| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 07/15/2009 | CN100513038C Composite reactive multilayer foil |
| 07/14/2009 | US7560011 Sputtering target and method/apparatus for cooling the target |
| 07/14/2009 | CA2531028C Surface-coated high hardness material for tool |
| 07/14/2009 | CA2468270C Method of making window unit including diamond-like carbon (dlc) coating |
| 07/09/2009 | WO2009086494A2 Multi-pass vacuum coating systems |
| 07/09/2009 | WO2009086023A2 Methods for cleaning process kits and chambers, and for ruthenium recovery |
| 07/09/2009 | WO2009085117A2 Erosion resistant yttrium comprising metal with oxidized coating for plasma chamber components |
| 07/09/2009 | WO2009084623A1 Processing apparatus, electron emitting element and method for manufacturing organic el display |
| 07/09/2009 | WO2009084537A1 Process for producing thin film of a-igzo oxide |
| 07/09/2009 | WO2009084527A1 Method for manufacturing solar cell, and solar cell |
| 07/09/2009 | WO2009084445A1 Dry etching method, magnetoresistive element, and method and apparatus for manufacturing the same |
| 07/09/2009 | WO2009084441A1 Method and apparatus for forming transparent conductive film |
| 07/09/2009 | WO2009084437A1 Vacuum processing device, vacuum processing method, and computer-readable storage medium |
| 07/09/2009 | WO2009084408A1 Film formation device and film formation method |
| 07/09/2009 | WO2009084318A1 Highly pure lanthanum, sputtering target comprising highly pure lanthanum, and metal gate film mainly composed of highly pure lanthanum |
| 07/09/2009 | WO2009083772A1 Deposition process |
| 07/09/2009 | WO2009083631A1 Method for obtaining phase diffraction gratings in a substrate by laser ablation of a target |
| 07/09/2009 | WO2009083546A1 Method and devices for controlling a vapour flow in vacuum evaporation |
| 07/09/2009 | WO2009083245A2 A method of giving an article a coloured appearance and an article having a coloured appearance |
| 07/09/2009 | WO2009083193A2 Method and apparatus for surface treatment by combined particle irradiation |
| 07/09/2009 | WO2008080249A3 Apparatus for gas handling in vacuum processes |
| 07/09/2009 | US20090176142 Corrosion resistant metal composite for electrochemical devices and methods of producing the same |
| 07/09/2009 | US20090176139 Passivated metallic bipolar plates and a method for producing the same |
| 07/09/2009 | US20090176128 Structured material, magnetic recording medium utilizing the same, and magnetic recording/reproducing apparatus |
| 07/09/2009 | US20090176121 Electroconductive diffuse reflective film and method of producing the same |
| 07/09/2009 | US20090176120 Highly electrically conductive surfaces for electrochemical applications |
| 07/09/2009 | US20090176114 Base Substrate for Epitaxial Diamond Film, Method for Producing the Base Substrate for Epitaxial Diamond Film, Epitaxial Diamond Film produced With the Base Substrate for Epitaxial Diamond Film, and Method for Producing the Epitaxial Diamond Film |
| 07/09/2009 | US20090176113 Display device and sputtering target for producing the same |
| 07/09/2009 | US20090176086 Substrate Which is Equipped with a Stack Having Thermal Properties |
| 07/09/2009 | US20090176059 Thermal Barrier Coating Member, Method for Producing the Same, Thermal Barrier Coating Material, Gas Turbine, and Sintered Body |
| 07/09/2009 | US20090176036 Method of organic material vacuum evaporation and apparatus thereof |
| 07/09/2009 | US20090174520 Laminates, Thin-Film Sensors, Thin-Film Sensor Modules, and Methods for Producing the Thin-Film Sensors |
| 07/09/2009 | US20090173945 Method for forming conductive film, thin-film transistor, panel with thin-film transistor, and method for manufacturing thin-film transistor |
| 07/09/2009 | US20090173715 Light source device, substrate treating device, and substrate treating method |
| 07/09/2009 | US20090173627 Sintered Sputtering Target Made of Refractory Metals |
| 07/09/2009 | US20090173626 Method for fabricating temperature sensitive and sputter target assemblies using reactive multilayer joining |
| 07/09/2009 | US20090173625 Process for producing an alumina coating comprised mainly of alpha crystal structure |
| 07/09/2009 | US20090173622 Reactive sputtering with hipims |
| 07/09/2009 | US20090173621 Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source |
| 07/09/2009 | CA2710371A1 Deposition process |
| 07/08/2009 | EP2077556A1 Silver alloy reflective film, sputtering target therefor, and optical information recording medium using the same |
| 07/08/2009 | EP2077340A2 Method and device for coating glasses |
| 07/08/2009 | EP2077172A1 Surface-coated cutting tool |
| 07/08/2009 | EP2076618A2 Titanium oxide-based sputtering target for transparent conductive film, method for producing such film and composition for use therein |
| 07/08/2009 | EP2076617A2 Copper or low-alloy copper layer with inserted nitrogen atoms and related processing method |
| 07/08/2009 | EP1663512A4 Methods for providing thin hydrogen separation membranes and associated uses |
| 07/08/2009 | EP1548148B1 Iron silicide sputtering target and method for production thereof |
| 07/08/2009 | EP1451118B1 Buffing diamond-like carbon (dlc) to improve scratch resistance |
| 07/08/2009 | CN201268720Y Cooling apparatus for sputtering target material |
| 07/08/2009 | CN201268719Y Coating equipment for copper-indium-gallium-selenium-sulfur, copper-indium-gallium-selenium or copper-indium-gallium-sulfur film solar cell absorption layer |
