Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
03/1995
03/01/1995EP0641014A1 Plasma reactor for deposition or etching process
03/01/1995EP0641013A2 High density plasma CVD and etching reactor
03/01/1995EP0640426A1 Electric arc plasma torch
03/01/1995EP0640244A1 Plasma treatment apparatus and method in which a uniform electric field is induced by a dielectric window.
03/01/1995EP0640022A1 High temperature plasma gun assembly
03/01/1995CN1099547A Plasma torch
02/1995
02/28/1995US5394061 High frequency plasma power source and impedance matching device for supplying power to a semiconductor processing apparatus
02/28/1995US5393954 Plasma torch with power supply for equalizing wear to prolong the lifespan of an electrode of the torch
02/28/1995US5393952 Plasma torch for cutting use with nozzle protection cap having annular secondary GPS passage and insulator disposed in the secondary gas passage
02/28/1995US5393374 Method of ashing
02/23/1995WO1995005431A1 Method and apparatus for recycling waste containing plastic and/or organic material
02/23/1995WO1995005263A1 Treatment of particulate matter by electrical discharge
02/23/1995DE4426475A1 Arrangement and method for using lasers in laser plasma spectroscopy for material detection in moving parts which are statistically sequential
02/21/1995US5392018 Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
02/21/1995US5391965 Gas discharge ignition device and method using high frequency and high power to ignite a uniform electrode surface area
02/21/1995US5391855 Apparatus for atmospheric plasma treatment of a sheet-like structure
02/21/1995US5391281 Plasma shaping plug for control of sputter etching
02/21/1995US5390864 Apparatus for forming fine particles
02/16/1995WO1995005060A1 A radiofrequency gas discharge
02/15/1995EP0639041A1 Plasma arc spray gun and anode for it
02/15/1995EP0637993A1 Pulsed electrical discharge apparatus for treating liquid
02/14/1995US5389197 Method of and apparatus for plasma processing of wafer
02/14/1995US5389153 Plasma processing system using surface wave plasma generating apparatus and method
02/09/1995WO1995003910A1 Plasma torch
02/07/1995US5387326 Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices
02/07/1995CA2075316C Plasma arc torch having improved nozzle assembly
02/02/1995WO1995003682A1 Method for matching the generator in dipolar low-pressure glow processes
02/01/1995EP0637055A1 Plasma processing apparatus
02/01/1995EP0636285A1 Stabilizer for switch-mode powered rf plasma processing.
02/01/1995CN1098243A Microwave enhanced cvd system under magnetic field
02/01/1995CN1027549C Microwave enhanced CVD system under magnetic field
01/1995
01/26/1995WO1995002893A1 Control of the properties of a film deposited on a semiconductor wafer
01/26/1995CA2166423A1 Control of the properties of a film deposited on a semiconductor wafer
01/19/1995DE4322608A1 Device for power modulation during plasma excitation, preferably during use of gas lasers
01/18/1995EP0634887A1 Transferred arc plasma torch
01/18/1995EP0634886A1 Structure of constrained chip for plasma jet torch, and plasma jet working method using this constrained chip
01/18/1995EP0634778A1 Hollow cathode array
01/18/1995EP0633821A1 Welding assembly for feeding powdered filler material into a torch.
01/18/1995EP0581765A4 Long life arcjet thruster having diffuse cathode arc attachment.
01/17/1995US5383049 Elliptically polarizing adjustable phase insertion device
01/17/1995US5383019 Inductively coupled plasma spectrometers and radio-frequency power supply therefor
01/17/1995US5382866 Method of focusing a charged particle beam and plasma lens therefor
01/17/1995CA2043504C High enthalpy plasma torch
01/13/1995CA2126731A1 Hollow cathode array and method of cleaning sheet stock therewith
01/11/1995EP0633713A1 Plasma reactor for a deposition and etching method
01/11/1995EP0632923A1 Substantially spherical particles made of lithium silicates having improved mechanical properties and surface quality.
01/11/1995EP0632847A1 Process for coating a substrate with a material giving a polished effect.
