| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 05/28/2009 | DE102008046318A1 Vakuumbedampfungsvorrichtung, Vakuumbedampfungsverfahren und verdampfter Gegenstand Vacuum evaporation, vacuum evaporation and vaporized subject |
| 05/28/2009 | DE102007055019A1 Verfahren zum Herstellen einer nanoporösen Schicht A method for producing a nano-porous layer |
| 05/28/2009 | DE102007055018A1 Verfahren zum Verbinden einer Edelmetalloberfläche mit einem Polymer A method of joining a noble metal surface with a polymer |
| 05/28/2009 | DE102007055017A1 Verfahren zum Verbinden zweier Fügeflächen A method for connecting two joint surfaces |
| 05/28/2009 | DE102007025600B4 Interferenzfilter und Verfahren zu dessen Herstellung Interference filter and process for its preparation |
| 05/27/2009 | EP2063320A2 Method and apparatus for fabricating vertical deposition mask |
| 05/27/2009 | EP2062994A1 Sb-Te BASE ALLOY SINTER SPUTTERING TARGET |
| 05/27/2009 | CN101443898A High throughput deposition apparatus with magnetic support |
| 05/27/2009 | CN101443473A Apparatus and method for coating substrates with approximate process isolation |
| 05/27/2009 | CN101443132A Sheet steel provided with a corrosion protection system and method for coating sheet steel with such a corrosion protection system |
| 05/27/2009 | CN101442184A Nitride semiconductor device and method of manufacturing the same |
| 05/27/2009 | CN101441937A Method for manufacturing end electrode of sheet-type capacitor |
| 05/27/2009 | CN101441411A Surface plasma resonance exposure photolithography method |
| 05/27/2009 | CN101441330A Light-induction anti-soil anti-fogging self-cleaning resin glasses lens and preparing method thereof |
| 05/27/2009 | CN101441280A Ultra low residual reflection low stress lens coating |
| 05/27/2009 | CN101441279A Ultra low residual reflection low stress lens coating |
| 05/27/2009 | CN101440475A Substrate supporting device and sputtering apparatus including the same |
| 05/27/2009 | CN101440474A Rotary disk type continuous sputtering machine for vacuum thin film manufacture process |
| 05/27/2009 | CN101440473A Rotary disk type continuous sputtering machine with mechanical arm |
| 05/27/2009 | CN101440472A Vacuum vapor deposition apparatus and method, and vapor deposited article formed therewith |
| 05/27/2009 | CN101440471A In-line film-formation apparatus |
| 05/27/2009 | CN101440470A Preparation of AZO target material for thin-film solar cell |
| 05/27/2009 | CN100492715C Evaporation mask and method for manufacturing organic electroluminescent device thereby |
| 05/27/2009 | CN100492069C Method for reducing the susceptibility of titanium nitride optical layers to crack |
| 05/27/2009 | CN100492057C Sputtering film deposited thickness correction device |
| 05/27/2009 | CN100492056C Optical article and manufacturing method of the same |
| 05/27/2009 | CN100491587C Physical vapour deposition equipment and technology |
| 05/27/2009 | CN100491586C Plasma processing apparatus |
| 05/27/2009 | CN100491585C Preparation method of ultrathin, large-size, high-silicon silicon steel sheet by electron beam physical vapor deposition |
| 05/27/2009 | CN100491584C Method for preparing different refractivity film layer |
| 05/27/2009 | CN100491583C Base plate with ITO transparent conductive film and method for preparing same |
| 05/27/2009 | CN100491582C Method for forming Tio2-X film on material surface by using plasma immersion ion implantation and use thereof |
| 05/26/2009 | US7538014 Method of producing crystalline semiconductor material and method of fabricating semiconductor device |
| 05/26/2009 | US7537846 Magnetic disk, method of manufacturing the magnetic disk and method of evaluating the magnetic disk |
| 05/26/2009 | US7537798 Deposition mask frame assembly, method of fabricating the same, and method of fabricating organic electroluminescent device using the deposition mask frame assembly |
| 05/26/2009 | US7537677 Method of making low-E coating using ceramic zinc inclusive target, and target used in same |
| 05/26/2009 | US7537676 Cathode apparatus to selectively bias pallet during sputtering |
| 05/26/2009 | CA2645532A1 Metallic bipolar plate for fuel cells and method for manufacturing the same |
| 05/26/2009 | CA2626769C Heat treatable low-e coated articles and methods of making same |
| 05/22/2009 | WO2009065039A2 Methods and apparatus for sputtering deposition using direct current |
| 05/22/2009 | WO2009064731A2 Melting and mixing of materials in a crucible by electric induction heel process |
| 05/22/2009 | WO2009064706A1 Stain masking material and articles made therefrom |
| 05/22/2009 | WO2009064007A1 Oxide semiconductor material, method for manufacturing oxide semiconductor material, electronic device and field effect transistor |
| 05/22/2009 | WO2009063950A1 Chalcogenide film and method for producing the same |
| 05/22/2009 | WO2009063789A1 Method for forming sputtering film on three-dimensional work and apparatus used in the method |
| 05/22/2009 | WO2009063788A1 Sputtering apparatus and sputtering film forming method |
| 05/22/2009 | WO2009062877A2 Corrosion-resistant coating and method for producing same |
