Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
06/1996
06/27/1996CA2207655A1 Plasma treatment apparatus and methods
06/26/1996EP0719077A1 Method and apparatus for determining of absolute plasma parameters
06/26/1996EP0718013A2 Method for the treatment of ski edges etc.
06/26/1996EP0396603B1 Procedure and apparatus for the coating of materials by means of a pulsating plasma beam
06/26/1996CN1125267A Apparatus for rapid plasma treatments and method
06/25/1996US5530220 Plasma torch arc transfer circuit
06/25/1996US5529632 Microwave plasma processing system
06/20/1996WO1996019096A1 Method and device for plasma processing
06/20/1996WO1996018754A1 Focusing unit for an arc discharge apparatus used for plating
06/18/1996US5528619 Gas discharge structure
06/18/1996US5528012 Apparatus and method for starting a plasma arc treatment system
06/18/1996US5527566 Exposure to oxygen-contining plasma, then to reducing gases(containing hydrogen) with heating to regenerate surface electrical properties
06/13/1996WO1996018283A1 Plasma jet converging system
06/13/1996WO1996018208A1 Plasma processor for large workpieces
06/13/1996WO1996018207A1 Plasma reactor and method of operating the same
06/13/1996WO1996008126A3 Steam plasma reactors
06/13/1996CA2523264A1 Coil having parallel paths having about the same electrical length
06/12/1996EP0716440A1 Cooled gas distribution system for a plasma reactor
06/06/1996WO1996017374A1 Unipolar blocking method and apparatus for monitoring electrically charged particles
06/05/1996EP0715335A1 System for processing a workpiece in a plasma
06/05/1996EP0715334A2 Plasma reactors for processing semiconductor wafers
06/04/1996US5523955 System for characterizing AC properties of a processing plasma
06/04/1996US5523651 Plasma wave tube amplifier/primed oscillator
06/04/1996US5523646 An arc chamber assembly for use in an ionization source
05/1996
05/30/1996WO1996016531A1 An apparatus for generation of a linear arc discharge for plasma processing
05/29/1996EP0714106A1 Tunable inductance element, matching network and plasma processing system using such inductance elements
05/23/1996WO1996015545A1 Inductive plasma reactor
05/23/1996WO1996015544A1 Device for coating substrates using a vapour phase material in a reduced pressure or vacuum environment
05/22/1996EP0713242A2 Device for suppressing arcing in cathode sputtering installations
05/21/1996US5519215 Plasma mass spectrometry
05/21/1996US5519183 Plasma spray gun head
05/21/1996US5518596 Procedure and apparatus for improving a plasma accelerator plating apparatus used for diamond plating
05/17/1996WO1996014653A2 Method and apparatus for reducing arcing in plasma processing chambers
05/15/1996EP0711622A1 Plasma torch
05/15/1996DE4440323A1 Nozzle for a torch head of a plasma spraying unit
05/15/1996DE4440130A1 Gas-discharge ignition or extinguishing appts. esp for high-power gas lasers
05/14/1996US5517085 Apparatus including ring-shaped resonators for producing microwave plasmas
05/14/1996US5517084 Selective ion source
05/14/1996US5517083 Method for forming magnetic fields
05/09/1996WO1996013964A1 Process and circuit for the bipolar pulsed supply of power in low-pressure plasmas
05/09/1996WO1996013623A1 Method and apparatus for depositing a substance with temperature control
05/09/1996WO1996013621A1 An ecr plasma source
05/08/1996EP0711100A1 Plasma production device, allowing a dissociation between microwave propagation and absorption zones
05/08/1996EP0710429A1 Method for matching the generator in dipolar low-pressure glow processes
05/08/1996EP0710398A1 Control of the properties of a film deposited on a semiconductor wafer
05/07/1996US5514936 RF plasma source and method for plasma cleaning of surface in space
05/07/1996US5514848 For decreasing ampere to volts ratio of operating power for a plasma torch
05/07/1996US5514246 Plasma reactors and method of cleaning a plasma reactor
05/07/1996US5513765 Plasma generating apparatus and method
05/02/1996WO1996013051A1 Inductively coupled plasma sputter chamber with conductive material sputtering capabilities
05/02/1996WO1996008211A3 Plasma grafting methods and compounds