| 07/08/2009 | CN101479400A Sputtering target/backing plate conjunction element |
| 07/08/2009 | CN101479399A A method of manufacturing a rotatable sputter target |
| 07/08/2009 | CN101476111A Transparent conductive film and preparation thereof |
| 07/08/2009 | CN101476110A Non-balance magnetron sputtering thin film deposition apparatus for cusped magnetic field confined ICP reinforced ionization |
| 07/08/2009 | CN101476109A Preparation of flexible high-resistance multi-layer transparent conductive film |
| 07/08/2009 | CN101476108A Magnesium alloy composite material and preparation thereof |
| 07/08/2009 | CN101476107A Vacuum arc ion film coating technology for non-arc spot |
| 07/08/2009 | CN101476106A Vacuum arc plasma evaporation inonization source for non-arc spot |
| 07/08/2009 | CN101476105A Titanium for plating inner container |
| 07/08/2009 | CN101476104A Zirconium silicon oxide thin film with high dielectric coefficient, and preparation and use thereof |
| 07/08/2009 | CN101476103A Method for preparing organic semiconductor material rubrene micro-nano wire |
| 07/08/2009 | CN100511569C Planetary magnetron |
| 07/08/2009 | CN100510166C Annealing method for producing large area two-side thallium series film |
| 07/08/2009 | CN100510165C Elongated vacuum system for coating one or both sides of a flat substrate |
| 07/08/2009 | CN100510164C System and apparatus for control of sputter deposition process |
| 07/08/2009 | CN100510163C Vacuum evaporation plating machine |
| 07/08/2009 | CN100510162C Method of raising coating adhesion in vacuum sputtering of plastic part |
| 07/08/2009 | CN100510161C Cutting tool made of surface-coated alloy with high hardness |
| 07/08/2009 | CN100510160C Hard coating and formation method, and hard-coated tool thereof |
| 07/08/2009 | CN100510159C Method for manufacturing jet orifice piece |
| 07/08/2009 | CN100510158C Deposition method and method for manufacturing display device |
| 07/08/2009 | CN100510157C Physical coating pretreatment for coating metal-film on plastic matrix |
| 07/08/2009 | CN100510154C Al composite material being crumbled with water, Al film and al powder comprising the material and methods for preparation thereof, constitutional member for film-forming chamber method for recovering |
| 07/07/2009 | US7556721 Physical vapor deposition; allows for deposition of blue thin film electroluminescent phosphors with high luminance and colors required for TV applications |
| 07/07/2009 | US7556719 Comprising conductor layer, insulating layer located adjacent to conductor layer, and terminal portion formed by conductor layer exposed by opening insulating layer, forming thin metal film on surface of insulating layer and surface, the removing; prevents electrostatic damage |
| 07/07/2009 | US7556718 Plasma vapor deposition; etching; semiconductors; integrated circuits |
| 07/07/2009 | US7556695 Apparatus to make nanolaminate thermal barrier coatings |
| 07/07/2009 | US7555822 Laser generation of thermal insulation blanket |
| 07/02/2009 | WO2009081953A1 Sputtering apparatus, sputter film forming method, and analyzer |
| 07/02/2009 | WO2009081952A1 Substrate holder, film forming method using substrate holder, method for manufacturing hard disc, film forming apparatus and program |
| 07/02/2009 | WO2009081889A1 Copper foil for printed wiring board |
| 07/02/2009 | WO2009081761A1 Plasma source mechanism and film forming apparatus |
| 07/02/2009 | WO2009081677A1 Tin oxide-magnesium oxide sputtering target and transparent semiconductor film |
| 07/02/2009 | WO2009080430A1 Linear electron source, evaporator using linear electron source, and appliccations of electron sources |
| 07/02/2009 | WO2009080411A1 Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 07/02/2009 | WO2009080312A1 Linear electron source, evaporator using linear electron source, and applications of electron sources |
| 07/02/2009 | WO2009080092A1 Method for depositing metal oxide films |
| 07/02/2009 | WO2009035933A3 Sputtering targets comprising a novel manufacturing design, methods of production and uses thereof |
| 07/02/2009 | WO2008076350A8 Improved evaporation process for solid phase materials |
| 07/02/2009 | US20090170227 Mask and container and manufacturing |
| 07/02/2009 | US20090169942 Physical Vapor Deposited Nano-Composites for Solid Oxide Fuel Cell Electrodes |
| 07/02/2009 | US20090169871 Method for Producing High-Quality Surfaces and a Product Having a High-Quality Surface |
| 07/02/2009 | US20090169845 Structural material of diamond like carbon composite layers and method of manufacturing the same |
| 07/02/2009 | US20090169826 Method for producing a heatable molded body, in particular for exterior rearview mirrors, with a heating element |
| 07/02/2009 | US20090169825 Method of manufacturing composite material |
| 07/02/2009 | US20090169766 Ion gun system, vapor deposition apparatus, and method for producing lens |
| 07/02/2009 | US20090169751 Multi-Pass Vacuum Coating Systems |
| 07/02/2009 | US20090169723 I-iii-vi2 photovoltaic absorber layers |
| 07/02/2009 | US20090169417 SEMI-REFLECTIVE FILM AND REFLECTIVE FILM FOR OPTICAL RECORDING MEDIUM, AND Ag ALLOY SPUTTERING TARGET FOR FORMING SEMI-REFLECTIVE FILM OR REFLECTIVE FILM FOR OPTICAL RECORDING MEDIUM |
| 07/02/2009 | US20090168837 Method for the temperature measurement of substrates, and vacuum processing apparatus |