01/11/1995EP0445147B1 Cascade arc plasma torch and a process for plasma polymerization
01/10/1995US5380415 Vacuum vapor deposition
01/05/1995WO1995001085A1 Device for measuring changes in the thrust of a plasma engine with closed electron drift
01/05/1995WO1995000758A1 Reduced length plasma engine with closed electron deviation
01/05/1995CA2142607A1 A plasma accelerator of short length with closed electron drift
01/05/1995CA2141605A1 Device for measuring changes in the thrust of a plasma engine with closed electron drift
01/04/1995EP0631712A1 Process for accelerting electrically charged particles
01/04/1995EP0631711A1 System for characterizing ac properties of a processing plasma
01/03/1995US5378311 Method of producing semiconductor device
01/03/1995CA2050857C Apparatus for treating the surface of workpieces by means of a plasma torch
12/1994
12/28/1994CN2186474Y 微波等离子体炬 Microwave plasma torch
12/28/1994CN1027215C Plasma arc starting process
12/27/1994US5376768 Method for equalizing wear to prolong the lifespan of a plasma torch electrode
12/27/1994US5376767 Plasma torch and an apparatus for producing fused silica using plasma arc electrodes
12/22/1994WO1994029494A1 Microwave plasma reactor
12/21/1994EP0413739B1 Accelerator
12/20/1994US5375149 Apparatus and method for extracting power from energetic ions produced in nuclear fusion
12/20/1994US5374802 Vortex arc generator and method of controlling the length of the arc
12/15/1994DE4319118A1 Process and apparatus for disposing of fluorocarbons and other fluorine-containing compounds
12/14/1994EP0629106A1 Plasma welding and cutting gun for discharging plasma gas with constant outlet pressure
12/14/1994EP0628212A1 Enhanced thin film dc plasma processing system
12/14/1994EP0615650A4 Method and apparatus for generating nuclear fusion energy by coherent bosons.
12/13/1994USRE34806 Vacuum chamber having plasma generator and electromagnets used to accelerate plasma beam toward target; efficiency; vapor deposition, semiconductors, solar cells, spacecraft propulsion
12/08/1994WO1994028568A1 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
12/07/1994EP0627157A1 Method of control of plasma stream and plasma apparatus.
12/06/1994US5370779 Electron cyclotron resonance etching or coating
12/06/1994US5370765 For use in vapor deposition, etching
12/06/1994US5369953 Three-grid accelerator system for an ion propulsion engine
12/01/1994DE4317964A1 Method and device for plasma-chemical processing of hazardous materials and materials
11/1994
11/30/1994EP0331718B1 Multiple electrode plasma reactor power distribution system
11/29/1994US5369336 Plasma generating device
11/29/1994US5369241 Plasma production of ultra-fine ceramic carbides
11/29/1994US5368724 Apparatus for treating a confined liquid by means of a pulse electrical discharge
11/29/1994US5368710 Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window
11/29/1994US5368676 Plasma processing apparatus comprising electron supply chamber and high frequency electric field generation means
11/29/1994US5368627 Treatment of oxide-containing dusts
11/24/1994DE4316450A1 Inertial fusion with volume ignition
11/23/1994EP0487573B1 Plasma arc torch with improved nozzle shield and step flow
11/22/1994US5366701 Apparatus and method for reducing pollutants in effluent gas flow utilizing an ionizing and resonance means
11/17/1994EP0491722B1 Quick disconnect connector for plasma arc torch
11/17/1994DE4327958C1 Process and apparatus for recycling waste containing plastic and/or organic material
11/17/1994DE4316349A1 Method for internal coating of hollow bodies with organic top coats by plasma polymerisation and device for carrying out the method
11/15/1994US5365147 Plasma stabilizing apparatus employing feedback controls
11/15/1994US5364665 Coating substrates with thin films as vapor barriers, glow discharge plasma from organosilicon, oxygen and inert gases
11/15/1994US5364488 Coaxial plasma processing apparatus
11/10/1994DE4412902A1 Method for increasing the deposition rate, method for reducing the dust density in a plasma discharge chamber, and plasma chamber
11/08/1994US5363400 Physical vapor deposition method
11/08/1994US5362939 Convertible plasma arc torch and method of use
11/08/1994US5362938 Plasma arc welding torch having means for "vortexing" plasma gas exiting the welding torch
11/03/1994DE4313830A1 Arc welding or cutting torch
11/02/1994EP0622835A1 Heterojunction compound semiconductor device and method of manufacturing the same
11/02/1994EP0621815A1 Nozzle and method of operation for a plasma arc torch
11/01/1994US5361274 Microwave discharge device with TMNMO cavity