| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/26/2009 | WO2009036910A1 Tubular sputtering target having a grooved outer surface of the support tube |
| 03/26/2009 | WO2009036775A1 Process for preparing methyltrioxorhenium and organorhenium(vii) oxides |
| 03/26/2009 | US20090081819 Method and apparatus for managing manufacturing equipment, method for manufacturing device thereby |
| 03/26/2009 | US20090081434 Thin film getter devices |
| 03/26/2009 | US20090081425 Precious metal jewelry and process for producing the same |
| 03/26/2009 | US20090081391 Methanol oxidation catalyst |
| 03/26/2009 | US20090081378 Layered lenses and method of layering lenses |
| 03/26/2009 | US20090081343 Slip Resistant Tubular Food Casing Comprising Cellulose or Fibre-Reinforced Cellulose |
| 03/26/2009 | US20090080098 Absorption Type Multi-Layer Film ND Filter and Process for Producing the Same |
| 03/26/2009 | US20090078580 Method for Forming Cu Film |
| 03/26/2009 | US20090078572 Magnetron end-block with shielded target mounting assembly |
| 03/26/2009 | US20090078571 Magnet assembly capable of generating magnetic field having direction that is uniform and can be changed and sputtering apparatus using the same |
| 03/26/2009 | US20090078570 Target/backing plate constructions, and methods of forming target/backing plate constructions |
| 03/26/2009 | US20090078569 Inductively coupled plasma processing apparatus |
| 03/26/2009 | US20090078567 Method of connecting electrodes and hydrogen generating apparatus using the same |
| 03/26/2009 | US20090078566 Deposited Film Forming Method, Deposited Film Forming Device, Deposited Film, and Photosensitive Member Provided with the Deposited Film |
| 03/26/2009 | US20090078565 Method and apparatus for depositing a coating onto a substrate |
| 03/26/2009 | US20090078564 Target structure and target holding apparatus |
| 03/26/2009 | US20090078563 Plasma Processing Apparatus And Method Capable of Adjusting Temperature Within Sample Table |
| 03/26/2009 | US20090078391 Sputter targets and methods of manufacturing same to reduce particulate emission during sputtering |
| 03/26/2009 | US20090078374 Apparatus and methods for transporting and processing substrates |
| 03/26/2009 | US20090078202 Substrate heater for material deposition |
| 03/26/2009 | DE10355678B4 Vakuumsystem, Verfahren zum Transport eines Objekts im Vakuum mittels des Vakuumsystems und Verwendung des Vakuumsystems Vacuum system, method for transporting an object in a vacuum via the vacuum system and the vacuum system using |
| 03/26/2009 | DE10215369B4 Kathodenzerstäubungsgerät zur Ausbildung eines Metallfilms unter Verwendung eines Magnetfeldes A sputtering cathode apparatus for forming a metal film using a magnetic field |
| 03/25/2009 | EP2040098A1 Apparatus and method for producing reflector mirror |
| 03/25/2009 | EP2039798A1 Transparent conductive film, process for production of the film, and sputtering target for use in the production of the film |
| 03/25/2009 | EP2039797A1 Sputtering target/backing plate conjunction element |
| 03/25/2009 | EP2039665A2 Method of producing a lithium phosphate sintered body and sputtering target |
| 03/25/2009 | EP2038451A2 Corrosion resistant thermal barrier coating material |
| 03/25/2009 | EP2038450A1 Method for producing an electrically conducting layer |
| 03/25/2009 | EP2038449A1 Substrate with antimicrobial properties |
| 03/25/2009 | EP1776229A4 Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates |
| 03/25/2009 | EP1664368B1 A method and apparatus for the production of metal coated steel products |
| 03/25/2009 | EP1641956B1 Rotating tubular sputter target assembly |
| 03/25/2009 | EP1491255A4 Method for carrying out homogeneous and heterogeneous chemical reactions using plasma |
| 03/25/2009 | EP1412550B1 Support with getter-material for micromechanical device |
| 03/25/2009 | CN201212059Y Thickness evenness correcting device of sputter film |
| 03/25/2009 | CN201212058Y Constant tension control device of high vacuum continuous coating |
| 03/25/2009 | CN201212057Y Reversible winding control device of high vacuum continuous coating composite film |
| 03/25/2009 | CN201212056Y Utilization rate strengthening device of high vacuum ion beam sputtering deposition target material |
| 03/25/2009 | CN101395711A Vertical substrate conveyance device and film deposition equipment |
| 03/25/2009 | CN101395296A Sputtering target |
| 03/25/2009 | CN101395295A Target arrangement |
| 03/25/2009 | CN101395294A System and method for sputtering a tensile silicon nitride film |
| 03/25/2009 | CN101395290A Semiconductor device, its manufacturing method, and sputtering target material for use in the method |
| 03/25/2009 | CN101395096A Substrate comprising a stack having thermal properties |
| 03/25/2009 | CN101394062A Chamber surface passivation method for semi-conductor laser |
| 03/25/2009 | CN101393980A Silicon cathode, lithium ion secondary battery comprising the same and manufacturing method therefor |
| 03/25/2009 | CN101393979A Silicon cathode, lithium ion secondary battery comprising the same and manufacturing method therefor |
| 03/25/2009 | CN101393294A Interference filter and method for its production |
