Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
04/2009
04/22/2009CN100480043C High hardness ZrN/Al2(O1-xNx)3 nanometer multicoating
04/22/2009CN100479955C Surface-coated cutting tool
04/21/2009US7521098 Method of processing an organic-film
04/21/2009US7521097 Using light source; adjust density, porosity; heat treatment; multilayer deposits of electroconductive material
04/21/2009US7521089 Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers
04/21/2009US7520969 Notched deposition ring
04/21/2009US7520965 Magnetron sputtering apparatus and method for depositing a coating using same
04/21/2009US7520954 Method and apparatus for separating disc-shaped substrates
04/16/2009WO2009049285A1 Thermal evaporation sources for wide-area deposition
04/16/2009WO2009048921A1 Optimum surface texture geometry
04/16/2009WO2009048189A1 Voltage variable type thinfilm deposition method and apparatus thereof
04/16/2009WO2009048104A1 Production system of thin film solar battery
04/16/2009WO2009048075A1 Plasma processing apparatus
04/16/2009WO2009047879A1 Film forming method and film forming apparatus
04/16/2009WO2009047867A1 Member covered with hard coating film and process for the production of the member
04/16/2009WO2009047333A1 Industrial vapour generator for the deposition of an alloy coating onto a metal strip
04/16/2009WO2009046928A1 Workpiece carrier device
04/16/2009WO2009046476A1 Method for producing a sliding bearing element having a bismuth-containing sliding layer
04/16/2009WO2009024738A3 Method of patterning vapour deposition by printing
04/16/2009WO2009017376A3 Process for manufacturing multi-layered thin film by dry vacuum vapor deposition
04/16/2009WO2008108809A3 All-gaseous deposition of nanocomposite films
04/16/2009WO2008009619A9 Method for depositing electrically insulating layers
04/16/2009WO2007027535A3 Deposition of perovskite and other compound ceramic films for dielectric applications
04/16/2009WO2006028779A3 Electrically floating diagnostic plasma probe with ion property sensors
04/16/2009WO2006011954A3 Diagnostic plasma measurement device having patterned sensors and features
04/16/2009WO2005060651A3 Protective layer for optical coatings with enhanced corrosion and scratch resistance
04/16/2009US20090098717 Co-sputter deposition of metal-doped chalcogenides
04/16/2009US20090098460 Negative plate for lithium ion batteries and a method of preparing the same
04/16/2009US20090098310 Method for bonding a tantalum structure to a cobalt-alloy substrate
04/16/2009US20090098307 Manufacturing method for far-infrared irradiating substrate
04/16/2009US20090098306 Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam
04/16/2009US20090098293 Method of providing an encapsulation layer stack, coating device and coating system
04/16/2009US20090096375 Plasma Display Panel and Method for Manufacturing Same
04/16/2009US20090095620 Semiconductor device, its manufacturing method, and sputtering target material for use in the method
04/16/2009US20090095617 Bias sputtering film forming process and bias sputtering film forming apparatus
04/16/2009US20090095616 Apparatus and method for measuring vapor flux density
04/16/2009US20090095214 Laser cladding device with an improved nozzle
04/16/2009US20090095213 Thermal evaporation sources for wide-area deposition
04/16/2009US20090095055 Method for Differentially Pumping Endblock Seal Cavity
04/16/2009DE19626861B4 Vakuumbehandlungsanlage zum Aufbringen dünner Schichten auf Substrate, beispielsweise auf Scheinwerferreflektoren Vacuum treatment plant for applying thin layers on substrates, for example on headlamp reflectors
04/16/2009DE19624609B4 Vakuumbehandlungsanlage zum Aufbringen dünner Schichten auf Substrate, beispielsweise auf Scheinwerferreflektoren Vacuum treatment plant for applying thin layers on substrates, for example on headlamp reflectors
04/16/2009DE10323295B4 Vakuumbeschichtungsanlage und Verfahren zur Beschichtung von Substraten Vacuum-coating apparatus and methods for coating substrates
04/16/2009DE102008050998A1 Transporteinrichtung für langgestreckte Substrate Transport means for elongated substrates
04/16/2009DE102007049649A1 Vorrichtung und Verfahren zur Ausbildung von Beschichtungen auf Substraten innerhalb von Vakuumkammern Apparatus and method for forming coatings on substrates in vacuum chambers
04/16/2009CA2702188A1 Industrial vapour generator for the deposition of an alloy coating onto a metal strip
04/16/2009CA2699085A1 Optimum surface texture geometry
04/15/2009EP2048664A1 Thin film for reflection film or semi-transparent reflection film, sputtering target, and optical recording medium
04/15/2009EP2048524A1 Thin film for use as reflective film or semi-transmissive reflective film, sputtering target and optical recording medium
