Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
06/1995
06/27/1995US5427669 Thin film DC plasma processing system
06/22/1995WO1995016804A1 Gas diffuser plate assembly and rf electrode
06/22/1995WO1995016798A1 Plasma-activated vapour-deposition process and device
06/22/1995WO1995012003A3 Method and apparatus for sputtering magnetic target materials
06/22/1995CA2177605A1 Gas diffuser plate assembly and rf electrode
06/21/1995EP0658917A2 Fine-processing apparatus using low-energy neutral particle beam
06/21/1995EP0460103B1 Method and apparatus for heat processing glass batch materials
06/14/1995EP0658073A1 Plasma generating apparatus and method
06/14/1995EP0656870A1 Methods and apparati for producing fullerenes
06/14/1995DE4443407A1 Analysis device esp. for molten metal analysis
06/14/1995CN1028882C Hydrogen-storing alloy electrode material
06/13/1995US5423945 Using a fluorocarbon gas as etchant, and scavenger
06/08/1995WO1995015672A1 Method and apparatus for planar plasma processing
06/08/1995WO1995015238A1 Convertible plasma arc torch and method of use
06/07/1995EP0656170A1 Device for measuring changes in the thrust of a plasma engine with closed electron drift
06/06/1995US5422481 Device for isotope separation by ion cyclotron resonance
06/06/1995US5421891 High density plasma deposition and etching apparatus
05/1995
05/31/1995EP0390871B1 Plasma pinch system and method of using same
05/31/1995CN1103232A Reactor and method for the treatment of particulate matter by electrical discharge
05/30/1995US5420391 Plasma torch with axial injection of feedstock
05/24/1995DE4339852A1 Maximum temperature battery which makes available electrical power for electronic units
05/24/1995DE4337119A1 VHF plasma source useful for etching and coating processes
05/24/1995CN1028588C Microwave plasma generating method and equipment
05/24/1995CN1028501C Electrode for plasma arc torch
05/23/1995US5418431 RF plasma source and antenna therefor
05/23/1995US5418430 Plasma generator with field-enhancing electrodes
05/23/1995CA2023991C Using non-oxidizing gas for plasma arc starting process
05/22/1995EP0640426A4 Electric arc plasma torch.
05/18/1995WO1995013144A1 Process and apparatus for water-based plasma cvd of diamond films
05/17/1995EP0653778A1 Plasma light source
05/17/1995EP0653775A1 Microwave plasma processing apparatus and method
05/17/1995EP0653147A1 On-site, biohazardous waste disposal system
05/17/1995EP0637993A4 Pulsed electrical discharge apparatus for treating liquid.
05/16/1995US5416297 Plasma arc torch ignition circuit and method
05/16/1995US5416296 Electrode for plasma arc torch
05/11/1995WO1995012965A1 Plasma torch
05/10/1995EP0652585A1 Process and device for etching thin layers, preferably Indium-Tin-Oxide layers
05/09/1995US5414237 Plasma arc torch with integral gas exchange
05/09/1995US5414235 Gas plasma generating system with resonant cavity
05/09/1995US5413769 Housings with wire electrodes
05/09/1995US5413760 Plasma sterilizer and method
05/09/1995US5413759 Medical instruments, preventing nascent plasma from directly impinging objects to be sterilized
05/04/1995WO1995012003A2 Method and apparatus for sputtering magnetic target materials
05/04/1995DE4336830A1 Plasma sputtering installation with microwave assistance
05/03/1995EP0650557A1 Fixed plasma motor.
05/02/1995US5412173 High temperature plasma gun assembly
05/02/1995US5411654 Method of maximizing anharmonic oscillations in deuterated alloys
05/02/1995US5411591 Apparatus for the simultaneous microwave deposition of thin films in multiple discrete zones
04/1995
04/26/1995EP0650183A1 Methods and apparatus for treating workpieces with plasmas
04/26/1995CN1102034A Microwave enhanced CVD system under magnetic field
04/25/1995US5410574 Internal component of fusion reactor
04/25/1995US5409584 Electrical method for conversion of molecular weights of particulates
04/25/1995US5409164 Plasma cutting torch
04/20/1995WO1995010385A1 Plasma cutting method
04/19/1995EP0648530A1 Production of fluorocarbon compounds
04/19/1995EP0640022A4 High temperature plasma gun assembly.
