| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 02/25/2009 | CN101372736A Crucible heating apparatus and deposition apparatus including the same |
| 02/25/2009 | CN101372327A Growth method of carbon nano-tube array |
| 02/25/2009 | CN101372041A Coated cutting tool for turning of heat resistant super alloys (HRSA) |
| 02/25/2009 | CN100464440C Mask frame assembly of thin layer vacuum evaporation for organic electroluminescent device |
| 02/25/2009 | CN100464004C Casting process for external sleeve of target pole for coating |
| 02/24/2009 | US7495348 Process for producing copy protection for an electronic circuit |
| 02/24/2009 | US7494908 Apparatus for integration of barrier layer and seed layer |
| 02/24/2009 | US7494575 Method for manufacturing a split probe |
| 02/24/2009 | CA2598768A1 A target foil for use in the production of [18f] using a particle accelerator |
| 02/19/2009 | WO2009023529A1 Target designs and related methods for coupled target assemblies, methods of production and uses thereof |
| 02/19/2009 | WO2009023133A1 Method of wafer level transient sensing, threshold comparison and arc flag generation/deactivation |
| 02/19/2009 | WO2009022573A1 Method for thin film formation |
| 02/19/2009 | WO2009022557A1 Surface-coated cutting tool |
| 02/19/2009 | WO2009021340A1 Method for producing a metal-oxide-coated workpiece surface with predeterminable hydrophobic behaviour |
| 02/19/2009 | US20090047510 Coated product and method of production thereof |
| 02/19/2009 | US20090047433 Substrate processing apparatus and method |
| 02/19/2009 | US20090047419 Film-forming method and film-forming device |
| 02/19/2009 | US20090047418 Film-forming method, and film forming device |
| 02/19/2009 | US20090047417 Method and system for vapor phase application of lubricant in disk media manufacturing process |
| 02/19/2009 | US20090047416 Method for forming thin films and apparatus therefor |
| 02/19/2009 | US20090045485 Capacitor, method of manufacturing capacitor, capacitor manufacturing apparatus, and semiconductor memory device |
| 02/19/2009 | US20090045398 MANUFACTURE METHOD FOR ZnO BASED COMPOUND SEMICONDUCTOR CRYSTAL AND ZnO BASED COMPOUND SEMICONDUCTOR SUBSTRATE |
| 02/19/2009 | US20090045053 Method of producing a lithium phosphate sintered body and sputtering target |
| 02/19/2009 | US20090045052 High strength sputtering target for forming phosphor film in electroluminescence element |
| 02/19/2009 | US20090045051 Target designs and related methods for coupled target assemblies, methods of production and uses thereof |
| 02/19/2009 | US20090045050 Sputtering target structure |
| 02/19/2009 | US20090045047 Conformal Magnetron Sputter Deposition |
| 02/19/2009 | US20090045046 Method of multi-location ARC sensing with adaptive threshold comparison |
| 02/19/2009 | US20090045045 Puck for cathodic arc coating with continuous groove to control arc |
| 02/19/2009 | US20090045044 Novel manufacturing design and processing methods and apparatus for sputtering targets |
| 02/19/2009 | US20090044911 Vacuum processor |
| 02/19/2009 | DE202008015862U1 Vorrichtung zur Umkehr der Beschickung von Sputter-Beschichtungsanlagen in Reinräumen Device for reversing the charge of sputter coating systems in clean rooms |
| 02/18/2009 | EP2025775A1 Photon induced cleaning of a reaction chamber |
| 02/18/2009 | EP2025774A1 Vapor deposition apparatus for organic vapor deposition material and process for producing organic thin film |
| 02/18/2009 | EP2025773A1 Vacuum evaporation apparatus for solid materials |
| 02/18/2009 | EP2025768A1 Ultra-high purity NiPt alloys and sputtering targets comprising same |
| 02/18/2009 | EP2025654A1 Oxide sinter, target, transparent conductive film obtained from the same, and transparent conductive base |
| 02/18/2009 | EP2024994A1 Method to prevent metal contamination by a substrate holder |
| 02/18/2009 | EP2024530A1 A rotatable sputter target |
| 02/18/2009 | EP2024529A1 Cold-pressed sputter targets |
| 02/18/2009 | EP2024528A1 Multifunctional hard material layers |
| 02/18/2009 | EP2024264A2 Multiple slot load lock chamber and method of operation |
| 02/18/2009 | EP1799876B1 Flat end-block for carrying a rotatable sputtering target |
| 02/18/2009 | EP1769106B1 Phosphorus effusion cell arrangement and method for producing molecular phosphorus |
| 02/18/2009 | EP1606110A4 Coated article including titanium oxycarbide and method of making same |
| 02/18/2009 | CN201195745Y Vapor deposition apparatus drying water leading-in system |
| 02/18/2009 | CN201195744Y Three-dimensional rotating bracket for workpiece of vacuum coating machine |
| 02/18/2009 | CN101370961A Method to obtain a corrosion-resistant and shiny substrate |
| 02/18/2009 | CN101370960A Process for forming a metallized sheet |
| 02/18/2009 | CN101370959A Sputtering method and sputtering system |
| 02/18/2009 | CN101370958A Sputtering apparatus |
| 02/18/2009 | CN101370957A Cathode evaporator |
| 02/18/2009 | CN101370956A Radiopaque coatings for polymer substrates |
