Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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03/01/1995 | EP0641014A1 Plasma reactor for deposition or etching process |
03/01/1995 | EP0641013A2 High density plasma CVD and etching reactor |
03/01/1995 | EP0640426A1 Electric arc plasma torch |
03/01/1995 | EP0640244A1 Plasma treatment apparatus and method in which a uniform electric field is induced by a dielectric window. |
03/01/1995 | EP0640022A1 High temperature plasma gun assembly |
03/01/1995 | CN1099547A Plasma torch |
02/28/1995 | US5394061 High frequency plasma power source and impedance matching device for supplying power to a semiconductor processing apparatus |
02/28/1995 | US5393954 Plasma torch with power supply for equalizing wear to prolong the lifespan of an electrode of the torch |
02/28/1995 | US5393952 Plasma torch for cutting use with nozzle protection cap having annular secondary GPS passage and insulator disposed in the secondary gas passage |
02/28/1995 | US5393374 Method of ashing |
02/23/1995 | WO1995005431A1 Method and apparatus for recycling waste containing plastic and/or organic material |
02/23/1995 | WO1995005263A1 Treatment of particulate matter by electrical discharge |
02/23/1995 | DE4426475A1 Arrangement and method for using lasers in laser plasma spectroscopy for material detection in moving parts which are statistically sequential |
02/21/1995 | US5392018 Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits |
02/21/1995 | US5391965 Gas discharge ignition device and method using high frequency and high power to ignite a uniform electrode surface area |
02/21/1995 | US5391855 Apparatus for atmospheric plasma treatment of a sheet-like structure |
02/21/1995 | US5391281 Plasma shaping plug for control of sputter etching |
02/21/1995 | US5390864 Apparatus for forming fine particles |
02/16/1995 | WO1995005060A1 A radiofrequency gas discharge |
02/15/1995 | EP0639041A1 Plasma arc spray gun and anode for it |
02/15/1995 | EP0637993A1 Pulsed electrical discharge apparatus for treating liquid |
02/14/1995 | US5389197 Method of and apparatus for plasma processing of wafer |
02/14/1995 | US5389153 Plasma processing system using surface wave plasma generating apparatus and method |
02/09/1995 | WO1995003910A1 Plasma torch |
02/07/1995 | US5387326 Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices |
02/07/1995 | CA2075316C Plasma arc torch having improved nozzle assembly |
02/02/1995 | WO1995003682A1 Method for matching the generator in dipolar low-pressure glow processes |
02/01/1995 | EP0637055A1 Plasma processing apparatus |
02/01/1995 | EP0636285A1 Stabilizer for switch-mode powered rf plasma processing. |
02/01/1995 | CN1098243A Microwave enhanced cvd system under magnetic field |
02/01/1995 | CN1027549C Microwave enhanced CVD system under magnetic field |
01/26/1995 | WO1995002893A1 Control of the properties of a film deposited on a semiconductor wafer |
01/26/1995 | CA2166423A1 Control of the properties of a film deposited on a semiconductor wafer |
01/19/1995 | DE4322608A1 Device for power modulation during plasma excitation, preferably during use of gas lasers |
01/18/1995 | EP0634887A1 Transferred arc plasma torch |
01/18/1995 | EP0634886A1 Structure of constrained chip for plasma jet torch, and plasma jet working method using this constrained chip |
01/18/1995 | EP0634778A1 Hollow cathode array |
01/18/1995 | EP0633821A1 Welding assembly for feeding powdered filler material into a torch. |
01/18/1995 | EP0581765A4 Long life arcjet thruster having diffuse cathode arc attachment. |
01/17/1995 | US5383049 Elliptically polarizing adjustable phase insertion device |
01/17/1995 | US5383019 Inductively coupled plasma spectrometers and radio-frequency power supply therefor |
01/17/1995 | US5382866 Method of focusing a charged particle beam and plasma lens therefor |
01/17/1995 | CA2043504C High enthalpy plasma torch |
01/13/1995 | CA2126731A1 Hollow cathode array and method of cleaning sheet stock therewith |
01/11/1995 | EP0633713A1 Plasma reactor for a deposition and etching method |
01/11/1995 | EP0632923A1 Substantially spherical particles made of lithium silicates having improved mechanical properties and surface quality. |
01/11/1995 | EP0632847A1 Process for coating a substrate with a material giving a polished effect. |
01/11/1995 | EP0445147B1 Cascade arc plasma torch and a process for plasma polymerization |
01/10/1995 | US5380415 Vacuum vapor deposition |
01/05/1995 | WO1995001085A1 Device for measuring changes in the thrust of a plasma engine with closed electron drift |
