Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2013
01/10/2013US20130008604 Method and apparatus for enhancing flow uniformity in a process chamber
01/10/2013US20130008601 Systems and methods for oscillating exposure of a semiconductor workpiece to multiple chemistries
01/10/2013US20130008380 Apparatus for fabricating ib-iiia-via2 compound semiconductor thin films
01/10/2013DE202007019495U1 Substrat mit darauf aufgetragener GaN Dünnschicht und Halbleitervorrichtung auf GaN-Basis GaN substrate with an applied thin film semiconductor device and GaN-based
01/10/2013DE19609652B4 Verfahren und Vorrichtung zur Korrektur von Maskenmustern Method and apparatus for correction of mask patterns
01/10/2013DE112011101181T5 Steuerung der Ferroelektrizität in dielektrischen Dünnschichten durch prozessinduzierte monoaxiale Spannungen Control of ferroelectricity in dielectric thin films by process-induced uniaxial tension
01/10/2013DE112011101129T5 Ultraschall-Bondsysteme und Verfahren zu ihrer Verwendung Ultrasonic bonding systems and methods for their use
01/10/2013DE112010003986T5 Abgestufte flache Grabenisolation für flächeneffiziente Körperkontakte in SOI-MOSFETS Graduated shallow grave insulation for area efficient body contacts in SOI MOSFETs
01/10/2013DE112010002423T5 Front end-anreissen von leuchtdioden (led; light emitting diode)-wafern und resultierende geräte End-scribe front of leds (led, light emitting diode) wafers and resulting device
01/10/2013DE10256985B4 Verfahren zur Herstellung eines Leistungshalbleiterbauelements Method for producing a power semiconductor component
01/10/2013DE10208414B4 Vorrichtung mit einem verbesserten Polierkissenaufbereiter für das chemisch mechanische Polieren Device having an improved chemical mechanical polishing for Polierkissenaufbereiter
01/10/2013DE102012211776A1 Fertigungsverfahren eines halbleitersubstrats Manufacturing method of a semiconductor substrate
01/10/2013DE102012210440A1 Halbleitermodul Semiconductor module
01/10/2013DE102012105929A1 Halbleiter-Bauelement mit einem Kontaktclip mit Vorsprüngen und Herstellung davon Semiconductor device with a contact clip with projections and preparation thereof
01/10/2013DE102012105848A1 Rissdetektionslinien-Einrichtung und Verfahren Crack detection line means and methods
01/10/2013DE102012104977A1 Verfahren und Einrichtung für die Montage von Halbleiterchips Method and device for the assembly of semiconductor chips
01/10/2013DE102011078619A1 LED light source has electrically conductive connections which are provided with respect to conductor tracks, mounting portions and reserve area for bridging the defective LED chip
01/10/2013DE102011078614A1 Vorrichtung und Verfahren zum Zwischenspeichern einer Vielzahl scheibenförmiger Werkstücke Apparatus and method for temporarily storing a plurality of disc-shaped workpieces,
01/10/2013DE102011078582A1 Verfahren zum Herstellen von strukturierten Sinterschichten und Halbleiterbauelement mit strukturierter Sinterschicht A process for producing structured sinter layers and semiconductor device with structured sintered layer
01/10/2013DE102011051707A1 Verfahren zum Herstellen einer Solarzelle A method of manufacturing a solar cell
01/10/2013DE102011051606A1 Formation of dopant profile on semiconductor component in manufacture of solar cell, involves applying phosphorus dopant source on semiconductor component, forming dopant profile, removing source and forming other dopant profile
01/10/2013DE102011051335A1 Substrate holding device for holding planar substrate e.g. silicon wafer of electronic components, has substrate brackets arranged with respect to frame longitudinal elements, which are provided in the slide bar
01/10/2013DE102009024982B4 Maskierungsverfahren, Verwendung des Verfahrens und Zwischenprodukt und Verfahren zur Herstellung einer Kontakt-Struktur für ein Halbleiter-Bauelement Masking method, using the method and intermediate and process for producing a contact structure for a semiconductor device
01/10/2013DE102004010839B4 Verfahren zum Bestimmen des Endpunkts eines Planarisierungsprozesses und Vorrichtung zum Planarisieren eines Substrats A method for determining the end point of a planarization process and apparatus for planarizing a substrate
01/10/2013CA2840968A1 Integrated solar collectors using epitaxial lift off and cold weld bonded semiconductor solar cells
01/09/2013EP2544250A1 Process for production of nitride semiconductor element, nitride semiconductor light-emitting element, and light-emitting device
01/09/2013EP2544249A1 Method of manufacturing a semi-conductor element and semi-conductor element
01/09/2013EP2544242A1 Method of texturing a photovoltaic cell
01/09/2013EP2544241A2 Insulated gate field-effect transistor having a dummy gate
01/09/2013EP2544240A1 Semiconductor transistor
01/09/2013EP2544236A1 Method for producing and method for designing soi wafer
01/09/2013EP2544235A1 Method for producing and method for designing soi wafer
01/09/2013EP2544234A1 Method for manufacturing a light emitting device
01/09/2013EP2544227A1 Non-volatile memory cell structure and method for programming and reading the same
01/09/2013EP2544226A1 Substrate storage container
01/09/2013EP2544225A1 Semiconductor device and bonding material for semiconductor device
01/09/2013EP2544224A1 Semiconductor transistor production method
01/09/2013EP2544223A1 Thin film forming apparatus
01/09/2013EP2544222A1 Semiconductor component comprising a polycrystalline semiconductor layer
