Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
10/1995
10/04/1995EP0674722A1 Protective film for articles and method
10/04/1995CN1109365A 冷等离子体灭菌消毒装置 Cold plasma sterilization device
10/03/1995US5455401 Plasma torch electrode
10/03/1995US5455197 Control of the crystal orientation dependent properties of a film deposited on a semiconductor wafer
10/03/1995US5454274 Sequential combination low temperature condenser and enclosed filter solvent removal system, and method of use
09/1995
09/28/1995WO1995026121A1 Plasma gas mixture for sterilizer and method
09/28/1995WO1995025951A1 Plasma manipulator
09/28/1995DE4410403A1 Arc or plasma welding or cutting current source
09/28/1995CA2186103A1 Plasma gas mixture for sterilizer and method
09/27/1995EP0674471A1 Plasma apparatus
09/27/1995EP0674337A1 Magnetron sputtering methods and apparatus
09/27/1995EP0674334A1 Plasma processing method and apparatus
09/26/1995US5454003 Gas laser oscillator
09/26/1995US5453614 Mass spectrometry probe, particularly in magnetized plasma
09/26/1995US5452854 Plasma spray apparatus
09/24/1995CA2143777A1 Use of multiple anodes in a magnetron for improving the uniformity of its plasma
09/22/1995CA2142230A1 Data reduction system for real time monitoring of radiation machinery
09/21/1995WO1995025420A1 Apparatus for treating metal surfaces with a magnetically impelled arc
09/21/1995DE4419423A1 Plasma-Manipulator Plasma manipulator
09/21/1995CA2184281A1 Apparatus for treating metal surfaces with a magnetically impelled arc
09/20/1995EP0673186A1 Method and apparatus for generating induced plasma
09/20/1995EP0673056A1 Plasma processing chamber and method of treating substrates in a plasma processing chamber
09/20/1995EP0672332A1 Industrial material processing electron linear accelerator
09/20/1995EP0671974A1 Apparatus and process for the treatment of powder particles for modifying the surface properties of the individual particles
09/20/1995EP0440634B1 Electric arc reactor
09/20/1995CN1108858A Method for stimulating low-temp. plasma by using micro-wave to heat
09/20/1995CN1108638A Production of fluorocarbon compounds
09/19/1995US5451794 Electron beam current measuring device
09/19/1995US5451784 Composite diagnostic wafer for semiconductor wafer processing systems
09/19/1995US5451740 Convertible plasma arc torch and method of use
09/19/1995US5451739 Electrode for plasma arc torch having channels to extend service life
09/14/1995WO1995024289A1 Electrode for plasma arc torch
09/13/1995EP0371128B1 Cathode structure of a plasma torch
09/12/1995US5449916 Electron radiation dose tailoring by variable beam pulse generation
09/12/1995US5449432 Method of treating a workpiece with a plasma and processing reactor having plasma igniter and inductive coupler for semiconductor fabrication
09/12/1995US5449412 Apparatus and method for controlling plasma size and position in plasma-activated chemical vapor deposition processes
09/12/1995US5449410 Plasma processing apparatus
09/12/1995CA2104072C Method and apparatus for optical emission end point detection in plasma etching process
09/08/1995WO1995024111A1 Local heat treatment device and corresponding treatment method
09/07/1995DE4407095A1 Brief plasma-dynamic treatment appts.