04/13/1995WO1995010169A1 Device and method for forming a microwave plasma
04/12/1995EP0648069A1 RF induction plasma source for plasma processing
04/11/1995US5406594 High rate, single or multi-barrel miniaturized injection system of cryogenic pellets, in particular for use in machines for the controlled nuclear fusion by magnetic confinement of plasma
04/11/1995US5406047 Plasma torch for melting material to be processed in a container and for maintaining the material at the required temperature
04/11/1995US5406046 Plasma spray apparatus for spraying powdery material
04/11/1995US5405480 Induction plasma source
04/06/1995WO1995009256A1 Treatment of surfaces by corona discharge
04/05/1995EP0647087A1 Double-layer pellet, method of manufacturing the same, and apparatus for manufacturing the same
04/05/1995EP0646544A1 Process and apparatus for the preparation of fullerenes
04/05/1995EP0342208B1 X-ray lithography system comprising a thin target
04/04/1995US5403991 Reactor and method for the treatment of particulate matter by electrical discharge
03/1995
03/30/1995DE4332866A1 Surface treatment with barrier discharge
03/30/1995DE4321725A1 Engine for spacecraft (space vehicles)
03/29/1995EP0645946A1 Burner head for plasma spray guns
03/29/1995EP0645584A1 Plasma fusion furnace and method of its operation
03/29/1995EP0615324A4 Method and device for obtaining an electric discharge.
03/29/1995CN1028064C Device for coupling microwave energy
03/28/1995US5401973 Industrial material processing electron linear accelerator
03/28/1995US5401356 Method and equipment for plasma processing
03/28/1995US5401351 Radio frequency electron cyclotron resonance plasma etching apparatus
03/28/1995US5401350 Coil configurations for improved uniformity in inductively coupled plasma systems
03/28/1995US5401318 Plasma reactor for performing an etching or deposition method
03/28/1995US5400665 Sample introduction system for inductively coupled plasma and other gas-phase, or particle, detectors utilizing an enclosed filter solvent removal system, and method of use
03/23/1995WO1995007788A1 Process for cleaning a device for welding under protective gas
03/21/1995US5399957 DC switched arc torch power supply
03/21/1995US5399871 Plasma flood system for the reduction of charging of wafers during ion implantation
03/21/1995US5399831 Ternary gas plasma welding torch
03/21/1995US5399830 Plasma treatment apparatus
03/21/1995US5399829 Material treatment method and apparatus
03/16/1995WO1995007544A1 Soft plasma ignition in plasma processing chambers
03/16/1995WO1995007234A1 PROCESS FOR PLASMACHEMICAL TRANSFORMATION OF N2O INTO NOx AND/OR INTO DERIVATIVES THEREOF
03/16/1995DE4331100A1 Device for inert-gas-shielded welding
03/16/1995CA2166549A1 Soft plasma ignition in plasma processing chambers
03/14/1995US5397962 Source and method for generating high-density plasma with inductive power coupling
03/14/1995US5397961 Apparatus for generating a pulsed plasma in a liquid medium
03/14/1995US5397555 Process for reducing carbon particles in exhaust gas flows
03/14/1995US5397448 Device for generating a plasma by means of cathode sputtering and microwave-irradiation
03/14/1995US5397420 Fine structure forming device
03/09/1995WO1995006954A1 Magnetic field cathode
03/09/1995DE4343042C1 Method and device for plasma-activated vapour deposition
03/08/1995EP0641269A1 Improved electrode for high current density plasma arc torch
03/07/1995US5396043 Plasma arc cutting process and apparatus using an oxygen-rich gas shield
03/01/1995EP0641151A1 RF plasma source and method for plasma cleaning of surfaces in space
03/01/1995EP0641150A1 Process apparatus