Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
04/2009
04/09/2009WO2009044889A1 Indium oxide target
04/09/2009WO2009044888A1 Indium oxide target
04/09/2009WO2009044705A1 Film forming apparatus and film forming method
04/09/2009WO2009044637A1 Re123-based oxide superconductor and process for producing the re123-based oxide superconductor
04/09/2009WO2009044597A1 High-frequency sputtering device
04/09/2009WO2009044474A1 Vacuum thin film forming apparatus
04/09/2009WO2009044473A1 High frequency sputtering device
04/09/2009WO2009044083A2 Method for reducing porosity of a metal deposit by ionic bombardment
04/09/2009WO2008016364A3 Cryogenic vacuum rf feedthrough device
04/09/2009WO2006078814A3 Cellular microarrays for screening differentiation factors
04/09/2009WO2006001840A3 System and method for quality testing of superconductivity tape
04/09/2009WO2005121038A3 Coating for glass molding dies and forming tools
04/09/2009US20090093105 Particle deposition apparatus, particle deposition method, and manufacturing method of light-emitting device
04/09/2009US20090092858 Perpendicular magnetic recording film medium and method of manufacturing the same
04/09/2009US20090092845 Electrode for Electric Discharge Surface Treatment, Method of Electric Discharge Surface Treatment, and Apparatus for Electric Discharge Surface Treatment
04/09/2009US20090092805 Ferroelectric Material With Polarization Pattern
04/09/2009US20090092783 Optical information recording medium
04/09/2009US20090092763 Method and Device for Testing the Quality of a Metallic Coating
04/09/2009US20090091003 Insulator undergoing abrupt metal-insulator transition, method of manufacturing the insulator, and device using the insulator
04/09/2009US20090090914 Semiconductor thin film, method for producing the same, and thin film transistor
04/09/2009US20090090621 Erbium Sputtering Target and Manufacturing Method
04/09/2009US20090090620 Sputtering target with grooves and intersecting channels
04/09/2009US20090090619 Thin-Film Deposition System
04/09/2009US20090090618 Solar cell and method for manufacturing the same
04/09/2009US20090090617 Method and Apparatus for Producing Controlled Stresses and Stress Gradients in Sputtered Films
04/09/2009US20090090616 System and method for plasma enhanced thin film deposition
04/09/2009US20090090066 Grinding tool and manufacturing method thereof
04/09/2009US20090090000 In-mould molding touch module and method for manufacturing the same
04/09/2009DE112007000440T5 Verfahren zum Erzeugen von verformten Metallartikeln A process for producing articles of deformed metal
04/09/2009DE112006003841T5 Verfahren zur Entfernung eines Hartbeschichtungsfilms A method for removing a hard coating film
04/09/2009DE10239014B4 Vakuumbeschichtungsanlage mit zwei Magnetrons Vacuum coating system with two magnetrons
04/09/2009DE102008048785A1 Magnetronanordnung mit abgeschirmter Targethalterung Magnetron with shielded target holder
04/09/2009DE102008026001A1 Verfahren und Vorrichtung zur Erzeugung und Bearbeitung von Schichten auf Substraten unter definierter Prozessatmosphäre Method and apparatus for creating and editing layers on substrates with defined process atmosphere
04/09/2009DE102007047330A1 Heating device for a vacuum plant, comprises a heat-radiating surface, and a heat storage unit and/or heating element arranged parallel to the surface of the heat storage unit
04/09/2009DE102007046925A1 Method for producing a metallic and/or non-metallic substrate, which is protected against corrosion in regions and/or is shiny, comprises provisioning a substrate or a carrier layer having a surface, which is coated in regions
04/09/2009DE102007024715B4 Verfahren zur Herstellung einer Folie sowie eine Mehrschichtfolie A method for producing a film and a multilayer film
04/09/2009DE102004004844B4 Vorrichtung zum Beschichten eines Substrats mit einer Absorberanordnung Apparatus for coating a substrate with an absorber assembly
04/09/2009CA2697239A1 Method and system for coating a surface of a medical device with a therapeutic agent and drug eluting medical devices made thereby
04/09/2009CA2690135A1 System and method for component material addition
04/08/2009EP2045838A1 Method for producing zinc oxide semiconductor crystal
04/08/2009EP2045630A1 Thin film for reflective film or semi-transmitting reflective film, sputtering target, and optical recording medium
04/08/2009EP2045353A1 Capacitive-coupled magnetic neutral line plasma sputtering system
04/08/2009EP2045352A1 Method of obtaining a hard surface on the nanometric scale
04/08/2009EP2044623A2 Method and system for isolated and discretized process sequence integration
04/08/2009EP2044609A1 Ion deposition apparatus
04/08/2009EP2044237A1 Coating apparatus and method
04/08/2009EP2043781A1 Arrangement comprising nanoparticles, and method for the production thereof
04/08/2009EP2043552A1 A method for the production of structured layers of titanium and nickel
04/08/2009EP1841897B1 Member for cavitation erosion resistance and method for manufacturing same
