Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
05/2009
05/20/2009CN101435070A TiAlN/TiN for tool and mould material surface and preparation thereof
05/20/2009CN101435069A System and method for preparing morphology controllable micro-nano structure film
05/20/2009CN101435068A Sputtering target and method for preparation thereof
05/20/2009CN101435067A Preparation of tellurium nano-wire array based on physical vapour deposition
05/20/2009CN101434408A A-site Pr doping BTO film material and preparation thereof
05/20/2009CN100490056C False piece operation method with cobalt deposition
05/20/2009CN100489152C Ion implantation process to raise anticorrosion performance of lumpy amorphous alloy
05/20/2009CN100489151C Target material with multilayer metal film
05/20/2009CN100489150C ITO sputtering target
05/20/2009CN100489149C Thin film forming method and forming device therefor
05/20/2009CN100489148C Cathode for vacuum sputtering treatment machine
05/20/2009CN100489147C Device and method for the vacuum evaporation of high temperature superconductive material
05/20/2009CN100489146C Mask-retaining device
05/20/2009CN100488677C Hard coating for cutting tool
05/19/2009US7534658 Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices
05/19/2009US7534628 Method for forming semiconductor device and method for forming photovoltaic device
05/19/2009US7534282 Molybdenum (Mo); target made by hot isostatic pressing of the powder; for forming a Mo thin film having little particle generation; use making liquid crystal displays or field effect transistors
05/14/2009WO2009060901A1 Sno-based sputtering target
05/14/2009WO2009060739A1 Vacuum-evaporation source, and organic el element manufacturing apparatus
05/14/2009WO2009060597A1 Thin film forming apparatus and forming method for thin film
05/14/2009WO2009059807A1 Method for depositing electrically insulating layers
05/14/2009WO2008057565A3 Artificial cushion joints and methods of making the same
05/14/2009WO2007047888A3 Method and apparatus for converting precursor layers into photovoltaic absorbers
05/14/2009US20090124033 Process for producing organiclight-emitting display device
05/14/2009US20090123789 Methods of gas confinement within the voids of crystalline material and articles thereof
05/14/2009US20090123735 Low contamination components for semiconductor processing apparatus and methods for making components
05/14/2009US20090123667 Double-Sided Adhesive Tapes for Producing LC Displays Having Light-reflecting and Absorbing Properties
05/14/2009US20090121333 Flexible substrates having a thin-film barrier
05/14/2009US20090120800 Organic Silver Complexes, Their Preparation Methods and Their Methods for Forming Thin Layers
05/14/2009US20090120790 Low contamination components for semiconductor processing apparatus and methods for making components
05/14/2009US20090120787 Method of manufacturing semiconductor device
05/14/2009US20090120786 Gallium Oxide-Zinc Oxide Sputtering Target, Method of Forming Transparent Conductive Film, and Transparent Conductive Film
05/14/2009US20090120785 Method for forming metal film or stacked layer including metal film with reduced surface roughness
05/14/2009US20090120784 reduce the contamination of the target surface; stress associated with the thermal expansion and contraction of the sputtering target; cathodic sputtering is used for the deposition of thin films; used in the production of semiconductor devices and display
05/14/2009US20090120783 Securing device for a sputtering source
05/14/2009US20090120501 Formation of photoconductive and photovoltaic films
05/14/2009US20090120462 Fabricating and cleaning chamber components having textured surfaces
05/13/2009EP2058120A1 Laminated films as high barrier films and their use in vacuum insulation panels
05/13/2009EP2058080A1 Normal temperature joining method and normal temperature joining device
05/13/2009EP2057667A1 A method of antistatic deposition on components of mobile phone
05/13/2009EP2057661A1 Process and apparatus for the modification of surfaces
05/13/2009EP2057299A1 Device for turning an article in a vacuum coating installation, method of turning an article in a vacuum coating installation and use thereof
05/13/2009EP1497479B1 Methods for deposition of electrolyte films
05/13/2009EP1474542B1 Method of CIRCUIT FABRICATION using an aperture mask
05/13/2009CN201236207Y Heater protection ring
05/13/2009CN201236206Y Silicon wafer bearing device in deposition film manufacture process
05/13/2009CN101433128A Process for producing organic light-emitting display device
05/13/2009CN101432459A Film forming method, film forming device, and storage medium
05/13/2009CN101432458A Atmospheric pressure chemical vapor deposition
