Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/2009
07/28/2009US7566438 Method for manufacturing nanostructured manganese oxide having dendritic structure, and oxygen reduction electrode comprising nanostructured transition metal oxide having dendritic structure
07/28/2009US7566422 Exposure apparatus with tanks storing helium gas and method of manufacturing device using exposure apparatus
07/28/2009US7566417 Containing bismuth and rare earth metal elements for suppress the growth of crystal grains of Ag and the aggregation of Ag atoms; high thermal conductivity, reflectance and durability; optical recording media
07/28/2009US7566384 transmitting and propagating ultrasonic waves in multiple modes over entire surface of sputter target; receiving ultrasonic waves, processing signal received to monitor and determine the depth of erosion at different locations on sputtering target in real-time, controlling physical vapor deposition
07/28/2009US7566378 Arrangement of electronic semiconductor components on a carrier system for treating said semiconductor components with a liquid medium
07/28/2009US7566368 Method and apparatus for an improved upper electrode plate in a plasma processing system
07/28/2009CA2510168C Valve component with multiple surface layers
07/23/2009WO2009092097A1 Concentric hollow cathode magnetron sputter source
07/23/2009WO2009091724A1 Low thermal conductivity, cmas-resistant thermal barrier coatings
07/23/2009WO2009091721A2 Cmas-resistant thermal barrier coatings
07/23/2009WO2009091331A1 Method of making a coated medical bone implant and a medical bone implant made thereby
07/23/2009WO2009090994A1 Substrate stage, sputtering apparatus provided with substrate stage, and film forming method
07/23/2009WO2009090839A1 Film-forming apparatus
07/23/2009WO2009090098A2 Method and apparatus for producing a solar cell
07/23/2009WO2009071810A3 Substrate provided with a multilayer stack having thermal properties
07/23/2009US20090187253 Method of making a coated medical bone implant and a medical bone implant made thereof
07/23/2009US20090186230 Refractory metal-doped sputtering targets, thin films prepared therewith and electronic device elements containing such films
07/23/2009US20090184322 Electroconductive film-forming method, a thin film transistor, a thin film transistor-provided panel and a thin film transistor-producing method
07/23/2009US20090184235 Merocyanine dye and photoelectric conversion device
07/23/2009US20090184000 Electrochemical Sensor System Using a Substrate With at Least One Aperture and Method of Making the Same
07/23/2009US20090183987 Sputter Target Having a Sputter Material Based on TiO2 and Production Method
07/23/2009US20090183986 Thin-Film Shape Memory Alloy Device and Method
07/23/2009US20090183985 Method of manufacturing magnetic recording medium
07/23/2009US20090183984 Seed Film Forming Method, Plasma-Assisted Film Forming System and Storage Medium
07/23/2009US20090183573 High Temperature Pressure Sensor Element, Particularly for Measuring Pressures Inside Jet Engines, Method for the Production Thereof and Component for Jet Engines
07/23/2009DE102009004196A1 Verfahren zum Regenerieren eines Separators für eine Brennstoffzelle, regenerierter Separator für eine Brennstoffzelle und Brennstoffzelle A method for regenerating a separator for a fuel cell, regenerated separator for a fuel cell and fuel cell
07/23/2009CA2712249A1 Low thermal conductivity, cmas-resistant thermal barrier coatings
07/22/2009EP2080821A1 Article having cobalt-phosphorous coating and method for heat treating
07/22/2009EP2080613A1 Gas barrier film laminate
07/22/2009EP1874977B1 Process and device for coating substrates
07/22/2009EP1871922B1 Coating, substrate provided with a coating and method for the application of a corrosion-resistant coating
07/22/2009EP1423551B1 Method for producing a nanostructured functional coating and a coating that can be produced according to said method
07/22/2009EP1116800B1 Sputtering target
07/22/2009CN201276593Y Continuous vacuum transition chamber with linear vacuum motive seal and X-ray radiation protection function
07/22/2009CN201276592Y Vacuum film plating apparatus
07/22/2009CN101490305A Method for depositing electrically insulating layers
07/22/2009CN101490304A Plasma film deposition system and method for producing film
07/22/2009CN101490303A Ultraviolet activated antimicrobial surfaces
07/22/2009CN101487113A Preparation of mask locating continuous component spreading thin film warehouse
07/22/2009CN101487112A Method for producing display device
07/22/2009CN101487111A Winding film coating machine
07/22/2009CN100517798C Method for forming a display device
07/22/2009CN100516286C Method for hard coating thin film of generic diamond
07/22/2009CN100516285C Electron beam heating evaporation method as well as device and uses thereof
07/22/2009CN100516284C Equipment of coating by vaporization
07/22/2009CN100516283C Silicon monoxide vapor deposition material and method for preparation thereof
07/22/2009CN100516282C Magnesium and its alloy surface vacuum plating preparation method
