| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/07/2009 | US20090117371 Weather-resistant layer system |
| 05/07/2009 | US20090117313 Ag base alloy thin film and sputtering target for forming ag base alloy thin film |
| 05/07/2009 | US20090117290 Method of manufacturing non-shrinkage ceramic substrate |
| 05/07/2009 | US20090116169 Alpha Tantalum Capacitor Plate |
| 05/07/2009 | US20090114942 Apparatus for manufacturing group-iii nitride semiconductor layer, method of manufacturing group-iii nitride semiconductor layer, group-iii nitride semiconductor light-emitting device, method of manufacturing group-iii nitride semiconductor light-emitting device, and lamp |
| 05/07/2009 | US20090114886 Fired material and process for producing the same |
| 05/07/2009 | US20090114535 Ruthenium-Alloy Sputtering Target |
| 05/07/2009 | US20090114534 Sputtering Assembly |
| 05/07/2009 | US20090114529 Sputtering apparatus |
| 05/07/2009 | US20090114528 Sputter coating device and coating method |
| 05/07/2009 | US20090114000 Nanoprobe tip for advanced scanning probe microscopy comprising a layered probe material patterned by lithography and/or fib techniques |
| 05/07/2009 | US20090113992 Miniaturized Metal (Metal Alloy)/ PdOx/SiC Hydrogen And Hydrocarbon Gas Sensors |
| 05/07/2009 | US20090113726 Method for obtaining a hard surface at the nanoscale |
| 05/07/2009 | DE19530331B4 Beschichtete Unterlage und Verfahren zu ihrer Bildung Coated substrate and methods for their formation |
| 05/07/2009 | DE10392702B4 Elektrisch leitendes Fluidverteilungselement mit elektrisch leitender Beschichtung, Verfahren zu seiner Herstellung und Brennstoffzellen mit dem Fluidverteilungselement An electrically conductive fluid distribution element having an electrically conductive coating, a process for its preparation and fuel cell with the fluid distribution member |
| 05/07/2009 | DE102007053194A1 Coating process comprises depositing layer on substrate, contacting evaporating materials at the substrate, supplying evaporators for heating the material by electric current, and detecting ripples of electrical parameters in evaporators |
| 05/07/2009 | DE102007052524A1 Transportmittel und Vakuumbeschichtungsanlage für Substrate unterschiedlicher Größe Transport equipment and vacuum coating system for substrates of different sizes |
| 05/07/2009 | DE102007030503B4 Verfahren zur Herstellung einer beschichteten Glaskeramik-Platte und verfahrensgemäß herstellbare beschichtete Glaskeramik-Platte A process for producing a coated glass ceramic plate and proceed according producible coated glass ceramic plate |
| 05/07/2009 | DE102005055035B4 Hartstoffbeschichteter Glas-oder Glaskeramik-Artikel, Verfahren zu dessen Herstellung und seine Verwendung A coated hard material glass or glass-ceramic articles, process for its preparation and its use |
| 05/07/2009 | DE102005024118B4 Vorrichtung und Verfahren zur Reduktion von Partikeln bei der thermischen Behandlung rotierender Substrate Device and method for reduction of particles in the thermal treatment rotating substrates |
| 05/07/2009 | DE102005023307B4 Gleitlagerverbundwerkstoff, Verwendung und Herstellungsverfahren Plain bearing composite material, use and production method |
| 05/07/2009 | DE10114485B4 Verfahren und Vorrichtung zur Herstellung von endlosen Kunststoff-Hohlprofilen Method and apparatus for production of endless plastic hollow profiles |
| 05/07/2009 | CA2704389A1 Transparent conductive oxide coating for thin film photovoltaic applications and methods of making the same |
| 05/06/2009 | EP2056373A1 Vapour deposition method for sheet-like materials with fuller's earth |
| 05/06/2009 | EP2056339A1 Method for manufacturing group iii nitride compound semiconductor light-emitting device, group iii nitride compound semiconductor light-emitting device, and lamp |