05/02/1996CA2202530A1 Inductively coupled plasma sputter chamber with conductive material sputtering capabilities
05/01/1996EP0710056A1 Radio-frequency plasma source
05/01/1996EP0710055A1 Plasma reactors for processing semi-conductor wafers
05/01/1996EP0710054A1 Microwave plasma torch and method for generating plasma
05/01/1996EP0709875A1 A processing chamber gas distribution manifold
05/01/1996EP0709874A1 Diagnostic wafer
05/01/1996EP0632923B1 Substantially spherical particles made of lithium silicates having improved mechanical properties and surface quality
05/01/1996EP0452494B1 Transferred plasma-arc torch
04/1996
04/30/1996US5512872 Permanent magnet arrangement for use in magnetron plasma processing
04/25/1996WO1996012390A1 Plasma torch electrode structure
04/24/1996EP0708185A1 Apparatus for treating the surface of an object, especially the internal surface of fuel tanks
04/24/1996EP0555305B1 Plasma torch for melting material to be processed in a container and for maintaining the material at the required temperature
04/24/1996CN1121303A Spiral wave plasma processing method and device
04/23/1996US5509266 Device for measuring variations in the thrust of a plasma acceleration with closed electron drift
04/17/1996EP0707439A1 Plasma torch electrode
04/16/1996US5508492 Apparatus for extending broad metal surface areas with a magnetically impelled arc
04/10/1996EP0706308A1 Plasma arc torch stabilized by gas sheath
04/09/1996US5506475 Microwave electron cyclotron electron resonance (ECR) ion source with a large, uniformly distributed, axially symmetric, ECR plasma volume
04/04/1996WO1996010324A1 Laser target for use in an apparatus for generating radiation and atomic particles
04/02/1996US5503676 Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber
03/1996
03/28/1996WO1996009641A1 Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber
03/27/1996EP0703302A1 A method for depositing a coating onto a substrate by means of thermal spraying and an apparatus for carrying out said method
03/26/1996US5501740 Microwave plasma reactor
03/26/1996CA2065852C Pneumatic-electrical quick disconnect connector for a plasma arc torch
03/21/1996WO1996008211A2 Plasma grafting methods and compounds
03/21/1996DE4443608C1 Plasma reactor for integrated circuit fabrication
03/20/1996EP0702413A2 MES field effect transistor formed in a diamond layer
03/20/1996EP0702392A2 Plasma reactor
03/20/1996EP0620867B1 Procedure and apparatus for improving a plasma accelerator plating apparatus used for diamond plating
03/20/1996CN1118934A Method and apparatus for processing wafers and substrates, and apparatus for transferring the wafers and substrates
03/19/1996US5500501 Torch device for chemical processes
03/14/1996WO1996008126A2 Steam plasma reactors
03/14/1996WO1996008033A1 Electron radiation dose tailoring by variable beam pulse generation
03/14/1996CA2170982A1 Electron radiation dose tailoring by variable beam pulse generation
03/13/1996EP0701392A1 Cylindrical antenna usable for generating a plasma under electron cyclotron resonance conditions
03/13/1996EP0700577A1 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
03/12/1996US5498826 Plasmatron with steam as the plasma gas and process for stable operation of the plasmatron
03/12/1996US5498308 Plasma asher with microwave trap
03/12/1996US5498291 Arrangement for coating or etching substrates
03/07/1996WO1996006706A1 Treatment of particulate matter by electrical discharge
03/06/1996EP0699300A1 Plasma manipulator
03/06/1996CN1031184C Method for preparation of superfine nanometer-grade calcium oxide by using plasma
02/1996
02/29/1996WO1996006518A1 Plasma accelerator with closed electron drift
02/29/1996WO1996006517A1 Apparatus for and method of forming uniform thin coatings on large substrates
02/29/1996DE4431414A1 High temp. breeder reactor for extracting hydrogen@ and oxygen@ from ice
02/28/1996EP0697935A1 Plasma arc cutting process and apparatus using an oxygen-rich gas shield
02/28/1996CN1117434A Surface smoothing unit
02/22/1996WO1996005608A1 Method and apparatus for reactions in dense-medium plasmas
02/21/1996CN1031072C Large area murowave plasma apparatus