Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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10/30/2008 | US20080264776 generating a nitrogen plasma with a radio frequency field and a power of less than or equal to 2 kW; and treating the gold film with said nitrogen plasma to from gold nitride film on a silicon wafer substrate; nitriding |
10/30/2008 | US20080264775 sputter forms a film on an incline, while rotating the substrate; facilities obtaining a stack film wherein the film thickness is distributed at a given incline rate, and in a single direction of the substrate |
10/30/2008 | US20080264774 electrochemical deposition of copper, a barrier layer of tantalum nitride/tantalum was formed, followed by physical vapor deposition of copper seed layer; gap fill metallization; reduction of copper oxide to copper; reducing gas selected from hydrogen, argon, nitrogen, ammonia and boronhydride |
10/30/2008 | US20080264337 Substrate processing apparatus and method for manufacturing semiconductor device |
10/30/2008 | US20080264336 Mechanical and acoustical suspension coating of medical implants |
10/30/2008 | DE10355682B4 Trägeranordnung Carrier assembly |
10/30/2008 | DE10213043B4 Rohrmagnetron und seine Verwendung Tubular magnetron and its use |
10/30/2008 | DE102007057699A1 Electrically conductive fluid distribution component for fuel cell comprises metallized regions on surface of conductive non-metallic porous media layer |
10/30/2008 | DE102007019994A1 Transparente Barrierefolie und Verfahren zum Herstellen derselben Transparent barrier film and method for manufacturing the same |
10/30/2008 | DE102007019982A1 Anordnung zur Ausbildung von Beschichtungen auf Substraten im Vakuum Arrangement for the formation of coatings on substrates in vacuum |
10/30/2008 | CA2630122A1 Method of deposition onto a sic-covered substrate |
10/30/2008 | CA2630121A1 Method of deposition of aluminum onto a sic-covered substrate |
10/29/2008 | EP1986472A2 Method for patterning, method for forming film, patterning apparatus, film formation apparatus, electro-optic apparatus and method for manufacturing the same, electronic equipment, and electronic apparatus and method for manufacturing the same |
10/29/2008 | EP1985725A2 Sputtering target, optical information recording medium and process for producing the same |
10/29/2008 | EP1985584A1 Method for producing a carbon-containing material by carbon electron-beam vaporisation in a vacuum and a subsequent condensation thereof on a substrate and a device for carrying out said method |
10/29/2008 | EP1984534A1 Radiopaque coatings for polymer substrates |
10/29/2008 | EP1984152A2 Multi-layer coating for razor blades |
10/29/2008 | EP1700324B1 Self-healing liquid contact switch |
10/29/2008 | EP1429326B1 Sputtering target and production method therefor and optical recording medium formed with phase-change type optical disk protection film |
10/29/2008 | EP1287172B1 High purity niobium and products containing the same, and methods of making the same |
10/29/2008 | CN201142322Y Improved structure of carrier disk |
10/29/2008 | CN201141398Y Plated film bearing |
10/29/2008 | CN101297060A Sheet-like plasma generator, and film deposition method and equipment employing such sheet-like plasma generator |
10/29/2008 | CN101297059A Cathode incorporating fixed or rotating target in combination with a moving magnet assembly and applications thereof |
10/29/2008 | CN101295704A Ta-Al-N diffusion blocking layer thin film for copper wiring and preparation thereof |
10/29/2008 | CN101295631A Sputtering film forming method, electronic device manufacturing method, and sputtering system |
10/29/2008 | CN101295560A Multi-layer isolation layer and YBCO coating conductor on metal base band, and preparation thereof |
10/29/2008 | CN101295031A Double-frequency magnetic response negative magnetoconductivity metal compound structure material and production method thereof |
10/29/2008 | CN101294284A Ablation-resistant fatigue-resistant plasma surface recombination reinforcing method |
10/29/2008 | CN101294283A Method for processing magnesium alloy surface |
10/29/2008 | CN101294272A Method for sputtering and depositing tin indium oxide transparent electroconductive film on flexible substrate at room temperature |
10/29/2008 | CN101294271A Deposition apparatus |
10/29/2008 | CN101294270A Equipment and method for producing nichrome composite plate with vacuum arc ion plating |
10/29/2008 | CN101294269A Process for producing vitrification SiO2-Al2O3 mix oxide deposition material |
10/29/2008 | CN101294268A Nitrogen case hardening method of orientation silicon steel |
10/29/2008 | CN101293409A Metallic-organic complex function thin film with stepped construction and uses thereof |
10/28/2008 | US7442665 Forming intermetallics, alloy, ceramic or composite |
10/28/2008 | US7442627 Transparent conductive layer forming method, transparent conductive layer formed by the method, and material comprising the layer |
10/28/2008 | US7442428 Gas barrier substrate |
10/28/2008 | US7442285 Common rack for electroplating and PVD coating operations |
10/28/2008 | US7442258 Organic electroluminescent device for fabricating shadow mask |
10/23/2008 | WO2008127554A1 Fine control of vaporized organic material |
10/23/2008 | WO2008127493A1 Ultra smooth face sputter targets and methods of producing same |
10/23/2008 | WO2008126811A1 Magnetron sputtering apparatus |
10/23/2008 | WO2008126525A1 Metallic separator for fuel cell and process for producing the metallic separator |
10/23/2008 | WO2008126489A1 Sputtering system and method for using sputtering system |
10/23/2008 | WO2008126445A1 Fluorescent material film forming equipment |
10/23/2008 | WO2007149546A3 Implantable medical devices comprising cathodic arc produced structures |