01/05/1995 | WO1995000758A1 Reduced length plasma engine with closed electron deviation |
01/05/1995 | CA2142607A1 A plasma accelerator of short length with closed electron drift |
01/05/1995 | CA2141605A1 Device for measuring changes in the thrust of a plasma engine with closed electron drift |
01/04/1995 | EP0631712A1 Process for accelerting electrically charged particles |
01/04/1995 | EP0631711A1 System for characterizing ac properties of a processing plasma |
01/03/1995 | US5378311 Method of producing semiconductor device |
01/03/1995 | CA2050857C Apparatus for treating the surface of workpieces by means of a plasma torch |
12/28/1994 | CN2186474Y 微波等离子体炬 Microwave plasma torch |
12/28/1994 | CN1027215C Plasma arc starting process |
12/27/1994 | US5376768 Method for equalizing wear to prolong the lifespan of a plasma torch electrode |
12/27/1994 | US5376767 Plasma torch and an apparatus for producing fused silica using plasma arc electrodes |
12/22/1994 | WO1994029494A1 Microwave plasma reactor |
12/21/1994 | EP0413739B1 Accelerator |
12/20/1994 | US5375149 Apparatus and method for extracting power from energetic ions produced in nuclear fusion |
12/20/1994 | US5374802 Vortex arc generator and method of controlling the length of the arc |
12/15/1994 | DE4319118A1 Process and apparatus for disposing of fluorocarbons and other fluorine-containing compounds |
12/14/1994 | EP0629106A1 Plasma welding and cutting gun for discharging plasma gas with constant outlet pressure |
12/14/1994 | EP0628212A1 Enhanced thin film dc plasma processing system |
12/14/1994 | EP0615650A4 Method and apparatus for generating nuclear fusion energy by coherent bosons. |
12/13/1994 | USRE34806 Vacuum chamber having plasma generator and electromagnets used to accelerate plasma beam toward target; efficiency; vapor deposition, semiconductors, solar cells, spacecraft propulsion |
12/08/1994 | WO1994028568A1 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure |
12/07/1994 | EP0627157A1 Method of control of plasma stream and plasma apparatus. |
12/06/1994 | US5370779 Electron cyclotron resonance etching or coating |
12/06/1994 | US5370765 For use in vapor deposition, etching |
12/06/1994 | US5369953 Three-grid accelerator system for an ion propulsion engine |
12/01/1994 | DE4317964A1 Method and device for plasma-chemical processing of hazardous materials and materials |
11/30/1994 | EP0331718B1 Multiple electrode plasma reactor power distribution system |
11/29/1994 | US5369336 Plasma generating device |
11/29/1994 | US5369241 Plasma production of ultra-fine ceramic carbides |
11/29/1994 | US5368724 Apparatus for treating a confined liquid by means of a pulse electrical discharge |
11/29/1994 | US5368710 Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window |
11/29/1994 | US5368676 Plasma processing apparatus comprising electron supply chamber and high frequency electric field generation means |
11/29/1994 | US5368627 Treatment of oxide-containing dusts |
11/24/1994 | DE4316450A1 Inertial fusion with volume ignition |
11/23/1994 | EP0487573B1 Plasma arc torch with improved nozzle shield and step flow |
11/22/1994 | US5366701 Apparatus and method for reducing pollutants in effluent gas flow utilizing an ionizing and resonance means |
11/17/1994 | EP0491722B1 Quick disconnect connector for plasma arc torch |
11/17/1994 | DE4327958C1 Process and apparatus for recycling waste containing plastic and/or organic material |
11/17/1994 | DE4316349A1 Method for internal coating of hollow bodies with organic top coats by plasma polymerisation and device for carrying out the method |
11/15/1994 | US5365147 Plasma stabilizing apparatus employing feedback controls |
11/15/1994 | US5364665 Coating substrates with thin films as vapor barriers, glow discharge plasma from organosilicon, oxygen and inert gases |
11/15/1994 | US5364488 Coaxial plasma processing apparatus |
11/10/1994 | DE4412902A1 Method for increasing the deposition rate, method for reducing the dust density in a plasma discharge chamber, and plasma chamber |
11/08/1994 | US5363400 Physical vapor deposition method |
11/08/1994 | US5362939 Convertible plasma arc torch and method of use |
11/08/1994 | US5362938 Plasma arc welding torch having means for "vortexing" plasma gas exiting the welding torch |
11/03/1994 | DE4313830A1 Arc welding or cutting torch |
11/02/1994 | EP0622835A1 Heterojunction compound semiconductor device and method of manufacturing the same |
11/02/1994 | EP0621815A1 Nozzle and method of operation for a plasma arc torch |
11/01/1994 | US5361274 Microwave discharge device with TMNMO cavity |