Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2010
11/04/2010DE102009019422A1 Generating plasma by magnetron, comprises supplying electrical energy in pulse form to magnetron, changing strength of electric field maintaining magnetron discharge, and changing strength of magnetic field penetrating through magnetron
11/04/2010DE102009018874A1 Powdery electrode material consists of nickel, oxygen and/or hydrogen, or tetravalent nickel oxide, alkali metal, transition metals such as cobalt, vanadium, tungsten, iridium, tantalum and/or chromium and impurities
11/04/2010DE102007055017B4 Verfahren zum Verbinden zweier Fügeflächen und Bauteil mit zwei verbundenen Fügeflächen A method for joining two joining surfaces and components associated with two joining surfaces
11/04/2010DE102005000911B4 Umweltbeständiges hochreflektierendes Spiegelschichtsystem und Verfahren zu dessen Herstellung Environmental resistant highly reflective mirror coating system and method for its manufacture
11/04/2010CA2758137A1 Arc evaporation source and film forming method using the same
11/03/2010EP2246910A1 Semiconductor substrate, semiconductor element, light emitting element and electronic element
11/03/2010EP2246894A1 Amorphous oxide and thin film transistor
11/03/2010EP2246459A1 Magnetron sputtering apparatus and magnetron sputtering method
11/03/2010EP2246458A1 Thin film of aluminum nitride and process for producing the thin film of aluminum nitride
11/03/2010EP2246410A2 Electroluminiscent material and electroluminiscent element using the same
11/03/2010EP2245670A2 Front electrode having etched surface for use in photovoltaic device and metod of making same
11/03/2010EP2245209A1 Method of making a coated medical bone implant and a medical bone implant made thereby
11/03/2010EP2245208A2 Method for producing a cermet-based spectrally selective coating and material thus obtained
11/03/2010EP2245207A1 Reel-to-reel reaction of a precursor film to form solar cell absorber
11/03/2010EP2245096A2 Cmas-resistant thermal barrier coatings
11/03/2010EP1659194B1 Ag base sputtering target and process for producing the same
11/03/2010EP1486583B1 Method and device for manufacturing semiconductor or insulator/metallic laminar composite cluster
11/03/2010CN201620190U Rubber plug half-coating clamping plate
11/03/2010CN201620189U Target-pair magnetron sputtering device
11/03/2010CN201620188U Target device
11/03/2010CN201620187U DC glow discharge clearing electrode
11/03/2010CN1875483B Process for forming a dielectric on a copper-containing metallization and capacitor arrangement
11/03/2010CN1863938B Polysulfide thermal vapour source for thin sulfide film deposition
11/03/2010CN1802450B Target/backing plate constructions, and methods of forming them
11/03/2010CN1777690B Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal
11/03/2010CN101878321A Control of arbitrary scan path of a rotating magnetron
11/03/2010CN101878320A Frame-based vacuum chamber for coating systems
11/03/2010CN101877372A Back electrode film of thin film solar cell
11/03/2010CN101877302A Method for vacuumizing cavity
11/03/2010CN101877300A Sputter magnetron device
11/03/2010CN101876490A Solar energy medium-high temperature selective heat absorbing coating
11/03/2010CN101876063A Barn door mechanism and vacuum cavity with same
11/03/2010CN101876062A Hollow cathode sputtering ion plating device
11/03/2010CN101876061A Method for forming strong combination thermal barrier coating
11/03/2010CN101876060A Vacuum ion coating method for preparing ring
11/03/2010CN101876059A Method for preparing transparent oxide semiconductor InGaZn4O7 film
11/03/2010CN101876058A Vacuum evaporation device
11/03/2010CN101876057A Evaporation cavity and evaporation device with same
11/03/2010CN101876056A Evaporating and coating equipment
11/03/2010CN101876055A Baffle cooling device
11/03/2010CN101876054A Manganese oxide epitaxial film and preparation method and applications thereof
11/03/2010CN101876053A Aluminum alloy surface titanium-doped diamond-like film and preparation method thereof
11/03/2010CN101619440B Electron beam deflection device of computer controlled coating machine and control method thereof
11/03/2010CN101575697B ZnO-based transparent conductive film co-doped with Al-F and preparation method thereof
11/03/2010CN101545095B Method for growing boron nitride membrane on graphite substrate
11/03/2010CN101378115B Method for preparing lithium ion secondary battery cathode
11/03/2010CN101378029B Dual-electrode electrostatic chuck
11/03/2010CN101365899B Piston ring for internal combustion engines
11/03/2010CN101343726B Solar energy thermal-collecting tube continuous automatic sputtering film coating method and device
11/03/2010CN101327523B Fine grained cemented carbide for turning in heat resistant super alloys (HRSA) and stainless steels