| 05/06/2009 | EP2056304A1 Zinc oxide based transparent electric conductor, sputtering target for forming of the conductor and process for producing the target |
| 05/06/2009 | EP2055802A1 Deposition Equipment with Guide Roller for Long Superconducting Tape |
| 05/06/2009 | EP2055793A1 Methodology for recycling RU and RU-alloy deposition targets & targets made of recycled RU and RU-based alloy powders |
| 05/06/2009 | EP2054956A1 Sealing technique and hermetically sealed device |
| 05/06/2009 | EP2054160A1 Method for producing smooth, dense optical films |
| 05/06/2009 | EP2003225A9 Ion gun system, vapor deposition apparatus and process for producing lens |
| 05/06/2009 | EP1305563B1 Heat exchange foam |
| 05/06/2009 | EP1305453B1 Ring-shaped high-density plasma source and method |
| 05/06/2009 | EP1146979B1 Method of producing a silicon/aluminium sputtering target |
| 05/06/2009 | CN101427390A Method for manufacturing gallium nitride compound semiconductor light emitting element, gallium nitride compound semiconductor light emitting element and lamp |
| 05/06/2009 | CN101427350A Methods of implanting ions and ion sources used for same |
| 05/06/2009 | CN101426948A ZnO deposition material and ZnO film formed of same |
| 05/06/2009 | CN101426947A Coated body |
| 05/06/2009 | CN101426946A Method of removing hard coating film |
| 05/06/2009 | CN101425474A Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing |
| 05/06/2009 | CN101425379A Cathode foil producing process for electrolytic capacitor |
| 05/06/2009 | CN101425347A Ice coverage preventing electricity transmission cable and production method therefor |
| 05/06/2009 | CN101424873A Photo mask using soda-lime glass as substrate and method for manufacturing same |
| 05/06/2009 | CN101424758A Negative refraction artificial material based on iron-clad |
| 05/06/2009 | CN101423941A Vacuum coating surface color spraying technology |
| 05/06/2009 | CN101423931A Method for forming metal oxide on surface of substrate |
| 05/06/2009 | CN101423927A Method for preparing AlxIn1-xN film |
| 05/06/2009 | CN101423926A Non-conductive film vacuum coating process |
| 05/06/2009 | CN101423907A Sn-Ge-As alloy as well as preparation method and use thereof |
| 05/06/2009 | CN101423896A Methodology for recycling ru and ru-alloy deposition targets & targets made of recycled ru and ru-based alloy powders |
| 05/06/2009 | CN101422977A Filming material and preparation method thereof |
| 05/06/2009 | CN100485993C Shadow mask for fabricating organic electroluminescent device |
| 05/06/2009 | CN100485969C Method for fabricating semiconductor device |
| 05/06/2009 | CN100485838C High speed winding multi-layer capacity film coater |
| 05/06/2009 | CN100485834C Method for producing amorphous FeCuNbCrSiB film solenoid micro-inductance device |
| 05/06/2009 | CN100485232C Sliding member and production process thereof |
| 05/06/2009 | CN100485084C Atomic layer deposition method |
| 05/06/2009 | CN100485082C Method for preparing ZnO:Al transparent conductive film by direct magnetic control co-sputtering method |
| 05/06/2009 | CN100485081C Process for preparing boron-doped n-shape high-hardness transparent conductive zinc oxide film |
| 05/06/2009 | CN100485024C Polymer film based miniature cell clamp and preparing process thereof |
| 05/05/2009 | US7527713 Variable quadruple electromagnet array in plasma processing |
| 04/30/2009 | WO2009055678A1 Refractory metal-doped sputtering targets |
| 04/30/2009 | WO2009055065A1 Thin film coating system and method |
| 04/30/2009 | WO2009054950A1 Universal nucleation layer/diffusion barrier for ion beam assisted deposition |
| 04/30/2009 | WO2009054466A1 DISPLAY DEVICE AND Cu ALLOY FILM FOR USE IN THE DISPLAY DEVICE |
| 04/30/2009 | WO2009054369A1 Sputtering target for magnetic recording film and method for manufacturing such sputtering target |