04/15/2009EP2048263A1 Workpiece mount device
04/15/2009EP2048262A1 Lithium-containing transition metal oxide target, process for producing the same and lithium ion thin-film secondary battery
04/15/2009EP2048261A1 Industrial steam generator for depositing an alloy coating on a metal band
04/15/2009EP2047010A2 Cvd coating scheme including alumina and/or titanium-containing materials and method of making the same
04/15/2009EP1606543B1 Universal vacuum coupling for cylindrical target
04/15/2009EP1235947A4 Method and apparatus for substrate biasing in multiple electrode sputtering systems
04/15/2009EP1207916B1 Medical devices with metal/polymer composites
04/15/2009CN201220962Y Mask apparatus for manufacturing film coated rubber plug
04/15/2009CN201220960Y Novel depositional ring
04/15/2009CN101410952A Method for seed film formation, plasma film forming apparatus, and memory medium
04/15/2009CN101410931A Coating apparatus
04/15/2009CN101410546A Sputtering apparatus
04/15/2009CN101410545A Ion gun system, vapor deposition apparatus and process for producing lens
04/15/2009CN101410209A Cutting tool and method of producing the same
04/15/2009CN101409347A Lithium ion battery cathode sheet and preparation method thereof
04/15/2009CN101409251A Electrostatic chuck apparatus
04/15/2009CN101409217A Method of forming an electrical circuit with overlaying integration layer
04/15/2009CN101409135A Soft magnetic film and preparation method
04/15/2009CN101409134A Alloy film capable of improving exchange bias field size and enhancing exchange bias stability, as well as preparation method thereof
04/15/2009CN101408354A Solar selective absorption coating and preparing method thereof
04/15/2009CN101407954A Spinning ring coated with nanoparticles
04/15/2009CN101407908A Correction plate
04/15/2009CN101407907A Sheath for producing target material by hot isostatic pressing and method for producing target material
04/15/2009CN101407906A Vacuum film plating apparatus
04/15/2009CN101407905A Cemented carbide cutting tool for multi-component coating
04/15/2009CN101407904A Method for producing ITO target material by hot isostatic pressing
04/15/2009CN101407902A Electrical contact strengthening apparatus and method for improving binding force of coating and workpiece
04/15/2009CN101407881A High purity tantalum and products containing the same like sputter targets
04/15/2009CN100479178C Organic electro-luminance device and method for fabricating the same
04/15/2009CN100479082C Method for manufacturing plasma display panel
04/15/2009CN100478490C Vaporizing material for producing highly refractive optical layers
04/15/2009CN100478489C Deposit film and its producing method
04/15/2009CN100478488C Transitional optical thin-film coating device and its smelting tool ring
04/15/2009CN100478381C Process for preparing a composite material
04/14/2009US7517554 Forming a mixed film of Al and Si and/or Ge having a matrix of Si, Ge, or Si-Ge and cylindrical portions of Al not larger than 30 nm in diameter and having the longitudinal direction perpendicular to a substrate; controlled the pore diameters and pore intervals
04/14/2009US7517551 Method of manufacturing a light-emitting device
04/14/2009US7517548 Method of forming ferroelectric thin film
04/14/2009US7517515 Sintering; high density
04/14/2009US7517513 Process for preparing nanostructured cerium oxide materials of controlled surface chemistry of zeta potential
04/14/2009US7517438 Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system
04/14/2009US7517437 RF powered target for increasing deposition uniformity in sputtering systems
04/14/2009US7517436 Magneto-optical recording medium and manufacturing method thereof
04/09/2009WO2009046093A2 Method and system for coating a surface of a medical device with a therapeutic agent and drug eluting medical devices made thereby
04/09/2009WO2009045740A2 Method for depositing films using gas cluster ion beam processing
04/09/2009WO2009045324A2 Method for coating fuel system components
04/09/2009WO2009044898A1 Indium oxide transparent conductive film and method for producing the same
04/09/2009WO2009044897A1 Indium oxide transparent conductive film and method for producing the same
04/09/2009WO2009044896A1 Method for producing indium oxide transparent conductive film
04/09/2009WO2009044893A1 Indium oxide transparent conductive film and method for producing the same
04/09/2009WO2009044892A1 Indium oxide-based transparent electroconductive film and process for producing the indium oxide-based transparent electroconductive film
04/09/2009WO2009044891A1 Indium oxide-based transparent electroconductive film and process for producing the indium oxide-based transparent electroconductive film
04/09/2009WO2009044890A1 Indium oxide target