10/23/2008 | WO2007126469A3 Method for conditioning a process chamber |
10/23/2008 | US20080261072 Clad textured metal substrate for forming epitaxial thin film thereon and method for manufacturing the same |
10/23/2008 | US20080261056 Coating; a photocatalytic compound in intimate association with Gallium Phosphide, Cadmium Sulfide, oxide of potassium, tantallum and Niobium, Cadmium Selenide, oxide of Strontium Titanium, TiO2, ZnO, Fe2O3, WO3, Nb2O5, V2O5 and Eu2O3. |
10/23/2008 | US20080260963 Substrate support, a proximity head to dispense a treatment gas having a chamber to excite the treatment gas before being dispensed |
10/23/2008 | US20080260940 Improving metal migration performance and reducing void propagation; barrier atomic layer deposition using proximity heads then copper seed deposition under controlled ambient transition conditions |
10/23/2008 | US20080260478 Pvd Coated Substrate |
10/23/2008 | US20080258073 Method and apparatus for simultaneously depositing and observing materials on a target |
10/23/2008 | US20080257724 sputtering; hot forging copper billet, upset forging to form part, rotating, quenching, heating, cooling, cold rolling, annealing, hydroforming |
10/23/2008 | US20080257723 Physical Vapor Deposition System |
10/23/2008 | US20080257716 Coating Method and Apparatus, a Permanent Magnet, and Manufacturing Method Thereof |
10/23/2008 | US20080257715 Method of Deposition with Reduction of Contaminants in An Ion Assist Beam and Associated Apparatus |
10/23/2008 | US20080257714 Method of making a tmr sensor having a tunnel barrier with graded oxygen content |
10/23/2008 | US20080257481 Sealing of plastic containers |
10/23/2008 | US20080257475 Flexible electrically conductive film |
10/23/2008 | US20080257263 Cooling shield for substrate processing chamber |
10/23/2008 | US20080257014 Partial pressure measuring method and partial pressure measuring apparatus |
10/23/2008 | DE112006003294T5 Absperrventil für eine Vakuumvorrichtung Shut-off valve for a vacuum device |
10/23/2008 | DE112006003218T5 Filmherstellvorrichtung und Verfahren zum Herstellen eines Films Filmherstellvorrichtung and method for producing a film |
10/23/2008 | DE102007018535A1 Protective material, useful to provide barrier effect against chemical attacks, comprises different layers of fluoroplastic materials, which are coated by metallic and/or ceramic materials |
10/22/2008 | EP1983072A1 Processing device and method for processing a subtrate |
10/22/2008 | EP1983071A1 Method for manufacturing pyrolytic boron nitride composite substrate |
10/22/2008 | EP1983070A2 Metal oxide layer formed on substrates and its fabrication methods |
10/22/2008 | EP1982967A2 Freestanding reactive multilayer foils |
10/22/2008 | EP1982003A2 Process for forming a metallized sheet |
10/22/2008 | EP1982002A1 Process for producing partially metallized substrates |
10/22/2008 | EP1831429A4 Methods and apparatus for sequentially alternating among plasma processes in order to optimize a substrate |
10/22/2008 | EP1680527A4 Apparatus and process for high rate deposition of rutile titanium dioxide |
10/22/2008 | EP1393340B1 Ion gun |
10/22/2008 | EP1187148B1 Thin permanent-magnet film and process for producing the same |
10/22/2008 | CN201136891Y Coating part rack for ion device planting film on surface of ceramic tile |
10/22/2008 | CN101292058A Film forming material supplying apparatus |
10/22/2008 | CN101291806A Durable thermal barrier coating having low thermal conductivity |
10/22/2008 | CN101291742A Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation |
10/22/2008 | CN101289738A Film thickness correcting process and system for magnetron sputtering coating |
10/22/2008 | CN101289737A Program controlled and compounding magnetic field controlled vaporizing ionization source for round cathode surface arc spot |
10/22/2008 | CN101289736A Partial pressure measuring method and partial pressure measuring apparatus |
10/22/2008 | CN100428581C Method for manufacturing electric connector |
10/22/2008 | CN100428536C Sb2Se3 anode film material for lithium ion cell and its preparing method |
10/22/2008 | CN100428527C Mask and its mfg. method, electroluminescent apparatus and its mfg. method, and electronic apparatus |
10/22/2008 | CN100428367C Aluminum alloy wiring material having high resistance to heat and target material |
10/22/2008 | CN100427640C Vacuum coating device |
10/22/2008 | CN100427639C Method for fabricating oriented film of liquid crystal by using sputtering in long range |
10/22/2008 | CN100427638C Sputtering target for forming optical recording medium protection film and optical recording medium with protection film produced by the same |
10/22/2008 | CN100427381C Diameter thinning method of one-dimensional micro-nanometer structural material of metal organic complex |
10/21/2008 | US7439208 Growth of in-situ thin films by reactive evaporation |
10/21/2008 | US7439194 Lanthanide doped TiOx dielectric films by plasma oxidation |
10/21/2008 | US7438965 Phase-change information recording medium, manufacturing method for the same, sputtering target, method for using the phase-change information recording medium and optical recording apparatus |
10/21/2008 | US7438955 Titanium nitride thin film formation on metal substrate by chemical vapor deposition in a magnetized sheet plasma source |
10/21/2008 | US7438762 Manufacture method for ZnO based compound semiconductor crystal and ZnO based compound semiconductor substrate |
10/21/2008 | CA2347830C Process for making metal flakes |
10/16/2008 | WO2008124555A1 Techniques for low-temperature ion implantation |
10/16/2008 | WO2008124519A2 Stents with ceramic drug reservoir layer and methods of making and using the same |