| 02/18/2009 | CN101370955A Multilayer structure, electrode for electrical circuit using same, and method for producing same |
| 02/18/2009 | CN101369629A Solid electrolyte silver germanium oxygen thin film and preparation method and use thereof |
| 02/18/2009 | CN101369042A Lens module and preparation thereof |
| 02/18/2009 | CN101368263A Preparation method of silicon nitride/silicon oxide double-layer anti-reflection protective film |
| 02/18/2009 | CN101368262A Method for coating surface |
| 02/18/2009 | CN101368261A Sputter coating device and method of depositing a layer on a substrate |
| 02/18/2009 | CN101368260A A method and apparatus for depositing a coating onto a substrate |
| 02/18/2009 | CN101368259A Preparation method of negative thermal expansion material ZrW2O8 thin film |
| 02/18/2009 | CN101368258A Preparation method of negative thermal expansion material ZrW2O8 film |
| 02/18/2009 | CN101367345A Cushion, back cushion and manufacturing method therefor |
| 02/18/2009 | CN101367286A Glass-hard low-frictional coefficient nano-multi-layer amplitude modulation structure coating and preparation method thereof |
| 02/18/2009 | CN100463099C Ion source |
| 02/18/2009 | CN100463084C Metal membrane and manufacture thereof, laminated ceramic electronic elements and manufacture thereof |
| 02/18/2009 | CN100462484C Forming method for model |
| 02/18/2009 | CN100462476C Production of multifunctional gas-phase depositer and solid oxide fuel single cell |
| 02/18/2009 | CN100462474C Process for preparing granular film TbFeCo |
| 02/18/2009 | CN100462473C Medical TiNi shape memory alloy sputtered by Ti-Ta-C-O composite film on surface and its production |
| 02/18/2009 | CN100462320C Preparation method of photo catalytic activation self cleaning product |
| 02/17/2009 | US7491660 Method of forming nitride films with high compressive stress for improved PFET device performance |
| 02/17/2009 | US7491655 Semiconductor device and method of fabricating the same |
| 02/17/2009 | US7491301 Methods and apparatuses for depositing film on both sides of a pane |
| 02/17/2009 | CA2357583C Process for producing a protective coating that forms a thermal barrier with an underlying binding layer on a superalloy substrate and the resulting item |
| 02/12/2009 | WO2009020562A1 Vaporization of thermally sensitive materials |
| 02/12/2009 | WO2009020183A1 Semiconductor element and method for production of semiconductor element |
| 02/12/2009 | WO2009020129A1 Plasma processing method and plasma processing apparatus |
| 02/12/2009 | WO2009020091A1 Ito sintered body and ito sputtering target |
| 02/12/2009 | WO2009020084A1 Ito sintered body and ito sputtering target |
| 02/12/2009 | WO2009019222A1 Vehicle handle and process for its coating |
| 02/12/2009 | WO2009018776A1 Mass production type vacuum deposition system |
| 02/12/2009 | US20090042046 Information recording medium, method and apparatus for manufacturing the same |
| 02/12/2009 | US20090041924 Hard coated cannula and methods of manufacturing same |
| 02/12/2009 | US20090040620 Disk structure, manufacturing method thereof and optical tweezers device using the same |
| 02/12/2009 | US20090038935 Thermal barrier coating resistant to penetration by environmental contaminants |
| 02/12/2009 | US20090038550 Evaporation source, manufacturing method of the same and manufacturing method of an organic el display device |
| 02/12/2009 | US20090038544 Film coating holder and film coating device using same |
| 02/12/2009 | DE202008013870U1 Einrichtung zum Erkennen von Wassereinbrüchen in Vakuumanlagen Means for detecting water leaks in vacuum systems |
| 02/12/2009 | DE102008004405A1 Producing a surface layer of a substrate e.g. ceramic electrode, comprises applying the surface layer on the substrate in an atmosphere of argon and oxygen by a sputter deposition, and setting the oxygen with oxygen partial pressure |
| 02/12/2009 | DE102005019100B4 Magnetsystem für eine Zerstäubungskathode Magnet system for a sputtering cathode |
| 02/11/2009 | EP2023382A1 Etching method, etching mask and method for manufacturing semiconductor device using the same |
| 02/11/2009 | EP2022871A2 Sputtering target, optical information recording medium and process for producing the same |
| 02/11/2009 | EP2022870A2 Layer system for creating a surface layer on a surface of a substrate, vaporisation source for manufacturing a layer system |
| 02/11/2009 | EP2022869A2 Method for forming active-element aluminide diffusion coatings |
| 02/11/2009 | EP2022625A1 Laminated body for resin glass and method for manufacturing such laminated body |
| 02/11/2009 | EP2021132A1 Sheet steel provided with a corrosion protection system and method for coating sheet steel with such a corrosion protection system |
| 02/11/2009 | EP1620497B1 Object with a stratified composite material |
| 02/11/2009 | EP1425431B1 Integrated circuit device and fabrication using metal-doped chalcogenide materials |
| 02/11/2009 | CN201193243Y Mask device for manufacturing coated plug |