11/03/2010CN101012544B Thin film of nichrome-chromium-aluminium-yttrium-nitrogen-oxygen material
11/02/2010US7826023 Display cell, in particular liquid crystal, or photovoltaic cell comprising means for connection to an electronic control circuit
11/02/2010US7825569 Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element
11/02/2010US7825029 Method for the production of structured layers on substrates
11/02/2010US7825015 Method for implanting ions in semiconductor device
11/02/2010US7824976 Semiconductor apparatus and method of manufacturing the semiconductor apparatus
11/02/2010US7824955 Hybrid beam deposition system and methods for fabricating metal oxide-ZnO films, p-type ZnO films, and ZnO-based II-VI compound semiconductor devices
11/02/2010US7824782 Multialyer; substrate overcoated with ceramic layer
11/02/2010US7824772 Anti-etch layer comprises zirconium oxycarbide
11/02/2010US7824744 Process and apparatus for depositing a ceramic coating
11/02/2010US7824528 End-block for a rotatable target sputtering apparatus
11/02/2010US7824497 Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
11/02/2010US7824496 Container, container producing method, substrate processing device, and semiconductor device producing method
11/02/2010US7823537 Plasma generator
11/02/2010CA2573485C Method and system for coating internal surfaces of prefabricated process piping in the field
10/2010
10/28/2010WO2010124050A1 Method for making endoprostheses
10/28/2010WO2010123802A2 Electrochemical biosensor electrode strip and preparation method thereof
10/28/2010WO2010123680A2 Wafer processing deposition shielding components
10/28/2010WO2010123027A1 Vapor deposition apparatus and vapor deposition method
10/28/2010WO2010123004A1 Vacuum deposition system and vacuum deposition method
10/28/2010WO2010122742A1 Apparatus for forming thin film and method for forming thin film
10/28/2010WO2010121931A1 Pulsed laser deposition with exchangeable shadow masks
10/28/2010WO2010121930A1 Device for high temperature pulsed laser deposition
10/28/2010WO2010121451A1 Method and apparatus for deposition-forming semiconductor film on substrate by close-spaced sublimation technology
10/28/2010US20100272988 Hydrophilic-hydrophobic transformable composite film and the method of fabricating the same
10/28/2010US20100272985 Method of forming self-assembly and uniform fullerene array on surface of substrate
10/28/2010US20100272921 Method and devices for controlling a vapour flow in vacuum evaporation
10/28/2010US20100272918 Method and system for galvanizing by plasma evaporation
10/28/2010US20100272917 Method and apparatus
10/28/2010US20100272887 Thin film forming apparatus and thin film forming method
10/28/2010US20100272596 High-Purity Lanthanum, Sputtering Target Comprising High-Purity Lanthanum, and Metal Gate Film Mainly Comprising High-Purity Lanthanum
10/28/2010US20100270265 Method for adsorption of nano-structure and adsorption matter using solid thin film mask
10/28/2010US20100270147 Transportable, miniature, chamberless, low power, micro metallizer
10/28/2010US20100270146 Method for manufacturing co-base sintered alloy sputtering target for formation of magnetic recording film which is less likely to generate partricles, and co-base sintered alloy sputtering target for formation of magnetic recording film
10/28/2010US20100270144 High Power Pulse Magnetron Sputtering For High Aspect-Ratio Features, Vias, and Trenches
10/28/2010US20100270143 Substrate stage, sputtering apparatus provided with same, and film forming method
10/28/2010US20100270062 Method and Apparatus for an Improved Filled Via
10/28/2010US20100269907 Thin-film solar cell having a molybdenum-containing back electrode layer
10/28/2010DE202010010139U1 Substratbehandlungsanlage Substrate treatment plant
10/28/2010DE112008003492T5 Schichtbildendes Verfahren und Vorrichtung zum Schichtbilden für transparente, elektrisch-leitfähige Schichten Layer forming method and apparatus for forming layer for transparent, electrically conductive layers
10/28/2010DE102010027874A1 Material collecting device for collecting scattering steam in a coating plant, comprises a carrier element, which is formed in the form of plate, tunnel or shell and is produced from ceramics, metallic materials and elastomers
10/27/2010EP2243857A1 A method for the production of cubic boron nitride-containing films
10/27/2010EP2243856A1 Device for high temperature pulsed laser deposition
10/27/2010EP2243855A1 Pulsed laser deposition with exchangeable shadow masks
10/27/2010EP2243751A2 Coated object
10/27/2010EP2243578A1 Cutting tool
10/27/2010EP2243149A1 Multiple grooved vacuum coupling
10/27/2010EP2242869A1 Method for depositing metal oxide films
10/27/2010EP2242868A1 Vaporization apparatus with precise powder metering
10/27/2010EP2242867A2 A method of giving an article a coloured appearance and an article having a coloured appearance