07/22/2009CN100516281C Chromium-doped non-crystalline graphite ware reducing coating layer and preparation process thereof
07/22/2009CN100516266C High-purity Ni-V alloy, target therefrom, high-purity Ni-V alloy thin film and process for producing high-purity Ni-V alloy
07/21/2009US7564054 Thin film forming device, method of forming a thin film, and self-light-emitting device
07/21/2009US7563729 Method of forming a dielectric film
07/21/2009US7563514 laminated thin films; uppermost layer is amorphous oxide thin film of gallium, indium, and oxygen; other layer is indium, tin and oxygen or indium, zinc and oxygen or indium, tungsten, and oxygen or indium, tungsten, zinc and oxygen; organic electroluminescence element
07/21/2009US7563488 Construction of a sputtering target by spraying
07/21/2009US7563349 Sputtering device
07/21/2009US7563347 Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus
07/21/2009US7563346 Molds having multilayer diamond-like carbon film and method for manufacturing same
07/21/2009CA2241878C Sputtering targets and method for the preparation thereof
07/16/2009WO2009088444A1 Vaporization apparatus with precise powder metering
07/16/2009WO2009046476A8 Method for producing a sliding bearing element having a bismuth-containing sliding layer
07/16/2009WO2009044083A3 Method for reducing porosity of a metal deposit by ionic bombardment
07/16/2009US20090181283 Regeneration method of separator for fuel cell, regenerated separator for fuel cell and fuel cell
07/16/2009US20090181264 Method for manufacturing patterned magnetic recording medium
07/16/2009US20090181188 Process for preparing titanium carbide
07/16/2009US20090181179 Sodium/Molybdenum Composite Metal Powders, Products Thereof, and Methods for Producing Photovoltaic Cells
07/16/2009US20090181162 Method and apparatus for thin film/layer fabrication and deposition
07/16/2009US20090180213 Magnetic recording medium, method for production thereof, and magnetic recording and reproducing drive
07/16/2009US20090178920 Multi-cathode ionized physical vapor deposition system
07/16/2009US20090178919 Sputter coating device
07/16/2009US20090178917 Method of sputtering a high-k dielectric material
07/16/2009US20090178916 Double-coating device with one process chamber
07/16/2009US20090178620 Process for Depositing Thin Layers on a Substrate in a Process Chamber of Adjustable Height
07/16/2009DE212007000083U1 Züchtungsmanipulator Breeding manipulator
07/16/2009DE102009004007A1 Poröser Metalldünnfilm, Verfahren zu dessen Herstellung und Kondensator Porous metal thin film, a process for its preparation and capacitor
07/16/2009DE10155712B4 Zinkoxid-Schicht und Verfahren zu dessen Herstellung Zinc oxide layer, and process for its preparation
07/15/2009EP2078765A1 Vapor deposition material, process for producing optical member or plastic lens for spectacle with use thereof, and plastic lens for spectacle
07/15/2009EP1685269B1 Process for manufacturing devices which require a non evaporable getter material for their working
07/15/2009CN201272830Y Quick-dismantling type inner-transmission frame structure
07/15/2009CN201272829Y Fixed locking type inner-transmission frame structure
07/15/2009CN201272828Y Quick-dismantling structure for inner-transmission rotating shaft unit
07/15/2009CN201272827Y Inner-transmission wheeltrack guiding structure
07/15/2009CN201272826Y Vacuum evaporation film-plating machine for thin film used for aluminum-thickened metalized capacitor
07/15/2009CN201272825Y Two-end multi-room vacuum coating device
07/15/2009CN101484608A Take up type vacuum vapor deposition device
07/15/2009CN101484607A Substrate tray and film-forming apparatus
07/15/2009CN101484606A Method for producing an electrically conducting layer
07/15/2009CN101484605A Rotatable sputter target
07/15/2009CN101481791A Preparation of high tenacity nanocrystalline silicide coating
07/15/2009CN101481790A ZAO semiconductor nano conductive film and preparation thereof
07/15/2009CN101481789A Film coating system and isolation device thereof
07/15/2009CN101481788A Preparation of single wall carbon nano-tube film
07/15/2009CN100513635C Driving mechanism for vacuum process equipment
07/15/2009CN100513634C Composite thin film preparation and preparing apparatus
07/15/2009CN100513633C Coating device with rotatable magnetrons covering large area
07/15/2009CN100513632C Thin film forming device and thin film forming method
07/15/2009CN100513631C Electrode instrument used for vacuum aluminizing device
07/15/2009CN100513630C Mask film cradle and deposition system
07/15/2009CN100513629C Molecular beam source apparatus for film deposition and method for depositing film by molecular beam
07/15/2009CN100513353C Target for transparent electroconductive film, transparent electroconductive material, transparent electroconductive glass and transparent electroconductive film
07/15/2009CN100513316C Indium oxide-tin oxide powder and sputtering target using the same
07/15/2009CN100513193C Phase-change information recording medium, manufacturing method for the same, sputtering target, method for using the phase-change information recording medium and optical recording apparatus