| 03/25/2009 | CN101392363A Method for diffusion connecting titanium alloy at low temperature and vacuum |
| 03/25/2009 | CN101392362A Method for preparing ITO target from nano homogeneous ITO powder |
| 03/25/2009 | CN101391557A Film with false proof function and anti-counterfeiting object containing film |
| 03/25/2009 | CN101391502A Composite anti-fake film material, preparation method thereof and anti-fake paper using thereof |
| 03/25/2009 | CN100472815C Electronic device and its mfg. method |
| 03/25/2009 | CN100472711C Device for and method of creating a model for determining relationship between process and quality |
| 03/25/2009 | CN100472670C Superconductor and process for producing the same |
| 03/25/2009 | CN100471998C Surface processing technology for Mg-alloy |
| 03/25/2009 | CN100471989C Sputtering coating method for high-shielding thin-film against electromagnetic interference on plastic matrix |
| 03/25/2009 | CN100471988C Cooled backing plate for a sputter target and sputter target made with several backing plates |
| 03/25/2009 | CN100471987C Method for improving sputtering and deposition processes |
| 03/25/2009 | CN100471986C A method of manufacturing a sputter target |
| 03/25/2009 | CN100471985C Making process for cellphone window protecting screen |
| 03/25/2009 | CN100471984C Method of depositing a material layer |
| 03/24/2009 | US7507615 Method of manufacturing gate insulated field effect transistors |
| 03/24/2009 | US7507483 Enhanced bonding layers on native oxide surfaces |
| 03/24/2009 | US7507467 Microchannels with minimum widths separate fluid from particles to be filtered; fluid flows through the widths into the microchannels and particles to be filtered are prevented from passing through the the widths; microchannels can be provided with gradient characteristics |
| 03/24/2009 | US7507458 Semi-reflective film and reflective film for optical information recording medium, optical information recording medium, and sputtering target |
| 03/24/2009 | US7507447 Transparent conductive film, method for producing same and method for forming pattern |
| 03/24/2009 | US7507357 Transparent oxide electrode film and manufacturing method thereof, transparent electroconductive base material, solar cell and photo detection element |
| 03/24/2009 | US7507304 Copper alloy sputtering target and semiconductor element wiring |
| 03/19/2009 | WO2009036284A1 Low-maintenance coatings, and methods for producing low-maintenance coatings |
| 03/19/2009 | WO2009036263A2 Low-maintenance coating technology |
| 03/19/2009 | WO2009035933A2 Sputtering targets comprising a novel manufacturing design, methods of production and uses thereof |
| 03/19/2009 | WO2009035870A2 Magnesium-titanium solid solution alloys |
| 03/19/2009 | WO2009035404A1 Insert for milling of cast iron |
| 03/19/2009 | WO2009035396A1 Coated cutting insert for machining of titanium based alloys |
| 03/19/2009 | WO2009035002A1 Electrostatic chuck |
| 03/19/2009 | WO2009034939A1 Process for producing thin organic film |
| 03/19/2009 | WO2009034938A1 Organic-material vapor generator, film deposition source, and film deposition apparatus |
| 03/19/2009 | WO2009034916A1 Vapor emission device, organic thin-film vapor deposition apparatus and method of organic thin-film vapor deposition |
| 03/19/2009 | WO2009034915A1 Evaporation apparatus |
| 03/19/2009 | WO2009034869A1 Vacuum processing system and substrate transfer method |
| 03/19/2009 | WO2009034822A1 Substrate processing apparatus, method for suppressing contamination of substrate processing apparatus, and storage medium |
| 03/19/2009 | WO2009034775A1 Method for producing sintered body, sintered body, sputtering target composed of the sintered body, and sputtering target-backing plate assembly |
| 03/19/2009 | WO2009034716A1 Composite material and coated cutting tool |
| 03/19/2009 | WO2009034610A1 Method of preventing detachment of deposited film on substrate retention tool in thin-film forming apparatus and thin-film forming apparatus |
| 03/19/2009 | WO2009034566A1 Vapor deposition of biomolecules |
| 03/19/2009 | WO2009034359A1 Coatings to resist and protect against aquatic biofouling |
| 03/19/2009 | WO2009033503A1 Method for manufacturing a compound film |
| 03/19/2009 | WO2009014394A3 Method for depositing ceramic thin film by sputtering using non-conductive target |
| 03/19/2009 | WO2008156794A3 Sputtering target having increased life and sputtering uniformity |
| 03/19/2009 | WO2008155087A3 Plasma reactor, and method for the production of monocrystalline diamond layers |
| 03/19/2009 | WO2008153785A3 Substrate cleaning chamber and components |
| 03/19/2009 | WO2008134516A3 Novel manufacturing design and processing methods and apparatus for sputtering targets |
| 03/19/2009 | US20090075411 Manufacturing apparatus |
| 03/19/2009 | US20090075361 Microfluidic Device and Method of Manufacturing the Microfluidic Device |
| 03/19/2009 | US20090075119 Tunable low loss material compositions and methods of manufacture and use therefore |
| 03/19/2009 | US20090075116 Gravure plate-making roll and method of producing the same |
| 03/19/2009 | US20090075114 Method for the manufacture of a hard material coating on a metal substrate and a coated substrate |