09/07/1995DE4406940A1 Prepn of coated workpieces
09/06/1995EP0670666A1 Plasma generating apparatus and plasma processing apparatus
09/06/1995EP0670590A2 High pressure plasma treatment method and apparatus
09/06/1995EP0670587A1 Plasma asher with microwave trap
09/06/1995EP0585229B1 Cluster tool soft etch module and ecr plasma generator therefor
09/06/1995EP0538293B1 Plasma burner for transferred arc
09/06/1995EP0441905B1 Method and apparatus for processing materials
09/05/1995US5448173 Triple-probe plasma measuring apparatus for correcting space potential errors
08/1995
08/31/1995DE4406421A1 X=ray fluorescence analysis of object surfaces
08/30/1995EP0669637A1 Plasma process apparatus
08/30/1995CN1107635A Special power supply for plasma producer
08/29/1995US5446255 Expert system for plasma torch
08/23/1995EP0667921A1 Microwave apparatus for depositing thin films
08/22/1995US5444259 Plasma processing apparatus
08/22/1995US5444209 Dimensionally stable subsonic plasma arc spray gun with long wearing electrodes
08/22/1995US5444208 Multiple source plasma generation and injection device
08/22/1995US5442907 Bootstrap re-ignition system for aircraft jet engine
08/17/1995DE4311035A1 Ignition or excitation of gas by standing microwave field
08/16/1995EP0667034A1 Magnetic field cathode
08/16/1995EP0514384B1 Device for treating substrates in a gas-based plasma produced by microwaves
08/16/1995EP0496733B1 Improved nozzle for a plasma arc torch
08/15/1995US5442153 High velocity electric-arc spray apparatus and method of forming materials
08/15/1995US5441596 Applying radio frequency power; stabilization without tuning; reduction in pressure; tuning; increasing power
08/10/1995WO1995021516A1 Plasma-generating device
08/09/1995EP0666335A1 Method for operation of a vacuum arc evaporator and current supply therefor
08/09/1995EP0579773B1 Modular, stackable plasma cutting apparatus
08/08/1995US5440094 Plasma arc torch with removable anode ring
08/08/1995US5440093 A forcedly cooled, copper/zirconium chip as one discharge electrode, heat and wear resistance, nozzles, metal cutting, lightweight
08/03/1995DE4403125A1 Vorrichtung zur Plasmaerzeugung Plasma generation device
08/02/1995EP0665575A1 Plasma processing systems
08/02/1995EP0665306A1 Apparatus and method for igniting plasma in a process module
07/1995
07/26/1995EP0664072A1 A radiofrequency gas discharge
07/25/1995US5436528 Plasma source employing spiral RF coil and method for using same
07/25/1995US5436424 Plasma generating method and apparatus for generating rotating electrons in the plasma
07/25/1995US5435881 Apparatus for producing planar plasma using varying magnetic poles
07/19/1995EP0663682A1 Method and apparatus for tuning field for plasma processing using corrected electrode
07/19/1995EP0663670A1 Method for setting-up a cooling system
07/19/1995EP0466704B1 Plasma arc transfer controller
07/18/1995US5434420 Industrial material processing electron linear accelerator
07/18/1995US5434353 Self-supporting insulated conductor arrangement suitable for arrangement in a vacuum container
07/18/1995US5433836 Arc source macroparticle filter
07/18/1995US5433820 Method and apparatus for dry process fluxing
07/18/1995US5433812 Apparatus for enhanced inductive coupling to plasmas with reduced sputter contamination
07/18/1995US5433790 Chemical vapor deposition with discharge plasma from microwave source
07/18/1995US5433788 Apparatus for plasma treatment using electron cyclotron resonance
07/13/1995DE4412906C1 Ion-assisted vacuum coating
07/13/1995DE4400689A1 Measuring probe for determining local characteristics of gaseous medium
07/12/1995EP0662746A1 Sheet material for electrical insulation, preimpregnated and electrically insulated coil using the same
07/12/1995EP0662195A1 Reduced length plasma engine with closed electron deviation.
07/12/1995EP0640244A4 Plasma treatment apparatus and method in which a uniform electric field is induced by a dielectric window.
07/11/1995US5432342 Method of and apparatus for generating low-energy neutral particle beam
07/11/1995US5432315 Plasma process apparatus including ground electrode with protection film
07/11/1995US5432090 Method for measuring metal ingredients in combustion gas
07/06/1995WO1995018521A1 Plasma torch
07/05/1995EP0311696B1 Method and apparatus for processing with plasma
07/05/1995CN1029206C Gas cooled cathode for arc torch
07/04/1995US5430776 Fuel pellets for thermonuclear reactions
07/04/1995US5430355 RF induction plasma source for plasma processing
06/1995
06/29/1995WO1995017278A2 Electric arc plasma torch
06/28/1995EP0660372A1 Plasma beam generating method and apparatus which can generate a high-power plasma beam