05/13/2009CN101432457A Atmospheric pressure chemical vapor deposition
05/13/2009CN101432064A Sealing gate for strips
05/13/2009CN101431119A Slide boat metal lift hook of solar cell panel
05/13/2009CN101430944A Transparent conductive film production method
05/13/2009CN101430503A Double-layer glue removing method used for electron beam lithography stripping
05/13/2009CN101430004A PVD chromium based ceramic composite coating piston ring and method for producing the same
05/13/2009CN101429648A Method for aluminum-copper-iron quasi-crystal coating preparation by three-target magnetic controlled cosputtering and use thereof
05/13/2009CN101429647A Example bench for surface modification of powder material by vacuum apparatus
05/13/2009CN101429646A Production method for film generating in-plane uniaxial magnetic anisotropy in non-inducement magnetic field
05/13/2009CN101429645A Production method and special equipment for zinc oxide aluminum transparent electroconductive film
05/13/2009CN101429644A Production method of metal or metal oxide nano particle
05/13/2009CN101429643A Low temperature production method of transparent conductive oxide film
05/13/2009CN101429642A BiFeO3 target and film production method
05/13/2009CN101429641A Chromium nitride, titanium nitride aluminum hard multi-layer nano-film coating
05/13/2009CN101429640A Transparent conductive film production method
05/13/2009CN101428492A Method for manufacturing construction composite panel with sedimentary deposit
05/13/2009CN101427979A Method for preparing semi-coating medical rubber plug
05/13/2009CN100487948C Method and apparatus for measuring thickness of deposited film and method and apparatus for forming material layer
05/13/2009CN100487909C Heterogeneous p-n nano-line array, its production and use
05/13/2009CN100487337C Selective absorbing composite membrane coated absorber plate core of solar energy and making method thereof
05/13/2009CN100487158C Hall Ion Source excitation magnetron sputtering enhancement magnetism filtration multi-arc ion composite coating method
05/13/2009CN100487157C Organic-molecular beam depositer for producing organic/inorganic thin film
05/13/2009CN100487156C Metal plate belt vacuum film coating equipment
05/13/2009CN100487155C Device for aligning substrate with mask and method using the same
05/13/2009CN100487154C Metal vaporizing heating element and metal vaporizing method
05/13/2009CN100487144C High-purity spongy titanium material and its production method
05/12/2009US7531679 Composition and method for low temperature deposition of silicon-containing films such as films including silicon nitride, silicon dioxide and/or silicon-oxynitride
05/12/2009US7531232 Component for vacuum apparatus, production method thereof and apparatus using the same
05/12/2009US7531207 MOCVD PGO thin films deposited on indium oxide for feram applications
05/12/2009US7531206 Flexible emitter using high molecular compound and method for fabricating the same
05/12/2009US7531205 High throughput ion beam assisted deposition (IBAD)
05/12/2009US7531071 Magnet arrangement for a planar magnetron
05/12/2009US7531070 Sputtering power-supply unit
05/12/2009US7531068 Method for manufacturing silicon nanodot film for light emission in nano-size photonic devices
05/12/2009US7531059 Cleaning of semiconductor wafers by contaminate encapsulation
05/12/2009CA2518955C Coated article including titanium oxycarbide and method of making same
05/07/2009WO2009059165A2 Endoprosthesis coating
05/07/2009WO2009058385A1 Transparent conductive oxide coating for thin film photovoltaic applications and methods of making the same
05/07/2009WO2009058351A2 Spinulose surfaces
05/07/2009WO2009058082A1 Coated cutting insert for machining of aluminium based alloys
05/07/2009WO2009057715A1 Magnetron unit, magnetron sputtering apparatus and method for manufacturing electronic device
05/07/2009WO2009057680A1 Film forming apparatus and film forming method
05/07/2009WO2009057678A1 Film forming apparatus and film forming method
05/07/2009WO2009029532A3 Thermocouple
05/07/2009WO2009024460A3 System and process for the continous vacuum coating of a material in web form
05/07/2009WO2009021340A9 Method for producing a metal-oxide-coated workpiece surface with predeterminable hydrophobic behaviour
05/07/2009WO2008004240A3 Device and method for thin film deposition using a vacuum arc in an enclosed cathode-anode assembly
05/07/2009WO2007059347A3 Flexible magnetron including partial rolling support and centering pins
05/07/2009WO2007035227A3 Sputtering target with bonding layer of varying thickness under target material
05/07/2009US20090117408 Perpendicular magnetic recording disk and method of manufacturing the same
05/07/2009US20090117372 Alloyed tungsten produced by chemical vapour deposition