| 04/30/2009 | WO2009054268A1 METHOD FOR FORMING Cu WIRING |
| 04/30/2009 | WO2009054217A1 High-purity ytterbium, sputtering target made of high-purity ytterbium, thin film containing high-purity ytterbium, and method for producing high-purity ytterbium |
| 04/30/2009 | WO2009054055A1 Method for manufacturing substrate structure for plasma display panel |
| 04/30/2009 | WO2009053479A2 Application of high power magnetron sputtering to through silicon via metallization |
| 04/30/2009 | WO2009053435A1 Method for manufacturing workpieces and apparatus |
| 04/30/2009 | WO2009053290A1 Method for coating and apparatus |
| 04/30/2009 | WO2009027905A3 Sputtering system |
| 04/30/2009 | WO2008137689A3 Fine grained, non banded, refractory metal sputtering targets with a uniformly random crystallographic orientation, method for making such film, and thin film based devices and products made there from |
| 04/30/2009 | WO2008035347A3 Superhydrophobic nanotextured polymer and metal surfaces |
| 04/30/2009 | WO2007032855A3 Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers |
| 04/30/2009 | US20090111036 Scanning beam of metallic ions over defect to dope, reducing transparency; implanting gallium atoms to reduce transmission and quartz can be etched |
| 04/30/2009 | US20090110918 Microbicidal Substrate |
| 04/30/2009 | US20090110915 Universal nucleation layer/diffusion barrier for ion beam assisted deposition |
| 04/30/2009 | US20090110892 System and method for making a graded barrier coating |
| 04/30/2009 | US20090110839 Apparatus and methods for controlling material application device |
| 04/30/2009 | US20090108264 Laminated conductive film, electro-optical display device and production method of same |
| 04/30/2009 | US20090107844 Glass electrophoresis microchip and method of manufacturing the same by mems fabrication |
| 04/30/2009 | US20090107837 Methodology for recycling ru and ru-alloy deposition targets & targets made of recycled ru and ru-based alloy powders |
| 04/30/2009 | US20090107834 Chalcogenide target and method |
| 04/30/2009 | US20090107396 Vacuum chamber on a frame basis for coating installations |
| 04/30/2009 | US20090107395 Deposition Apparatus With Guide Roller For Long Superconducting Tape |
| 04/30/2009 | DE19807930B4 Herstellung eines thermisch hochbelastbaren wärmereflektierenden Belags Producing a high thermal loads and heat-reflective coating |
| 04/30/2009 | DE19752322B4 Verfahren und Vorrichtung für die hochautomatisierte Herstellung von Dünnfilmen Method and apparatus for the highly automated manufacturing of thin films |
| 04/30/2009 | DE102007051023A1 Method for coating a surface of tooth flanks of pinion, comprises producing static loaded particles from coating material and then moving towards the tooth flanks to be coated |
| 04/30/2009 | CA2701402A1 Method for manufacturing workpieces and apparatus |
| 04/29/2009 | EP2053144A1 Method for quenching of steel member, quenched steel member, and agent for protecting quenched surface |
| 04/29/2009 | EP2053028A1 Zinc oxide sinter, process for producing the same, and sputtering target |
| 04/29/2009 | EP2052403A1 Method and device for coating a substrate with a defined distribution of coating thickness |
| 04/29/2009 | EP1925003A4 Siox:si composite material compositions and methods of making same |
| 04/29/2009 | EP1907597B1 Device for clamping and positioning an evaporator boat |
| 04/29/2009 | EP1686196B1 Method of manufacturing high purity hafnium |
| 04/29/2009 | EP1511876B1 Sputtering cathode adapter |
| 04/29/2009 | CN201228283Y Composite light path wide spectrum film thickness monitoring apparatus |
| 04/29/2009 | CN201228282Y Composite material surface modification apparatus assisted by pulse high energy density plasma |