Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
02/1996
02/15/1996WO1996004771A1 Electrode for a plasma arc torch
02/15/1996WO1996004098A1 High velocity, high pressure plasma gun
02/15/1996DE4438463C1 Method and circuit for bipolar pulsed energy feed to low-pressure plasmas
02/15/1996CA2196661A1 High velocity, high pressure plasma gun
02/15/1996CA2195101A1 Electrode for a plasma arc torch
02/14/1996EP0696327A1 An electrical method for conversion of molecular weights of particulates
02/08/1996WO1995017278A3 Electric arc plasma torch
02/07/1996EP0695577A2 Apparatus for plasma treatment of fine grained materials
02/06/1996US5489820 Method of control of plasma stream and plasma apparatus
02/06/1996US5489362 Method for generating excited neutral particles for etching and deposition processes in semiconductor technology with a plasma discharge fed by microwave energy
02/01/1996WO1996002966A1 Plasma superconfinement generator for producing positive or negative ions in a gaseous medium
02/01/1996WO1996002934A1 Method of and apparatus for microwave-plasma production
02/01/1996DE4427259A1 Method and apparatus for cleaning or preheating the surface of workpieces
02/01/1996CA2195343A1 Plasma superconfinement generator for producing positive or negative ions in a gaseous medium
01/1996
01/31/1996EP0694949A2 Inductively coupled plasma reactors
01/31/1996EP0694208A1 Plasma shaping plug for control of sputter etching
01/31/1996CN1115693A Plasma arc spray gun
01/24/1996EP0693865A1 Induction plasma torch
01/24/1996EP0693769A2 Plasma reactor with enhanced plasma uniformity by gas addition, reduced chamber diameter and reduced RF wafer pedestal diameter
01/23/1996US5487094 Double-layer pellet, method of manufacturing the same, and apparatus for manufacturing the same
01/23/1996US5486675 Plasma production of ultra-fine ceramic carbides
01/23/1996US5486674 Plasma torch device for chemical processes
01/23/1996US5485721 Arcjet for a space flying body
01/17/1996EP0692926A1 Instrument for measuring plasma excited by high-frequency
01/17/1996EP0692138A1 Reactive dc sputtering system
01/17/1996CN1115191A Magnetic field cathode
01/03/1996EP0690666A1 Structure and method for semiconductor processing
01/03/1996EP0690479A1 Method and apparatus for processing substrates, and apparatus for transferring the substrates
01/03/1996EP0450061B1 Improved resonant radio frequency wave coupler apparatus using higher modes
01/03/1996CN1114504A Process for plasmachemical transformation of N2O into NOx and/or into derivatives thereof
01/02/1996US5481081 Method and apparatus of synthesizing diamond in vapor phaase
01/02/1996US5481080 For the supply of reactant
01/02/1996US5480686 Process and apparatus for chemical vapor deposition of diamond films using water-based plasma discharges
12/1995
12/28/1995WO1995035647A1 Plasma torch with axial injection of feedstock
12/27/1995EP0689227A2 Microwave plasma processing method
12/27/1995EP0689226A1 Multiple electrode plasma reactor
12/27/1995EP0517735B1 Process for stable operation of a plasmatron with steam as the plasma gas
12/26/1995US5478532 Large scale purification of contaminated air
12/26/1995US5478459 Plasma sputtering installation with microwave enhancement
12/26/1995US5478403 Applying plasma generated by activating gas containing oxygen through plate for capturing charged particles and transmitting neutral species, positioning material where high energy particles impinge thereon with neutral species
12/21/1995WO1995034376A1 Surface treatment method by gas jetting and surface treatment device
12/21/1995CA2192349A1 Surface treatment method by gas jetting and surface treatment device
12/20/1995EP0688037A1 Microwave plasma processing system
12/19/1995US5476182 Etching apparatus and method therefor
12/19/1995CA2021836C Electrode for arc plasma torch and torch used therefor
12/12/1995US5475354 Plasma accelerator of short length with closed electron drift
12/12/1995US5475231 Apparatus for monitoring ion beams with an electrically isolated aperture
12/12/1995US5475228 Unipolar blocking method and apparatus for monitoring electrically charged particles
12/12/1995US5474643 Plasma processing apparatus
12/12/1995US5474642 Apparatus for the treatment of a solid body
12/07/1995WO1995033362A1 Liquid film stabilized induction plasma torch
12/06/1995EP0685873A1 Inductively coupled plasma reactor with an electrode for enhancing plasma ignition
12/06/1995EP0685143A1 Linear microwave source for the plasma treatment of surfaces.