01/09/2013EP2544221A1 Crystalline film, device, and production methods for crystalline film and device
01/09/2013EP2544220A1 Single crystal substrate, production method for single crystal substrate, production method for single crystal substrate with multilayer film, and device production method
01/09/2013EP2544219A1 Single crystal substrate with multilayer film, production method for single crystal substrate with multilayer film, and device production method
01/09/2013EP2544218A1 Process for production of photoresist pattern
01/09/2013EP2543754A1 Semiconductor epitaxial substrate
01/09/2013EP2543752A1 Internal reforming substrate for epitaxial growth, internal reforming substrate with multilayer film, semiconductor device, bulk semiconductor substrate, and production methods therefor
01/09/2013EP2543749A1 Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
01/09/2013EP2543629A1 Molded oxide and process for producing same
01/09/2013EP2543082A2 Service device and service method
01/09/2013EP2543072A2 Structures and methods of fabricating dual gate devices
01/09/2013EP2543069A2 Semiconductor-metal-on-insulator structures, methods of forming such structures, and semiconductor devices including such structures
01/09/2013EP2543068A2 Floating body cell structures, devices including same, and methods for forming same
01/09/2013EP2543064A1 Multi-chip integrated circuit
01/09/2013EP2543063A2 Wafer carrier with sloped edge
01/09/2013EP2543061A1 A method for the production of a conformal element, a conformal element and uses of the same
01/09/2013EP2543060A1 Systems and methods for application of optical materials to optical elements
01/09/2013EP2542709A1 Cleaning solvent and cleaning method for metallic compound
01/09/2013CN202663641U Upper electrode structure of dry-etching machine
01/09/2013CN202662660U Automatic sorting carrying box of crystalline silicon solar battery
01/09/2013CN202662653U Bobbin loading trolley for solar silicon wafer slicing machine
01/09/2013CN202662585U Single-side acid soaking device for back metallization pretreatment of semiconductor chip
01/09/2013CN202662584U Vacuum sucking pen capable of sucking two wafers simultaneously
01/09/2013CN202662583U Support suction device for LED (light-emitting diode) die bonder
01/09/2013CN202662582U Silicon wafer transmission device capable of transmitting warped silicon wafers
01/09/2013CN202662581U Quartz boat for solar cell diffusion
01/09/2013CN202662580U Quartz boat
01/09/2013CN202662579U Silicon wafer cleaning device
01/09/2013CN202662578U Lead element outer insulator immersion seal device
01/09/2013CN202662577U Wafer chip mounter
01/09/2013CN202662576U Oven for semiconductor packaging manufacture
01/09/2013CN202662575U Material receiving device of electroplating machine
01/09/2013CN202662574U Slice inverting device for texture making blanking to diffusion feeding
01/09/2013CN202662573U Isopropanol drying machine with ultrasonic or megasonic oscillator
01/09/2013CN202662572U Co-crystallizing machine
01/09/2013CN202662571U Heat radiating system of semiconductor package mould press
01/09/2013CN202662570U Die bonder welding head mechanism based on built-in displacement sensor voice coil motor
01/09/2013CN202662569U Wet processing tank provided with tank cover opening/closing detection device
01/09/2013CN202662568U Up-and-down lifting protection cover with air exhaust function for hot plate
01/09/2013CN202660132U Gas supply device and connecting piece thereof
01/09/2013CN1802736B Thin sheet-like article displacement detection method and displacement correction method
01/09/2013CN102870383A Substrate support structure, clamp preparation unit, and lithography system
01/09/2013CN102870237A Photovoltaic cell with porous semiconductor regions for anchoring contact terminals, electrolitic and etching modules, and related production line
01/09/2013CN102870234A Method of manufacture of chalcogenide-based photovoltaic cells
01/09/2013CN102870221A Thin film transistor substrate, liquid crystal display device provided with same, and thin film transistor substrate production method
01/09/2013CN102870219A Method for manufacturing semiconductor device
01/09/2013CN102870218A Dual gate lDMOS device with reduced capacitance
01/09/2013CN102870215A 垂直晶体管相变存储器 Phase change memory vertical transistor
01/09/2013CN102870209A Method for manufacturing circuit device
01/09/2013CN102870207A 半导体装置 Semiconductor device
01/09/2013CN102870206A Wafer support ring
01/09/2013CN102870205A Substrate holding device
01/09/2013CN102870204A Transfer device for plate-like member, and suction pad
01/09/2013CN102870203A Protruding TSV tips for enhanced heat dissipation for IC devices
01/09/2013CN102870202A Organic semiconductor film and method for manufacturing the same, and stamp for contact printing
01/09/2013CN102870201A Method of manufacturing semiconductor device
01/09/2013CN102870200A Apparatus for radial delivery of gas to a chamber and methods of use thereof
01/09/2013CN102870199A Methods and apparatus for reducing flow splitting errors using orifice ratio conductance control
01/09/2013CN102870198A Ultra low silicon loss high dose implant strip
01/09/2013CN102870197A Composition that forms n-type diffusion layer, method for producing n-type diffusion layer, and method for producing solar cell element
01/09/2013CN102870196A Epitaxial substrate and method for producing epitaxial substrate
01/09/2013CN102870195A Epitaxial substrate and process for producing epitaxial substrate