CN100465117C A substrate with a photocatalytic coating |
| 03/04/2009 | CN100465116C A method for preparing layers and layer systems and coating substrates |
| 03/03/2009 | US7497932 Electro-chemical deposition system |
| 03/03/2009 | US7497633 Substrate processing apparatus and substrate processing method |
| 02/28/2009 | CA2600097A1 Physical vapour deposition process for depositing erosion resistant coatings on a substrate |
| 02/26/2009 | WO2009025718A1 Krypton sputtering of thin tungsten layer for integrated circuits |
| 02/26/2009 | WO2009025306A1 Sputtering method |
| 02/26/2009 | WO2009025258A1 Sputtering method and sputtering apparatus |
| 02/26/2009 | WO2009025143A1 Process for producing nanoparticles |
| 02/26/2009 | WO2009025112A1 Surface-coated cutting tool |
| 02/26/2009 | WO2009024460A2 System and process for the continous vacuum coating of a material in web form |
| 02/26/2009 | WO2007120967A3 Rf powered target for increasing deposition uniformity in sputtering systems |
| 02/26/2009 | US20090054277 Sliding member and production process thereof |
| 02/26/2009 | US20090053950 Deposition of Electronic Circuits on Fibers and Other Materials |
| 02/26/2009 | US20090053888 Method of depositing a diffusion barrier layer which provides an improved interconnect |
| 02/26/2009 | US20090053836 Method of wafer level transient sensing, threshold comparison and arc flag generation/deactivation |
| 02/26/2009 | US20090053540 Physical Vapor Deposition Targets Comprising Ti and Zr and Methods of Use |
| 02/26/2009 | US20090053478 Functional film containing structure and method of manufacturing functional film |
| 02/26/2009 | US20090053454 Optical disc and method for fabricating the same |
| 02/26/2009 | US20090053453 Semiconductor device and method of manufacture thereof |
| 02/26/2009 | US20090053439 Film type antenna, case structure, and method of manufacturing the same |
| 02/26/2009 | US20090051272 Gas barrier film, gas barrier film manufacturing method, resin substrate for organic electroluminescent device using the aforesaid gas barrier film, and organic electroluminescent device using the aforementioned gas barrier film |
| 02/26/2009 | US20090050475 Hafnium Alloy Target and Process for Producing the Same |
| 02/26/2009 | US20090050471 Process of forming an electronic device including depositing layers within openings |
| 02/26/2009 | US20090050470 Method And Device For Enhancing Solderability |
| 02/26/2009 | US20090050469 Alignment film forming apparatus and methos |
| 02/26/2009 | US20090050468 Controlled surface oxidation of aluminum interconnect |
| 02/26/2009 | US20090050270 Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate |
| 02/26/2009 | US20090050052 Plasma processing apparatus |
| 02/26/2009 | DE202007014905U1 Beschichtungsanlage mit mindestens einer PVD (physical vapour deposition)-Beschichtungseinrichtung Coating system with at least a PVD (physical vapor deposition) -Beschichtungseinrichtung |
| 02/26/2009 | DE19982566B4 Einrichtung und Verfahren zum Bearbeiten eines Substrats Apparatus and method for processing a substrate |
| 02/26/2009 | DE10349087B4 Verfahren zur Herstellung von Halbton-Phasenverschiebungsmasken-Rohlingen A process for the production of halftone phase shift mask blanks |
| 02/26/2009 | DE102008039430A1 Durchlaufbeschichtungsanlage Continuous coating installation |
| 02/26/2009 | DE102007040098A1 Trägerfolie Support film |
| 02/26/2009 | DE10082309B4 Phasenschieberfilm, Phasenschiebermaskenrohling, Phasenschiebermaske, Herstellungsverfahren für dieselben sowie Belichtungsverfahren Phase shifting film phase shift mask blank, phase shift mask manufacturing method for the same and exposure method |
| 02/25/2009 | EP2028695A1 Method for creating a transparent conductible oxide coating |
| 02/25/2009 | EP2028288A1 Target in the shape of a cylinder for cathodic arc coating with continuous groove to control arc |
| 02/25/2009 | EP2028287A1 Sputtering target, optical information recording medium and process for producing the same |
| 02/25/2009 | EP2027399A1 Wear-resistant chain with a wear-resistant coating having a nanocrystalline structure |
| 02/25/2009 | EP2027302A1 Sputter target with sputter material based on tio2, and a production method |
| 02/25/2009 | EP2027301A1 Use of a tungsten bronze structured material and turbine component with a thermal barrier coating |
| 02/25/2009 | EP1844177B1 Controllably feeding organic material in making oleds |
| 02/25/2009 | EP0805977B1 Composite film moisture barrier for on-cell tester |
| 02/25/2009 | CN201199758Y Structure for covering surface of electronic apparatus shell |
| 02/25/2009 | CN201199268Y Reparation board for plated wedge-shaped film |
| 02/25/2009 | CN101375378A Al-base alloy wiring material and element structure using the same |
| 02/25/2009 | CN101375366A Improved sputter target utilization |
| 02/25/2009 | CN101375204A Laminated structure, and electrode for electric circuit using the same |
| 02/25/2009 | CN101374976A Object comprising a relatively soft carrier material and a relatively hard decorative layer, and method for the production thereof |
| 02/25/2009 | CN101374972A Etch and sidewall selectivity in plasma sputtering |
| 02/25/2009 | CN101374971A Adaptable fixation for cylindrical magnetrons |
| 02/25/2009 | CN101374611A Methods of producing deformed metal articles |
| 02/25/2009 | CN101374388A Method for preparing fine line flexible circuit board with high peeling strength |
| 02/25/2009 | CN101373813A Method for improving aeolotropism magnetic resistance permalloy film performance |
| 02/25/2009 | CN101373735A Controlled surface oxidation of aluminum interconnect |
| 02/25/2009 | CN101373731A Electrostatic chuck apparatus and temperature control method thereof |
| 02/25/2009 | CN101373703A Cap-opening mechanism and semiconductor processing device and cap-opening control method thereof |
| 02/25/2009 | CN101372738A Auxiliary guide system and apparatus for vacuum sputtering device |
| 02/25/2009 | CN101372737A Sputtering target having multicomponent target material |