04/08/2009EP1785010B1 Apparatus and method for levitation of an amount of conductive material
04/08/2009EP1007569B1 Stimulation of an immune response with antibodies labeled with the alpha-galactosyl epitope
04/08/2009CN201217692Y Optical disk replacing apparatus of sputter
04/08/2009CN201217691Y Sputtering metal membrane machine bench
04/08/2009CN201217690Y Accurate control circuit for closure time of silvers praying port guard board of film-plating machine
04/08/2009CN201217689Y Scraps-preventing vacuumizing opening structure of film-plating machine
04/08/2009CN201217688Y Six-plating head electrode structure of film-plating machine
04/08/2009CN201217687Y Quick-release type silver spraying port guard board structure of film-plating machine
04/08/2009CN201217686Y Ionic beam emission source capable of emitting singular ion energy
04/08/2009CN201217685Y Magnetron sputtering and multi-sphere ion plating combined vacuum coating machine
04/08/2009CN101406108A Atomic layer deposition system and method for coating flexible substrates
04/08/2009CN101405843A Method for forming thin film and multilayer structure of thin film
04/08/2009CN101405432A Edge coating in continuous deposition line
04/08/2009CN101405431A Notched deposition ring
04/08/2009CN101405430A Ternary aluminum alloy films and targets
04/08/2009CN101405429A Method for manufacturing Co-base sintered alloy sputtering target for formation of magnetic recording film which is less likely to generate particles, and Co-base sintered alloy sputtering target ther
04/08/2009CN101405428A Method of arc ion plating and target for use therein
04/08/2009CN101405427A Zinc oxide-based transparent conductor and sputtering target for forming the transparent conductor
04/08/2009CN101405426A SiOx:Si composite material compositions and methods of making same
04/08/2009CN101405423A Heat shield coating member, process for producing the same, heat shield coat material, gas turbine and sintered body
04/08/2009CN101403809A Production method for amorphous Sn1As20S79 bar-shaped optical waveguide
04/08/2009CN101403806A Visible/infrared wide optical spectrum color separation filter based on germanium substrate
04/08/2009CN101403805A Production method of optical spectrum phase step type integration color filter
04/08/2009CN101403120A Anti-pressure and abrasion-proof stainless steel processing technique
04/08/2009CN101403116A Preparation method for Ti-Si-N nano-coating
04/08/2009CN101403102A Continuous vacuum transition chamber with linear vacuum motive seal and X-ray radiation protection function
04/08/2009CN101403101A Quick solid-ceramic coating ion plating apparatus
04/08/2009CN101403100A Method of manufacturing magnetic microscope probe with ultrahigh resolution
04/08/2009CN101403099A Method of manufacturing metal doping ZnO film
04/08/2009CN101403098A Magnetic memory material of compound structure of FePt nano-particle monolayer film and B4C and method of producing the same
04/08/2009CN101403097A Method for high-temperature alloy vacuum diffusion connection with film as intermediate coat
04/08/2009CN101403096A Nano-twin crystal aluminum surface film material with high corrosion resistance and method of producing the same
04/08/2009CN101403095A Workpiece clamping head structure
04/08/2009CN101403094A Method for growth of type n ZnMgO Ga semiconductor film on flexible substrate
04/08/2009CN101403093A Method of manufacturing vacuum composite film coating on surface of neodymium iron boron magnet
04/08/2009CN101403092A Evaporation apparatus with inclined crucible
04/08/2009CN101403091A Batch production type film vapor deposition device using mass substrate installing and uninstalling system
04/08/2009CN101403090A Film vapor deposition device of load locking cavity using multi-layer substrate fixer structure
04/08/2009CN101403089A Batch production type film vapor deposition device using multi-layer substrate fixer
04/08/2009CN101403088A Silicon-aluminium alloy target material with high silicon content for sputtering and coating film, and method of producing the same
04/08/2009CN100477346C Substrate containing metal oxide and method for production thereof
04/08/2009CN100477133C Near-infrared high-transmission rate and multi-crystal transparent conductive oxide film and making method thereof
04/08/2009CN100477078C Substrate processing apparatus and substrate processing method
04/08/2009CN100477020C Superconducting wire and production method thereof
04/08/2009CN100476044C Phosphorus effusion cell arrangement and method for producing molecular phosphorus
04/08/2009CN100476037C Film-forming apparatus component and method for cleaning same
04/08/2009CN100476019C Lifting mechanism of physical gas-phase deposition
04/08/2009CN100476018C Method of forming indicator
04/08/2009CN100476017C Sputtering target and process for producing the same, thin film for optical information recording medium and process for producing the same
04/08/2009CN100476016C Device and method for evaporation
04/08/2009CN100476015C Component for film forming device and method of washing the component