| 05/22/2009 | WO2009045324A3 Method for coating fuel system components |
| 05/22/2009 | WO2009035870A3 Magnesium-titanium solid solution alloys |
| 05/22/2009 | WO2009034131A3 Method and arrangement for providing chalcogens |
| 05/22/2009 | WO2009033674A3 Method and apparatus for thermally converting metallic precursor layers into semiconducting layers, and also solar module |
| 05/22/2009 | WO2009029944A3 Improved sputtering assembly |
| 05/22/2009 | WO2009013667A3 Thin film coating of blades |
| 05/22/2009 | WO2007041454A3 Systems and methods for determination of endpoint of chamber cleaning processes |
| 05/21/2009 | US20090130795 Systems and methods for preparation of epitaxially textured thick films |
| 05/21/2009 | US20090130794 Thermal evaporation apparatus, use and method of depositing a material |
| 05/21/2009 | US20090130574 Sputtering target used for production of reflective mask blank for euv lithography |
| 05/21/2009 | US20090130418 Transparent conductive film, its production method and sputtering target used for its production |
| 05/21/2009 | US20090130409 Substrate comprising a stack having thermal properties |
| 05/21/2009 | US20090130396 Method and system for use in preparing magnetic ink character recognition readable documents |
| 05/21/2009 | US20090130365 Information recording medium and method for producing the same |
| 05/21/2009 | US20090130336 Coating apparatus |
| 05/21/2009 | US20090128939 Durability broad band metallic neutral density optical filters and related methods of manufacture |
| 05/21/2009 | US20090127519 Transparent oxide electrode film and manufacturing method thereof, transparent electrodonductive base material, solar cell and photo detection element |
| 05/21/2009 | US20090127236 Method and apparatus for fabricating vertical deposition mask |
| 05/21/2009 | US20090127110 Method of manufacturing electrode for electrical-discharge surface treatment, and electrode for electrical-discharge surface treatment |
| 05/21/2009 | US20090127109 Substrate supporting device and sputtering apparatus including the same |
| 05/21/2009 | US20090127108 Sputtering target, method for producing same, sputtering thin film formed by using such sputtering target, and organic el device using such thin film |
| 05/21/2009 | US20090127107 Magnetron sputtering cathode mechanism |
| 05/21/2009 | US20090127106 Magnet choir design for target material erosion |
| 05/21/2009 | US20090127105 Systems and methods for forming niobium and/or vanadium containing layers using atomic layer deposition |
| 05/21/2009 | US20090127102 Plasma deposition apparatus and method |
| 05/21/2009 | US20090127101 Methods and apparatus for sputtering deposition using direct current |
| 05/21/2009 | US20090127100 Fet-based sensor for detecting reducing gases or alcohol, and associated production and operationg method |
| 05/21/2009 | US20090127099 Multi-Station Sputtering and Cleaning System |
| 05/21/2009 | US20090127098 uniform sheet resistance; magnetrons; dielectrics |
| 05/21/2009 | US20090127097 Forming Seed Layer in Nano-Trench Structure Using Net Deposition and Net Etch |
| 05/21/2009 | US20090127096 Method for forming a corrugation multilayer |
| 05/21/2009 | US20090127095 Method for forming fine particles, method for forming concavities and convexities, and device for forming fine particles |
| 05/20/2009 | EP2061041A1 Conductive film and method for production of conductive film |
| 05/20/2009 | EP2060657A1 Substrate supporting device and sputtering apparatus including the same |
| 05/20/2009 | EP2060656A2 Hard carbon film and hard carbon film sliding member |
| 05/20/2009 | EP2060655A1 Hard coating and method for forming hard coating |
| 05/20/2009 | EP2060654A1 Aperture masks for circuit fabrication |
| 05/20/2009 | EP2059625A2 Sputtering apparatus including novel target mounting and/or control |
| 05/20/2009 | EP1523585B1 Loading and unloading device for a coating unit |
| 05/20/2009 | EP1358361A4 Robotic manipulation system utilizing patterned granular motion |
| 05/20/2009 | EP1230416B1 A method for the manufacturing of a matrix |
| 05/20/2009 | DE102008047382A1 Verschleißfestes Element mit Hartbeschichtung Wear-resistant element with hard coating |
| 05/20/2009 | CN201241182Y Positive and negative helical flow cooling structure of broad width continuous magnetron sputtering film coating roller |
| 05/20/2009 | CN201241181Y Turn-over trolley |
| 05/20/2009 | CN101438429A III nitride compound semiconductor laminated structure |
| 05/20/2009 | CN101437978A Method for preparing nickle titanium alloy medical instrument surface coating |
| 05/20/2009 | CN101437977A Antimicrobial coating methods |
| 05/20/2009 | CN101437926A Operable transmission, working fluid for such a transmission, and method for commissioning the same |
| 05/20/2009 | CN101437644A Coating method |
| 05/20/2009 | CN101435888A Optical multilayer filter, method of manufacturing the same, and electronic apparatus |
| 05/20/2009 | CN101435352A Engine air valve and air valve conduit pipe surface treating method |
| 05/20/2009 | CN101435072A Film coating jig and film coating apparatus |
| 05/20/2009 | CN101435071A Preparation of wear resistant and oxidation resistant TiAlSiCN film |