12/06/1995EP0685117A1 Plasma generating process and arrangement.
12/06/1995EP0685003A1 Method of stabilizing plasma generation by an electron-beam evaporator.
12/05/1995US5473291 For adjusting voltage standing wave ratio of plasma processing system
12/05/1995US5473131 Arc welding or cutting torch and electrode holder used for same
12/05/1995US5472664 Noble gas with hydrogen and oxygen
12/05/1995CA2065431C Improved nozzle for a plasma arc torch
12/05/1995CA1337691C Hazardous waste incinerator using cyclotron resonance plasma
11/1995
11/30/1995WO1995032315A1 Magnetically enhanced multiple capacitive plasma generation apparatus and related method
11/28/1995US5471115 Method and apparatus for measuring electron density of plasma
11/28/1995US5470426 Plasma processing apparatus
11/23/1995DE4417114A1 Appts. for particle-selective deposition of thin films
11/23/1995DE4416900A1 Gas-discharge appts. for wave conductor laser
11/23/1995DE19518208A1 Assembly for disposal of toxic waste
11/22/1995CN1112302A Sheet material for electrical insulation, prepreg and electrically insulated coil using the same
11/21/1995US5468356 Large scale purification of contaminated air
11/21/1995US5468296 Apparatus for igniting low pressure inductively coupled plasma
11/16/1995DE4416351A1 Producing quartz glass preform
11/15/1995EP0682126A1 Low energy plasma cleaning method for cryofilms
11/15/1995EP0681886A1 Plasma cutting method and cutting apparatus
11/15/1995CN1111897A Plasma beam generating method and apparatus which can generate a high-power plasma beam
11/08/1995EP0680816A2 Plasma process for reducing friction within the lumen of polymeric tubing
11/07/1995US5464962 Electrode for a plasma arc torch
11/07/1995US5464499 Multi-electrode plasma processing apparatus
11/07/1995CA2065025C Plasma arc torch with improved nozzle shield and step flow
11/02/1995EP0680072A2 A method of operating a high density plasma CVD reactor with combined inductive and capacitive coupling
11/02/1995EP0544786B1 Treatment of oxide-containing dusts
11/02/1995DE4440521C1 Vorrichtung zum Beschichten von Substraten mit einem Materialdampf im Unterdruck oder Vakuum Apparatus for coating substrates with a material vapor in the vacuum or vacuum
10/1995
10/26/1995WO1995028508A1 Process and device for ion-supported vacuum coating
10/26/1995DE4413993A1 Circuitry for producing pulsed current in arcs and plasmas
10/25/1995EP0678895A1 Plasma processing apparatus
10/25/1995EP0678894A1 Plasma processing apparatus
10/25/1995CN1110832A Vacuum plasma processing apparatus
10/24/1995US5460707 Etching or coating method and a plant therefor
10/24/1995US5460689 Precleaning semiconductor wafer at varying pressure
10/19/1995WO1995027998A1 Plasma-generating device
10/18/1995EP0677737A2 Method and system for analyzing plasma data
10/17/1995US5459393 Beam position monitor and beam position detecting method
10/12/1995DE4431785A1 Plasmagerät Plasma device
10/11/1995EP0676790A1 Focus ring for semiconductor wafer processing in a plasma reactor
10/11/1995CN1029992C Microwave plasma treating apparatus
10/10/1995US5457298 Coldwall hollow-cathode plasma device for support of gas discharges
10/05/1995WO1995026253A1 Apparatus and method for starting a plasma arc treatment system
10/05/1995WO1995026252A1 Detecting non-symmetrical nozzle wear in a plasma arc torch
10/05/1995WO1995026251A1 Plasma torch condition monitoring
10/05/1995DE19510267A1 Real time monitoring of electron beam properties
10/05/1995CA2186391A1 Apparatus and method for starting a plasma arc treatment system
10/04/1995EP0674805A1 Process for carrying out stable low pressure discharge processes.